Proceedings of the Korean Society of Machine Tool Engineers Conference (한국공작기계학회:학술대회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
권호 표지

Design and Manufacturing of Focused Ion Beam Machining System

집속이온빔을 가공 시스템 설계 및 제작

  • 박철우 (한국산업기술대학교 기계공학과) ;
  • 이종항 (한국산업기술대학교 기계공학과) ;
  • 최진형 (한국산업기술대학교 지식/기반 에너지대학원) ;
  • 유성만 (한국산업기술대학교 지식/기반 에너지대학원)
  • Published : 2005.05.01
Download PDF
⟨ Previous Next ⟩

Abstract

This paper describes the design and manufacturing of a focused-ion-beam machining system which can make small features of nano size. We use a SIMION simulator in order to obtain the design data of an ion column. The simulation result shows that the focal length of ion beam decreases as the applied voltage of object lens increases. Finally, we obtained the good images of a mesh of 50 micrometers by using the adjustment of applied voltage, acceleration power, and dimension of each elements.

Keywords