• 한국정보디스플레이학회:학술대회논문집
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• 2009.10a
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• pp.1025-1027
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• 2009

Novel low temperature deposition process for nano-crystalline Si thin film is developed with the hyper-thermal neutral beam (HNB) technology. By our HNB assisted CVD system, the reactive particles can induce crystalline phase in Si thin films and effectively combine with heating effect on substrate. At low deposition temperature under $80^{\circ}C$, the HNB with proper incident energy controlled by the reflector bias can effectively enhance the nano-crystalline formation in Si thin film without any additional process. The electrical properties of Si thin films can be varied from a-Si to nc-Si according to change of HNB energy and substrate temperature. Characterization of these thin films with conductivity reveal that crystalline of Si thin film can increase by assist of HNB with appropriate energy during low temperature deposition. And low temperature prcoessed nc-Si TFT performance has on-off ratio as order 5.

• Steel and Composite Structures
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• v.50 no.1
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• pp.15-24
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• 2024

This research presents dynamical reaction investigation of pore-dependent and nano-thickness beams having functional gradation (FG) constituents exposed to a movable particle. The nano-thickness beam formulation has been appointed with the benefits of refined high orders beam paradigm and nonlocal strain gradient theory (NSGT) comprising two scale moduli entitled nonlocality and strains gradient modulus. The graded pore-dependent constituents have been designed through pore factor based power-law relations comprising pore volumes pursuant to even or uneven pore scattering. Therewith, variable scale modulus has been thought-out until process a more accurate designing of scale effects on graded nano-thickness beams. The motion equations have been appointed to be solved via Ritz method with the benefits of Chebyshev polynomials in cosine form. Also, Laplace transform techniques help Ritz-Chebyshev method to obtain the dynamical response in time domain. All factors such as particle speed, pores and variable scale modulus affect the dynamical response.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.3
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• pp.88-95
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• 2007

Generally, the integrated system using ion beam consists of 4 major parts, which are SEM, FIB, nano stage, and chamber. Among them, the nano stage and the chamber are designed and manufactured. The whole systems are integrated. Also, FE models are built to perform modal analyses of each part and the whole integrated system with a commercial program. Through these analyses, it is found that each part and the integrated system are very safe against vibrations including external excitations from ground and any others, because their natural frequencies are much larger than frequencies of external excitations. Also, isolation of ground induced vibration is considered.

• 한국정보디스플레이학회:학술대회논문집
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• 2006.08a
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• pp.387-390
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• 2006

The protective layer of AC-PDP was fabricated by laminating an MgO green sheet. The MgO green sheet was made by coating MgO solution composed of solvent, dispersant, binder, and MgO nano-powder. The MgO solution was coated by the die casting method on the base film. We fabricated three kinds of MgO green sheets of which thicknesses were 20, 28, and $40\;{\mu}m$, respectively. The MgO nano-powder showed lower CL intensity and ${\gamma}i$ than the e-beam MgO. The MgO green sheet applied panels showed low luminance and current density. The efficiency was almost same as the conventional e-beam MgO panel.

• Applied Microscopy
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• v.42 no.4
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• pp.223-227
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• 2012

Focused Ion Beam (FIB) systems have incorporated versatile nanomanipulators with inherent sophisticated machining capability to characterize the electrical properties of highly miniature components of electronic devices. Carbon fibers were chosen as a model system to test the applicability of nanomanipulators to microscale electronic materials, with special emphasis on the direct current current-voltage characterizations in terms of electrode configuration. The presence of contact resistance affects the electrical characterization. This resistance originates from either i) the so-called "spreading resistance" due to the geometrical constriction near the electrode - material interface or ii) resistive surface layers. An appropriate electrode strategy is proposed herein for the use of FIB-based manipulators.

• Vacuum Magazine
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• v.2 no.2
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• pp.17-23
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• 2015

Medium Energy Ion Scattering (MEIS) has been successfully used for ultrathin film analysis such as gate oxides and multilayers due to its single atomic depth resolution in compostional and structural depth profiling. Recently, we developed a time-of-flight (TOF) MEIS for the first time, which can analyze a $10{\mu}m$ small spot. Small spot analysis would be useful for test pattern analysis in semiconductor industry and various thin film technology. The ion beam damage problem is minimized due to its improved collection efficiency by orders of magnitude and the ion beam neutralization problem is removed completely for quantitative analysis. Newly developed TOF-MEIS has been applied for gate oxides, ultra shallow junctions, nanoparticles, FINFET structures to provide compositional and structural profiles. Further development for submicron spot analysis and applications for functional nano thin films and nanostructured materials are expected for various nanotechnology and biotehnology.

• Applied Science and Convergence Technology
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• v.26 no.6
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• pp.214-217
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• 2017

AlSb is a promising material for optical devices, particularly for high-frequency and nonlinear-optical applications. We report the effect of growth temperature on structural properties of AlSb grown on GaAs substrate. In particular we studied the surface of AlSb with the growth temperature by atomic force microscopy, and concluded that optimized growth temperature of AlSb is $530^{\circ}C$. We also show the result of real-time monitoring of AlSb growth by in situ ellipsometry. The results of the structural study are good agreement with the previous reported ellipsometric data.

• Current Optics and Photonics
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• v.5 no.2
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• pp.134-140
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• 2021

In this paper, I introduce a novel design method of a high performance nanophotonic beam deflector providing broadband operation, large active tunability, and signal efficiency, simultaneously. By combining thermo-optically tunable vanadium dioxide nano-ridges and a metallic mirror, reconfigurable local optical phase of reflected diffraction beams can be engineered in a desired manner over broad bandwidth. The active metagrating deflectors are systematically designed for tunable deflection of reflection beams according to the thermal phase-change of vanadium dioxide nano-ridges. Moreover, by multiplexing the phase-change supercells, a robust design of actively tunable beam splitter is also verified numerically. It is expected that the proposed intuitive and simple design method would contribute to development of next-generation optical interconnects and spatial light modulators with high performances. The author also envisions that this study would be fruitful for modern holographic displays and three-dimensional depth sensing technologies.

• Advances in nano research
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• v.12 no.6
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• pp.617-627
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• 2022

In the current study, the nonlinear impact of the Von-Kármán theory on the vibrational response of nonhomogeneous structures of functionally graded (FG) nano-scale tubes is investigated according to the nonlocal theory of strain gradient theory as well as high-order Reddy beam theory. The inhomogeneous distributions of temperature-dependent material consist of ceramic and metal phases in the radial direction of the tube structure, in which the thermal stresses are applied due to the temperature change in the thickness of the pipe structure. The general motion equations are derived based on the Hamilton principle, and eventually, the acquired equations are solved and modeled by the Meshless approach as well as a computer simulation via intelligent mathematical methodology. The attained results are helpful to dissect the stability of the MEMS and NEMS.

• Advances in nano research
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• v.13 no.5
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• pp.487-497
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• 2022

This study investigates the stability of protein tissues regarding the vibration analysis based on the classical beam theory coupled with the nonlocal elasticity theory concerning the exercise impact. As reported in the previous research, four different types of protein tissues are supposed, and the influence of sports training is investigated. The protein tissues are made of protein fibers surrounded by an elastic foundation. The exercise enhances the muscle area and plays an essential role in the stability and strength of protein and muscle tissues. The results are examined in detail to examine the impact of different parameters on the stability of nano protein fibers.