Transactions of the Korean Society of Machine Tool Engineers (한국공작기계학회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Structural Analysis and Manufacturing of the Integrated System using Ion Beam

이온 빔 이용 통합시스템의 제작 및 구조해석

  • 김성걸 (서울산업대학교 기계설계자동화공학부)
  • Published : 2007.06.15
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Abstract

Generally, the integrated system using ion beam consists of 4 major parts, which are SEM, FIB, nano stage, and chamber. Among them, the nano stage and the chamber are designed and manufactured. The whole systems are integrated. Also, FE models are built to perform modal analyses of each part and the whole integrated system with a commercial program. Through these analyses, it is found that each part and the integrated system are very safe against vibrations including external excitations from ground and any others, because their natural frequencies are much larger than frequencies of external excitations. Also, isolation of ground induced vibration is considered.

Keywords

References

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