• Journal of the Korean Society for Precision Engineering
• /
• v.25 no.4
• /
• pp.134-139
• /
• 2008

A spirally arrayed nano-pattern is designed as a model pattern for the next generation optical storage media. The pattern consists off types of embossed rectangular dot, which are 50nm, 100nm, 150nm and 200nm in length and 50nm in width. The height of the dot is designed to be 50nm. The pitch of the spiral track of the pattern is 100nm. A ER(Electron resist) master for this pattern is fabricated by e-beam lithography process. The ER is first spin-coated to be 50nm thick on a Si wafer and then the model pattern is written on the coated ER layer by e-beam. After developing this pattern written wafer in the solution, a ER pattern master is fabricated. The most conventional e-beam machine can write patterns in orthogonal way, so we made our own pattern generator which can write the pattern in circular or spiral way. This program generates the patterns to be compatible with the e-beam machine from Raith(Raith 150). To fabricate 50nm pattern master precisely, a series of experiments were done including the design compensation for the pattern size, optimization of the dose, acceleration voltage, aperture size and developing. Through these experiments, we conclude that the higher accelerating voltages and smaller aperture size are better for mastering the nano pattern which is in order of 50nm. With the optimized e-beam lithography process, a spiral arrayed 50nm pattern master adopting PMMA resist was fabricated to have dimensional accuracy over 95% compared to the designed. Using this pattern master, a metal pattern stamp will be fabricated by Ni electro plating for injection molding of the patterned plastic substrate.

• Proceedings of the KSME Conference
• /
• 2004.04a
• /
• pp.978-982
• /
• 2004

We present high aspect ratio 100nm-scale nickel stamper using e-beam lithography process and Cr/Qz mask for the injection molding process of nano grating patterns. Conventional photolithography blank mask (CrON/Cr/Qz) consists of quartz substrate, Cr layer of UV protection and CrON of anti-reflection layer. We have used Cr/Qz blank mask without anti-reflection layer of CrON which is non-conductive material and ebeam lithography process in order to simplify the nickel electroplating process. In nickel electroplating process, we have used Cr layer of UV protection as seed layer of nickel electroplating. Fabrication conditions of photolithography mask using e-beam lithography are optimized with respect to CrON/Cr/Qz blank mask. In this paper, we have optimized e-beam lithography process using Cr/Qz blank mask and fabricated nickel stamper using Cr seed layer. CrON/Cr/Qz blank mask and Cr/Qz blank mask require optimal e-beam dosage of $10.0{\mu}C/cm^2$ and $8.5{\mu}C/cm^2$, respectively. Finally, we have fabricated $116nm{\pm}6nm-width$ and $240nm{\pm}20nm-height$ nickel grating stamper for the injection molding pattern.

• Advances in nano research
• /
• v.7 no.6
• /
• pp.443-457
• /
• 2019

In this investigation, dynamic and bending behaviors of isolated protein microtubules are analyzed. Microtubules (MTs) can be considered as bio-composite structures that are elements of the cytoskeleton in eukaryotic cells and posses considerable roles in cellular activities. They have higher mechanical characteristics such as superior flexibility and stiffness. In the modeling purpose of microtubules according to a hollow beam element, a novel single variable sinusoidal beam model is proposed with the conjunction of modified strain gradient theory. The advantage of this model is found in its new displacement field involving only one unknown as the Euler-Bernoulli beam theory, which is even less than the Timoshenko beam theory. The equations of motion are constructed by considering Hamilton's principle. The obtained results are validated by comparing them with those given based on higher shear deformation beam theory containing a higher number of variables. A parametric investigation is established to examine the impacts of shear deformation, length scale coefficient, aspect ratio and shear modulus ratio on dynamic and bending behaviors of microtubules. It is remarked that when length scale coefficients are almost identical of the outer diameter of MTs, microstructure-dependent behavior becomes more important.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.10a
• /
• pp.149-153
• /
• 2005

The electron beam machining provides very high resolution up to nanometer scale, hence the E-beam writing technology is rapidly growing in MEMS and nano-engineering areas. In the optical column of the e-beam writer, there are several lenses condensing and focusing electron beams from electron gun with fringing magnetic fields. The polepieces of these lenses are usually made with high purity iron which is hard to fabricate and very expensive. In this paper, the possibility of using polepiece of object lens composed with pure iron and low carbon steel was examined to reduce cost. The magnetic field at object lens was calculated with finite element method, and practical focusing qualities of SEM pictures were observed comparing for the object lens polepieces with pure iron and two type of composed with low carbon steel.

• Steel and Composite Structures
• /
• v.41 no.6
• /
• pp.821-829
• /
• 2021

Nonlinear dynamic response of a sandwich beam considering porous core and nano-composite face sheet on nonlinear viscoelastic foundation with temperature-variable material properties is investigated in this research. The Hamilton's principle and beam theory are used to drive the equations of motion. The nonlinear differential equations of sandwich beam respect to time are obtained to solve nonlinear differential equations by Homotopy perturbation method (HPM). The effects of various parameters such as linear and nonlinear damping coefficient, linear and nonlinear spring constant, shear constant of Pasternak type for elastic foundation, temperature variation, volume fraction of carbon nanotube, porosity distribution and porosity coefficient on nonlinear dynamic response of sandwich beam are presented. The results of this paper could be used to analysis of dynamic modeling for a flexible structure in many industries such as automobiles, Shipbuilding, aircrafts and spacecraft with solar easured at current time step and the velocity and displacement were estimated through linear integration.

• Advances in Computational Design
• /
• v.7 no.2
• /
• pp.99-112
• /
• 2022

This research has been devoted to examine nonlinear static bending analysis of smart beams with nano dimension exposed to thermal environment. The beam elastic properties are corresponding to piezo-magnetic material of different compositions. The large deflection analysis of the beam has been performed assuming that the beam is exposed to transverse uniform pressure. Based on the rule of Hamilton, the governing equations have been derived for a nonlocal thin beam and solved using differential quadrature method. Temperature variation effect on nonlinear deflection of the smart beams has been studied. Also, the beam deflection is shown to be affected by electric voltage, magnetic intensity and material composition.

• Advances in materials Research
• /
• v.11 no.4
• /
• pp.279-298
• /
• 2022

In this paper, the important novelty and the defining a physical phenomenon of the resent research is the development of nonlocal stress and strain parameters on the porous sandwich beam with functionally graded materials in the top and bottom face sheets.Also, various beam models including Euler-Bernoulli, Reddy and the generalized formulation of two-variable beam theories are obtained in this research. According to a nonlocal strain elasticity theory, the strain at a reference point in the body is dependent not only on the stress state at that point, but also on the stress state at all of the points throughout the body. Thus, the nonlocal stress-strain elasticity theory is defined that can be actual at micro/nano scales. It can be seen that the critical buckling load and transverse deflection of sandwich beam by considering both nonlocal stress-strain parameters is higher than the nonlocal stress parameter. On the other hands, it is noted that by considering the nonlocal stress-strain parameters simultaneously becomes the actual case.

• Journal of the Korean Vacuum Society
• /
• v.19 no.5
• /
• pp.371-376
• /
• 2010

The GaAs epitaxial layers were grown on Si(100) substrates by molecular beam epitaxy (MBE) using the two-step method. The Si(100) substrates were cleaned with three different surface cleaning methods of vacuum heating, As-beam exposure, and Ga-beam deposition at the substrate temperature of $800^{\circ}C$ in the MBE growth chamber. Growth temperature and thickness of the GaAs epitaxial layer were $800^{\circ}C$ and $1{\mu}m$, respectively. The surface structure and properties were investigated by reflection high-energy electron diffraction (RHEED), AFM (Atomic force microscope), DXRD (Double crystal x-ray diffraction), PL (Photoluminescence), and PR (Photoreflectance). From RHEED, the surface structure of GaAs epitaxial layer grown on Si(100) substrate with Ga-beam deposition is ($2{\times}4$). The GaAs epitaxial layer grown on Si(100) substrate with Ga-beam deposition has a high quality.

• Structural Engineering and Mechanics
• /
• v.61 no.2
• /
• pp.209-220
• /
• 2017

The purpose of this paper is to study the geometrically nonlinear free vibration of functionally graded nano/micro beams (FGNBs) based on the modified couple stress theory. For practical applications, some analytical expressions of nonlinear frequencies for FGNBs on a nonlinear Pasternak foundation are developed. Hamilton's principle is employed to obtain nonlinear governing differential equations in the context of both Euler-Bernoulli and Timoshenko beam theories for a comprehensive investigation. The modified continuum theory contains one material length scale parameter to capture the size effect. The variation of two-constituent material along the thickness is modeled using Reddy's power-law. Also, the Mori-Tanaka method as an accurate homogenization technique is implemented to estimate the effective material properties of the FGNBs. The results are presented for both hinged-hinged and clamped-clamped boundary conditions. The nonlinear partial differential equations are reduced to ordinary differential equations using Galerkin method and then the powerful method of homotopy analysis is utilized to obtain the semi-analytical solutions. Eventually, the presented analytical expressions are used to examine the influences of the length scale parameter, material gradient index, and elastic foundation on the nonlinear free vibration of FGNBs.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.24 no.2
• /
• pp.217-223
• /
• 2015

In this paper, the performance of a system was analyzed according to the design parameters of a LED secondary lens that can be applied at a very close range, e.g., for direct lighting or display systems. We designed the secondary lens of the very-close-range LED using an aspheric equation and analyzed its performance-particularly the angle of the beam spread, central luminous intensity, and light uniformity-with respect to the thickness of lens, radius, conic constant, and asphericity (4th). Our analysis shows that four parameters affect the performance. The simulation results indicate an optimal thickness of 1 mm and show that a larger radius yields higher performance. The optimal range for the conic constant was determined as -1.21 to -1.25, the optimal range for the asphericity was determined as 0.0047xx to 0.0049xx (4th).