• 제목/요약/키워드: multilayer substrates

검색결과 98건 처리시간 0.035초

Epitaxial Growth and Characterization of Zinc-blende CrAs/GaAs/MnAs/GaAs Multilayers

  • Wang W.H.;Manago T.;Akinaga H.
    • Journal of Magnetics
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    • 제11권1호
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    • pp.1-4
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    • 2006
  • We report on the growth, structural and transport properties of zinc-blende CrAs/GaAs/MnAs/GaAs multilayers on GaAs(001) substrates. Structural analyses using in-situ reflection high-energy electron diffraction and exsitu cross-sectional transmission electron microscopy confirmed the realization of a zinc-blende crystal structure. Room temperature Hall measurements reveal that the as-grown multilayer exhibits p-type conductivity with a very low resistivity of $0.052\;\omega{cm}$, a high carrier concentration of $6.2X10^{19}\;cm^{-3}$ and a Hall mobility of $1.8\;cm^2/Vs$. We also observed a clear decrease of the resistivity in samples after low temperature annealing.

Functional Polymer Thin Films based on the Layer-by-Layer Deposition

  • Char, Kook-Heon
    • 한국고분자학회:학술대회논문집
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    • 한국고분자학회 2006년도 IUPAC International Symposium on Advanced Polymers for Emerging Technologies
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    • pp.192-192
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    • 2006
  • Organic/organic and organic/inorganic multilayer films composed of organic polyelectrolytes (PE) and inorganic nanoparticles/platelets were prepared from the layer-by-layer (LbL) deposition using both spinning and dipping. The difference in both LbL methods is quantitatively compared in terms of internal layer ordering and physical properties of the multilayered films. Additionally, we suggest that the patterned multilayer films can be easily prepared by the combination of the spin SA and the lift-off method. Freestanding films were also prepared with the LbL deposition on low energy substrates, which allows the detailed analysis of composition within the films. Other LbL thin films prepared with block copolymer micelles will be discussed.

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Nanostructure Fabrication using Dip-pen Nanolithography

  • Lee, Seung-Woo;Mirkin Chad A.
    • 한국고분자학회:학술대회논문집
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    • 한국고분자학회 2006년도 IUPAC International Symposium on Advanced Polymers for Emerging Technologies
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    • pp.285-285
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    • 2006
  • The ionic layer-by-layer (LBL) assembled films can be formed by sequentially dipping of substrates to oppositely charged polyions solution in the multilayer, called polyelectrolytes multilayer (PEM) films. Easy way of these assemblies of charged polymers offer the ability to adjust important parameters such as controllability of thickness in the nanometer-scale level and functionality of most top layer of PEM films. Nevertheless, we do not know of any trials to fabricate PEM organic films into nanometer size. Herein, we show the integration of the LBL technique with DPN in fabricating nanometer size patterns of multilayered polyelectrolyte structures. Through the use of single and multiple cantilever AFM probes, we demonstrate the parallel writing capabilities of DPN.

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스펙트랄 도메인법을 사용한 다층 GaAs 마이크로스트립선로 해석 모델링 (Analysis of MMIC-Microstrip Line Using Spectral Domain method)

  • 제이 프라카쉬 타쿠르;손창신;박준석;조홍구;김형석
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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    • pp.2294-2296
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    • 2005
  • Multilayer microstrip lines are an integral part of an MMIC. This paper presents an analysis of multilayer GaAs-MMIC microstrip line using a spectral domain method(SDM) taking into account the effect of the variation in the thickness of various layers of substrates on the characteristic impedance and the effective dielectric constant of the line. This work is expected to be useful in GaAs foundries for accurate CAD modelling of the microstrip lines up to 40GHz.

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IN SITU STRESS MEASUREMENTS OF Co-BASED MULTILAYER FILMS

  • Kim, Young-Suk;Shin, Sung-Chul
    • 한국자기학회지
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    • 제5권5호
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    • pp.470-473
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    • 1995
  • We have constructed an apparatus for in sity measurement of stress of the film prepared by sputtering using an optical noncontact displacement detector. A Change of the gap distance between the detector and the substrate, caused by stress of a deposited film, was detected by a corresponding change of the reflectivity. The sensitivity of the displacement detector was $5.9\;{\mu}V/{\AA}$ and thus, it was turned out to be good enough to detect stress caused by deposition of a monoatomic layer. The apparatus was applied to in situ stress measurements of Co/X(X=Pd or Pt) multilayer thin films prepared on the glass substrates by dc magnetron sputtering. At the very beginning of the deposition, both Co and X sublayers have subjected to their own intrinsic stresses. However, when the film was thicker than about $100{\AA}$, constant tensile stress in the Co sublayer and compressive stress in the X sublayer were observed, which is believed to be related to a lattice mismatch between the matching planes of Co and X.

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다양한 기판 위에서 고분자 전해질 다층 막과 폴리에틸렌글리콜 미세 구조물을 이용한 세포 패터닝 방법 (Cell Patterning on Various Substrates Using Polyelectrolyte Multilayer and Microstructure of Poly(Ethylene Glycol))

  • 심현우;이지혜;최호석;이창수
    • Korean Chemical Engineering Research
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    • 제46권6호
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    • pp.1100-1106
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    • 2008
  • 본 연구는 표면에 세포를 부착하는데 있어서, 다양한 기판 표면에 보편적인 플랫폼으로써 적용될 수 있는 세포 부착을 위한 기능성 표면의 제작 기술 및 이를 이용한 세포의 선택적인 고정과 편리한 세포 패터닝의 방법을 보여주었다. 세포 부착에 적합한 기능성 표면의 제작은 산소 플라즈마 처리를 이용한 다양한 기판의(유리, PMMA, PS, PDMS) 표면 활성화 및 상반되는 고분자 전해질의(PAH, PDAC, PSS, PAA) 정전기적 인력을 통한 증착으로 이루어진 다층의 고분자 전해질 층을 통해 제작될 수 있었다. 또한, 고분자 전해질로 증착된 표면 위로 마이크로 몰딩 인 케필러리 방법을 사용하여 PEG 마이크로 구조물을 제작함으로써 세포의 선택적인 고정이 이루어질 수 있었다. 다층의 고분자 전해질로 증착된 표면은 세포와의 강한 정전기적 인력으로 세포 부착에 유리한 표면을 제공하였다. 반면에, 제작된 PEG 마이크로 구조물은 물리적, 생물학적인 장애물의 역할로써 세포의 비 특이적인 흡착을 방지하였다. 세포 부착을 위한 기능성 표면을 제작하는 동안 표면의 특성은 접촉각 측정을 통해 이루어 졌다. 다양한 기판 상에서 개질된 표면은 세포 부착을 위한 적합한 환경의 제공과 함께 세포의 마이크로 패터닝 기술에서 높은 수율의 세포 패터닝을 제공한다. 상기의 제안된 세포 부착을 위한 기능성 표면 제작 기술 방법은 제작 과정이 매우 간단하고, 편리하여 손쉽게 구현이 가능하며, 제작 공정에서 어떠한 해로운 용매도 사용하지 않기 때문에 친환경적이다. 또한, 이를 이용하여 세포를 이용하는 바이오 칩 및 바이오 센서, 세포를 기반으로 하는 시스템 등에서 기본이 되는 기술로 사용될 수 있는 넓은 응용 범위를 갖는다.

Barrier property Enhancement of Plastic Substrates for Flexible Display by Inorganic-organic Hybrid Multilayer

  • Kim, Hyun-Gi;Ryu, Hyun-Sun;Kim, Sung-Soo
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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    • pp.617-619
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    • 2008
  • Inorganic-organic hybrid multilayers were formed on the plastic substrate to enhance the barrier properties of substrate to water vapor and oxygen transport. Plasma pretreatment of substrate with $Ar/O_2$ lead to adhesion improvement and the densification of inorganic layer on the substrates. Combination of $SiO_xN_y$ layer and silanenanoclay composite layer offered quite good barrier properties (WVTR and OTR) to PES substrate.

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Effect of the multilayer structure on electrical and mechanical properties fo thin film yttria stabilized zirconia electrolyte

  • Jung, In-Ho;Lee, You-Kee;Park, Jong-Wan
    • Journal of Korean Vacuum Science & Technology
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    • 제2권1호
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    • pp.43-48
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    • 1998
  • The effect of mcirostructure on the electrical properties of yttria stabilized zirconia (YSZ) was analyzed by modeling layer arrangements and mixed phase structure. The YSZ thin films were deposited by RF magnetron sputtering using 30mol% YSZ and 8 mol% YSZ targets with yttrium pellets on porous alumina substrates. The structure, composition and electricla properties of the YSZ films were investigated as functions of sputtering conditons and layer arrangements by XRD, TEM, XPS and acimpedance spectroscopy. The results showed that the triple palyered YSZ films had highermicrohardness, lower compressive stress state and higher ionic conductivity by one order than single and double layered YSZ films. However, sputtered YSZ films have low conductivity compared to YSZ pellets or doctor bladed YSZ thin plates. These results were probably due to the influence of insulating alumina substrates, impractical for most stacking geometries and inductance induced by relatively long platinum, lead wire on YSZ conductivity.

Arrays of Microcavity Plasma Devices;Versatile Platform for The Next Generation of Plasma Displays

  • Eden, J.G.;Park, S.J.
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.473-476
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    • 2006
  • Microcavity plasma devices having characteristic dimensions below $100\;{\mu}m$ have been investigated as a candidate for the next generation of plasma displays. Arrays of inverted pyramid microcavity devices, fabricated in Si with emitting apertures of $(50\;{\mu}m)^2$ and designed for AC or bipolar excitation, demonstrate a luminous efficacy above 6 lm/W at pressures up to and beyond one atmosphere of Ne/Xe mixtures. Also the design of analogous microplasma devices in ceramic multilayer structures or plastic substrates is disccussed.

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