Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2005.08a
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- Pages.63-63
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- 2005
Comparative Study on Mechanical Properties of MoSiN Multilayer Films Deposited on Si(100) and Ti-covered Si(100) Substrates
- Jeong, Chung-Gyeong (Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Jeong, Yun-Mo (Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
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Han, Jeon-Geon
(Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
;
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Bu, Jin-Hyo
(Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
- Published : 2005.08.18
Abstract
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