• 한국자기학회:학술대회 개요집
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• 한국자기학회 2003년도 somma/kms meeting
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• pp.145-145
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• 2003

• 한국전기전자재료학회논문지
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• 제20권8호
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• pp.685-690
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• 2007

The new design of inchworm-type piezoelectric actuator is presented in this paper, Compared to conventional inchworm-type actuators, which are composed of more than three piezoelectric bodies, we can reduce the number of piezoelectric bodies by employing the proposed design, resulting in only one piezoelectric body. The overall size of the proposed actuator which consists of one piezoelectric body, two clamping parts and one extending part, is only $5{\times}6{\times}9 [mm^3]$ (DWL). The actuating characteristics of fabricated Monolithic Inchworm Type Actuator(MITA), were found to be a displacement of $0.3{\mu}m$, a generating force of 0.6N and an electric power of 0.5W.

• 한국전기전자재료학회논문지
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• 제19권1호
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• pp.35-39
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• 2006

In this study, in order to develop the multilayer piezoelectric actuator and ultrasonic resonator, PMN-PNN-PZT ceramics were fabricated by sintering with $Li_2CO_3-Na_2CO_3$ as sintering aids at $950^{\circ}C$ and their piezoelectric and dielectric characteristics were investigated as a function of PNN substitution. With increasing PNN substitution, dielectric constant(${\epsilon}_r$), electromechanical coupling factor(kp), and piezoelectric d constant($d_{33}$) were increased to $12 mol\%$ PNN substitution and then showed a tendency to decrease rapidly With increasing PNN substitution, crystal structure changed from tetragonal to rhombohedral at $12 mol\%$ PNN substitution and then secondary phase was appeared and its intensity was increased. At the $12 mol\%$ PNN substituted PMN-PZT composition ceramic sintered at $950^{\circ}C$, density, kp, $d_{33}$ and Qm showed the optimum value of $7.79 g/cm^3$, 0.599, 419 pC/N, and 894, respectively for multilayer piezoelectric actuator application.

• 한국전기전자재료학회논문지
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• 제21권2호
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• pp.126-130
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• 2008

In this study, in order to develop low loss multilayer piezoelectric actuator, PZN-PZT ceramics were fabricated using $Li_2CO_3,\;Bi_2O_3$, CuO and ZnO as sintering aids, their structural, piezoelectric and dielectric characteristics were investigated according to the amount of ZnO addition, At the sintering temperature of $870^{\circ}C$, the density, electromechanical coupling factor(kp), mechanical quality factor(Qm), dielectric constant(${\epsilon}_r$) and piezoelectric constant($d_{33}$) of 0.4 wt% ZnO added specimen (sintered at $870^{\circ}C$) showed the optimum value of $7.812g/cm^3$, 0.535, 916, 1399, 335 pC/N respectively. Taking into consideration above piezoelectric properties of the specimen sintered at low temperature, it was concluded that PZN-PZT ceramics using 0.4 wt% ZnO as additive showed the optimum characteristics as the composition ceramics for low loss multilayer piezoelectric actuator application.

• 분석과학
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• 제6권2호
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• pp.231-238
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• 1993

적층 액츄에이터에서 바인더의 열적 거동이 액츄에이터의 물성을 좌우하므로 압전-전왜 재료로서 우수한 PNN-PZT/Acrylic binder의 혼합물에서 고분자 열분해 메카니즘과 결합제 번아웃 공정에 영향을 끼치는 요소들을 FTIR, DSC, TGA와 같은 분석기기를 통하여 분석하였다. 결합제는 2단계를 거쳐 번아웃이 되며, 산소 분위기일 경우 열분해가 활발해져서 최종 잔유물이 5% 내외로 최소화되므로 물성이 좋은 액츄에이터를 얻을 수 있다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 춘계학술대회 논문집 반도체 재료 센서 박막재료 전자세라믹스
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• pp.129-132
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• 2004

This paper describes the design, fabrication and characteristics of a piezoelectric valve using MCA(Multilayer ceramic actuator). The MCA valve, which has the buckling effect, consists of three separate structures; MCA, a valve actuator die and an a seat die. The design of the actuator die was done by FEM modeling and displacement measurement, respectively. The valve seat die with 6 trenches was made, and the actuator die, which is driven to MCA under optimized conditions, was also fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the seat/actuator die structure. PDMS sealing pad was fabricated to minimize a leak-rate. It was also bonded to seat die and SUS package. The MCA valve shows a flow rate of 9.13 sccm at a supplied voltage of 100 V with a 50 % duty cycle, maximum non-linearity was 2.24 % FS and leak rate was $3.03{\times}10^{-8}\;pa{\cdot}m^3/cm^2$. Therefore, the fabricated MCA valve is suitable for a variety of flow control equipment, a medical bio-system, automobile and air transportation industry.

• 센서학회지
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• 제13권3호
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• pp.230-235
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• 2004

This paper describes the design, fabrication and characteristics of a piezoelectric valve using MCA(Multilayer ceramic actuator). The MCA valve, which has the buckling effect, consists of three separate structures; MCA, a valve actuator die and an a seat die. The design of the actuator die was done by FEM modeling and displacement measurement, respectively. The valve seat die with 6 trenches was made, and the actuator die, which is driven to MCA under optimized conditions, was also fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the seat/actuator die structure. PDMS sealing pad was fabricated to minimize a leak-rate. It was also bonded to seat die and SUS package. The MCA valve shows a flow rate of 9.13 seem at a supplied voltage of 100 V with a 50% duty cycle, maximum non-linearity was 2.24% FS and leak rate was $3.03{\times}10^{-8}pa{\codt}m^{3}/cm^{2}$. Therefore, the fabricated MCA valve is suitable for a variety of flow control equipment, a medical bio-system, automobile and air transportation industry.

• 한국전기전자재료학회논문지
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• 제27권11호
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• pp.702-706
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• 2014

A comparative study has been attempted for microwave and conventional sintering of lead-free $Bi_{0.5}Na_{0.5}TiO_3(BNT)$-based multilayer ceramic actuators(MLAs). It was found that microwave sintering (MWS) could be successfully applied to the co-firing of piezoceramic/AgPd MLAs with a 10 times shorter firing cycle as well as $100^{\circ}C$ lower firing temperature ($850^{\circ}C$) for sufficient densification than conventional furnace sintering ($950^{\circ}C$). Furthermore, MWS-derived specimens showed better electric field-induced strain than that of CFS-derived specimens by effectively suppressing interdiffusions between ceramic and electrode layers.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2009년도 춘계학술대회 논문집
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• pp.357-358
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• 2009

• 한국세라믹학회:학술대회논문집
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• 한국세라믹학회 2003년도 추계총회 및 연구발표회 초록집
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• pp.203.1-203
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• 2003