Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Design, Fabrication and Characteristics of a MCA Valve

적층형 압전밸브의 설계, 제작 및 특성

  • 정귀상 (동서대학교 정보시스템공학부) ;
  • 김재민 (동서대학교 정보시스템공학부) ;
  • 윤석진 (한국과학기술연구원 박막기술연구센터) ;
  • 정순종 (한국전기연구원 전자기소자그룹) ;
  • 송재성 (한국전기연구원 전자기소자그룹)
  • Published : 2004.05.31
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Abstract

This paper describes the design, fabrication and characteristics of a piezoelectric valve using MCA(Multilayer ceramic actuator). The MCA valve, which has the buckling effect, consists of three separate structures; MCA, a valve actuator die and an a seat die. The design of the actuator die was done by FEM modeling and displacement measurement, respectively. The valve seat die with 6 trenches was made, and the actuator die, which is driven to MCA under optimized conditions, was also fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the seat/actuator die structure. PDMS sealing pad was fabricated to minimize a leak-rate. It was also bonded to seat die and SUS package. The MCA valve shows a flow rate of 9.13 seem at a supplied voltage of 100 V with a 50% duty cycle, maximum non-linearity was 2.24% FS and leak rate was $3.03{\times}10^{-8}pa{\codt}m^{3}/cm^{2}$. Therefore, the fabricated MCA valve is suitable for a variety of flow control equipment, a medical bio-system, automobile and air transportation industry.

Keywords

References

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