• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.148-148
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• 2011

Recently, there have been many research activities to develop the large-area plasma source, which is able to generate the high-density plasma with relatively good uniformity, for the plasma processing in the thin-film solar cell and display panel industries. The large-area CCP sources have been applied to the PECVD process as well as the etching. Especially, the PECVD processes for the depositions of various films such as a-Si:H, ${\mu}c$-Si:H, Si3N4, and SiO2 take a significant portion of processes. In order to achieve higher deposition rate (DR), good uniformity in large-area reactor, and good film quality (low defect density, high film strength, etc.), the application of VHF (>40 MHz) CCP is indispensible. However, the electromagnetic wave effect in the VHF CCP becomes an issue to resolve for the achievement of good uniformity of plasma and film. Here, we propose a new electrode as part of a method to resolve the standing wave effect in the large-area VHF CCP. The electrode is split up a series of strip-type electrodes and the strip-type electrodes and the ground ones are arranged by turns. The standing wave effect in the longitudinal direction of the strip-type electrode is reduced by using the multi-feeding method of VHF power and the uniformity in the transverse direction of the electrodes is achieved by controlling the gas flow and the gap length between the powered electrodes and the substrate. Also, we provide the process results for the growths of the a-Si:H and the ${\mu}c$-Si:H films. The high DR (2.4 nm/s for a-Si:H film and 1.5 nm/s for the ${\mu}c$-Si:H film), the controllable crystallinity (~70%) for the ${\mu}c$-Si:H film, and the relatively good uniformity (1% for a-Si:H film and 7% for the ${\mu}c$-Si:H film) can be obtained at the high frequency of 40 MHz in the large-area discharge (280 mm${\times}$540 mm). Finally, we will discuss the issues in expanding the multi-electrode to the 8G class large-area plasma processing (2.2 m${\times}$2.4 m) and in improving the process efficiency.

• Wind and Structures
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• 제26권5호
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• pp.267-277
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• 2018

Numerical simulations are performed of a long flexible cylinder undergoing vortex-induced vibration at a Reynolds number of 500. The cylinder is pinned at both ends, having an aspect ratio of 100 (cylinder length to cylinder diameter) and a mass ratio of 4.2 (structural mass to displaced fluid mass). Temporal and spatial information on the cross-flow (CF) and in-line (IL) vibrations is extracted. High modal vibrations up to the $6^{th}$ in the CF direction and the $11^{th}$ in the IL direction are observed. Both the CF and IL vibrations feature a multi-mode mixed pattern. Mode competition is observed. The $2^{nd}$ mode with a low frequency dominates the IL vibration and its existence is attributed to a wave group propagating back and forth along the span. Distributions of fluid force coefficients are correlated to those of the CF and IL vibrations along the span. Histograms of the x'-y motion phase difference are evaluated from the total simulation time and a complete vibration cycle representing the standing or travelling wave pattern. Correlations between the phase difference and the vibrations are discussed. Vortex structures behind the cylinder show an interwoven near-wake pattern when the standing wave pattern dominates, but an oblique near-wake pattern when the travelling wave pattern prevails.

• KIEE International Transactions on Electrophysics and Applications
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• 제4C권4호
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• pp.137-141
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• 2004

In this paper, a thermopneumatic PMDS (polydimethlysiloxane) micropump with nozzle/diffuser elements is presented. The micropump is composed of nozzle/diffuser elements as dynamic valves, an actuator consisting of a circular PDMS diaphragm and a Cr/Au heater on a glass substrate. Four PDMS layers are used for fabrication of an actuator chamber, actuator diaphragm by a spin coating process, spacer layer, and nozzle/diffuser by the SU-8 molding process. The radius and thickness of the actuator diaphragm is 2 mm and 30 ${\mu}{\textrm}{m}$, respectively. The length and the conical angle of the nozzle/diffuser elements are 3.5 mm and 20$^{\circ}$, respectively. The actuator diaphragm is driven by the air cavity pressure variation caused by ohmic heating and natural cooling. The flow rate of the micropump in the frequency domain is measured for various duty cycles of the square wave input voltage. When the square wave input voltage of 5 V DC is applied to the heater, the maximum flow rate of the micropump is 44.6 ${mu}ell$/min at 100 Hz with a duty ratio of 80% under the zero pressure difference.

• 한국해양공학회지
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• 제26권1호
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• pp.17-26
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• 2012

A coupled analysis of a floating crane barge with a crane wire and hanging structure is carried out in thetime domain. The motion analysis of the crane barge is based on the floating multi-body dynamics, and thecrane wire is modeled as a simple spring tension. The hanging structure is assumed to be a rigid body with 3 degree-of-freedom translational motion. In this study, numerical simulations were conducted at three different stages. First, the developed code was validated by comparing the time-domain motion response of a crane barge with the frequency-domain results. Then, a coupled analysis of a crane barge and simple structure hanging by the crane wire was performed using the present scheme. The motion response and wire tension from the present calculations are compared with the results of OrcaFlex. The agreement between the two sets of results isfairly good. Last, lowering simulations in regular and irregular waves were conducted considering buoyancy changes in the hanging structure. The effects of the wave conditions, structure's weight, wire length, and lowering speed on the wire tension are considered.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 춘계학술대회논문집B
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• pp.599-604
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• 2000

In order to study unsteady aerodynamic loads on high speed trains passing by each other at the speed of 350km/h, three-dimensional flow fields around trains during the crossing event are numerically simulated using the three-dimensional Euler equations. The Roe's FDS with MUSCL interpolation is employed to simulate wave phenomena properly. An efficient moving grid system based on domain decomposition techniques is developed to analyze the unsteady flow field induced by the restricted motion of a train on a rail. The numerical simulations of the trains passing by on the double-track are carried out to study the effect of the train nose-shape, the train length and the existence of tunnel when the crossing event occur. Unsteady aerodynamic loads side force and drag force-acting on the train during the crossing are numerically predicted and anlayzed. It is found that the strength of the side force mainly depends on the nose-shape, and that of drag force on tunnel existence. And it is observed that the push-pull like impulsive force successively acts on each car and acts in different directions between the neighborhood cars. The maximum change of the impulsive force reaches about 3 tons. These aerodynamic force data are absolutely necessary for the evaluation of the stability of the high speed multi-car train. The results also indicate the effectiveness of the present numerical method for the simulation of unsteady flow field induced by the bodies in the relative motion.

• 대한조선학회논문집
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• 제32권2호
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• pp.84-92
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• 1995

석유시추공에서 저주파음향의 전파특성을 파악하기 위하여, 무한히 길고, 균일한 단면을 갖고, 유체와 고체로 구성된 원통형 다층 음향도파관에 대한 이론적 해석을 수행하여, 각 층들의 연성작용을 고려한 음향의 전파모드, 전파속도를 구했다. 저주파수(음향파의 파장이 시추공 지름에 비해 매우 크다), 축대칭, 비점성유체 등의 가정을 함으로써 해석적 해를 얻을 수 있었다. 또한 그 결과를 이용하여 단면의 변화가 있는 곳에서의 반사를 해석하는 기법을 제시하였다. 각 층간의 연성이 심한 경우와 연성이 무시될 수 있는 경우에 대한 실제 해석을 통하여 본 기법의 유용성을 확인하였으며, 유한요소법으로 해석한 결과와의 비교를 통하여 본 기법을 검증하였다.

• 한국해양공학회지
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• 제26권4호
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• pp.77-85
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• 2012

A study was performed on the design of a mooring line to maintain the position of a floating WEC (wave energy conversion) system. The procedure to design a mooring line is set up and the safety of the designed mooring system is evaluated using commercial software, Orcaflex. The characteristics curve for one line is analyzed to determine the properties and pretension of a mooring line. While considering the ocean environmental condition and importance of a floating WEC system, a multi-line layout is determined. A 4-point mooring system with 4 lines shows the instability in the yaw motion of the floating WEC system under a designed ocean environmental condition. The redesigned 4-point mooring system with 8 lines is found to be safe on the condition of a harsh ocean environment. The floating WEC system with the redesigned mooring system also shows stable motion in surge and pitch under operating conditions. From a parametric study on the mooring line length, the extreme value of the mooring line tension is found to be very sensitive to the pretension and length of mooring line. The results of this study can contribute to the establishment of a design procedure for mooring lines.

• 수산해양기술연구
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• 제22권1호
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• pp.41-48
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• 1986

Ifis recommended that the injection rate should be accurate and reliable in the input data of the performance simulation in diesel engine. Matsuoka Sin improved W. Bosch's injection ratio measurement system. Matsuoka Sin reduced length of the test pipe and set the orifice. However, it was not measured accurately to measure the injection ratio due to reflection wave. In the present thesis, the improved measurement system with combination of the conventional W. Bosch type injection ratio measurement system and Matsuoka Sin type corrected W. Bosch type was practically made. The location of orifice and throttle valve was modified and set one more back pressure valve in order to reduce the effect of reflection wave. The results according to injection condition of multi-hole nozzle are following: 1. Measurement error of injection ratio measurement system in this thesis was $\pm$ 1 %, therefore, its reliability was good. 2. The form of injetion ratio is changed from trapezoidal shape to triangle shape with increase of revolution per minute when injection amount is constant. 3. In the case of constant rpm, the initial injection ratio is almost constant regardless of the amount, meanwhile the injection period becomes longer with increase of the amount. 4. The injection pressure of nozzle isn't largely influenced with injection ratio in the case of constant injection amount and rpm, otherwise the initial injection amount is increased by 3-4% when the injection pressure is low. 5. The injection ratio isn't nearly influenced with back pressure.

• International Journal of Aeronautical and Space Sciences
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• 제17권3호
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• pp.324-331
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• 2016

The present study focuses on the characteristics of a supersonic jet flowing from a rectangular nozzle exit on a flat plate. Flow visualization techniques using schlieren and kerosene-lampblack tracing are utilized to investigate shock reflection structures and boundary-layer separations over a flat plate. Wall pressure measurements are also carried out to quantitatively analyze the flow structures. All observations are repeated for multiple jet flow boundary conditions by varying the flap length and nozzle pressure ratio. The experimental results show that the jet flow structures over the flat plate are highly three-dimensional with strong bleeding flows from the plate sides, and that they are sensitive to plate length and nozzle pressure ratio. A multi-component force measurement device is also utilized to observe the characteristics of the jet flow thrust vectoring over the plate. The maximum thrust deflection angle of the jet is about $8^{\circ}$, demonstrating the applicability of thrust vector control via a flat plate installed at the nozzle exit.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2003년도 The Fifth Asian Computational Fluid Dynamics Conference
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• pp.294-298
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• 2003

The complex, unsteady, self-sustained pressure oscillations induced by supersonic flow past a rectangular cavity is investigated using numerical simulations. The present numerical study is performed using a parallel, multiblock solver for the two-dimensional, compressible Navier­Stokes equations. Open cavities with length-to-depth (L / D) ratio in the range 0.5 - 3.3 are considered. This paper sheds light on the cavity physics, cavity oscillatory mechanism, and the organisation of vortical structures inside the cavity. The vortex shedding phenomenon, the shear layer impingement event at the aft wall and the movement of the acoustic/compression wave within the cavity are well predicted. The vortical structures· and the source of the acoustic disturbances are found to be located near the aft wall of the cavity. With the increase in the cavity length, strong recompression of the flow near the aft wall leading to a sudden jump in the cavity form drag is observed. The estimated cavity tones are in good agreement with the available semi­empirical relation. Multiple peaks are noticed in deep and long cavities. For the present free­stream Mach number 1.71, it is observed that around L/D=2.0, the cavity oscillatory mechanism changes from the transverse to longitudinal oscillatory mode. The effects of this transition on various fluid dynamics and acoustic properties are also discussed.