• 한국재료학회지
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• 제17권1호
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• pp.31-36
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• 2007

Nanoimprint lithography (NIL) is a new lithographic method that offers a sub-10nm feature size, high throughput, and low cost. One of the most serious problems of NIL is the stiction between mold and resist. The antistiction layer coating is very effective to prevent this stiction and ensure the successful NIL results. In this paper, an antistiction layer was deposited by VSAM (vapor self assembly monolayer) method on silicon samples with FOTS (perfluoroctyltrichlorosilane) as a precursor for making an antistiction layer. A specially designed LPCVD (low pressure chemical vapor deposition) was used for this experiment. All experiments were achieved after removing the humidity. First, the evaporation test of FOTS was performed for checking the evaporation temperature at low pressure. FOTS was evaporated at 5 Tow and $110^{\circ}C$. In order to evaluate the temperature effect on antistiction layer, chamber temperature was changed from 50 to $170^{\circ}C$ with 0.1ml of FOTS for 1 minute. Good hydrophobicity of all samples was shown at about $110^{\circ}$ of contact angle and under $20^{\circ}$ of hysteresis. The surface energies of all samples calculated by Lewis acid/base theory was shown to be about 15mN/m. The deposited thicknesses of all samples measured by ellipsometry were almost 1nm that was similar value of the calculated molecular length. The surface roughness of all samples was not changed after deposition but the friction force showed relatively high values and deviations deposited at under $110^{\circ}$. Also the white circles were founded in LFM images under $110^{\circ}$. High friction forces were guessed based on this irregular deposition. The optimized VSAM process for FOTS was achieved at $170^{\circ}C$, 5 Torr for 1 hour. The hot embossing process with 4 inch Si mold was successfully achieved after VSAM deposition.

• 전기화학회지
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• 제2권1호
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• pp.31-37
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• 1999

구리이온을 함유하는 효소인 laccase(Rhus vernicifera)를 self-assembly technique을 이용하여 금전극 표면에 고정시킨 후 표면의 특성을 관찰하고 반응을 살펴보았다. laccase는 diphenol, diamine등을 산소에 의해 산화시킬 수 있는 oxidoreductase이다. 이 경우 산소는 peroxide나 superoxide 등의 중간체 생성없이 물까지 직접 4전자 환원이 일어난다. $\beta-mercaptopropionate$를 이용하여 금전극 표면에 음전하를 띤 self-assembled monolayer를 형성시킨 후, 중성용액에서 양 전하를 띤 laccase(pI=9)를 정전기적 인력에 의해 고정시킨 후, 순환 전압-전류법에 의한 실험으로 전극표면에 고정되었음을 확인하였다. 또한, 낮은 주사속도에서 흐른 전하량으로부터 surface coverage를 계산하여 전극표면에 효소가 monolayer로 덮여 있음을 확인하였다. laccase가 고정된 전극을 laccase의 기질인 ABTS(2,2-azino-bis-(3-ethylbenzthioline-6-sulfonic acid) 용액에 담그면 ABTS가 산화되는 것으로부터 고정된 laccase가 활성을 가지고 있음을 확인하였고, 그 효소효과는 $4^{\circ}C$에서 $2\~3$일 동안 지속됨을 관찰하였다. 앞서 구한 surface coverage로부터 고정된 효소의 양을 알 수 있어서, 표면에 고정된 laccase가용액상의 laccase에 비하여 $10\~15\%$정도만의 효소효과를 유지하고 있음을 알 수 있었다. 또한, laccase의 산소의 전기화학적 환원 촉매로서의 역할에 대하여 용액상에서와 전극표면에 고정시켰을 경우에 비교하여 보았는데, 두 경우 다 전자전달체가 없이는 산소환원의 촉매로 작용하지 않고, $Fe(CN)_6^{3-}$를 전자전달체로 사용한 경우에 산소환원의 촉매로 작용함을 알 수 있었다. 이러한 산소환원촉매로서의 역할이 laccase로부터 기인한다는 것은 억제제인 azide를 이용한 실험으로 다시 한 번 확인할 수 있었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2002년도 제22회 학술발표회 초록집
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• pp.210-210
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• 2002

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제54권2호
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• pp.51-54
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• 2005

In this work, the attempt has been made to investigate the morphology of self-assembled dipyridinium dithioacetate on Au(111) substrate by Scanning Tunneling Microscopy(STM). Also, we measured electrical properties(I-V) using Scanning Tunneling Spectroscopy(STS). Sample used in this experiment is dipyridinium dithioacetate, which contains thiol functional group, this structure that can be self-assembled easily to Au(111) substrate. The self-assembly procedure was used for two different concentrations, 0.5 mM/ml and 1 mM/ml. Dilute density of sample by 0.5 mM/ml, 1 mM/ml and observed dipyridinium dithioacetate's image by STM after self-assembled on Au(111) substrate. The structure of STM tip-SAMs-Au(111) substrate has been used measurement for electrical properties(I-V) using STS. The current-voltage(I-V) measurement result, observed negative differential resistance(NDR) properties.

• Bulletin of the Korean Chemical Society
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• 제26권1호
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• pp.127-130
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• 2005

The early stage of the self assembly for octadecyltrichlorosilane (OTS)-based monolayers is investigated using atomic force microscopy (AFM). Height measurements using AFM prove that the island height of the monolayers gradually increases with increasing the island size, and is close to the limiting value (h = $\sim$25 $\AA$) after d = $\sim$600 nm in size. Since the theoretical length of a covalently bound OTS molecule is 26.2 Å, the limiting value of the island height means that the islands with d ${\geq}$ 600 nm consist of close-packed, fully extended chains. The heights for the islands with d < 600 nm are lower than the limiting value and decrease with decreasing the island sizes. This observation indicates that the OTS molecules in the small islands are less densely packed, and that the packing densities of the islands increase as the islands grow in size.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.205-205
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• 2011

The self-assembly of ${\gamma}$-phenylalanine on Au(111) at 150 K was investigated using scanning tunneling microscopy (STM). Phenylalanine can potentially form two-dimensional (2D) molecular networks through hydrogen bonding (through the carboxyl and amino groups) and ${\pi}-{\pi}$ stacking interactions (via aromatic rings). We found that ${\gamma}$-phenylalanine molecules self-assembled on Au(111) surfaces into well-ordered structures such as ring-shaped clusters (at low and intermediate coverages) and 2D molecular domains (intermediate and monolayer coverages), whereas ${\alpha}$-phenylalanine molecules formed less-ordered structure on Au(111). The self-assembly of ${\gamma}$- but not ${\alpha}$-phenylalanine may be related to the flexibility of the carboxyl and amino groups in the molecule. Moreover, as expected, the 2D molecular network of ${\gamma}$-phenylalanine on Au(111) was mediated by a combination of hydrogen bonding and ${\pi}-{\pi}$ stacking interactions.

• Bulletin of the Korean Chemical Society
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• 제29권7호
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• pp.1349-1352
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• 2008

We report a novel patterning method for a homo-polymeric poly(3-hexylthiophene) (P3HT) nanofilm particularly capable of strong adhesion to a $SiO_2$ surface. An oxidized silicon wafer substrate was micro-contact printed with n-octadecyltrichlorosilane (OTS) monolayer, and subsequently its negative pattern was selfassembled with three different amino-functionalized alkylsilanes, (3-aminopropyl)trimethoxysilane (APS), N- (2-aminoethyl)-3-aminopropyltrimethoxy silane (EDAS), and (3-trimethoxysilylpropyl) diethylenetriamine (DETAS). Then, P3HT nanofilms were selectively grown on the aminosilane pre-patterned areas via the vapor phase polymerization method. To evaluate the adhesion, patterning, and the film itself, the PEDOT nanofilms and SAMs were investigated with a $Scotch^{(R)}$ tape test, contact angle analyzer, ATR-FT-IR, and optical and atomic force microscopes. The evaluation showed that the newly developed all bottom-up process can offer a simple and inexpensive patterning method for P3HT nanofilms robustly adhered to an oxidized Si wafer surface by the mediation of $FeCl_3$ and amino-functionalized alkylsilane SAMs.

• 폴리머
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• 제26권5호
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• pp.634-643
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• 2002

고분자 주사슬에 벤젠과 sulfonyloxvimide moiety를 가지고 있는 polyamic acid 초박막을 LB 기법을 이용하여 제조한 다음 200 $^{\circ}C$에서 1시간 동안 열처리에 의해 감광성 폴리이미드 LB 필름을 얻었다. Polyamic acid는 THF-pyridine 공용매를 가지고 축중합에 의해 합성하였다. 모든 단량체와 고분자는 원소분석, FT-IR, $^1$H-NMR의 분광학적 측정을 통해 정량 정성분석을 행하였다. UV lithography 방법을 사용하여 금 기판 위에 제조한 감광성 폴리이미드 LB 필름의 마이크로 어레이 패턴을 제조하였다. 형성된 마이크로 어레이 패턴을 따라 두 가지의 자기조립 방법으로 단백질 cytochrome c 단분자 막을 고정화시켰다. 자기조립된 cytochrome c 단분자 막의 물리ㆍ전기 화학적 특성은 cyclic voltammetry와 AFM을 통해 조사하였으며 생물전자소자로의 응용 가능성에 대해서도 검토하였다.

• Biotechnology and Bioprocess Engineering:BBE
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• 제8권4호
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• pp.227-232
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• 2003

A self-assembled monolayer of protein G was fabricated to develop an immunosensor based on surface plasmon resonance (SPR), thereby improving the performance of the antibodybased biosensor through immobilizing the antibody molecules (lgG). As such, 11-mercaptoundecanoic acid (11-MUA) was adsorbed on a gold (Au) support, while the non-reactive hydrophilic surface was changed through substituting the carboxylic acid group (-COOH) in the 11-MUA molecule using 1-ethyl-3-(3-dimethylaminopropyl) carbodiimide hydrocholide (EDAC). The formation of the self-assembled protein G layer on the Au substrate and binding of the antibody and antigen were investigated using SPR spectroscopy, while the surface topographies of the fabricated thin films were analyzed using atomic force microscopy (AFM). A fabricated monoclonal antibody (Mab) layer was applied for detecting E. coli O157:H7. As a result, a linear relationship was achieved between the pathogen concentration and the SPR angle shift, plus the detection limit was enhanced up to 10$^2$ CFU/mL.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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• pp.878-881
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• 2004

When it converted solar energy or light energy into chemical energy, it studied the electric charge transfer property of the viologen which is used widely as the electron acceptor for the electric charge delivery mediation of the devices. It was formed monolayer in QCM by self-assembled viologen. The absorbed quantities of viologen's electron through peak current and to analyze the electron transfer property of viologen in redox reaction made experiments in cyclic voltammetry among the electrochemical process. It studied the electron transfer relation of viologen from changing the anion in 0.1M NaCl and $NaClO_4$ electrolyte and the interrelation between scan rate and peak current when scan rate increased twice.