• 마이크로전자및패키징학회지
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• 제20권4호
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• pp.25-30
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• 2013

Pb-free ferroelectric $(Na_{0.5}Bi_{0.5})TiO_3$ (NBT) thin films were prepared by a modified sol-gel process. Their structural, dielectric and pyroelectric properties were investigated as a function of the excess Na/Bi ratio and the annealing temperature. In the case of thin films containing no excess Na and Bi, only partial amounts of the perovskite NBT were crystallized, where the films consisted mainly of the pyrochlore phase of $Bi_2Ti_2O_7$ for annealing conditions of $600{\sim}800^{\circ}C$. With increasing excess Na/Bi ratio, the proportion of the perovskite phase effectively increased due to the compensation of the volatile Na and Bi components. For a Na/Bi ratio of 2.0, the thin film with single NBT perovskite phase was obtained within XRD detection limit after annealing at $700^{\circ}C$ for 10 min and it showed the excellent dielectric properties, ${\varepsilon}r$ of ~550 and tan ${\delta}$ of 0.03. While these properties were degraded for Na/Bi ratio of 2.5 despite the existence of pure perovskite phase. The NBT thin film with Na/Bi ratio of 2.0 are also promising candidates for applications requiring pyroelectric devices because it was found to have pyroelectric coefficients of $1.3{\sim}7nC/cm^2K$ in the temperature range of $30{\sim}100^{\circ}C$.

• 멤브레인
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• 제34권2호
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• pp.96-104
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• 2024

항생제는 과도한 사용으로 인해 폐수뿐만 아니라 다양한 수원에서 발견되는 새로운 오염 물질 중 하나입니다. 수중 항생제 오염 물질을 처리하기 위한 고도 산화 공정, 생물학적 처리 등 다양한 기술이 있습니다. 이 두 가지 공정은 비효율적이며, 부산물의 생성은 이 공정을 더욱 복잡하게 만듭니다. 오염 물질을 제거하기 위한 또 다른 대안으로 막 기술이 있습니다. 항생제와 내성 유전자의 제거를 개선하기 위해 막 생물 반응기는 NaClO와 탄소 물질로 변형됩니다. 풍부한 반응성 종의 생성은 항생제의 내성 유전자에 대해 활성입니다.

• ETRI Journal
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• 제35권3호
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• pp.425-430
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• 2013

In this paper, we propose a triple-gate trench power MOSFET (TGRMOS) that is made through a modified RESURF stepped oxide (RSO) process, that is, the nitride_RSO process. The electrical characteristics of TGRMOSs, such as the blocking voltage ($BV_{DS}$) and on-state current ($I_{D,MAX}$), are strongly dependent on the gate configuration and its bias condition. In the nitride_RSO process, the thick single insulation layer ($SiO_2$) of a conventional RSO power MOSFET is changed to a multilayered insulator ($SiO_2/SiN_x/TEOS$). The inserted $SiN_x$ layer can create the selective etching of the TEOS layer between the gate oxide and poly-Si layers. After additional oxidation and the poly-Si filling processes, the gates are automatically separated into three parts. Moreover, to confirm the variation in the electrical properties of TGRMOSs, such as $BV_{DS}$ and $I_{D,MAX}$, simulation studies are performed on the function of the gate configurations and their bias conditions. $BV_{DS}$ and $I_{D,MAX}$ are controlled from 87 V to 152 V and from 0.14 mA to 0.24 mA at a 15-V gate voltage. This $I_{D,MAX}$ variation indicates the specific on-resistance modulation.

• 센서학회지
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• 제23권6호
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• pp.392-396
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• 2014

The 2-dimensional silicon vertical Hall devices, which are sensitive to X,Y components of the magnetic field parallel to the surface of the chip, are fabricated using a modified bipolar process. It consists of the thin p-layer at Si-$SiO_2$ interface and n-epi layer to improve the sensitivity and influence of interface effect. Experimental samples are a sensor type K with and type J without $p^+$ isolation dam adjacent to the center current electrode. The results for both type show a more high sensitivity than the former's 2-dimensional vertical Hall devices and a good linearity. The measured non-linearity is about 0.8%. The sensitivity of type J and type K are about 66 V/AT and 200 V/AT, respectively. This sensor's behavior can be explained by the similar J-FET model.

• Environmental Engineering Research
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• 제25권1호
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• pp.36-42
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• 2020

Fenton process is one of the most effective advanced oxidation processes for the removal of pollutants from wastewater. In this study, while ferrous iron was used in conventional Fenton process (CFP); nano-sized iron(II, III) oxide was experienced in modified Fenton process (MFP) as a new catalyst alternative. In order to enhance their oxidation efficiencies, both CFP and MFP were combined with ultrasonication at 53 kHz fixed frequency. Thus, the influences of both catalyst iron species and ultrasonication on color and chemical oxygen demand (COD) removals from synthetic textile wastewater including Maxilon Red GRL 200% dyestuff were investigated experimentally. While the COD and color removal rates were found as 72.5% and 69.7% via CFP; they were 87% and 75.8% by ultrasonicated CFP, respectively. The color and COD removals were 40.6% and 64.8% via MFP, and 49.9 and 73.1% by ultrasonicated MFP, respectively. Therefore, it was found that the simultaneously usage of ultrasonication with CFP and MFP was improved the COD and color removal efficiencies and oxidation rates even at lower H₂O₂ dosages, compared to individual CFP and MFP. Moreover, the color and COD removal kinetics were also modelled mathematically and compared in the study.

• Macromolecular Research
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• 제17권6호
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• pp.378-387
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• 2009

This research compared three methods for producing and processing nanocomposite polypropylene filament yarns with permanent antimicrobial efficiency. The three methods used to mix antimicrobial agents based on silver nano particles with PP were as follows: 1) mixing of PP powder and inorganic nanocomposite filler with the appropriate concentration using a twin-screw extruder and preparing granules, 2) method 1 with a singlerather than twin-screw extruder, and 3) producing the masterbatch by a twin-screw extruder and blending it with PP in the melt spinning process. All pure polypropylene samples and other combined samples had an acceptable spinnability at the spinning temperature of $240^{\circ}C$ and take-up speed of 2,000 m/min. After producing as-spun filament yarns by a pilot plant, melt spinning machine, the samples were drawn, textured and finally weft knitted. The physical and structural properties (e.g., linear density, tenacity, breaking elongation, initial modulus, rupture work, shrinkage and crystallinity) of the as-spun and drawn yarns with constant and variable draw ratios (the variable draw ratio was used to gain a constant breaking elongation of 50%) were investigated and compared, while DSC, SEM and FTIR techniques were used to characterize the samples. Finally, the antibacterial efficiency of the knitted samples was evaluated. The experimental results revealed that the crystallinity reduction of the as-spun yarn obtained from method 1 (5%) was more than that of method 2 (3%), while the crystallinity of the modified as-spun yarns obtained with method 3 remained unchanged compared to pure yarn. However, the drawing procedure compensated for this difference. By applying methods 2 and 3, the drawing generally improved the tenacity and modulus of the modified fibers, whereas method 1 degraded the constant draw ratio. Although the biostatic efficiency of the nanocomposite yarns was excellent with all three methods, the modified fabrics obtained from methods 1 and 2 showed a higher bioactivity.

• 공업화학
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• 제32권1호
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• pp.28-34
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• 2021

SiO2/Ag 코어-쉘 나노입자를 수정된 Stöber 공정법과 물/dodecylbenzenesulfonic acid (DDBA)/cyclohexane의 역 미셀에서 acetoxime을 환원제로 사용하는 역 미셀 방법을 상호 조합하여 합성하였다. SiO2/Ag 코어-쉘은 UV-visible spectroscopy, XRD, SEM 및 TEM을 사용하여 구조, 형태 및 크기를 조사하였다. SiO2/Ag 코어-쉘의 나노입자 크기는 [물]/[DDBA]의 몰비(WR)의 값을 조절하여 제어할 수 있었다. SiO2/Ag 코어-쉘의 크기와 다분산성은 WR 값이 증가함에 따라 증가하였다. 비정질 SiO2 나노입자 위에 생성된 Ag 나노입자는 430 nm에서 강한 표면 플라즈몬 공명 (SPR) 피크를 나타내었다. SPR 피크는 나노입자 크기의 증가에 따라 장파장으로의 적색 이동을 나타내었다. 합성된 SiO2/Ag 코어-쉘을 분산시켜 70 wt% 조성의 전도성 페이스트를 제조하고, 스크린 인쇄법으로 PET 필름에 코팅하여 전도성을 조사하였다. SiO2/Ag 코어-쉘 페이스트로 코팅된 필름은 상용 Ag 페이스트에 비하여 높은 460~750 µΩ/sq 영역의 표면저항을 나타내었다.

• 공업화학
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• 제34권1호
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• pp.36-44
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• 2023

코어-쉘 TiO₂/Ag 나노입자를 수정된 졸-겔 공정과 함께 acetoxime을 환원제로 사용한 물/dodecylbenzenesulfonic acid (DDBA)/cyclohexane의 역 미셀 방법으로 합성하였다. 합성된 TiO₂/Ag 나노입자의 구조, 형태 및 크기를 XRD, UV-visible spectroscopy, SEM, TEM 및 TGA를 이용하여 조사하였다. TiO₂/Ag 나노입자의 크기는 [물]/[DDBA]의 몰비를 조절하여 제어할 수 있었다. TiO₂/Ag 나노입자의 크기와 다분산성은 [물]/[DDBA]의 몰비가 증가함에 따라 증가하였다. 아나타제 결정상의 TiO₂ 나노입자 위에 생성된 Ag 나노입자는 430 nm 주변에서 강한 표면 플라즈몬 공명(SPR) 흡수 특성을 나타내었다. SPR 피크는 나노입자 크기의 증가에 따라 장파장으로의 적색 이동이 나타났다. 70 wt% 조성으로 TiO₂/Ag 나노입자를 분산시켜 전도성 페이스트를 제조하고, 스크린 인쇄법으로 PET 필름에 코팅하여 전도성을 조사하였다. TiO₂/Ag 나노입자 페이스트로 코팅된 필름은 상용 Ag 페이스트의 경우보다 높은 405~630 μΩ/sq 영역의 표면저항을 나타내었다.

• ETRI Journal
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• 제16권1호
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• pp.45-57
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• 1994

The effects of reactive ion etching (RIE) of $SiO_2$ layer in $CHF_3/C_2F_6$ on the underlying Si surface have been studied by X-ray photoelectron spectroscopy (XPS), secondary ion mass spectrometer, Rutherford backscattering spectroscopy, and high resolution transmission electron microscopy. We found that two distinguishable modified layers are formed by RIE : (i) a uniform residue surface layer of 4 nm thickness composed entirely of carbon, fluorine, oxygen, and hydrogen with 9 different kinds of chemical bonds and (ii) a contaminated silicon layer of about 50 nm thickness with carbon and fluorine atoms without any observable crystalline defects. To search the removal condition of the silicon surface residue, we monitored the changes of surface compositions for the etched silicon after various post treatments as rapid thermal anneal, $O_2$, $NF_3$, $SF_6$, and $Cl_2$ plasma treatments. XPS analysis revealed that $NF_3$ treatment is most effective. With 10 seconds exposure to $NF_3$ plasma, the fluorocarbon residue film decomposes. The remained fluorine completely disappears after the following wet cleaning.

• 멤브레인
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• 제14권3호
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• pp.201-206
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• 2004

열화학적 IS 공정에서 요오드화수소의 분해에 적용하기 위하여 화학증착법(CVD)으로 제조된 silica 막의 안정성을 HI-$H_2O$ 기상 혼합물에서 평가하였다. Si 원천으로 tetraethoxysilane을 사용하여 서로 다른 CVD 온도로 기공크기가 100 nm인 $\alpha$-alumina를 처리하였다. CVD온도는 $700^{\circ}C$, $650^{\circ}C$, $600^{\circ}C$이었다. $600^{\circ}C$에서 수행한 단일 성분의 투과 실험에서 측정한 막의 $H_2$/$N_2$ 선택도는 CVD 온도 $700^{\circ}C$의 M1 막은 43.2, $650^{\circ}C$의 M2 막은 12.6, $600^{\circ}C$의 M3 막은 8.7을 나타내었다. HI-$H_2O$ 기상 혼합물에서 안정성 실험은 $450^{\circ}C$에서 수행하였는데, CVD 온도 $650^{\circ}C$에서 처리된 막이 다른 온도에서 처리된 막보다 더 안정성이 더 좋은 결과를 얻었다.