• Clean Technology
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• v.7 no.3
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• pp.203-214
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• 2001

A silicon oxide cleaning characteristic and its mechanism were studied in RF plasma cleaning system with various gases such as $CHF_3$, $CF_4$, Argon, oxygen and mixing gas. The experimental parameters - working pressure (100 mTorr), RF power (300 W, 500 W), electrode distance (5cm, 8cm, 11.5cm), cleaning time (90, 180 seconds), gas flow (50 sccm) were fixed to compare cleaning efficiency by gas types. The results were as follows. First, the argon plasma is retaining only physical sputtering effect and etch rate was low. Second, the oxygen plasma showed good cleaning efficiency in electrode distace of 5cm, 300W, 180secs, but surface roughness increased. Third, $CF_4$ Plasma could get the best cleaning efficiency. Fourth, $CHF_3$ plasma could know that addition gas that can lower the CFx/F ratio need. We could not get good cleaning efficiency in case of added argon to $CHF_3$. But, we could get good cleaning efficiency in case added oxygen.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.104-104
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• 2009

Critical dimensions has rapidly shrunk to increase the degree of integration and to reduce the power consumption. However, it is accompanied with several problems like direct tunneling through the gate insulator layer and the low conductivity characteristic of poly-silicon. To cover these faults, the study of new materials is urgently needed. Recently, high dielectric materials like $Al_2O_3$, $ZrO_2$ and $HfO_2$ are being studied for equivalent oxide thickness (EOT). However, poly-silicon gate is not compatible with high-k materials for gate-insulator. To integrate high-k gate dielectric materials in nano-scale devices, metal gate electrodes are expected to be used in the future. Currently, metal gate electrode materials like TiN, TaN, and WN are being widely studied for next-generation nano-scale devices. The TaN gate electrode for metal/high-k gate stack is compatible with high-k materials. According to this trend, the study about dry etching technology of the TaN film is needed. In this study, we investigated the etch mechanism of the TaN thin film in an inductively coupled plasma (ICP) system with $O_2/BCl_3/Ar$ gas chemistry. The etch rates and selectivities of TaN thin films were investigated in terms of the gas mixing ratio, the RF power, the DC-bias voltage, and the process pressure. The characteristics of the plasma were estimated using optical emission spectroscopy (OES). The surface reactions after etching were investigated using X-ray photoelectron spectroscopy (XPS) and auger electron spectroscopy (AES).

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.10a
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• pp.31.2-31.2
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• 2011

We studied a method of manufacturing an anode to restrict contraction in reducing NiO/YSZ by uniformly mixing. In order to mix Ni and YSZ, a sub-micron Ni core surface was coated at high-speed by a mixture of nano-sized YSZ and a spherical core-shell was subsequently formed. The micron-sized core-shell anode powder was then heat treated at $400{\sim}1,450^{\circ}C$ in an air atmosphere and Ni was extruded and synthesized in nano-size. Subsequently, when the nano-sized mixture of the anode was heat treated and maintained at a temperature of $1,450^{\circ}C$, the anode was manufactured, where Ni and YSZ were uniformly distributed with the nano-structure. According to the nano-sized anode powder synthesis process, Ni particles were oxidized at $400{\sim}500^{\circ}C$ and became spherical by surface tension. In the case of the spherical core Ni powder, the heat treatment temperature rose to $1,250^{\circ}C$ and then a gap between the internal and external pressures occurred due to thermal and tensile stresses. A crack subsequently appeared on the surface, and the heat treatment temperature was increased continuously to increase the pressure gap and then the core Ni extruded as a nano-sized powder, Ni and YSZ uniformly distributed. It was found that the anode of 50~200 nm with a consistent structure obtained in this study has electric conductivity that is approximately 3 times larger than that of a commercial anode.

• Textile Coloration and Finishing
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• v.30 no.2
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• pp.98-106
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• 2018

In this study, graphene oxide(GO) was synthesized by using Hummer's method. Then, GO was used as a additive for epoxy resin nanocomposites that were prepared by mixing Tetraglycidyl diamino diphenyl methane(TGDDM) and hardner(MDEA+M-MIPA). Thermal and mechanical properties of epoxy resin nanocomposites were confirmed by analytical methods such as TG-DTA, DMA, fracture toughness, tensile strength, and flexural strength. The fracture surfaces of epoxy resin nanocomposites with different content of the GO were observed by a Scanning Electron Microscope(SEM). The mechanism for mechanical properties of epoxy resin nanocomposites was analyzed by modeling of nanocomposites with different GO weight. Due to the GO, both the heat resistance and the glass transition temperature of the epoxy resin nanocomposites were improved. Interestingly, when 0.1wt.% of GO was added to the epoxy resin/hardner mixture, the properties of mechanical increased compared with the neat epoxy resin. This results were caused by an aggregation between the GO.

• Journal of Biosystems Engineering
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• v.28 no.5
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• pp.403-410
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• 2003

To enhance the performance of a rice seed pelleting machine and the quality of rice-seed pellets made, improvement of the rice seed pelleting machine developed previously(Park, 2002) was tried and its performance was evaluated. As compared with the previous pelleting machine, a feeding mechanism of pellet materials to the forming rolls was changed from screw conveyor to hydraulic cylinder for proper feeding, rings were installed among rows of semi-spherical forming grooves on the forming rolls for reducing pellet materials loss and seeds damage, and discharging air nozzles were added for complete discharging of the pellets made. Through performance tests, capacity, pelleting ratio, and seed loss ratio of the pelleting machine were investigated at the mixing ratios of soil to rice seed of 6 : 1, 7 : 1, and 8 : 1, and rotating speeds of the forming rolls of 7 rpm, 10 rpm, and 13 rpm. As results of performance evaluation, pelleting ratios were in the range of 77 ∼ 89 ％, and maximum pelleting ratio increased by 18 % in comparison with that of the previous machine. Maximum capacity was about 110 kg/h(about 63,000 pellets/h), which was increased by 70 % in comparison with that of the previous machine. But, ratios of seed loss were in the range of 24 - 49 ％, which were not improved.

• Applied Chemistry for Engineering
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• v.9 no.7
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• pp.1090-1097
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• 1998

Lidocaine compounds have widely been used as local anesthetics. Regarding the molecular mechanism for anesthesia by lidocaine, it is proposed that lidocaine molecules penetrate to the hydrophobic region of cell membrane and expand the membrane volume, producing a change in protein conformation that blocks sodium permeability or lidocaine molecules directly adsorb into lidocaine receptor in the protein channel without expanding the cell membrane. But these proposals have never been proven experimentally. In this study, the expansion of cell membrane by lidocaine compounds was investigated by employing lipid monolayer at the air/water interface as the mimetic system of cell membrane. It was found that oil-soluble lidocaine contracted the area/molecule of lipid in the monolayer of phosphatidyl choline, sphingomyelin, DS-PL95E and lipoid, but expanded the monolayer of phosphatidyl ethanolamine only in a certain range of mixing ratios. On the contrary, water-soluble lidocaine-HCl salt expanded the monolayers of all lipids used in this study.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.32 no.4
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• pp.61-66
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• 2004

The objective of the present study is to develop methodology for the assessment of combustion stability of liquid rocket injectors. To simulate actual combustion occurring inside of a thrust chamber, a fullscale injector has been employed in the study, which bums gaseous oxygen and mixture of methane and propane. The main idea of the experiment is that the mixing mechanism is considered as a dominant factor significantly affecting combustion instability in a fullscale thrust chamber. A single split triplet injector has been used with an open-end cylindrical combustion chamber. The characteristics revealed by excited dynamic pressures in gaseous combustion show degrees of relative acoustic damping depending on operating conditions. Upon test results, the direct comparison between various types of injectors can be realized for the selection of the best design among prospective injectors.

• Resources Recycling
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• v.24 no.3
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• pp.66-75
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• 2015

The flexural performance of amorphous steel fibers having environmental and economy benefits due to relatively short manufacturing process were evaluated as well as that of hooked steel fibers by varing fiber length and volume fraction. Fiber lengths were 10 mm, 20 mm, 30 mm and fiber volume fractions were varied from 0.3% to 1.2%. Test results with flexural performance showed that mixing design needs to be careful because of relatively high volume of amorphous steel fiber compared to hooked steel fibers. High flexural strength was obtained from both longer fiber length and higher volume fraction. Residual strength and toughness of amorphous steel fiber were similar to that of hooked steel fiber, even though rapid dropping of applied load right after concrete matrix breaking. It can be judged that relatively high ability of energy dissipation around first cracking area relatively overcome rapid dropping of loading.

• Journal of Korean Society on Water Environment
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• v.36 no.2
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• pp.89-97
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• 2020

North Han River is a very unique type of water system, where Hwacheon, Chuncheon, Soyanggang, Euiam and Cheongpyeong Dams are located consecutively. These dams are operated differently in the amount of discharge and release schedule according to their structure and purpose of use. They have different water quality characteristics depending on external pollutant inflow and internal mixing condition. Therefore, this study investigated the relationship between the upper dam and down stream river with respect to water quality indicators, such as water temperature, electrical conductivity, BOD, COD, TN and TP of the North Han River. The similarities and correlations representing the relationship were analyzed by Pearson's correlation r and t-test. The data was taken from the Ministry of Environment's water quality monitoring from 1999 to 2018. The results show that water temperature and electrical conductivity of the dam and river are similar and correlated. However, it turned out that there was no similarities and correlations in BOD, COD, TN and TP that are significantly affected by subaqueous reaction mechanism. The results of this study present the impact of the dam on the water quality of North Han River, which can be used as useful data for management of water quality.

• Journal of Korean Society of Water and Wastewater
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• v.9 no.3
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• pp.99-107
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• 1995

Various humic substances are widely distributed in natural water body, such as rivers and lakes and cause the yellowish or brownish color to water. The evidence that humic substances are precursors of THMs formation in chlorinated drinking water has been reported m the Jiteratures. For the reason of public health as well as aesthetics, needs for humic substances removal have been increased in the conventional water treatment processes. In this research, the characteristics of aluminium coagulation of humic acids and humic acids were investigated. The optimum pH and coagulants dosage to remove these materials simultaneously by coagulation were alto studied. The results are as followed; 1. UV-254 absorptiometry for measuring the concentration of aquatic humic acids showed good applicability and stable results. 2. The optimal pH range for humic acids removal by aluminium coagulation was 5 to 5.5, however, an increase in aluminium coagulant dosage could enhance the removal rate of humic acids in the wide pH range. 3. Coprecipitation of humic acids in the typical pH range of 6.5 to 8 in water treatment processes may require the sweep coagulation mechanism with the excess aluminium coagulant dosage. 4. Using PAC(poly aluminium chloride) or PASS(poly aluminium silica sulfate) as coagulants was able to expand the operating range for removing humic acids. 5. From the coagulation of humic substances(UV-254) and turbidity at pH range of 5.5 - 6.0 and alum dose of 86 ppm, the removal efficiency of turbidity from the reservoir water was above 90% and that of UV-254 was above 70%. 6. By using the reservoir water, the optimum condition of rapid mixing for simultaneous removal of turbidity and UV-254 absorbance was pH of 5.8 and LAS dose of 86 ppm, in this study.