• Title/Summary/Keyword: microstructural

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Improved Electrical Properties by In Situ Nitrogen Incorporation during Atomic Layer Deposition of HfO2 on Ge Substrate (Ge 기판 위에 HfO2 게이트 산화물의 원자층 증착 중 In Situ 질소 혼입에 의한 전기적 특성 변화)

  • Kim, Woo-Hee;Kim, Bum-Soo;Kim, Hyung-Jun
    • Journal of the Korean Vacuum Society
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    • v.19 no.1
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    • pp.14-21
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    • 2010
  • Ge is one of the attractive channel materials for the next generation high speed metal oxide semiconductor field effect transistors (MOSFETs) due to its higher carrier mobility than Si. But the absence of a chemically stable thermal oxide has been the main obstacle hindering the use of Ge channels in MOS devices. Especially, the fabrication of gate oxide on Ge with high quality interface is essential requirement. In this study, $HfO_xN_y$ thin films were prepared by plasma-enhanced atomic layer deposition on Ge substrate. The nitrogen was incorporated in situ during PE-ALD by using the mixture of nitrogen and oxygen plasma as a reactant. The effects of nitrogen to oxygen gas ratio were studied focusing on the improvements on the electrical and interface properties. When the nitrogen to oxygen gas flow ratio was 1, we obtained good quality with 10% EOT reduction. Additional analysis techniques including X-ray photoemission spectroscopy and high resolution transmission electron microscopy were used for chemical and microstructural analysis.

Effect of Niobium and Tin on Mechanical Properties of Zirconium Alloys (Zr 합금의 기계적 특성에 미치는 Nb와 Sn의 영향)

  • Kim, Gyeong-Ho;Choe, Byeong-Gwon;Baek, Jong-Hyeok;Kim, Seon-Jae;Jeong, Yong-Hwan
    • Korean Journal of Materials Research
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    • v.9 no.2
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    • pp.188-194
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    • 1999
  • To investigate the effect of niobium and tin on the mechanical properties of zirconium alloys, the tensile test and the microstructural analysis were performed on the Zr-based binary(Zr-xNb, Zr-xSn) and ternary(Zr-0.8Sn-xNb, Zr-0.4Nb-xSn) alloys. As the content of Nb or Sn element increased, the strengths of the Zr-based alloys tended to gradually increase. The increase of mechanical strength was remarkable strength was remarkable in the range more than the solubility of Nb and Sn. The strengthening effects were discussed on the basis of the solid solution hardening, the precipitate hardening, the grain size effect, and the texture effect. The mechanical strength is mainly controlled by the solid solution hardening and additionally by the precipitate hardening in the content more than solubility limit of Nb and Sn. The grain refinement also has a slight effect on the strength of the zirconium alloys with the addition of Nb and Sn. However, the texture effect can be excluded due to the same Kearns number regardless of the content of alloying elements.

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Elevation of Properties of Al-Nb-Ar alloys Fabricated by Mechanical Alloying Metho (기계적합금화법을 이용한 고온 고강도 Al-Nb-Zr 합금 제조 및 특성 평가)

  • Kwon, Dae-Hwan;Ahn, In-Shup;Kim, Sang-Shik;Lee, Kwang-Min;Park, Min-Woo
    • Korean Journal of Materials Research
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    • v.10 no.7
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    • pp.499-504
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    • 2000
  • Recently there have been many investigations on the synthesis and properties of transition metal trialuminides based on Ti, Zr, V, Nb and Ta for use aircraft structure materials in an elevated environment. The effect of Zr additions on the formation behaviour of Al-Nb alloy was investigated. Al-1.3at.%(Nb+Zr) alloys with different Nb to Zr atomic 1:3, 1:1 and 3:1 were prepared by mechanical alloying(MA). The morphological changes and microstructural evolution of Al-Nb-Zr powders during MA were investigated by SEM, XRD and TEM. The intermetallic compound phase of $Nb_2Al\; and\; Al_3Zr_4$ was identified by X-ray diffraction. The intemetallic compound of $Al_3Zr,\; Al_3Nb$ and $Al_3Zr_4$ were formed by heat treatment for 1 hour at $500^{\circ}C$. The size of intermetallic compounds observed by TEM were approximately below 100nm, when they were heat treated after mechanically alloying for 30 hours.

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Effect of Precipitates on the High Temperature Tensile Properties of Cast Alloy 718 (주조용 718합금의 고온 인장 성질에 미치는 석출물의 영향)

  • Ju, Dong-Won;Jo, Chang-Yong;Kim, Du-Hyeon;Ryu, Yeong-Su;Kim, In-Su;Jo, Hae-Yong;Choe, Seung-Ju
    • Korean Journal of Materials Research
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    • v.10 no.7
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    • pp.515-521
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    • 2000
  • The effect of precipitates on the high temperature tensile properties of cast alloy 718 was investigated by phase extraction method and microstructural observation. The value of tensile strength and elongation gradually decreased with increasing testing temperature up to $760^{\circ}C$. Elongation of the alloy increased, while tensile strength decreased above 76$0^{\circ}C$. The amount of precipitates in the specimen that tensile tested at $760^{\circ}C$ showed maximum owing to stress assisted precipitation. Therefore, the alloy exhibited the lowest value of the elongation and the degree of decrease in yield strength at this temperature due to high flow stress of precipitates. Little amount of precipitate, especially $\gamma$' and $\gamma$", resulted in softening of the alloy at the temperature above $760^{\circ}C$.

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The Microstructural Properties Change Owing to the Sintering Condition of T42 High Speed Steel Produced by Powder Injection Molding Process (분말 사출 성형법으로 제조된 T42 고속도 공구강의 소결 조건에 따른 조직 특성 변화)

  • Do, Kyoung-Rok;Choi, Sung-Hyun;Kwon, Young-Sam;Cho, Kwon-Koo;Ahn, In-Shup
    • Journal of Powder Materials
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    • v.17 no.4
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    • pp.312-318
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    • 2010
  • High speed steels (HSS) were used as cutting tools and wear parts, because of high strength, wear resistance, and hardness together with an appreciable toughness and fatigue resistance. Conventional manufacturing process for production of components with HSS was used by casting. The powder metallurgy techniques were currently developed due to second phase segregation of conventional process. The powder injection molding method (PIM) was received attention owing to shape without additional processes. The experimental specimens were manufactured with T42 HSS powders (59 vol%) and polymer (41 vol%). The metal powders were prealloyed water-atomised T42 HSS. The green parts were solvent debinded in normal n-Hexane at $60^{\circ}C$ for 24 hours and thermal debinded at $N_2-H_2$ mixed gas atmosphere for 14 hours. Specimens were sintered in $N_2$, $H_2$ gas atmosphere and vacuum condition between 1200 and $1320^{\circ}C$. In result, polymer degradation temperatures about optimum conditions were found at $250^{\circ}C$ and $480^{\circ}C$. After sintering at $N_2$ gas atmosphere, maximum hardness of 310Hv was observed at $1280^{\circ}C$. Fine and well dispersed carbide were observed at this condition. But relative density was under 90%. When sintering at $H_2$ gas atmosphere, relative density was observed to 94.5% at $1200^{\circ}C$. However, the low hardness was obtained due to decarbonization by hydrogen. In case of sintering at the vacuum of $10^{-5}$ torr at temperature of $1240^{\circ}C$, full density and 550Hv hardness were obtained without precipitation of MC and $M_6C$ in grain boundary.

A Study on the Electrochemical Properties of LiNi0.8Co0.2-xMxO2[M=Al] Cathode Materials Prepared by Sol-Gel Method (졸-겔법에 의해 제조된 정극 활물질 LiNi0.8Co0.2-xMxO2[M=Al]의 전기화학적 특성)

  • Han, Chang-Joo;Cho, Won-Il;Cho, Byung-Won;Yun, Kyung-Suk;Jang, Ho
    • Journal of the Korean Electrochemical Society
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    • v.6 no.4
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    • pp.266-270
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    • 2003
  • The $LiN_{0.8}Co_{0.2}O_2$ has shown outstanding electrochemical properties. The microstructure of $LiN_{0.8}Co_{0.2}O_2$ cathode was investigated by using TEM (transmission electron microscopy) and X-ray diffraction techniques. The $LiN_{0.8}Co_{0.2}O_2$ was produced by sol-gel method to synthesize fine particles less than $1{\mu}m$ in the average diameter. In this study, emphasis was given to the examination and interpretation of the microstructural change during charge-discharge cycling experiments, which appeared to be one of the main causes of early degradation of rechargeable batteries. Results showed that the $1{\mu}m$ cathode produced by sol-gel method had high reversible capacity and excellent cycling stability due to its homogeneous distribution of Ni and Co cations on u atomic scale. In particular, the $1{\mu}m$ cathode did not show severe strain induced structural defects or cubic spinel disordering during cycling experiments, which had been observed in the conventional $LiCoO_2$ cathode. The $LiNi_{0.8}Co_{0.2-x}M_x[M=Al]$ compounds show good reversibility but low discharge capacity.

Comparison of Longitudinal Wave Velocity in Concrete by Ultrasonic Pulse Velocity Method and Impact-Echo Method (초음파 속도법과 충격반향기법에 의한 콘크리트의 종파 속도 비교)

  • Lee, Hoi-Keun;Lee, Kwang-Myong;Kim, Young-H.
    • Journal of the Korean Society for Nondestructive Testing
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    • v.23 no.2
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    • pp.98-106
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    • 2003
  • Nondestructive test (NDT) provides much information on concrete without damage of structural functions. Of NDT methods, elastic wave propagation methods, such as ultrasonic pulse velocity (UPV) method and impact-echo (IE) method, have been successfully used to estimate the strength, elastic modulus, and Poisson's ratio of concrete as well as to detect the internal microstructural change and defects. In this study, the concretes with water-binder ratio ranging from 0.27 to 0.50 and fly ash content of 20% were made and then their longitudinal wave velocities were measured by UPV and IE method, respectively. Test results showed that the UPV is greater than the longitudinal wave velocity measured by the If method, i.e., rod-wave velocity obtained from the same concrete cylinder. It was found that the difference between the two types of velocities decreased with increasing the ages of concrete and strength level. Moreover, for the empirical formula, the dynamic Poisson's ratio, static and dynamic moduli of elasticity, and velocity-strength relationship were determined. It was observed that the Poisson's ratio and the modulus of elasticity determined by the dynamic method are greater than those determined by the static test. Consequently, for the more accurate estimation of concrete properties using the elastic wave velocities, the characteristics of these velocities should be understood.

Characteristics of the Brazed Joint between Superhard Alloy Particles and Carbon Steel Using BAg System Insert Metals. (은계(BAg) 삽입금속으로 접합된 초경합금 입자와 탄소강 브레이징부의 특성)

  • Kim, Gwang-Soo;Kim, Sang-Duck
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.9 no.2
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    • pp.298-302
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    • 2008
  • This study was carried out to evaluate brazing characteristics of the braze joint between superhard alloy particles and carbon steel. Two types of insert metals that made by mechanical alloying process were selected for this study. One is composed of Cu, Zn and Ag(MIM-1) and the other one is composed of Cu, Zn, Ag and Cd.(MIM-2) The chemical compositions of these insert metals were similar to AWS BAg-20 and BAg-2a system. And the commercial insert metals(CIM-1, CIM-2) were also evaluated for the comparative study. The characterization of the insert metals were conducted by wettability tests, shear tensile test and microstructural analyses. The results indicated that wettability tests displayed that MIM-1 and CIM-1 insert metals had the larger wetting angle than MIM-2 and CIM-2 and the wetting angle of the MIM-1 showed higher value than that of CIM-1. However these values are less than $25^{\circ}$ that is recommended for standard value for usual insert metals. The highest value of shear tensile tests was obtained from the brazed joint that made by MIN-1 and the value was $2.29{\times}10^2MPa$. This value is appeared to be higher or same as the commercial insert metals. The microstructures of the inserts metals were composed of Cu-rich proeutectic structure for matrix and Ag-rich eutectic structure. The braze joint between superhard alloy particles and carbon steel produced by the MIM-1(Ag-Cu-Zn) system showed sound joint showing stable microstructures. However there was also some porosities at the interface.

Thermal Stability of Mechanically Alloyed Al-(6~3wt.%)Cr-(3~6wt/%)Zr Alloys (기계적 합금화법으로 제조된 Al-(6~3wt.%)Cr-(3~6wt.%)Zr 합금의 열적 안정성)

  • Yang, Sang-Seon;Lee, Gwang-Min
    • Korean Journal of Materials Research
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    • v.10 no.6
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    • pp.403-408
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    • 2000
  • The Al-Cr-Zr composite metal powders were prepared by mechanical alloying and consolidated by vacuum hot pressing. The microstructural characteristics and the thermal stability of the MA Al-Cr-Zr alloys were evaluated by means of microhardness measurement, XRD and TEM in order to develop high temperature, high strength aluminum alloys. The mechanical alloying was conducted in attritor with 300rpm for 20 hours. The density of the vacuum hot pressed Al-Cr-Zr alloy reached at 97% of theoretical one. After exposing at $300^{\circ}C$ for 100 hours, there is almost no variation in hardness change of the MA alloys. Even after exposing at $ 500^{\circ}C$ for 100 hours, the hardness of the alloy was decreased within 6% of the initial value. The fine stable $Al_3Zr\;and\; Al_{13}Cr_2$ intermetallics were formed at the stage of consolidation and heat treatment in aluminum matrix. The good thermal stability of the MA Al-Cr-Zr alloy can ab attributed to the role of the dispersoids, inhibiting grain growth of nanocrystalline, and the final grain size after heat treatment was less than 150nm.

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Observations on the Modulated Structure in Pyrochlore-type Compounds, $In_2(Ti_{1.7}Zn_{0.3})O_{0.67}$ and $In_2(Ti_{1.7}Mg_{0.3})O_{6.7}$ (Pyrochlore형 화합물 $In_2(Ti_{1.7}Zn_{0.3})O_{0.67}$$In_2(Ti_{1.7}Mg_{0.3})O_{6.7}$에서의 변조구조 관찰)

  • Lee, Hwack-Joo;Park, Hyun-Min;Cho, Yang-Koo;Ryu, Hyun;Nahm, Sahn;Bando, Y.
    • Applied Microscopy
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    • v.29 no.4
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    • pp.471-477
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    • 1999
  • Microstructural observations on the pyrochlore-type $Lu_2Ti_2O_7$ and the similar type of compounds, $In_2(Ti_{1.7}Zn_{0.3})O_{6.7}$ and $In_2(Ti_{1.7}Mg_{0.3})O_{6.7}$ which were made by the isothermal heat-treatment at 1623K for 18 days in Pt tube, were carried out using a top-entry HRTEM working at 200 kV. The modulated structures were found in both compounds, however, not in $Lu_2Ti_2O_7$. From the electron diffraction pattern analysis, the modulated superlattices are incommensurate and are 2.69 times of sublattices along (220) direction. The high resolution TEM images have shown that the superlattices consist of alternate superlattices which are composed of two or three sublattices, resulting in the average of 2.7 times of sublattices in accordance with the analysis of electron diffraction patterns. The crystal structures of both compounds are found to quite similar to those of pyrochlore, however the evidence that the cubic axes are slightly deviated from right angle. The modulated structure has gradually changed to the unmodulated structure induced by electron irradiation.

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