• 제목/요약/키워드: micromachining

검색결과 493건 처리시간 0.028초

UV 레이저 미세 가공공정에서의 물 액적 렌즈 효과에 관한 연구 (A Study on Water Droplet Lens Effect of UV Laser Micromachining Process)

  • 신보성;이정한
    • 한국생산제조학회지
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    • 제21권5호
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    • pp.773-777
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    • 2012
  • Recently UV laser micromachining processes is widely introduced to meet the needs of advanced components of IT, BT and ET industries. Due to the characteristics of non-contact and high-speed laser processing, UV laser micromachining is applied to manufacture very thin substrate such as polymer, metals and composite. These minimum line width obtained by UV laser micromachining is generally determined from laser wavelength, optical lens and its numerical aperture. In this paper we will show the lens effect of water droplet on the surface of workpiece to reduce the line width when UV laser light is irradiated and focused through the water droplet. Because of the refraction effect generated by the semi-spherical or spherical shape of water droplet, we can find smaller line width. And water droplet could not only protect thermal deformation, but also carry away burr around micro dent. Firstly fundamental theory of minimum line width was derived from relationship between the geometry of water droplet and laser light trace, and then experimental and simulation results will be finally compared to verify the effectiveness of water droplet lens effect of UV laser micromachining process.

UV 레이저 마이크로머시닝을 이용한 마이크로 채널 제작기술 (Micro Channel Fabrication Technology Using UV Laser Micromachining)

  • 양성빈;장원석;김재구;신보성;전병희
    • 소성∙가공
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    • 제13권3호
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    • pp.216-224
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    • 2004
  • In this study, we have developed a new UV$({\lambda}=355nm)$ laser micromachining technology by direct ablation method without masks. This technology allows that 3D micro parts can be fabricated rapidly and efficiently with a low price. And it has a benefit of reducing fabricating process simply. Due to micro parts' fabrication, such technologies need the control of XYZ stages with high precision, the design of optical devices to maintain micron spot sizes of laser beam and the control technology of laser focus. The developed laser manufacturing process for laser micromachining is that, after extracting coordinates of shape data from CAD model data, a beam path considering manufacturing features of laser beam is created by using genetic algorithm. This generated manufacturing process is sent to stage controller. In order to improve the surface quality of micro parts, we have carried out experiments on iteration manufacturing and beam step-over by using a minimum focus size. Moreover, we have fabricated a micro-channel through the developed laser micromachining technology and verified it through the results.

마이크로머시닝 기술과 MEMS 광스위치 응용 (Micromachining Technologies and its application to MEMS Optical Switch)

  • 이종현
    • 소성∙가공
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    • 제11권2호
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    • pp.103-107
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    • 2002
  • With the great demand for WDM (Wavelength Division Multiplexing) optical communications, optical switches are expected to become one of the dominant components in future networks. Conventional mechanical switches suffer from poor reliability and large size; however, many micromachined optical switches with moving mirrors have been proposed for high scale OXC (Optical Crossconnect) or ADM (Add/Drop Multiplex) because of the low power consumption and high reliability of these switches. In this paper, we introduce the technological trends of optical switches using MEMS, related micromachining technologies and their characteristics.

전원특성에 따른 마이크로 전해가공에 관한 연구 (A Study on the Electrochemical Micromachining with Various Pulse Currents)

  • 박정우;이은상;문영훈
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2001년도 춘계학술대회 논문집
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    • pp.942-945
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    • 2001
  • Pulse electrochemical micromachining offers significant improvements in dimensional accuracy as compared with conventional electrochemical machining. One primary issue in pulse electrochemical micromachining is to identify and control machining depth as well as interelectrode gap size. This paper presents an identification method for the machining depth by in-process analysis of machining current and interelectrode gap size. The inter electrode gap characteristics, including pulse current, effective volumetric electrochemical equivalent and electrolyte conductivity variations, are analysed based on the model and experiments.

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점 전극을 이용한 미세전해가공 기구의 고찰 (A study on the mechanism of the Electrochemical micromachining using point electrode method)

  • 이승훈;박규열
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2000년도 추계학술대회 논문집
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    • pp.906-909
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    • 2000
  • To improve dimension accuracy and make very small parts are one of the major purpose on the electrochemical micromachining. This paper introduce a small machine tool by using the point electrode. That has a data acquisition system for gathering applied electric condition between the gap. Point electrode on this system was made by this method as well. It was found that variable phenomena occurred through the acquired V-I curve on the process.

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가속도 센서용 파이렉스 유리의 미세가공 (Micromachining of Pyrex Class for Accelerometer)

  • 김광현;최영현;최종순;박동삼;유우식
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2002년도 추계학술대회 논문집
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    • pp.268-273
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    • 2002
  • The mechanical etching technique has recently been developed to a powder blasting technique for various materials, capable of producing micro structures larger than 100$\mu\textrm{m}$. This paper describes the performance of powder blasting technique in micromachining of pyrex for the accelerometer sensor and the effect of the number of nozzle scanning and the stand-off distance on the erosion depth.

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UV 레이저 마이크로머시닝을 이용한 마이크로 채널 제작기술개발 (Technology Development of Micro Channel Fabrication using UV Laser Micromachining)

  • 양성빈;장원석;김재구;신보성;전병희
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2004년도 춘계학술대회 논문집
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    • pp.237-240
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    • 2004
  • In this study, we have developed a new $UV(\lambda=355nm)$ laser micromachining technology by direct ablation method without masks. This technology allows that 3D micro parts can be fabricated rapidly and efficiently with a low price. And it has a benefit of reducing fabricating process simply. Due to micro parts' fabrication, such technologies need the control of XYZ stages with high precision, the design of optical devices to maintain micron spot sizes of laser beam and the control technology of laser focus. Also, we have fabricated a micro-channel through the developed laser micromachining technology and verified it through the results.

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MEMS 기반의 IR $CO_2$ 센서 제작 및 특성 평가 (A Fabrication of IR $CO_2$ Sensor based on the MEMS and Characteristic Evaluation)

  • 김신근;한용희;문성욱
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제54권5호
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    • pp.232-237
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    • 2005
  • In this paper, we fabricated $CO_2$ gas sensor based on the MEMS infrared sensor and characterized its electrical and $CO_2$-sensing properties. The fabricated $CO_2$ gas sensor by MEMS technique has many advanges over NDIR(nondispersive) $CO_2$ sensor such as monolithic fabrication, very high selectivity on $CO_2$, low power consumption and compact system. Microbolometer by surface micromachining was fabricated for gas detector and $CO_2$ filter chip by bulk micromachining was fabricated for signal referencing. By using the proposed and fabricated gas sensor, we are expected to measure $CO_2$ concentration more accurately with high reliability.

광조형법을 이용한 마이크로가공에 관한 연구 (A Study on Micromachining Using Stereolithographic Rapid Prototyping System)

  • Kim, D.W.;H.C. Chae;Kim, N.G.
    • 한국정밀공학회지
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    • 제14권6호
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    • pp.99-105
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    • 1997
  • Recently, with a great interest in micromachine, it is more and more important to promote the way of manufacturing micromachine. The silicon process or the LIGA process was the main method to manufacture micromachine in the past. But, these manufacturing method was 2.5-dimensinal, there was the limit in manufacturing perfect 3-dimensional structure micromachine. In this study, we developed the rapid prototyping system for micromachining and tested its property. We also realized .mu. m-order manu- facturing and 3-dimensional structure processing. The results showed the possibility of micromachining with the rapid prototyping system.

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