The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
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A Fabrication of IR $CO_2$ Sensor based on the MEMS and Characteristic Evaluation

MEMS 기반의 IR $CO_2$ 센서 제작 및 특성 평가

  • 김신근 (연세대 보건과학대 의공학과) ;
  • 한용희 (고려대 공대 재료공학과) ;
  • 문성욱 (KIST 마이크로시스템 연구센터)
  • Published : 2005.05.01
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Abstract

In this paper, we fabricated $CO_2$ gas sensor based on the MEMS infrared sensor and characterized its electrical and $CO_2$-sensing properties. The fabricated $CO_2$ gas sensor by MEMS technique has many advanges over NDIR(nondispersive) $CO_2$ sensor such as monolithic fabrication, very high selectivity on $CO_2$, low power consumption and compact system. Microbolometer by surface micromachining was fabricated for gas detector and $CO_2$ filter chip by bulk micromachining was fabricated for signal referencing. By using the proposed and fabricated gas sensor, we are expected to measure $CO_2$ concentration more accurately with high reliability.

Keywords

References

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