Transactions of Materials Processing (소성∙가공)

The Korean Society for Technology of Plasticity and materials processing (한국소성∙가공학회)
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Micro Channel Fabrication Technology Using UV Laser Micromachining

UV 레이저 마이크로머시닝을 이용한 마이크로 채널 제작기술

  • 양성빈 (한국기계연구원 나노공정그룹) ;
  • 장원석 (한국기계연구원 나노공정그) ;
  • 김재구 (한국기계연구원 나노공정그) ;
  • 신보성 (부산대학교 ERC/NSD) ;
  • 전병희 (인덕대학 컴퓨터응용기계계열)
  • Published : 2004.06.01
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Abstract

In this study, we have developed a new UV$({\lambda}=355nm)$ laser micromachining technology by direct ablation method without masks. This technology allows that 3D micro parts can be fabricated rapidly and efficiently with a low price. And it has a benefit of reducing fabricating process simply. Due to micro parts' fabrication, such technologies need the control of XYZ stages with high precision, the design of optical devices to maintain micron spot sizes of laser beam and the control technology of laser focus. The developed laser manufacturing process for laser micromachining is that, after extracting coordinates of shape data from CAD model data, a beam path considering manufacturing features of laser beam is created by using genetic algorithm. This generated manufacturing process is sent to stage controller. In order to improve the surface quality of micro parts, we have carried out experiments on iteration manufacturing and beam step-over by using a minimum focus size. Moreover, we have fabricated a micro-channel through the developed laser micromachining technology and verified it through the results.

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References

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