Comparison between $d_{31}\;and\;d_{33}$ actuation characterization of the PZT micro-actuator for RF MEMS switch
(RF 스위치 적용을 위한 박막 PZT 엑추에이터의 $d_{31}$ 구동과 $d_{33}$ 구동 특성 비교)
-
- Proceedings of the Korean Society of Precision Engineering Conference
- /
- 2006.05a
- /
- pp.467-468
- /
- 2006