• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.26 no.11
• /
• pp.2415-2420
• /
• 2002

In the present study, a new anchor design was proposed to minimize the initial deflection of micro multi-layer cantilever beam with step-up structure, which is a key component of thin film micro-mirror array. It is important to minimize the initial deflection, caused by residual stress, because it reduces the performance of the actuation. Theoretical and experimental studies were conducted to examine the cause of the initial bending deflection. It was found that the bending deflection at the anchor of the cantilever beam was the primary source of initial deflection. Various anchor designs were proposed and the initial deflections for each design were calculated by finite element analysis. The analysis results were compared with experiments. To reduce the initial deflection a secondary support was added to the conventional structure. The optimal shapes were obtained by simulation and experiment. It was found from the analysis that the ratio or horizontal and vertical dimensions of secondary support was the governing factor, which affected the initial deflection.

• Transactions of Materials Processing
• /
• v.13 no.3
• /
• pp.253-261
• /
• 2004

The machining technology for the brittle materials such as ceramics are applied to the fields of MEMS(micro electromechanical system) by the progress of new machining technologies such as Etching, Diamond machining, Micro drilling, EDM(Electro discharge machining), ECDM(Electro discharge machining), USM(Ultrasonic machining), LBM(Laser beam machining), EBM(Electron beam machining). Especially, the USM technology can be applied to the dieletric brittle materials such as silicon, borosilicate glass, silicon nitride, quartz and ceramics with high aspect ratio. The micro machining system with machining force controlled position servo is developed in this paper and the optimized ultrasonic machining algorithm is constructed by the force controlled position servo control. The load cell is adapted in the force measuring and the servo control algorithm, suit for the ultrasonic machining characteristics, is estabilished with using the PID auto-tunning functions at the PMAC system which is generally adapted in the field of robot industries. The precision force signal amplifier is constructed with high precision operational amplifier AD524. The vacuum adsorption chuck which is made of titanum and internal flow line is engraved, is used in the workpiece fixing. The mahining results by USM shows that there are some deviation between the force command and the actual machining force that the servo control algorithm should be applied in the machining procedures. Therefore, the constant force controlled position servo system is developed for the micro USM system and by the examination machining process in USM, the stable USM system is realized by tracking the average value of machining force.

• Journal of the Korean Society for Precision Engineering
• /
• v.26 no.10
• /
• pp.108-115
• /
• 2009

Although nanosecond pulsed laser drilling and milling are rapid and non-wear processes in micromachining, the quality cannot meet the precision standard due to the recast layer and heat affected zone. On the other hand, electrical discharge machining (EDM) is a well-known high precision machining process in micro scale; however, the low material removal rate (MRR) and tool wear remain as drawbacks. In this paper, hybrid process of laser beam machining (LBM) using nanosecond pulsed laser and micro EDM was studied for micro drilling and milling. While the quality of the micro structure fabricated by this hybrid process remains as high as direct EDM, the machining time and tool wear can be reduced. In addition, variable depth of layer was introduced as an effective method improving efficiency of hybrid milling.

• Journal of Power System Engineering
• /
• v.20 no.5
• /
• pp.5-13
• /
• 2016

This study is on wear damage of the material for a molding machine that be used at finally cutting of metal beam made in roll forming process of vehicle bump beam process line. SKD11 steel was used with the material for cutting mold jig. In the cutting mold jig, Ti diffusion heat treatment after vacuum heat treatment was carried out for upgrade of surface hardness and anti-wear. Also, the heat treatments by various methods were performed to compare the wear damage degree against above the existing heat treatment. Wear loss and friction coefficient were obtained from wear test. And, micro Vickers hardness values were compared with damaged parts or not of cutting mold jig. Micro Vickers hardness value appeared higher at the undamaged part by Ti diffusion heat treatment. The micro Vickers hardness well followed a two-parameter Weibull probability distribution.

• Steel and Composite Structures
• /
• v.41 no.6
• /
• pp.805-820
• /
• 2021

In this research, the buckling and free vibration of three-phase carbon nanotubes/ fiber/ polymer piezoelectric nanocomposite face sheet sandwich microbeam with microsensor and micro-actuator surrounded in elastic foundation based on modified couple stress theory (MCST) is investigated. Three types of porous materials are considered for sandwich core. Higher order (Reddy) and sinusoidal shear deformation beam theories are employed for the displacement fields. Sinusoidal surface stress effects are extracted for sinusoidal shear deformation beam theory. The equations of motion are derived by Hamilton's principle and then the natural frequency and critical buckling load are obtained by Navier's type solution. The determined results are in good agreement with other literatures. The detailed numerical investigation for various parameters is performed for this microsensor-microactuator. The results reveal that the microsensor-microactuator enhanced by increasing of Skempton coefficient, carbon nanotubes diameter length to thickness ratio, small scale factor, elastic foundation, surface stress constants and reduction in porous coefficient, micro-actuator voltage and CNT weight fraction. The valuable results can be expedient for micro-electro-mechanical (MEMS) and nano-electro-mechanical (NEMS) systems.

• Journal of the Korean Society of Visualization
• /
• v.8 no.3
• /
• pp.22-28
• /
• 2010

In the present study, we performed the velocity field measurement in a microchannel using a focal length variable micro liquid lens. The liquid lens is used as a beam expander in a micro-PIV system to acquire the scatter image of the seeded particle. A thin film-type micro liquid lens was made of PDMS material and it was attached on top of the 700-micron-wide working fluid supply channel trench. As a result, the focal length and contact angle of the liquid lens changed with variations in applied pressure.

• Journal of Korean Society for Atmospheric Environment
• /
• v.24 no.E1
• /
• pp.54-62
• /
• 2008

Microbeam PIXE, often called micro-PIXE, is one of powerful tools for analyzing a wide range of elements for various samples. Moreover, it has important applications of interest to the atmospheric science. In the present study, a qualitative elemental imagination for various atmospheric environmental species was attempted using micro-PIXE. Especially, in combination with a novel individual droplet collection method and the micro-PIXE analytical technique, the chemical specification of various individual atmospheric samples could be carried out. Here, we briefly introduce the results of an application of micro-PIXE to the study of atmospheric environment. The detailed spatial resolution of multiple elements for various samples like individual ambient particles, individual raindrops, individual fog droplets, and individual snow crystals could be successfully achieved by scanning 2.6 MeV $H^+$ micro beam ($1{\sim}2{\mu}m$) accelerated by 3 MeV single-end accelerator.

• Advances in nano research
• /
• v.10 no.2
• /
• pp.115-128
• /
• 2021

In this article, free vibration behavior of electro-magneto-thermo sandwich Timoshenko beam made of porous core and Graphene Platelet Reinforced Composite (GPLRC) in a thermal environment is investigated. The governing equations of motion are derived by using the modified strain gradient theory for micro structures and Hamilton's principle. The magneto electro are under linear function along the thickness that contains magnetic and electric constant potentials and a cosine function. The effects of material length scale parameters, temperature change, various distributions of porous, different distributions of graphene platelets and thickness ratio on the natural frequency of Timoshenko beam are analyzed. The results show that an increase in aspect ratio, the temperature change, and the thickness of GPL leads to reduce the natural frequency; while vice versa for porous coefficient, volume fractions and length of GPL. Moreover, the effect of different size-dependent theories such as CT, MCST and MSGT on the natural frequency is investigated. It reveals that MSGT and CT have most and lowest values of natural frequency, respectively, because MSGT leads to increase the stiffness of micro Timoshenko sandwich beam by considering three material length scale parameters. It is seen that by increasing porosity coefficient, the natural frequency increases because both stiffness and mass matrices decreases, but the effect of reduction of mass matrix is more than stiffness matrix. Considering the piezo magneto-electric layers lead to enhance the stiffness of a micro beam, thus the natural frequency increases. It can be seen that with increasing of the value of WGPL, the stiffness of microbeam increases. As a result, the value of natural frequency enhances. It is shown that in hc/h = 0.7, the natural frequency for WGPL = 0.05 is 8% and 14% less than its for WGPL = 0.06 and WGPL = 0.07, respectively. The results show that with an increment in the length and width of GPLs, the natural frequency increases because the stiffness of micro structures enhances and vice versa for thickness of GPLs. It can be seen that the natural frequency for aGPL = 25 ㎛ and hc/h = 0.6 is 0.3% and 1% more than the one for aGPL = 5 ㎛ and aGPL = 1 ㎛, respectively.

• Tribology and Lubricants
• /
• v.33 no.3
• /
• pp.92-97
• /
• 2017

The understanding of the friction characteristics of micro-textured surface is of great importance to enhance the tribological properties of nano- and micro-devices. We fabricate rectangular patterns with submicron-scale structures on a Si wafer surface with various pitches and heights by using a focused ion beam (FIB). In addition, we fabricate tilted rectangular patterns to identify the influence of the tilt angle ($45^{\circ}$ and $135^{\circ}$) on friction behaviour. We perform the friction test using lateral force microscopy (LFM) employing a colloidal probe. We fabricate the colloidal probe by attaching a $10{\pm}1-{\mu}m$-diameter borosilicate glass sphere to a tipless silicon cantilever by using a ultraviolet cure adhesive. The applied normal loads range between 200 nN and 1100 nN and the sliding speed was set to $12{\mu}m/s$. The test results show that the friction behavior varied depending on the pitch, height, and tilt angle of the microstructure. The friction forces were relatively lower for narrower and deeper pitches. The comparison of friction force between the sub-micro-structured surfaces and the original Si surface indicate an improvement of the friction property at a low load range. The current study provides a better understanding of the influence of pitch, height, and tilt angle of the microstructure on their tribological properties, enabling the design of sub-micro- and micro-structured Si surfaces to improve their mechanical durability.

• Structural Engineering and Mechanics
• /
• v.45 no.4
• /
• pp.543-568
• /
• 2013

This study explores the floor micro-vibrations induced by the automated guided vehicles (AGVs) in liquid-crystal-display (LCD) factories. The relationships between moving loads and both the vehicle weights and speeds were constructed by a modified Kanai-Tajimi (MKT) power spectral density (PSD) function whose best-fitting parameters were obtained through a regression analysis by using experimental acceleration responses of a small-scale three-span continuous beam model obtained in the laboratory. The AGV induced floor micro-vibrations under various AGV weights and speeds were then assessed by the proposed regressional MKT model. Simulation results indicate that the maximum floor micro-vibrations of the target LCD factory fall within the VC-B and VC-C levels when AGV moves at a lower speed of 1.0 m/s, while they may exceed the acceptable VC-B level when AGV moves at a higher speed of 1.5 m/s. The simulated floor micro-vibration levels are comparable to those of typical LCD factories induced by AGVs moving normally at a speed between 1.0 m/s and 2.0 m/s. Therefore, the numerical algorithm that integrates a simplified sub-structural multi-span continuous beam model and a proposed regressional MKT moving force model can provide a satisfactory prediction of AGV-induced floor micro-vibrations in LCD factories, if proper parameters of the MKT moving force model are adopted.