• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.922-925
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• 2000

As mechanical components require size minimization and high precision, micro die machining technology has been developed in many fields. to machine a micro die by EDM, sometimes, a polygonal electrode is use. Machining corners by MEDM shows special characteristics. Physically, electrons are concentrated in sharp region and a high potential level is established in this region. Also, the electrode can't be rotated when machining a polygonal cavity, and machined debris can not drawn off easily. Discharge concentration in corners and 2nd discharge by machined debris result in distortion of corner shape. This phenomena can be improved by shaking the electrode. This method is also shown to be effective in improving surface roughness by circulation of machining fluid resulting from movement of the electrode.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.636-639
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• 2003

It is difficult to machine below 10 micrometers by conventional machining methods, such as micro-EDM. However, ultra micro machining using focused ion beam(FIB) is able to machine to 50 nanometers. In addition, 3 dimensional structures can be made by a combination of FIB and CVD to the level of 10 nanometers. Die ＆ moulds techniques are better than one-to-one machining techniques in the mass production of ultra size structures, in regards to production costs. In this case, the machining precision of die ＆ moulds affects produced parts. Also, it is advantageous to machine die ＆ moulds to the 10 micrometer level by FIB technique rather than other techniques. In this paper, the grooving characteristics for die ＆ mould materials by FIB were carried out experimentally in order to compare the machining characteristics of FIB with conventional machining methods. The results showed that the machining parameters and the scanning path of FIB affects the precision. The machined width and depth of the groove varied depending on the required depth due to the redeposition of the sputtered ion material accumulating on both the bottom and the side of the wall.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2002.02a
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• pp.245-252
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• 2002

Ultrasonic machining technology has been developed over recent years for the manufacture of cost-effective and quality-assured precision parts for several industrial application such as optics, semiconductors, aerospace, and automobile. Ultrasonic machining process is an efficient and economical means of precision machining of ceramic materials. The process is non-thermal, non-chemical and non-electric md hardly creates changes to the mechanical properties of the brittle materials machined. This paper describes the characteristics of the micro-hole of $Al_2O_3$ by ultrasonic machining with tungsten carbide tool. The effects of various parameters of ultrasonic machining, including abrasives, machining force and pressure, on the material removal rate, hole quality, and tool wear presented and discussed. The ultrasonic Machining of micro-holes in ceramics has been under taken and the machining mechanism in the ultrasonic machining of ceramics based on the fracture-mechanics concept has been analyzed.

• Transactions of Materials Processing
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• v.20 no.1
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• pp.17-22
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• 2011

Recently, analyzing system is studying for applying to biomedical engineering field, actively. Micro fluidics control system has been manufactured using LIGA (Lithographie Galvanoformung und Abformung), Etching, Lithography and Laser etc. However, it is difficult that above-mentioned methods are applied to fabrication of precision mold master efficiently because of long processing time and rising cost of equipments. Therefore, in this study, micro EDM and micro WEDG system were developed to analyze machining characteristics with tool wear, surface roughness and process time. Then, optimal machining conditions could be obtained from the results of analysis. As the results, mold master of staggered herringbone mixer which has a high mixing efficiency, one of passive mixer of Lab-on-a-chip, could be fabricated from micro pattern(< 50um) using micro EDM successfully.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.04a
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• pp.275-280
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• 2001

Recently, the trends of industrial products grow more miniaturization, variety and mass production. Micro drilling which take high precision in cutting work is requested more micro hole and high speed working. Especially, Micro deep hole drilling is becoming more important in a wide spectrum of precision production industries, ranging from the production of automotive fuel injection nozzle, watch and camera parts, medical needles, and thick multi-layered Printed Circuit Boards(PCB) that are demanded for very high density electric circuitry. This paper shows the tool monitoring results of micro drill with tool dynamometer. And additionally, microscope with built-in monitor inspection show the relationship between burr in workpiece and chip form of micro drill machining.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.377-382
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• 2005

This paper describes the design of micro machine tools system for mechanical machining of micro/meso scale mechanical parts. The micro machining systems such as $\mu-Late$, $\mu-milling/drilling$ machine and $\mu-grinding$ machine are the basic elements constructing $\mu-factory$ which gains more attention recently because of increasing needs of mico and nano-parts in various industrial and medical area. A miniaturized 3-axis milling machine with VCM stage and air spindle and palm-top size micro-late are designed, and air bearing stage and stepwise linear motion system with PZT are studied for motion system. The micro cutting characteristics are investigated experimentally, and reconfigurable machine structures are also considered.

• Proceedings of the KIEE Conference
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• 1987.07a
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• pp.481-485
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• 1987

The fabrication of a micro mass flow sensor on a silicon chip by means of micro-machining technology is described on this paper. The operation of micro mass flow sensor is based on the heat transfer from a heated chip to a fluid. The temperature differences on the chip is a measure for the flow velocity in a plane parallel with the chip surface. An anisotropic etching technigue was used for the formation of the V-type groove in this fabrication. The micro mass flow sensor is made up of two main parts ; A thin glass plate embodying the connecting parts and mass flow sensor parts in silicon chip. This sensor have a very small size and a neglible dead space. Micro mass flow sensor can fabricate on silicon chip by micro machining technology too.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.20 no.1
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• pp.101-107
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• 2011

Analytical solution of micro-scale milling process is presented in order to suggest available machining conditions. The size effect should be considered to determine cutting characteristics in micro-scale cutting. The feed per tooth is the most dominant cutting parameter related to the size effect in micro-scale milling process. In order to determine the feed per tooth at which chips can be formed, the finite element method is used. The finite element method is employed by utilizing the Johnson-Cook (JC) model as a constitutive model of work material flow stress. Machining experiments are performed to validate the simulation results by using a micro-machining stage. The validation is conducted by observing cutting force signals from a cutting tool and the conditions of the machined surface of the workpiece.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.8 no.1
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• pp.31-36
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• 2009

Micro-machining technology has been adopted for shape accuracy of micrometer and sub-micrometer scale, surface roughness of tens nanometer in industries. In micro-machining process the quality of machined surface is derived from machining condition and tooling. This paper investigates AE(acoustic emission) and cutting force signals according to machined surface quality related to machining condition. Machined surface quality was analyzed by the AE and cutting force parameter which reflect surface morphology. The characteristics of signal were extracted for process optimization by monitoring both the tool condition and the machined surface texture in micro end milling process.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1893-1896
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• 2003

This research aimed to fabricate a micro structure using micro electrochemical machining (${\mu}$-ECM). with a view to that the theory of ${\mu}$-ECM is established accurately in a different way of conventional electrochemical machining. In details, if the impedance is existed in the system, it is difficult to analyze the micro electrochemical reaction efficiently in polarization curve using a potentiodynamic test. Hence, this research investigates the relationships between impedance and electric current measuring with a potentiostatic test applying to a pair or electrode as a constant potential. And this paper examines the influence of temperature of electrolyte on polarization curve for the quantitative analysis of electrochemical reactions.