Transactions of Materials Processing (소성∙가공)

The Korean Society for Technology of Plasticity and materials processing (한국소성∙가공학회)
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A Study on the Micro Pattern Fabrication of Lab-on-a-chip Mold Master using Micro EDM

Micro EDM을 이용한 Lab-on-a-chip금형의 미세 패턴 제작에 관한 연구

  • 신봉철 (인하대학교 기계공학과) ;
  • 김규복 (인하대학교 기계공학과) ;
  • 조명우 (인하대학교 기계공학부) ;
  • 김보현 (숭실대학교 기계공학부) ;
  • 정우철 (한국생산기술연구원 정밀금형팀) ;
  • 허영무 (한국생산기술연구원 정밀금형팀)
  • Received : 2010.12.27
  • Accepted : 2011.01.07
  • Published : 2011.02.01
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Abstract

Recently, analyzing system is studying for applying to biomedical engineering field, actively. Micro fluidics control system has been manufactured using LIGA (Lithographie Galvanoformung und Abformung), Etching, Lithography and Laser etc. However, it is difficult that above-mentioned methods are applied to fabrication of precision mold master efficiently because of long processing time and rising cost of equipments. Therefore, in this study, micro EDM and micro WEDG system were developed to analyze machining characteristics with tool wear, surface roughness and process time. Then, optimal machining conditions could be obtained from the results of analysis. As the results, mold master of staggered herringbone mixer which has a high mixing efficiency, one of passive mixer of Lab-on-a-chip, could be fabricated from micro pattern(< 50um) using micro EDM successfully.

Keywords

Acknowledgement

Grant : 마이크로 기능성 초정밀 핵심요소부품 제조기반 기술 개발, 기능성 초정밀 핵심 요소 부품 제조 초정밀 금형 기반기술 개발

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