• Title/Summary/Keyword: micro heater

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Development of SPM Dynamic Analysis Software (SPM의 동적해석 S/W 개발)

  • 이문성;김진석;조철희;홍성근;정광식
    • Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
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    • 2000.10a
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    • pp.84-89
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    • 2000
  • Thermal simulation of typical stack-type and newly proposed planar-type micro-gas sensors were studied by FEM method. The thermal analyses for the proposed planar structure including temperatur distribution over the sensing layer and power consumption of the heater were carried using finite element method by computer simulation and well compared with those of typical stack-type micro-gas sensor. The thermal properties of the microsensor from thermal simulation were compared with those of a actual device to investigate the acceptability of the computer simulation.

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Design of Continuous-flow Micro-PCR System (연속류형 Micro-PCR 시스템의 설계)

  • Kim, Duck-Jong;Kim, Jae-Yun;Park, Sang-Jin;Heo, Pil-Woo;Yoon, Eui-Soo
    • 유체기계공업학회:학술대회논문집
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    • 2003.12a
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    • pp.115-120
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    • 2003
  • In this work, a continuous-flow micro-PCR system is systematically designed. From the numerical simulation based on the finite volume method, adapting oneself to a new environmental temperature without an external temperature controller is shown to be possible and a cooler as well as a heater is shown to be necessary to obtain three individual temperature zones for polymerase chain reaction. In addition, appropriate geometry of a heat sink for the cooler is determined by using a compact modeling method, the porous medium approach.

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Fabrication of Micro-heaters Using MgO as Medium Layer and It`s Application for Micro-Flowsensors (매개층 산화마그네슘막을 이용한 백금박막 미세발열체의 제작과 마이크로 유량센서에의 응용)

  • 홍석우;조정복;정귀상
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.11a
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    • pp.358-361
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    • 1999
  • This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD\`s and micro-heater on the Si substrate, in which MgO thin-films were used as medium layer in order to improve adhesion of Pt thin-films to SiO$_2$ layer The MgO layer improved adhesion of Pt thin-films to SiO$_2$` layer without any chemical reactions to Pt thin-films under high as gas flow rate and its conductivity increased due to increase of heat-loss from sensor to external. Output voltage was 82 mV at N2 flow rate of 2000 sccm/min, heating power of 1.2W. The respons time was about 100 msec when input flow was step-input

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MEMS-Based Micro Sensor Detecting the Nitrogen Oxide Gases (산화질소 검출용 마이크로 가스센서 제조공정)

  • Kim, Jung-Sik;Yoon, Jin-Ho;Kim, Bum-Joon
    • Korean Journal of Materials Research
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    • v.23 no.6
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    • pp.299-303
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    • 2013
  • In this study, a micro gas sensor for $NO_x$ was fabricated using a microelectromechanical system (MEMS) technology and sol-gel process. The membrane and micro heater of the sensor platform were fabricated by a standard MEMS and CMOS technology with minor changes. The sensing electrode and micro heater were designed to have a co-planar structure with a Pt thin film layer. The size of the gas sensor device was about $2mm{\times}2mm$. Indium oxide as a sensing material for the $NO_x$ gas was synthesized by a sol-gel process. The particle size of synthesized $In_2O_3$ was identified as about 50 nm by field emission scanning electron microscopy (FE-SEM). The maximum gas sensitivity of indium oxide, as measured in terms of the relative resistance ($R_s=R_{gas}/R_{air}$), occurred at $300^{\circ}C$ with a value of 8.0 at 1 ppm $NO_2$ gas. The response and recovery times were within 60 seconds and 2 min, respectively. The sensing properties of the $NO_2$ gas showed good linear behavior with an increase of gas concentration. This study confirms that a MEMS-based gas sensor is a potential candidate as an automobile gas sensor with many advantages: small dimension, high sensitivity, short response time and low power consumption.

The fabrication of a micro pump with a flap valve and a phase change actuator (알루미늄 플랩 밸브와 상변화 구동 마이크로 펌프의 제작)

  • Lee, Sang-Woo;Sim, Woo-Young;Yang, Sang-Sik
    • Proceedings of the KIEE Conference
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    • 1998.11c
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    • pp.1023-1025
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    • 1998
  • This paper presents the fabrication of a micro pump consisting of a pair of Al f1ap wave and a phase change actuator. The phase change actuator is composed of a heater, a silicone rubber diaphragm and a working liquid chamber. The diaphragm is actuated by the evaporation and the condensation of the working liquid. The actuator pumps fluid through the valves. The micro pump is fabricated by the anisotropic etch, the boron deposition and the metal evaporation. The forward and the backward flow characteristics of the f1ap valves were obtained. Also, the flow rate of the micro pump has been measured. When the square wave input of 12 V, 60% duty ratio and 0.2 Hz is applied, the average flow rate is $0.15{\mu}{\ell}/sec$ for zero pressure difference.

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A study on the Thermopneumatic Actuator with Phase Change for Micro Pump (상변화를 이용한 열공압형 마이크로 펌프용 액츄에이터 성능에 관한 연구)

  • Park, S.;Hwang, J.Y.;Lee, S.;Kang, K.;Kang, H.;Jang, J.;Lee, H.;Kang, S.
    • 한국신재생에너지학회:학술대회논문집
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    • 2006.11a
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    • pp.425-428
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    • 2006
  • Recently, Direct Methanol Fuel Cell (DMFC) for portable devices has been received much attention because DMFC has a possibility of higher energy density than electrical batteries and smaller size than other fuel cells. This paper presents the fabrication and test of a thermopneumatic microactuator with a phase change for DMFC. A microactuator consists of an inlet an outlet a chamber, a heater and a sensor of resistance temperature detector(RTD). The micoractuator is fabricated by the spin-coating process, the lithograph process, the deep RIE process and so on. The total size of microactuator is $20{\times}20{\times}0.53mm^3$. When the current is applied, the heater heats liquid in chamber. As a result the liquid vaporizes. The response of temperature in the chamber was measured using thermocouple The changed temperature is $3^{\circ}C$ for 5 sec at 0.032W.

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A Study on the Development of Greenhouse Temperature Control System by Using Micro-computer (Micro-computer를 이용(利用)한 Greenhouse의 온도제어(溫度制御) System 개발(開發)에 관한 연구(硏究))

  • Suh, W.M.;Min, Y.B.;Yoon, Y.C.
    • Journal of Biosystems Engineering
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    • v.15 no.2
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    • pp.134-142
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    • 1990
  • This study was carried out for the development of greenhouse temperature control system by modifying an APPLE-II microcomputer attached with several interface systems. The interface systems are composed of 12 bit A/D converter, output port, multiplexer, time clock, etc. Under the operation of developed system, the greenhouse temperature was to be manipulated within the setting temperatures assumed to be appropriate for certain plant growth. The temperature control equimpents installed in the greenhouse are one-speed propeller type fan and two-phase electric heater, which are selectively started or stopped according to the control logic programmed in the control system. The results are summarized as follows : 1. The difference between two temperatures measured by the developed system and the self-recording thermometer calibrated with standard thermometer was less than $1^{\circ}C$. 2. When the temperature were measurd by 12 bit A/D converter and both electric heater and ventilation fan were controlled by developed ON/OFF logic, greenhouse temperature showed narrow fluctuation bands of less than $1^{\circ}C$ near the setting temperatures. 3. The temperature acquisition and control system developed in this study is expected to be applicable to environment control system such as greenhouse only by modifying the logic based on long term experimental data. 4. In order to reduce the measurement error and to increase the system control efficiency, it is recommended that continuous study should be carried out in the aspect of eliminating various systematic noises and improving the environmental control logic.

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Thermal Analysis of Highly Integrated Gas Sensor Array with Advanced Thermal Stability Properties (안정성이 개선된 고집적 가스센서 어레이 열해석)

  • 정완영;임준우;이덕동
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.40 no.12
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    • pp.17-23
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    • 2003
  • A sensor array (3${\times}$5$\textrm{mm}^2$ in diaphragm dimension) of 12 sensing clements with different operating temperatures was optimized with respect to thermal operation. This sensor array with single heater on a glass diaphragm over back-etched silicon bulk realizes a novel concept of a sensor array: an array of sensor clements operated at different temperatures can yield more information than single measurement. The proposed micro sensor array could provide well-integrated array structure because it had only single heater at the center of the diaphragm and used the various sensing properties of two kinds of metal oxide layers with various operating temperatures.

Design and Fabrication of Durable Micro Heater for Intelligent Mold System (금형온도 능동제어 시스템 적용을 위한 고 내구성 마이크로 히터의 설계 및 제작)

  • Noh Cheolyong;Kim Youngmin;Choi Yong;Kang Shinill
    • 정보저장시스템학회:학술대회논문집
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    • 2005.10a
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    • pp.26-30
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    • 2005
  • Stamper surface temperature is very critical in replicating the high density optical disc substrates using injection molding as the pit or land/groove patterns on the optical disc substrate have decreased due to the rapid increase of areal density. During the filling stage, the polymer melt in the vicinity of the stamper surfaces rapidly solidifies and the solidified layer generated during polymer filling greatly deteriorates transcribability and fluidity of polymer melt. To improve transcribability and fluidity of polymer melt, stamper surface temperature should be controlled such that the growth of the solidified layer is delayed during the filling stage. In this study, the effect of heating on replication process was simulated numerically. Then, an injection mold equipped with instant active heating system was designed and constructed to raise the stamper surface temperature over the glass transition temperature during filling stage of the injection molding. Also, the closed loop controller using the Kalman filter and the linear quadratic Gaussian regulator was designed. As a result, the stamper surface temperature was controlled according to the desired reference stamper surface temperature.

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The Characteristics of Flow Sensor Fabricated by MgO Medium Layer (MgO 매개층을 이용하여 제작된 유량센서의 특성)

  • Hong, Seok-Woo;Jang, Soo;Lee, Jong-Chun;Chung, Gwiy-Sang
    • Proceedings of the KIEE Conference
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    • 1999.07g
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    • pp.3319-3321
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    • 1999
  • Pt-RTD and Micro Heater was fabricated by using MgO as medium layer in order to improve adhesion of Pt thin-films to $SiO_2$ layer, MgO layer improved adhesion of Pt thin-films to $SiO_2$ layer without any chemical reactions to Pt thin-films under high annealing temperatures, In the analysis of properties of Pt-RTD, TCR value had 3927 $ppm/^{\circ}C$ and liner in the temperature range of $25-400^{\circ}C$. The temperature of Pt micro-heater had up to $400^{\circ}C$ with 1.5watts of the heating power. In investigating output characteristics of flow sensors output voltages increased as gas flow rate and its conductivity increased due to increase of heat-loss from sensor to external. Output voltage was 82 mV at $N_2$ flow rate of 2000sccm, heating power of 1.2W.

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