• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2004년도 ICCAS
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• pp.301-306
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• 2004

In this study, Dual servo mechanism with VCM(Voice Coil Motor) and PZT is designed for a high precision force and position control. We designed the VCM actuator and dual servo mechanism with leaf spring. VCM actuators, with their high linearity, simple structure, low weight, and high efficiency, are increasingly being used in micro-positioning applications. There are many kinds of VCM with a structure. VCM actuators are divided into two types by moving parts. One is moving magnet type and the other moving coil type. We described the properties of these two types of VCM. Design parameters of VCM are defined through the FEM simulation analysis of magnetic field and dynamic model of dual servo mechanism. These researches help to for decreasing loss in the air gap of VCM. We present dual servo mechanism is effective mechanism for a force control in hi h precision, properties of designed VCM.

• 한국레이저가공학회:학술대회논문집
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• 한국레이저가공학회 2006년도 춘계학술발표대회 논문집
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• pp.129-134
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• 2006

In this paper, actuator based on voice coil motor is designed and estimated to check the capability whether that system is in design specification or not. Design specification is moving range as $20{\times}20mm^2$ a along XY-axis in plane and maximizes bandwidth for high speed. The type of voice coil motor is selected with regarding design specification and minimizes the size of actuator. Flux density of designed voice coil motor is simulated. And PI controller is designed to maximize bandwidth of actuator. Finally, characteristic of designed actuator is simulated and that result reveals the validity of presented design.

• 한국전기전자재료학회논문지
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• 제22권1호
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• pp.1-6
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• 2009

Air core based transformers have been designed, simulated and fabricated by using micromachining process for the application of wireless power transmission with the range of frequency from 1 GHz to 20 GHz. Fabricated transformers are the types of solenoid transformers with primary and secondary coils. the size of fabricated transformer is $1.1{\times}1.5{\sim}2.15\;mm$ including ground shield. Transformers have been measured by dividing two groups based on the turns ratio between primary coil and secondary coil which are 1:1 transformers(the number of turns of primary coil and secondary coil: 3/3, 5/5, 7/7) and l:n transformers(the number of turns of primary coil and secondary coil: 3/3, 3/6, 3/9). As a result of the measurement, the lowest insertion loss of transformers ranged from 2 dB to 2.8 dB according to the number of turns between primary coil and secondary coil. And the lowest insertion loss from the transformers was measured at the frequency from 7 GHz to 11 GHz according to the number of turns between primary coil and secondary coil. Based on the measurement data from the microfabricated transformers, the transformer with the 3/3 turns in the primary coil and secondary coil showed best performance compared to others in terms of lowest insertion loss, lowest insertion loss frequency and bandwidth.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 G
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• pp.3328-3330
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• 1999

In this paper, the fabrication of a micro actuator with a micro electromagnet and an actuator diaphragm is presented. The micro electromagnet consists of a magnetic core and a micro inductive planar coil. The actuator diaphragm is the p+ silicon diaphragm on both sides of which magnetostrictive materials are deposited by sputtering. The micro electromagnet is fabricated by sputtering, evaporating, etching and electroplating. The magnetic flux density of the micro electromagnet is measured by using the gauss meter. The deflection of the actuator diaphragm is measured by using the laser vibrometer and optic microscope.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2005년도 춘계학술대회논문집
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• pp.551-554
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• 2005

This study uses a characteristic function to explain correlations between the objective function and design variables. Analysis of means and table of orthogonal array were carried out. The change of shape of diaphragm, thickness of diaphragm and voice coil weight based on the table of orthogonal array is made. Therefore this study carried to decide shape of diaphragm, voice coil weight and thickness of diaphragm for minimizing 1st natural frequency and maximizing 2nd natural frequency of diaphragm using design of experiments and characteristic function with constraints. we showed improved design factors that minimized 1st natural frequency and maximized 2nd natural frequency of diaphragm.

• 한국자기학회:학술대회 개요집
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• 한국자기학회 2007년도 The 1st International Symposium on Advanced Magnetic Materials
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• pp.313.1-313.1
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• 2007

• 대한의용생체공학회:의공학회지
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• 제29권2호
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• pp.99-106
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• 2008

To improve $B_1$ homogeneity in high field MRI, the RF power is applied to the transmit array coil elements sequentially in the time-multiplexed way. Since only a single coil element is activated in a time-multiplexing slot, the global standing wave formation in the human body is greatly suppressed. The time-multiplexing slot width is on the order of micro seconds, hence, high-order-harmonic slices can be placed far from the transmit coil and simultaneous multiple slice selection can be avoided. The $B_1$ homogeneities of a birdcage coil and an eight-channel transmit array coil have been compared through finite difference time domain simulations. The simulation results indicate that the proposed technique can reduce the peak-to-peak $B_1$ inhomogeneity down to one fourth of the transmission with a birdcage coil on the central plane of the human head model at 3 T. The mimicking experiments at 3 T, eight separate experiments with a single coil element activated and image reconstruction by combining the eight images, also show promising results. It is expected that the proposed technique has some advantages over other $B_1$ improving methods in real practice since simple RF switching circuitries are only necessary and electromagnetic coupling between the coil elements is out of concern in its realization.

• Bulletin of the Korean Chemical Society
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• 제28권2호
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• pp.193-199
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• 2007

Raman and fluorescence spectroscopies were employed to study the coil effects on the intermolecular structure of a rod-coil liquid crystalline (LC) oligomer, the esterification products of ethyl 4-[4'-oxy-4-biphenylcarbonyloxy]- 4'-biphenylcarboxylate with poly(propylene)oxides (PPO) (DP=12) and poly(ethylene oxide)s (PEO) (DP=12). Three different vibrational modes (carbonyl, aromatic C-H, and aromatic C=C) obtained from the Raman experiment at variable temperature indicate that PPO and PEO coils induce the hydrogen bonding in a different manner. Further information about the micro-environment around the mesogenic unit obtained by fluorescence excitation spectra of P12-4 (LC with PPO coil) and 12-4 (LC with PEO coil) suggests that the mesogenic unit of P12-4 is quite different from that of 12-4 in intermolecular structure. This study supports the results obtained only from Raman spectroscopy, providing more accurate information about the intermolecular structural changes of liquid crystalline polymers at a molecular level during the phase transitions.

• 마이크로전자및패키징학회지
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• 제14권4호
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• pp.57-61
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• 2007

PCB제작방법으로 제작한 4층 사각코일과 Nd 영구자석을 이용하여 초소형발전기를 제작하였다. 선폭이 $100{\mu}m$로 제작된 4층 사각코일의 크기는 두께가 1.6 mm 면적이 $1{\times}1cm^2$ 와 $2{\times}2cm^2$이다. 진동발생장치를 제작하고 코일위에서 Nd 영구자석을 수평으로 움직여 교류전압을 발생시켰다. 진동수를 0.5 Hz에서 7 Hz까지 변화시키면서 전압 값을 측정하였다. 5.5 Hz의 진동을 발생시켜 $1{\times}1cm^2$의 크기의 코일에서 62 mV의 교류전압이 발생하였고 $2{\times}2cm^2$의 크기의 코일에서 245 mV의 교류전압이 발생하였다. 7 Hz의 진동수에서 $2{\times}2cm^2$의 크기의 코일에서 320 mV의 교류전압이 발생하였고 채배정류회로를 이용할 때는 7 Hz의 진동수에서 400 mV의 직류전압이 발생하였다.

• 청정기술
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• 제9권3호
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• pp.101-105
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• 2003

MEMS(Micro Electro Mechanical System) 기술에서 실리콘 식각기술의 중요성으로 플라즈마 식각기술의 개발이 꾸준히 진행되고 있다. 본 연구에서는 ICP(Inductive Coupled Plasma)를 이용하여 플라즈마를 발생시켜, 이온에너지를 증가시키지 않고도 이온밀도를 높이고 이온입자들에 의한 식각의 방향성을 가할 수 있는 새로운 플라즈마 기술을 이용하였다. 이같이 플라즈마를 이용하여 실리콘웨이퍼를 식각하여 제조하는 MEMS 응용분야는 다양하나, 본 연구에서는 미생물배양에 응용할 수 있는 PCR(Polymerase Chain Reaction)장치 제작을 위한 식각에 이용하였다. Platen power, Coil power 및 Process pressure에 다양한 변화를 주어 각 변수에 따른 식각속도를 관찰하였다. 각 공정별 변수를 변화시킨 결과 Platen 12W, Coil power 500W, 식각/Passivation Cycle 6/7sec 일 경우 식각속도는 $1.2{\mu}m/min$ 이었고, sidewall profile은 $90{\pm}0.7^{\circ}$로 나타나 매우 우수한 결과를 보였다. 분 연구에 SF6를 식각에 이용하였으며 공정의 최적화를 통하여 사용량을 최소화하여환경영향이 최소가 될 수 있는 가능성이 있었다.