Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Fabrication of the Micromachined Transformer based on Air Core for the Application of Wireless Power Transmission

무선전력전송을 위한 에어 코어 기반의 트랜스포머 제작

  • Published : 2009.01.01
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Abstract

Air core based transformers have been designed, simulated and fabricated by using micromachining process for the application of wireless power transmission with the range of frequency from 1 GHz to 20 GHz. Fabricated transformers are the types of solenoid transformers with primary and secondary coils. the size of fabricated transformer is $1.1{\times}1.5{\sim}2.15\;mm$ including ground shield. Transformers have been measured by dividing two groups based on the turns ratio between primary coil and secondary coil which are 1:1 transformers(the number of turns of primary coil and secondary coil: 3/3, 5/5, 7/7) and l:n transformers(the number of turns of primary coil and secondary coil: 3/3, 3/6, 3/9). As a result of the measurement, the lowest insertion loss of transformers ranged from 2 dB to 2.8 dB according to the number of turns between primary coil and secondary coil. And the lowest insertion loss from the transformers was measured at the frequency from 7 GHz to 11 GHz according to the number of turns between primary coil and secondary coil. Based on the measurement data from the microfabricated transformers, the transformer with the 3/3 turns in the primary coil and secondary coil showed best performance compared to others in terms of lowest insertion loss, lowest insertion loss frequency and bandwidth.

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References

  1. 박정흠, '마이크로파 무선전력전송을 위한 렉테나 설계와 구현', 조명.설비학회논문지, 20권, 6호, p. 43, 2006 https://doi.org/10.5207/JIEIE.2006.20.6.043
  2. Cendoya. I., de. No. J., and Garsia-Alonso. A., 'A new methodology for the on-wafer characterization of RF integrated transformers', IEEE Transactions on Microwave Theory and Techniques, Vol. 55, p. 1046, 2007 https://doi.org/10.1109/TMTT.2007.895648
  3. Hsu, H.-M., Tsai, M.-C., and Huang, K.-H., 'An on-chip transformer in silicon-based technology', Journal of micromechanics and microengineering, Vol. 17, No. 8, p. 1504, 2007 https://doi.org/10.1088/0960-1317/17/8/012
  4. L. Gu and X. Li, 'High-performance CMOS-compatible solenoidal transformers with a concave-suspended configuration', IEEE Transactions on Microwave Theory and Techniques, Vol. 55, p. 1237, 2007 https://doi.org/10.1109/TMTT.2007.897853
  5. J. R. Long, 'Monolithic transformers for silicon RF IC design', IEEEJ. Solid-State Circuits, Vol. 35, No. 9, p. 1368, 2000 https://doi.org/10.1109/4.868049
  6. N. Fong, J. Plouchart, N. Zamdmer, J. Kim, K. Jenkins, C. Plett, and G. Tarr, 'High- performance and area-efficient stacked transformers for RF CMOS integrated circuits', in IEEE MTT-S Int. Microw. Symp. dig., Vol. 2, p. 967, 2003
  7. H. Jiang, Z. Li, and N. Tien, 'Reducing silicon-substrate parasitics of on-chip transformers', in IEEE Int. Microelectromech. Syst. Conf. Tech. Dig., p. 649, 2002 https://doi.org/10.1109/MEMSYS.2002.984354
  8. J. Y. Park, Y. S. Eo, and J. U. Bu, 'Surface micromachined RF inductors and transformers for advanced telecommunication applications', European Microwave Conference 2002, 32nd, p. 1, 2002 https://doi.org/10.1109/EUMA.2002.339433
  9. K. T. Ng, B. Rejaei, and J. N. Burghartz, 'Substrate effects in monolithic RF transformers on silicon', IEEE Trans. Microw. Theory Tech., Vol. 50, No. 1, p. 377, 2002 https://doi.org/10.1109/22.981289
  10. J.-W. Kim, E.-J. Yun, Y.-C. Jung, and C.-H. Hong, 'A study for solenoid-type RF chip inductor', J. of KIEEME(in Korean), Vol. 13. No. 10, p. 840, 2000
  11. J.-B. Lee and K.-H. Kim, 'Fabrication of micromachined on-chip high ratio air core solenoid inductor', J. of KIEEME(in Korean), Vol. 19, No. 8, p. 780, 2006 https://doi.org/10.4313/JKEM.2006.19.8.780
  12. H.-S. Kim, J.-S. Song, and Y.-W. Oh, 'Impedance properties of thin film inductors by fabricated wet etching method', J. of KIEEME (in Korean), Vol. 10, No. 8, p. 813, 1997
  13. R. P. Ribas, J. Lescot, J.-L. Leclercq, J. M. Karam, and F. Ndagihimana, 'Micromachined microwave planar spiral inductors and transformers', IEEE trans. Microwave Theory Tech, Vol. 48, p. 2415, 2000 https://doi.org/10.1109/22.898992
  14. J.-B. Yoon, Y.-S. Choi, B.-I. Kim, Y. S. Eo, and E. S. Yoon, 'CMOS-compatible surface- micromachined suspended-spiral inductors for multi-GHz silicon RF ICs', IEEE Electron Device Lett., Vol. 23, p. 591, 2002. https://doi.org/10.1109/LED.2002.803767
  15. T. Biondi, A. Scuderi, E. Ragonese, and G. Palmisano, 'Analysis and modeling of layout scaling in silicon integrated stacked transformers', IEEE Trans. Microw. Theory Tech., Vol. 54, No. 5, p. 2203, 2006 https://doi.org/10.1109/TMTT.2006.872788
  16. Martincic E., Figueras E., Cabruja E., Dufour-Gergam E., and Woytasik M., 'Magnetic micro-transformers realized with a flip-chip process', Journal of Micromechanic and Microengineering, p. 1455, 2004 https://doi.org/10.1088/0960-1317/14/9/009
  17. K. Chong and Y. Xie, 'High-performance on-chip transformers', IEEE Electron Device Lett., Vol. 26, No. 8, p. 557, 2005 https://doi.org/10.1109/LED.2005.851817
  18. Clark T. C. Nguyen, Linda P. B. Katehi, and Gabriel M. Rebeix, 'Micromachined devices for wireless communications', Proceeding of the IEEE, Vol. 86, No. 8, p. 1756, 1998 https://doi.org/10.1109/5.704281