• 반도체디스플레이기술학회지
• /
• 제19권4호
• /
• pp.28-33
• /
• 2020

Plasma etching process employs high density plasma to create surface chemistry and physical reactions, by which to remove material. Plasma chamber includes silicon-based materials such as a focus ring and gas distribution plate. Focus ring needs to be replaced after a short period. For this reason, there is a need to find materials resistant to erosion by plasma. The developed chemical vapor deposition processing to produce silicon carbide parts with high purity has also supported its widespread use in the plasma etch process. Silicon carbide maintains mechanical strength at high temperature, it have been use to chamber parts for plasma. Recently, besides the structural aspects of silicon carbide, its electrical conductivity and possibly its enhanced life time under high density plasma with less generation of contamination particles are drawing attention for use in applications such as upper electrode or focus rings, which have been made of silicon for a long time. However, especially for high purity silicon carbide focus ring, which has usually been made by the chemical vapor deposition method, there has been no study about quality improvement. The goal of this study is to reduce surface roughness and depth of damage by diamond tool grit size and tool dressing of diamond tools for precise dimensional assurance of focus rings.

• 한국정밀공학회지
• /
• 제14권12호
• /
• pp.143-152
• /
• 1997

The deflection of an end mill is very important in machining process and cutting simulation because it affects directly workpiece accuracy, cutting force, and chattering. In this study, the deflection of the end mill was studied both experimentally and by using finite element analysis. And the moment of inertia of cross sections of the helical end mill is calculated for the determination of the relation between geometry of radial cross section and rigidity of the tools. Using the Bernoulli-Euler beam theory and the concept of equivalent diameter, a deflection model is established, which includes most influences from tool geomety parameters. It was found that helix angle attenuates the rigidity of the end mill by the finite element analysis. As a result, the equivalent diameter is determined by tooth number, inscribed diameter ratio, cross sectional geometry and helix angle. Because the relation betweem equivalent diameter and each factor is nonlinear, neural network is used to decide the equivalent diameter. Input patterns and desired outputs for the neural network are obtained by FEM analysis in several case of end milling operations.

• 한국기계가공학회지
• /
• 제7권2호
• /
• pp.52-59
• /
• 2008

The objective of this study is to develop an automatic object changer unit to improve processing problems existed in the conventional horizontal machining center. To achieve this goal, this study designed a horizontal transfer as the second project continued to the first project that designed a upward and downward traverse unit. A horizontal traverse unit shows a symmetric structure and consists of frame, which consists of four unit tools, motor and reducer, which are fixed at a frame, operation unit with pinions, first traverse unit, and second traverse unit. Constraint conditions based on the operation mechanism with these elements were configured and obtained following results after modeling a model for a traverse motor. In the kinematic expression of sliding motion with one degree of freedom, the sliding motion is constrained. Also, the rack 3 installed at a frame is used to configure possible kinematic constraint conditions of the rack 2 according to the rolling motion of the pinion 2 in the first traverse unit. In addition, the moment of inertia that is a type of kinetic energy in a converted horizontal traverse unit in the side of the reducer can be applied to introduce the moment of inertia of a converted horizontal traverse unit in the side of the reducer by using the sum of kinetic energy in the rack and pinion, which is a part of the horizontal traverse unit. Also, the equation of motion of the converted upward and downward traverse unit in the side of the motor using the equation of motion of the motor. Furthermore, the horizontal traverse unit predetermines the mass of the first and second traverse unit and applied load including the radius and reduction ratio of the pitch circle in the pinion 1 and applied load to the rack 2. Then, a proper motor can be determined using several parameters in the upward and downward traverse unit in order to verify such predetermined specifications. In future studies later this study, a simulation that verifies the results of the previous two stages of studies using a finite element method.

• 실천공학교육논문지
• /
• 제13권2호
• /
• pp.327-332
• /
• 2021

교육용으로 사용되는 피삭재(소재)는 SM20C, Al6061, 아크릴 등의 소재를 사용한다. SM20C 소재는 탄소강으로서 자격증 시험 및 기능경기대회에서 많이 사용되지만 산업현장에서도 많이 사용된다. Al6061 소재는 탄소강에 비하여 경도가 낮아지고 전성(연성)이 강한 소재이기에 공구의 구성인선이 많이 발생하는 소재 라고 한다. 아크릴 소재를 이용하여 학생들에게 실습지도 하면 어느 부분에서 과다 절삭으로 인하여 진동이 발생하고 공구의 파손이 발생하는 소재이다. 이러한 과정에서 5축장비인 2NC헤드에게 가해지는 충격이 정밀도 제어에는 어느정도 영향을 줄 수 있는지 알아본다. 5축장비의 가장 취약한 부분은 AC축을 제어하는 헤드가 가장 약한 부분이라 할 수 있다. 이 부분의 정밀도 및 누적 공차가 발생할 경우 모든 제품의 정밀도가 떨어지는 현상이 발생한다. 따라서 2NC헤드의 핵심적인 부분, 스핀들 하우징은 Al7075 T6(미국 알코아사) 소재를 사용하고 전체 바디는 FCD450 (구상흑연주철) 사용하여 진행하였다. 이 두가지 소재에서 작용되는 진동 및 절삭 과정에서 힘을 극한조건에서 유한요소 해석으로 적용되는 값을 밝혀 내고자 해석을 진행하였다. 이러한 해석 데이터를 활용하여 학생들이 5축절삭 보다 5축 가공기의 구조를 보고 이해하는데 도움이 되기를 기대한다.

• 실천공학교육논문지
• /
• 제14권1호
• /
• pp.119-125
• /
• 2022

교육용으로 사용되는 피삭재(소재)는 SM20C, Al6061, 아크릴 등의 소재를 사용한다. SM20C 소재는 탄소강으로서 자격증 시험 및 기능경기대회에서 많이 사용되지만 산업현장에서도 많이 사용된다. Al6061 소재는 탄소강에 비하여 경도가 낮아지고 전성(연성)이 강한 소재이기에 공구의 구성인선이 많이 발생하는 소재라고 한다. 아크릴 소재를 이용하여 학생들에게 실습지도 하면 어느 부분에서 과다 절삭으로 인하여 진동이 발생하고 공구의 파손이 발생하는 소재이다. 이러한 과정에서 5축장비인 2NC헤드에게 가해지는 충격이 정밀도 제어에는 어느정도 영향을 줄 수 있는지 알아본다. 5축장비의 가장 취약한 부분은 AC축을 제어하는 헤드가 가장 약한 부분이라 할 수 있다. 이 부분의 정밀도 및 누적 공차가 발생할 경우 모든 제품의 정밀도가 떨어지는 현상이 발생한다. 따라서 2NC헤드의 핵심적인 부분, 스핀들 하우징은 Al7075 T6(미국 알코아사) 소재를 사용하여 진행하였다. 이 소재에서 작용되는 진동 및 절삭 과정에서 힘을 극한조건에서 유한요소 해석으로 적용되는 값을 밝혀 내고자 해석을 진행하였다. 이러한 해석 데이터를 활용하여 학생들이 5축절삭 보다 5축가공기의 구조를 보고 이해하는데 도움이 되기를 기대한다.

• 대한안전경영과학회지
• /
• 제15권4호
• /
• pp.179-184
• /
• 2013

An accident from machine work is often fatal to the worker. This accident is mostly preventable through perfect process jig. In case of this machine work, however, the disaster frequently occurred because of the design which is not considered the beginning of product design, post-process and mass process of production. As for sand casting method, this has the merits of the production; the product is easily produced by manual labor. On the other hand, this method has the demerits of a bigger dimensional error contrary to other mass process of production. When the sand casting product is in machine work, there are various problems such as unsafe fix and excessive cutting, product desorption and rapid life depreciation of equipment and tools. Considering the characteristics of sand casting method, it is accepted as difficulty to improve the problems. In this study, it suggests shell mold method for mold instead of the machine work after the sand casting of the circle shape container product. And the surface accomplishes the following average of surface roughness Ra$9.94{\mu}m$ of machine work with the casting of flask mold by shell mold method. In accordance with the simplification of processing process and reducing the average thickness variation by mass production of product with detailed appearance, it has a good influence on safety accident prevention caused by production and damaged product. It is confirmed that making higher degree of size precision of all machine work product is possible to increase the safety and productivity, reduce the processing process and improve environment.

• 대한기계학회논문집B
• /
• 제35권3호
• /
• pp.331-336
• /
• 2011

가스터빈 회전익이나 고정익 에어포일이 지닌 3 차원 곡면형상의 복잡성은 제조산업뿐만 아니라 재생정비 공정조차 어렵게 만드는 요인이다. CNC 기반기술을 이용한 공작기계와 공정 관련 프로그램들은 1990 년대부터 발달하기 시작한 컴퓨터 기술 덕분에 급속히 개발되면서 가스터빈 분야로 그 응용범위를 넓혀 나가고 있다. 특히 적응형 기능을 겸비한 5 축 동기 제어형 생산장비들은 유연한 공정능력과 손실된 부위의 형상 정보를 결정하는데 탁월한 성능을 보이고 있다. 8 축 동기제어가 가능하도록 구비된 로봇형 공정시스템은 매우 강력한 공정절차 표준화를 이룰 수 있게 할 뿐만 아니라 높은 생산성도 가져다 준다. 이 논문에서는 가스터빈 산업에서 CNC 기반기술의 응용현황을 검토하고, 부품 제조산업과 재생정비 산업의 공정비교와 개발사례를 통해 향후 전망을 제시한다.

• 한국재료학회:학술대회논문집
• /
• 한국재료학회 2011년도 춘계학술발표대회
• /
• pp.58.1-58.1
• /
• 2011

WC-Co and other similar cemented carbides have been widely used as hard materials in industrial cutting tools and as mould metals; and a number of techniques have been applied to improve its microstructural characteristics, hardness and ear resistance. Cobalt is used primarily to facilitate liquid phase sintering and acts as a matrix, i.e. a cementing phase between WC grains. A uniform distribution of metal phase in a ceramic is beneficial for improved mechanical properties of the composite. WC-Co, starting from initial powders, is vastly used for a variety of machining, cutting, drilling, and other applications because of its unique combination of high strength, high hardness, high toughness, and moderate modulus of elasticity, especially with fine grained WC and finely distributed cobalt. In this study, that started with two different compositions of initial powders, WC-7.5wt%Co and WC-12wt%Co with initial powder size being 1~3 ${\mu}m$, magnetic pulsed compaction followed by subsequent vacuum sintering were carried out to produce consolidated preforms. Magnetic Pulsed Compaction (MPC), a very short duration (~600 ${\mu}s$), high pressure (~4 Gpa), high-density preform molding method was used with varied pressure between 0.5 and 3.0 Gpa, in order to reach an initial high density that would help improve the sintering behavior. For both compositions and varied MPC pressure, before and after sintering, changes in microstructural behavior and mechanical properties were analyzed. With proper combination of MPC pressure and sintering, samples were obtained with better mechanical properties, densification and microstructural behavior, and considerably improved than other conventional processes.

• Design & Manufacturing
• /
• 제14권1호
• /
• pp.42-48
• /
• 2020

Titanium alloy has been in the spotlight as a core material in high-tech industries that require high strength and light weight because it has excellent strength and corrosion resistance and strength is higher than that of steel. Therefore, in various industries, existing steel products are intended to be replaced with titanium alloys. Titanium alloys can cause cutting tool breakage during cutting, and heat generated during cutting does not dissipate, accumulates in tools and workpieces, resulting in large wear and tear on thin workpieces. In addition, since titanium alloy is a metal with high chemical activity, the wear of the tool becomes more severe when the cutting speed is high, so machining of titanium bolt through cutting is very disadvantageous in terms of productivity. Therefore, the production of bolts using titanium alloys is being produced through a forging process to improve productivity and product quality. In this paper, hot forging molding analysis was performed on bolts used for fastening automobile parts using Ti-6Al-4V alloy, which is the most commonly used titanium alloy.

• 한국전기전자재료학회논문지
• /
• 제29권10호
• /
• pp.665-670
• /
• 2016

Prevailing dissemination of machine tools and cutting technology have caused drastic developments of high speed dry machining with work materials of high hardness, and demands on the high-hardness-materials with high efficiency have become increasingly important in terms of productivity, cost reduction, as well as environment-friendly issue. Addition of Si to TiAlN has been known to form nano-composite coating with higher hardness of over 30 GPa and oxidation temperature over $1,000^{\circ}C$. However, it is not easy to add Si to TiAlN by using conventional PVD technologies. Therefore, Ti-Al-Si-N have been prepared by hybrid process of PVD with multiple target sources or PVD combined with PECVD of Si source gas. In this study, a single composite target of Ti-Al-Si was prepared by powder metallurgy of MA (mechanical alloying) and SPS (spark plasma sintering). Properties of he resulting alloying targets were examined. They revealed a microstructure with micro-sized grain of about $1{\sim}5{\mu}m$, and all the elements were distributed homogeneously in the alloying target. Hardness of the Ti-Al-Si-N target was about 1,127 Hv. Thin films of Ti-Al-Si-N were prepared by unbalanced magnetron sputtering method by using the home-made Ti-Al-Si alloying target. Composition of the resulting thin film of Ti-Al-Si-N was almost the same with that of the target. The thin film of Ti-Al-Si-N showed a hardness of 35 GPa and friction coefficient of 0.66.