• Title/Summary/Keyword: low temperature scanning electron microscopy

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Effects of Sputtering pressure on preferred Orientation of Shielding NbTi Thin Film by RF Magnetron Sputtering (RF 마그네트론 스퍼터링법으로 제조된 차폐용 NbTi박막의 우선방향에 미치는 스퍼터링 압력의 영향)

  • Kim, Bong-Seo;Woo, Byung-Chul;Byun, Woo-Bong;Lee, Hee-Woong
    • Proceedings of the KIEE Conference
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    • 1995.07c
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    • pp.1098-1101
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    • 1995
  • NbTi thin films were prepared on Si wafer and Cu substrate by rf magnetron sputtering in the range of sputtering pressure $3{\times}10^{-2}$torr to $3{\times}10^{-4}$torr at room temperature. The influence of sputtering pressure and substrate type on crystallographic orientation and morphology of NbTi thin films was investigated by using X-ray diffraction(XRD) and scanning electron microscopy(SEM), respectively. And the effect of crystallographic orientation and morphology of NbTi film on electromagnetic behaviors was estimated by measuring critical current in various applied magnetic field. The film morphology changed from porous structure consisting of tapered crystallites to densely deposited film decreasing with sputtering pressure. The change of crystallographic orientation with the sputtering pressure and rf power was calculated from the texture coefficient of(002) plane based on XRD patterns. It was found that a change of texture coefficient of(002) plane increased with decreasing sputtering pressure. From observation of critical current in various applied magnetic field, we have identified that the change of critical current abruptly decrease applying with magnetic field and NbTi film produced at high sputtering pressure does not exhibit superconductivity but at low sputtering pressure shows superconductivity.

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LTCC기판상에 성장시킨 PZT박막의 열처리 특성연구

  • Lee, Gyeong-Cheon;Hwang, Hyeon-Seok;U, Hyeong-Gwan;Lee, Tae-Yong;Heo, Won-Yeong;Sim, Deung;Song, Jun-Tae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.11a
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    • pp.117-117
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    • 2009
  • Recently, low temperature co-fired ceramic (LTCC) technology has gained a remarkable application potential in sensors, actuators and microsystems fields. In this study, we investigated the effects of annealing treatment on the electrical properties of $Pb(ZrTi)O_3$ (PZT) thin films deposited on LTCC substrate. The LTCC substrates with thickness of 400 ${\mu}m$ were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The PZT thin films were deposited on Au/LTCC substrates by RF magnetron sputtering method. Then, the change of the crystallization of the films was investigated under various annealing temperatures. The results showed that the crystallization of the films were enhanced as increasing annealing temperatures. The film, annealed at $700^{\circ}C$, 3min, was well crystallized in the ferovskite structure. The structural variation of the films were analyzed by using X-Ray diffraction (XRD) and field emmision scanning electron microscopy (FESEM).

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A Study on the Characteristic of Weld Joint and Tensile Fracture of SUS304 and Cu High-Speed Dissimilar Lap Welds by Single Mode Fiber Laser (싱글모드 파이버 레이저를 이용한 SUS304와 Cu의 고속 겹치기 용접에서 접합부 및 인장시험 파단부의 특성에 관한 연구)

  • Lee, Su-Jin;Kim, Jong-Do;Katayama, Seiji
    • Journal of Welding and Joining
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    • v.32 no.6
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    • pp.56-63
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    • 2014
  • To develop and understand dissimilar metals joining of Stainless steel and Copper, ultra-high speed laser lap welding was studied using single mode fiber laser in this study. SUS304 and Cu have large differences in materials properties, and Cu and Fe have no intermetallic compounds by typical binary phase of Cu and Fe system. In this study, ultra-high speed lap welds of SUS304 and Cu dissimilar metals using single-mode fiber laser was generated, and weldability of the weld fusion zone was evaluated using a tensile shear test. To understand the phenomenon of tensile shear load, weld fusion zone of interface weld area and fracture parts after tensile shear test were observed using scanning electron microscopy (SEM) and energy dispersive X-ray spectroscopy (EDX) analysis system. And it was confirmed that Cu was easily melting and penetrating in the grain boundaries of SUS304 because of low melting temperature. And high thermal conductivity of copper occurred dissipate heat energy rapidly. These properties cause the solidification cracking in weld zone.

WETTING PROPERTIES AND INTERFACIAL REACTIONS OF INDIUM SOLDER

  • Kim, Dae-Gon;Lee, Chang-Youl;Hong, Tae-Whan;Jung, Seung-Boo
    • Proceedings of the KWS Conference
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    • 2002.10a
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    • pp.475-480
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    • 2002
  • The reliability of the solder joint is affected by type and extent of the interfacial reaction between solder and substrates. Therefore, understanding of intermetallic compounds produced by soldering in electronic packaging is essential. In-based alloys have been favored bonding devices that demand low soldering temperatures. For photonic and fiber optics packaging, m-based solders have become increasingly attractive as a soldering material candidate due to its ductility. In the present work, the interfacial reactions between indium solder and bare Cu Substrate are investigated. For the identification of intermetallic compounds, both Scanning Electron Microscopy(SEM) and X-Ray Diffraction(XRD) were employed. Experimental results showed that the intermetallic compounds, such as Cu$_{11}$In$_{9}$ was observed for bare Cu substrate. Additionally, the growth rate of these intermetallic compounds was increased with the reaction temperature and time. We found that the growth of the intermetallic compound follows the parabolic law, which indicates that the growth is diffusion-controlled.d.

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Development of a Pad Conditioning Method for ILD CMP using a High Pressure Micro Jet System

  • Lee, Hyo-Sang;DeNardis, Darren;Philipossian, Ara;Seike, Yoshiyuki;Takaoka, Mineo;Miyachi, Keiji;Doi, Toshiro
    • Transactions on Electrical and Electronic Materials
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    • v.8 no.1
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    • pp.26-31
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    • 2007
  • The goal of this study is to determine if High Pressure Micro Jet (HPMJ) conditioning can be used as a substitute for, or in conjunction with, conventional diamond pad conditioning. Five conditioning methods were studied during which 50 ILD wafers were polished successively in a 100-mm scaled polisher and removal rate (RR), coefficient of friction (COF), pad flattening ratio (PFR) and scanning electron microscopy (SEM) measurements were obtained. Results indicated that PFR increased rapidly, and COF and removal rate decreased significantly, when conditioning was not employed. With diamond conditioning, both removal rate and COF were stable from wafer to wafer, and low PFR values were observed. SEM images indicated that clean grooves could be achieved by HPMJ pad conditioning, suggesting that HPMJ may have the potential to reduce micro scratches and defects caused by slurry abrasive particle residues inside grooves. Regardless of different pad conditioning methods, a linear correlation was observed between temperature, COF and removal rate, while an inverse relationship was seen between COF and PFR.

Effects of annealing under oxygen atmosphere of PZT thin films on LTCC substrates (LTCC 기판위에 성장시킨 PZT 박막의 열처리시 $O_2$가 미치는 영향)

  • Lee, Kyung-Chun;Hur, Won-Young;Hwang, Hyun-Suk;Lee, Tae-Yong;Lee, Jong-Duk;Song, Joon-Tae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2010.06a
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    • pp.205-205
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    • 2010
  • Recently, low temperature co-fired ceramic (LTCC) technology is widely used in sensors, actuators and microsystem fields because of its very good electrical and mechanical properties, high stability as well as possibility of making 3D micro structures. In this study, we investigated the effects of on $O_2$ annealing treatment on the electrical properties of Pb(ZrTi)$O_3$ (PZT) thin films deposited on LTCC substrate. The LTCC substrates with thickness of $400\;{\mu}m$ were fabricated by laminating 4 green tapes which consist of alumina and glass particle in an organic binder. The PZT thin films were deposited on Au / LTCC substrates by RF magnetron sputtering method. The change of the crystallization of the films were investigated under various atmosphere. The structural variation of the films were analyzed by using X-Ray diffraction (XRD) and field emission scanning electron microscopy (FESEM) and secondary ion mass spectrometry (SIMS).

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GROWTH OF CARBON NANOTUBES ON GLASS BY MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION (마이크로웨이브 플라즈마 화학기상증착장비를 사용한 유리기판상의 탄소나노튜브의 합성)

  • Lee, Jae-Hyeoung;Choi, Sung-Hun;Choi, Won-Seok;Hong, Byung-You;Kim, Jeong-Tae;Lim, Dong-Gun;Yang, Kea-Joon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.11a
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    • pp.99-100
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    • 2005
  • We have grown carbon nanotubes (CNTs) with a microwave plasma chemical vapor deposition (MPECVD) method, which has been regard as one of the most promising candidates for the synthesis of CNTs due to the vertical alignment, the low temperature and the large area growth. We use methane ($CH_4$) and hydrogen ($H_2$) gas for the growth of CNTs. 60 nm thick Ni catalytic layer were deposited on the TiN coated glass substrate by RF magnetron sputtering method. In this work, we report the effects of pressure on the growth of CNTs. We have changed pressure of processing (10 $\sim$ 20 Torr) deposition of CNTs. SEM (Scanning electron microscopy) images show diameter, length and cross section state CNTs.

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The Physicochemical Characteristics of PET Fabrics Treated with Low Temperature Glow Plasma and Atmospheric Corona Discharge (진공 저온 플라즈마와 대기압 코로나 방전가공 PET 직물의 물리화학적 특성)

  • Ma, Jaehyuk;Yang, Jinyoung;Koo, Kang;Yang, Hyun A;Park, Youngmi
    • Textile Coloration and Finishing
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    • v.26 no.3
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    • pp.201-208
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    • 2014
  • The high value-added functionality for synthetic fiber can be considered through a plasma enhanced treatment. In this study, PET(Polyethyleneterephthalate) was treated with a glow plasma and corona treatment. Surface characteristics of treated fabric were investigated using electron scanning microscopy(SEM), contact angle, X-ray photoelectron spectroscopy(XPS), tensile and adhesion strength. It was found that the contact angle showed $85.5^{\circ}$ for untreated fabric, $0^{\circ}$ for plasma and corona treatment at the condition of 200W for 7min. By XPS analysis, atomic ratio of O 1s/C 1s was increased from 0.27 to 0.43 by glow plasma and 0.27 to 0.41 by corona treatment at 200W for 7min, respectively. Glow plasma and corona treatment did not significantly change the tensile strength of PET fabric. Adhesion strength showed a substantial enhancement for the surface treated with the glow plasma, while corona treatment was adversely affected.

Adhesion improvement between metal and ceramic substrate by using ISG process (ISG법에 의한 금속과 세라믹기판과의 밀착력 향상)

  • 김동규;이홍로;추현식
    • Journal of the Korean institute of surface engineering
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    • v.32 no.6
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    • pp.709-716
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    • 1999
  • Ceramic is select for an alternative substrate material for high-speed circuits due to its low-thermal expansion. As, in this study, ceramic was prepared by ISG (interlayer sol-gel) process using metal salts and a metal alkoxide as the starting materials. Generally ceramic substrate is used electroless copper plating for the metallization. But it has been indicate weakely the adhesion strength between the substrate and copper layer. Therefore, this research, using the ISG process on the preparation of homogeneous and possible preparation at law temperature fabricated sol solution. Using of the dip coating method was coated for the purpose of giving the anchoring effect on the coating layer and enhancing the adhesion strength between the $Al_2$O$_3$ substrate and copper layer. This study examined primary the characteristic of the sol making condition and differential thermal analysis (DTA) X-ray diffraction (XRD) were mearsured to identify the crystal phase of heat treatment specimens. The morphology of the coated films were studied by scanning electron microscopy(SEM). As a resurt, XRD analysis was obtained patterns of $\alpha$-cordierite after heat-treatment about 2 hours at $1000^{\circ}C$. SEM analysis could have seen a large number of voids on coated film. The more contants of$ Al_2$$O_3$ Wt% was increased the more voids was advanced. Peel adhesion strength has a maximum in the contants of the TEOS:ANE of 1:0.7 mole%. In this case, adhesion strength has been measured 1150gf, peel adhesion strength were about 10 times more than uncoated of the ceramics film.

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Improvement in availability and stability of to 106w by inclusion with $\beta-cyclodextrin$ and its derivatives ($\beta-cyclodextrin$ 및 유도체의 포접체 형성에 의한 LG 106W의 유용성 및 안정성 개선에 관한 연구)

  • 정성훈;이천구;조완구;강세훈
    • Journal of the Society of Cosmetic Scientists of Korea
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    • v.25 no.1
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    • pp.120-136
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    • 1999
  • A newly synthesized polyhydroxy aromatic compound(LG 106w) has good skin lightening effect. Inclusion complexation of LG 106w with $\beta$-cyclodextrin and its hydroxypropyl and dimethyl derivatives was studied by the solubility method, scanning electron microscopy and differential thermal analysis. A relationship between host and guest was clearly reflected in the magnitude of the stability constant(DM-$\beta$> HP-$\beta$>$\beta$ -cyclodextrin). Formulation problems, which resulted from its very low solubility in aqueous solution, were resolved by the inclusion formation. LG 106W from inclusions is much more water-soluble than pure one. The improvement of pH and temperature stability correlated with the increased solubility was also observed. Inclusion complex of LG 106w had similar activity to pure LG 106w on the inhibition of melanin synthesis in B-16 melanoma cell but showed lower irritation on cultured cell test in vitro. According to the results, cyclodextrins might be one of the reliable candidates for improving the availability of LG 106w.

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