• 제목/요약/키워드: liquid carbon dioxide

검색결과 229건 처리시간 0.026초

초임계 유체와 공용매를 이용한 미세전자기계시스템 웨이퍼의 식각, 세정을 위한 최적공정조건 (Optimum process conditions for supercritical fluid and co-solvents process for the etching, rinsing and drying of MEMS-wafers)

  • 노성래;유성식
    • 반도체디스플레이기술학회지
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    • 제16권3호
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    • pp.41-46
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    • 2017
  • This study aims to select suitable co-solvents and to obtain optimal process conditions in order to improve process efficiency and productivity through experimental results obtained under various experimental conditions for the etching and rinsing process using liquid carbon dioxide and supercritical carbon dioxide. Acetone was confirmed to be effective through basic experiments and used as the etching solution for MEMS-wafer etching in this study. In the case of using liquid carbon dioxide as the solvent and acetone as the etching solution, these two components were not mixed well and showed a phase separation. Liquid carbon dioxide in the lower layer interfered with contact between acetone and Mems-wafer during etching, and the results after rinsing and drying were not good. Based on the results obtained under various experimental conditions, the optimum process for treating MEMS-wafer using supercritical CO2 as the solvent, acetone as the etching solution, and methanol as the rinsing solution was set up, and MEMS-wafer without stiction can be obtained by continuous etching, rinsing and drying process. In addition, the amount of the etching solution (acetone) and the cleaning liquid (methanol) compared to the initial experimental values can be greatly reduced through optimization of process conditions.

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이산화탄소 해양격리 심해주입시스템의 초기설계 (Preliminary Design of a Deep-sea Injection System for Carbon Dioxide Ocean Sequestration)

  • 최종수;홍섭;김형우;여태경
    • 한국해양공학회:학술대회논문집
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    • 한국해양공학회 2006년 창립20주년기념 정기학술대회 및 국제워크샵
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    • pp.265-268
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    • 2006
  • The preliminary design of a deep-sea injection system for carbon dioxide ocean sequestration is performed. Common functional requirements for a deep-sea injection system of mid-depth type and lake type are determined, Liquid transport system, liquid storage system and liquid injection system are conceptually determined for the functional requirements. For liquid injection system, the control of flow rate and temperature of liquid $CO_2$ in the injection pipe is needed in the view of internal flow. The function of depressing VIV(Vortex Induced Vibration) is also required in the view of dynamic stability of the injection pipe. A case study is performed for $CO_2$ sequestration capacity of 10 million tons per year. In this study, the total number of injection ships, the flow rate of liquid $CO_2$ and the configuration of a injection pipe are designed. The static structural analysis of the injection pipe is also performed. Finally the preliminary design of a deep-sea injection system is proposed.

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전이금속 촉매를 이용한 이산화탄소와 메탄의 개질 특성 (Characteristics of methane reforming with carbon dioxide using transition metal catalyts)

  • 장현태
    • 한국산학기술학회논문지
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    • 제22권2호
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    • pp.644-650
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    • 2021
  • 본 연구는 지구 온난화의 주요 원인인 이산화탄소를 이용하여 메탄의 개질반응 특성을 수행하였다. 이산화탄소와의 메탄 분해 반응을 전이금속 촉매인 주석을 사용하여 수행되었으며, 주석의 분해 반응성은 니켈, 철과 같은 전이 금속보다 낮으며, 대부분의 분해 반응은 고체 상태 촉매하에 수행된다. 반면에 주석의 녹는점은 505.03K로 액상 촉매하에서 분해가 발생된다. 주석을 사용하는 경우 액상으로 반응하며 메탄이 분해되어 생성되는 고체상 탄소가 촉매에 침적되어 비활성화되는 것을 것을 방지하는 장점이 있다. 이산화탄소를 사용하여 메탄을 분해하는 경우 일산화탄소와 수소를 생성한다. 촉매의 활성과 수명을 높이기 위해 Ni를 사용한 경우 촉매 활성이 향상되었다. 본 연구에서는 과잉습식함침법을 이용하여 촉매를 합성하였으며, 반응 온도, 공간 속도에 따른 활성과 촉매 재생 가능성을 타진하였다. 탄소가 침적된 주석의 촉매 재생 온도는 1023 K로 나타났으며, 니켈을 조촉매로 사용하고 물을 공급하므로써 반응성이 향상되는 것으로 나타났다.

팽나무버섯 액체 종균 배양시 이산화탄소 농도와 균사 생장량 변화 (Changes in the CO2 and amount of mycelium growth of the liquid spawn on Flammulina velutipes)

  • 심규광;유영진;구창덕;김영석;김명곤
    • 한국버섯학회지
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    • 제10권1호
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    • pp.3-8
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    • 2012
  • 본 연구에서는 효율적으로 팽나무버섯 액체종균을 생산할 때에 폭기(공기방울을 매우 작게하여) 배양의 효과에 대하여 액체 배지 내 이산화탄소 농도와 잔류 유리당 함량 변화로써 측정하였다. 이산화탄소 농도는 폭기 진행 중 배양용기의 배출구에서 측정하였다. 액체종균은 폭기 배양 3일째에 균사생장이 급격히 증가하였으며, 이산화탄소 농도($CO_2$)도 급증하였으나 폭기 5일째에는 정점을 나타낸 후 감소하였다. 액체배지 내 환원당은 배양 7일째까지 일정 속도로 감소되었고 이후에는 검출되지 않았고, 침전 균사체의 중량은 3일째 이후 비슷한 수준으로 유지되었다. 총질소(T-N)량은 폭기 11일째까지 일정한 수준으로 감소되었다. 유리당의 함량은 폭기 배양 7일째에 가장 낮았으므로 폭기 배양 6~7일째에 접종원으로 사용하는 것이 가장 효과적인 것으로 생각되었다. 그리고 액체종균의 배양 중에 배출구에서의 이산화탄소 농도 측정은 저비용으로 액체종균의 균사배양 정도를 추정하는 간이 지표로 이용할 수 있을 것으로 판단되었다.

GMAW의 금속이행에 영향을 주는 변수연구를 위한 계측 시스템과 조건해석 (Study of variables influencing on the metal transfer in GMAW)

  • 이세헌
    • Journal of Welding and Joining
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    • 제11권1호
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    • pp.73-79
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    • 1993
  • The phenomenon of metal transfer has been investigated for different transfer modes using a digital high speed motion analyzer and an arc shadow-graphing system based on a laser source and related optical system. It was observed that the pinch instability phenomenon did not occur for the globular transfer mode, since the liquid globule was then spherical rateher than a cylindrical liquid bar. On increasing the ratio of carbon dioxide to argon, the transition current from globular to spray transfer generally increased, but it is interesting that the transition was observed to occur at the lowest current in a 5% CO$_{2}$-95% argon gas mixture. For pure carbon dioxide and helium shielding gases, the drop frequency increased slowly with increasing current. At high currents or an argon based shielding gas, the length of liquid bar decreased as the carbon dioxide content increased. The acceleration of a droplet within the arc was determined using the gas drag force theory and was found to be greater than the experimental results.

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Solubility of Carbon Dioxide in Strongly Basic Ionic Liquid

  • Sung, Jun-Kyung;Kim, Sung-Hyun;Cheong, Min-Serk;Baek, Il-Hyun
    • Bulletin of the Korean Chemical Society
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    • 제31권10호
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    • pp.2797-2800
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    • 2010
  • For the purpose of developing advanced new absorbents for carbon dioxide, ionic liquids (ILs) are considered as alternative materials due to their superior properties to conventional organic solvents. Since low $CO_2$ solubility in ionic liquids is a major concern for their application as absorbents, it is essential to focus on improving $CO_2$ absorbing capability of ILs. In this paper, strongly basic ionic liquids, namely [$C_n$-mim]OPh (n = 2, 4, 6), have been synthesized and studied over a wide range of temperature and pressure changes. [$C_n$-mim]OPh can be easily synthesized from corresponding [$C_n$-mim]Cl and sodium phenoxide and has been found to be good $CO_2$ absorbents.

액체 이산화탄소 해양 고정화에 대한 수치적 연구 (Numerical Study on the Ocean Sequestration of Liquid $CO_2$)

  • 김남진;천원기;김종보
    • 설비공학논문집
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    • 제18권3호
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    • pp.270-278
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    • 2006
  • The idea of carbon dioxide sequestration in the ocean is proposed to be an effective mitigation strategy to counteract potential global warming due to the greenhouse effect. Therefore, in the present study, calculations of the dissolution behavior of carbon dioxide when liquid carbon dioxide is released at 1,000m and 1,500 m in depth. by fixed pipeline are peformed. The results show the liquid $CO_2$ injected in the ocean becomes $CO_2$ bubble at between 350m and 500m in depth, and the injection from a moving ship is a more effective method of dissolution than through a fixed pipeline. It so also noted that the ultimate plume generated from $CO_2$ bubbles repeats expansion and shrinking due to the peeling from a fixed pipeline.

이산화탄소와 프로판 혼합냉매의 기상-액상 평형 (Vapor-Liquid Equilibria of Carbon Dioxide and Propane Mixtures)

  • 김주혁;김민수;김만회
    • 설비공학논문집
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    • 제18권11호
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    • pp.859-866
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    • 2006
  • This paper presents the vapor-liquid equilibrium (VLE) data measured for carbon dioxide and propane mixtures. Their mixtures were considered as promising alternative refrigerants due to good thermophysical properties and negligible environmental impact. The isothermal VLE data were measured at eight temperatures ranging from 253.15 to 323.15 K in the circulation type equipment with a view cell. The binary system was found to be a zeotropic mixture in the tested temperature range and could be correlated with sufficient accuracy by using the Peng-Robinson equation of state (PR EoS) with the van der Waals one fluid mixing rule. A comparison with published experimental VLE data has been carried out by means of the PR equation of state. In addition, the phase behaviors of carbon dioxide and propane mixtures were analyzed based on the measured VLE data.

Effect of the rheological properties of aqueous xanthan gum solution on chemical absorption of carbon dioxide with diisopropanolamine

  • Son, Young-Sik;Park, Sang-Wook;Park, Dae-Won;Lee, Jae-Wook
    • Korea-Australia Rheology Journal
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    • 제21권2호
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    • pp.109-117
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    • 2009
  • Absorption rate of carbon dioxide was measured in the aqueous xanthan gum (XG) solution in the range of 0~0.15 wt% containing diisopropanolamine (DIPA) of $0{\sim}2\;kmol/m^3$ in a flat-stirred vessel with an impeller of 0.05 m and agitation speed of 50 rpm at $25^{\circ}C$ and 101.3 kPa. The volumetric liquid-side mass transfer coefficient ($k_La$) of $CO_2$, which was obtained by the measured physical absorption rate, was correlated with the viscosity and the elastic behavior of XG solution such as Deborah number as an empirical formula. The chemical absorption rate of $CO_2$ ($R_A$), which was estimated by the film theory using the measured $k_La$ and the known kinetics of reaction between $CO_2$ and DIPA, was compared with the measured rate. The aqueous XG solution with elastic property of non-Newtonian liquid made $k_La$ and $R_A$ increased compared with Newtonian liquid based on the same viscosity of the solution.

고압 저등급탄-이산화탄소 슬러리 분무특성에 관한 연구 (Spray Characteristics of a Coal Slurry with Liquid Carbon Dioxide)

  • 김창연;김학덕;송주헌
    • 한국수소및신에너지학회논문집
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    • 제26권4호
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    • pp.357-362
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    • 2015
  • There is potential method to utilize the liquid carbon dioxide ($LCO_2$) in coal gasification plants. The $LCO_2$ could be used to effectively transport coal particles instead of conventional carrier such as liquid water ($H_2O$) particularly in wet-fed gasifier. However, there is a lack of fundamental study on the atomization behavior of $LCO_2$ coal slurry under high pressure condition. In this study, the flashing spray characteristics of a coal mixture with $LCO_2$ was examined during a throttling process by using a flow visualization system. The spray of coal water slurry which is in the Rayleigh-type break up mode was significantly different. This difference indicates that the coal water slurry did not effectively transport the coal, as compared to $LCO_2$ coal slurry.