• 한국정보디스플레이학회:학술대회논문집
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• 2006.08a
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• pp.544-547
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• 2006

In this study, the characteristics of large area internal linear ICP sources of $1,020mm{\times}920mm$ (substrate area is $880mm{\times}660mm$) were investigated using a multiple linear antennas with U-type parallel connection. Using the multiple linear antennas with U-type parallel connection, a high plasma density of $2{\times}10^{11}/cm^3$ and a high power transfer efficiency of about 88% could be obtained at 5kW of RF power and with 20mTorr Ar. A low plasma potential of less than 26V and a low electron temperature of $2.6{\sim}3.2eV$ could be also obtained. The measured plasma uniformity on the substrate size of 4th generation $(880mm{\times}660mm)$ was about 4%, therefore, it is believed that the multiple linear antennas with U-type parallel connection can be successfully applicable to the large area flat panel display processing.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.93-96
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• 2004

An ultrasonic linear motor was composed of a slider and a stator vibrator including piezoelectric material and elastic material. The ultrasonic linear motors mainly consist of an ultrasonic vibrator which generates elliptical oscillations. L1-B4 ultrasonic linear motor use longitudinal and bending multi-vibration. In order to design stators which has high efficiency and driving characteristics, The finite element method was used to optimize dimension of ultrasonic vibrator and direction of vibratory displacement. stator vibrator of respectively width 3, 5, 7[mm] was fabricated and experimented. as results When width was 5[mm], the driving characteristics was good.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.730-733
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• 2004

An ultrasonic linear motor was composed af a slider and a stator vibrator including piezoelectric material and elastic material. The ultrasonic linear motors mainly consist of an ultrasonic vibrator which generates elliptical oscillations. $L_1-B4$ ultrasonic linear motor use longitudinal and bending multi-vibration. In order to design stators which has high efficiency and diriving characteristics. The finite element method was used to optimize dimension of ultrasonic vibrator and direction of vibratory displacement. stator vibrator of respectively width 3, 5, 7[mm] was fabricated an experimented. as results When width was 5[mm], the driving characteristics was good

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.14 no.9 s.90
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• pp.868-876
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• 2004

The linear motion(LM) guide using ball bearing has many advantages compared with conventional sliding guides. Therefore, LM guide using ball bearing has been widely used to increase the accuracy of the position of a system. This research investigates dynamic characteristics of LM guide through mainly linear analyses. Linear analysis is accomplished by Lagrange equation and the finite element method. And another trial that performs nonlinear analysis about one mode(bouncing mode) of LM guide from Hertzian contact theory is accomplished in the latter half of this research. Through nonlinear analysis we could observe the softening characteristic due to the Hertzian contact nonlinearity.

• Proceedings of the KIEE Conference
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• 2003.07b
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• pp.1048-1050
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• 2003

Recently, many linear motion generators and motors are rapidly finding applications that ranges from short stroke linear motion vibrators, such as dynamic con type loud speakers to stilting engine driven linear reciprocating alternators, compressors, textile machines etc. In this paper, we analyze the characteristics of tubular linear motor with Halbach and radial magnet array respectively. We already derived magnetic field solutions due to the PMs and to the currents and Motor thrust. On the basis of analytical field solutions, this paper deals with flux linkages and back emf. The results are validated extensively by comparison with finite element analyses. Then, this parer also presents thrust characteristics according to design parameters for each model.

• Proceedings of the KIEE Conference
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• 2005.07b
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• pp.1462-1464
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• 2005

The demand for linear electrical machines, for both controlled motion and electrical power generation, has increased steadily in recent years. For example, for applications in the high-speed packaging and manufacturing sectors, linear electromagnetic machines, which provide thrust force directly to a payload without the need to convert rotary to linear motion, offer significant advantages in terms of simplicity, efficiency, positioning accuracy, and dynamic performance in both acceleration capability and bandwidth. So, this paper describes analysis the dynamic characteristics of Tubular Type Linear BLDC Motor by simulation and experiments.

• Korean Journal of Fisheries and Aquatic Sciences
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• v.54 no.6
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• pp.1036-1044
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• 2021

A linear array acoustic transducer with 12 tonpilz elements mounted independently on a gradual wedge-shaped tail mass was fabricated, tested and analyzed. The compensated transducer, which is modified by including a series inductance of 137 µH in the developed linear array transducer, attained improved figure of merit (FOM) performance characteristics compared with the uncompensated transducer. The four resonant frequency bands were identified from the measured FOM curve. The FOM response patterns over the frequency ranges of 31 to 40 kHz and 50 to 60 kHz were relatively uniform, whereas sharp resonance peaks were observed at around 73 kHz and 84 kHz. These results indicate that the developed linear array transducer can be used as an enhanced broadband transducer of echo sounder, and the operating frequency can be selected for more effective echo surveys in the fishing ground.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.416-423
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• 2004

This paper presents the thermal characteristic analysis of a high-speed horizontal machining center with spindle speed of 50,000rpm and feedrate of 120m/fin. The spindle system is designed based on the built-in motor, angular contact ceramic ball bearings, oil-air lubrication and oil-jacket cooling method. The X-axis and Y-axis feeding systems are composed of the linear motors and linear motion guides, and the Z-axis feeding system is composed of the servo-motor, ball screw and linear motion guides. The thermal characteristics such as the temperature distribution, temperature rise, thermal deformation and step response, are estimated based on the finite element model of machining center and the heat generation rates of heat sources related to the machine operation conditions. Especially, the thermal time constant assessed from the step response function is introduced as an index of thermal response characteristics.

• Structural Engineering and Mechanics
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• v.25 no.1
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• pp.1-20
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• 2007

Dynamic behaviors of the contact surface between ball and raceway in a guideway mechanism vary with the applied loads and hence affect the mechanical responses of machine tools. The study aims to investigate the nonlinear characteristics of dynamic behaviors at the rolling contact interface in linear guideway mechanisms. Firstly, analytical method was introduced to understand the contact behaviors based on Hertz contact theory in a point-to-point way. Then, the finite element approach with a three-dimensional surface-to-surface contact model and appropriate contact stiffness was developed to study the dynamic characteristics of such linear guideways. Finally, experiments with modal test were conducted to verify the significance of both the analytical and the numerical results. Results told that the finite element approach may provide significant predictions. The study results also concluded that the current nonlinear models based on Hertz's contact theory may accurately describe the contact characteristic of a linear guideway mechanism. In the modal analysis, it was told that the natural frequencies vary a little with different loading conditions; however, the mode shapes are changed obviously with the magnitude of applied loads. Therefore, the stiffness of contact interface needs to be properly adjusted during simulation which may affect the dynamic characteristics of the machine tools.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.13 no.5
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• pp.30-37
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• 2004

This paper presents the thermal characteristic analysis of a high-speed horizontal machining center with spindle speed of 50,000rpm and feedrate of 120m／min. The spindle system is designed based on the built-in motor, angular contact ceramic ball bearings, oil-air lubrication and oil-jacket cooling method. The X-axis and Y-axis feeding systems are composed of the linear motors and linear motion guides, and the Z-axis feeding system is composed of the servo-motor, ball screw and linear motion guides. The thermal characteristics such as the temperature distribution, temperature rise, thermal deformation and step response, are estimated based on the finite element model of machining center and the heat generation rates of heat sources related to the machine operation conditions. Especially, the thermal time constant assessed from the step response function is introduced as an index of thermal response characteristics.