• Title/Summary/Keyword: layer 2

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Investigation of Memory Characteristics in MOSCAP with Oxidation AlOx Tunnel Layer

  • Hwang, Se-Yeon;Jo, Won-Ju
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.260-260
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    • 2016
  • 최근 고화질 및 대용량 영상의 등장으로 메모리 디바이스에 대한 연구가 활발하다. 메모리 디바이스의 oxide 층은 tunnel layer, trap layer와 blocking layer로 나누어지며, tunnel layer와 trap layer 사이 계면의 상태는 메모리 특성에 큰 영향을 준다. 한편, AlOx는 메모리 디바이스의 tunnel layer에 주로 적용되는 물질로서, AlOx를 형성하는 방법에는 진공공정을 이용하여 증착하는 방법과 알루미늄을 산화시켜 형성하는 방법이 있다. 그 중, 진공공정 방법인 RF 스퍼터를 이용하는 방법은 증착시 sputtering으로 인하여 표면에 손상을 주게 되어, 산화시켜 형성한 AlOx에 비해 막질이 좋지 않다는 단점이 있다. 따라서 본 연구에서는 우수한 막질의 메모리 디바이스를 제작하기 위하여 산화시켜 형성한 AlOx를 tunnel layer로 적용시킨 MOSCAP을 제작하여 메모리 특성을 평가하였다. 제작된 소자는 n-Si (1-20 ohm-cm) 기판을 사용하였다. Tunnel layer는 e-beam evaporator를 이용하여 Al을 5 nm 두께로 증착하고 퍼니스를 이용하여 O2 분위기에서 $300^{\circ}C$의 온도로 1시간 동안 산화시켜 AlOx을 형성하였으며, 비교군으로 RF 스퍼터를 이용하여 AlOx를 10 nm 두께로 증착한 소자를 같이 제작하였다. 순차적으로, trap layer와 blocking layer는 RF 스퍼터를 이용하여 각각 HfOx 30 nm와 SiOx 30 nm를 증착하였다. 마지막으로 전극 물질로는 Al을 e-beam evaporator를 이용하여 150 nm 두께로 증착하였다. 제작된 소자에서 메모리 측정을 한 결과, 같은 크기의 윈도우를 비교하였을 때 산화시킨 AlOx를 tunnel layer로 적용한 MOSCAP에서 더 적은 전압으로도 program 동작이 나타나는 것을 확인하였다. 또한 내구성을 확인하기 위해 program/erase를 103회 반복하여 endurance를 측정한 결과, 스퍼터로 증착한 AlOx를 적용한 MOSCAP에서는 24 %의 메모리 윈도우 감소가 일어난 반면에, 산화시킨 AlOx를 적용한 MOSCAP에서는 메모리 윈도우 감소가 5 % 미만으로 일어났다. 결과적으로 산화시킨 AlOx를 메모리소자의 tunnel layer로 적용한 MOSCAP에서 더 뛰어난 내구성을 나타냈으며, 추후 최적의 oxide 두께와 열처리 조건을 통해 더 뛰어난 메모리 특성을 가지는 메모리 디바이스 제작이 가능할 것으로 기대된다.

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Properties of Single-and Two-layered Handsheets Formed with Sw-UKP and OCC (침엽수 미표백 크라프트펄프와 재생고지를 이용한 단층지와 이층지의 물성 연구)

  • Park, Yong;Lee, Hak-Lae
    • Journal of Korea Technical Association of The Pulp and Paper Industry
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    • v.30 no.2
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    • pp.5-12
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    • 1998
  • Exploitation of the papermaking technology to reduce the strength loss that accompanies when using recycled papers as raw materials for papermaking is one of the most important issues imposed upon today's paper industry. Multi-layer sheet forming technology has been suggested as a way that provides some answers to this issue. In this study strength properties of single- and two-layer handsheets formed with recycled fiber and unbleached softwood kraft pulp have been examined to quantify the benefits when using two-layer sheet forming technology rather than a conventional single layer sheet forming precess. Single- and two-layer handsheets were made from 50% of OCC and 50% of Sw-UKP and their strength properties were evaluated. Also the strength properties made from Sw-UKP and OCC sheets were determined. A multihead, which can be attached on the top of hand- sheet former, was used to form two-layer sheets. Maximum strength properties could be obtained in the freeness range of 500∼300mL CSF for Sw-UKP Most of the strength properties was reduced by 30∼35% when 50% OCC was blended with UKP. Decrease of strength properties, however, could be reduced by employing a two-layer sheet forming method. Creator strengths could be obtained when UKP was positioned at the top layer of two layered sheets indicating greater UKP fines retention due to the filtration effect of the OCC layer formed prior to UKP layer contributed the strength improvement. Two-layer sheet showed lower Scott internal bond strength than single layer sheet. By incorporating some of UKP fibers into OCC layer this reduction could be reduced.

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Study of charge trap flash memory device having Er2O3/SiO2 tunnel barrier (Er2O3/SiO2 터널베리어를 갖는 전하트랩 플래시 메모리 소자에 관한 연구)

  • An, Ho-Myung
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2013.05a
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    • pp.789-790
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    • 2013
  • $Er_2O_3/SiO_2$ double-layer gate dielectric shows low gate leakage current and high capacitance. In this paper, we apply $Er_2O_3/SiO_2$ double-layer gate dielectric as a charge trap layer for the first time. $Er_2O_3/SiO_2$ double-layer thickness is optimized by EDISON Nanophysics simulation tools. Using the simulation results, we fabricated Schottky-barrier silicide source/drain transistor, which has10 um/10um gate length and width, respectively. The nonvolatile device demonstrated very promising characterstics with P/E voltage of 11 V/-11 V, P/E speed of 50 ms/500 ms, data retention of ten years, and endurance of $10^4$ P/E cycles.

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Fabrication and Characterization of La2Zr2O7/YSZ Double-Ceramic-Layer Thermal Barrier Coatings Fabricated by Suspension Plasma Spray (서스펜션 플라즈마 용사법을 이용한 La2Zr2O7/YSZ 2층세라믹 열차폐코팅의 제조와 특성평가)

  • Kwon, Chang-Sup;Lee, Sujin;Lee, Sung-Min;Oh, Yoon-Suk;Kim, Hyung-Tae;Jang, Byung-Koog;Kim, Seongwon
    • Journal of Surface Science and Engineering
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    • v.48 no.6
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    • pp.315-321
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    • 2015
  • Rare-earth zirconates, such as $La_2Zr_2O_7$ and $Gd_2Zr_2O_7$, have been investigated as one of the candidates for replacing conventional yttria-stabilized zirconia (YSZ) for thermal barrier coating (TBC) applications at higher turbine inlet temperatures. In this study, double-ceramic-layer (DCL) TBCs of YSZ 1st layer and $La_2Zr_2O_7$ top coat layer are fabricated by suspension plasma spray with serial liquid feeders. Microstructures, hardness profiles, and thermal durability of DCL-TBCs are also characterized. Fabricated DCL-TBCs of YSZ/$La_2Zr_2O_7$ exhibit excellent properties, such as adhesion strength (>25 MPa) and electrical thermal fatigue (~1429 cycles), which are comparable with TBCs fabricated by atmospheric plasma spray.

An Efficient P2P System Using Cross-Layer Design for MANETs (MANET 에서의 Cross-Layer 디자인을 사용한 효율적인 P2P 시스템)

  • Park, Ho-Hyun;Choi, Hyun-Duk;Woo, Mi-Ae
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.34 no.7B
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    • pp.728-733
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    • 2009
  • An ubiquitous environment has features like peer-to-peer and nomadic environments. Such features can be represented by peer-to-peer systems and mobile ad-hoc networks. P2P systems and MANETs share similar features, appealing for implementing P2P systems in MANET environment. However, if a P2P system designed for wired networks was applied to mobile ad-hoc environment, its performance was not good enough. Subsequently, this paper proposes a P2P system to improve performance using cross-layer design and the goodness of a node as a peer by using routing metric and P2P metric to choose favorable peers to connect. It also utilizes proactive approach for distributing peer information. The simulation results showed that the proposed system produced better performance in query success rate, query response time and energy consumption by reducing the routing path length.

Unusual Enhancements of NmF2 in Anyang Ionosonde Data

  • Yun, Jongyeon;Kim, Yong Ha;Kim, Eojin;Kwak, Young-Sil;Hong, Sunhak
    • Journal of Astronomy and Space Sciences
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    • v.30 no.4
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    • pp.223-230
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    • 2013
  • Sudden enhancements of daytime NmF2 appeared in Anyang ionosonde data during summer seasons in 2006-2007. In order to investigate the causes of this unusual enhancement, we compared Anyang NmF2's with the total electron contents (GPS TECs) observed at Daejeon, and also with ionosonde data at at mid-latitude stations. First, we found no similar increase in Daejeon GPS TEC when the sudden enhancements of Anyang NmF2 occurred. Second, we investigated NmF2's observed at other ionosonde stations that use the same ionosonde model and auto-scaling program as the Anyang ionosonde. We found similar enhancements of NmF2 at these ionosonde stations. Moreover, the analysis of ionograms from Athens and Rome showed that there were sporadic-E layers with high electron density during the enhancements in NmF2. The auto-scaling program (ARTIST 4.5) used seems to recognize sporadic-E layer echoes as a F2 layer trace, resulting in the erroneous critical frequency of F2 layer (foF2). Other versions of the ARTIST scaling program also seem to produce similar erroneous results. Therefore we conclude that the sudden enhancements of NmF2 in Anyang data were due to the misrecognition of sporadic-E echoes as a F-layer by the auto-scaling program. We also noticed that although the scaling program flagged confidence level (C-level) of an ionogram as uncertain when a sporadic-E layer occurs, it still automatically computed erroneous foF2's. Therefore one should check the confidence level before using long term ionosonde data that were produced by an auto-scaling program.

EFFECT OF COLLAGEN DISSOLUTION IN ACID CONDITIONED DENTIN ON RESIN-DENTIN HYBRID LAYER (산표면처리 후 노출된 상아질 교원섬유의 용해가 하이브리드층 형성에 미치는 영향)

  • Jeon, Seong-Min;Son, Ho-Hyun;Lee, Kwang-Won
    • Restorative Dentistry and Endodontics
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    • v.21 no.1
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    • pp.227-241
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    • 1996
  • The effect of collagen dissolution in acid conditioned dentin was morphologically examined by both scanning and transmission electron microscopy. 18 freshly extracted human molars and dentin bonding systems of All Bond 2, Scotchbond Multipurpose, Superbond D-Liner were used in this study. For SEM preparation, each 3 of ~ exposed dentin surfaces were acid conditioned by using various acids within the above three bonding systems respectively. After acid conditioning of the other 3 exposed dentin surfaces as above, they were treated with 1.7% NaOCl for 2 minutes. The remaining 3 dentin surfaces were acid conditioned and treated with 3.3 % NaOCl for 2 minutes. All of the specimens were then fixed in 4 % glutaraldehyde for 12 h at $4^{\circ}C$ and dehydrated in ethanols grades from 50 % to 100 %, then surface changes of the specimens were observed by using SEM. For TEM preparation, exposed dentin surfaces were acid conditioned with the same acid as SEM specimens and treated with 1.7%, 3.3 % NaOCl respectively, then applied with corresponding bonding agents. After the procedures were finished, composite resin were applied on the dentin surfaces and light cured. Small, rectangular sticks with end dimensions of approximately 1 by 1 mm were sectioned and further sample preparative techniques for transmission electron microscopy were performed in accordance with the procedures used for ultrastructural TEM observations of calcified tissues. The results were as follows : 1. In the 1.7 % NaOCl retreated specimens after acid conditioning, the porous dentin surface of intertubular dentin and wide opening of dentinal tubules were appeared. And there were fine irregularities on the intertubular dentin, indicating a clear difference as compared with the acid conditioned specimens. 2. In the 3.3% NaOCl retreated specimens after acid conditioning, the intertubular dentin was further eroded causing a more porous and wider opening of dentinal tubules. Moreover, sharp irregularities on the intertubular dentin were more evident than those of acid conditioned and 1.7% NaOCl retreated specimens. 3. In all of the acid conditioned specimens, the resin-dentin hybrid layer of approximately 3.5mm thickness was formed and the collapsed collagen layer was observed on the uppermost part of hybrid layer in the specimens applied with All Bond 2. The collgen fibrils of intertubular dentin in specimens applied with Scotchbond Multipurpose were running perpendicular to the interface, and electron dense black layer demarcated from the deep unaltered dentin was more evident in the specimen applied with Superbond D-Liner than any other specimens. 4. In the 1.7 % NaOCl retreated specimens after acid conditioning, the resin-dentin hybrid layer of approximately 2.5-3.0mm thickness was formed and the collapsed collagen layer and longitudinally running collagen fibrils as shown in the acid conditioned specimens were observed in the specimens applied with All Bond 2 and Superbond D-Liner. 5. In all of the 3.3% NaOCl retreated specimens after acid conditioning, the evidence of resin-dentin hybrid layer was not identified ; nevertheless, the longitudinally running collagen fibrils remained slightly in the specimens applied with All Bond 2.

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The Characteristic Change of Piggery Slurry during the Storage Time and Depth (돈슬러리 저장기간 및 깊이에 따른 성분특성 변화)

  • 최동윤;전병수;곽정훈;박치호;정광화;김태일;김형호;이덕수;양창범
    • Journal of Animal Environmental Science
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    • v.8 no.3
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    • pp.129-134
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    • 2002
  • This study was carried out to investigate the characteristic change of piggery slurry during the storage time and depth. The Piggery slurry was settled in a 10.0m diameter$\times$3.0m high storage tank for 6 months and then divided into three layers according to the storage time. The pollutants concentration, BODs(Biochemical Oxygen demand), CO $D_{Mn}$ (Chemical Oxygen demand) and SS(Suspended Solids) of the piggery slurry used in this study were 25,134, 15,840, 23,800mg/$\ell$, respectively. The initial fertilizer content of piggery slurry, N(Nitrogen), $P_2$ $O_{5}$(Phosphoric acid) and $K_2$O(Potassium oxide), were 0.69, 0.33, 0.40%, respectively. 6 months later, BO $D_{5}$, CO $D_{Mn}$ and SS of the Piggery slurry were 16,040, 8,098, 3,300mg/$\ell$ in top layer, 15,806, 8,309, 5,900mg/$\ell$ in middle layer and 39,530, 23,958, 51,000mg/$\ell$ in bottom layer, respectively. The fertilizer content of piggery slurry after 6 months, N, $P_2$ $O_{5}$ and $K_2$O, were 0.47, 0.07, 0.46% in top layer, 0.43, 0.08, 0.47% in middle layer and 0.60, 0.44, 0.40% in bottom layer, respectively. Consequently, in course of storage time, the pollutant concentration and fertilizer content were the highest in the bottom layer compared with the top and middle layer.

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Assessment on Ecological Characteristics of Vegetation in the Trail of Adjacent to Molundae (몰운대 탐방로 주변 식생의 생태적 특성 평가)

  • Nam, Jung-Chil;Seo, Jung-Bum;Oh, Ju-Sung
    • Journal of Environmental Impact Assessment
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    • v.20 no.2
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    • pp.187-198
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    • 2011
  • The objective of this study is to analyze the flora and forest vegetation of trails with high visitor density at Molundae. Nine quadrats of $20{\times}20m$ were selected for the survey. The survey was conducted from April to October 2010. The obtained results are summarized as follows. Plot1, plot2, plot3, plot4, plot6, and plot7 were located at slopes of $5{\sim}20^{\circ}$, 17~40m above sea level, and were formed with the colony of Japanese black pine(Pinus thunbergii Parl) and Japanese black pine(Pinus thunbergii Parl)-white oak(Quercus aliena Blume). Tree layer had the height of 8~20m, and the coverage of 50~70%, while subtree layer had the height of 3-8m, and the coverage 30~80%. On the other hand, shrub layer had the height of 2~4m, and the coverage of 10~30%, and herb had the height of 0.2~1m and coverage 5~20%. Plot5, plot8, and plot9 were located at the summit areas of 57~78m above sea level, and $0^{\circ}$ slope. Japanese black pine(Pinus thunbergii Parl) formed a community there. Tree layer was 8~20m high, and covered 60~70%, of the area, and subtree layer was 6~8m high, and coverage 30~40%. Shrub layer had the height of 2~6m, and the coverage of 30%, while herb layer had the height 0.2~2m, and the coverage 20-80%. Succession does not occur in the surveyed areas which have high visitor density. Artificially planted sawtooth oak(Quercus acutissima) trees were found to disturb succession and formation of multi-layer vegetation, resulting in the ecologically unstable forest. Therefore, the researcher suggested the strategy of managing the vegetation in the conclusion. This study has the limit in that the plots selected for the survey reflected only part of various trails in the Molundae area. It is necessary to suggest the vegetation management plans by selecting more diverse trail areas in consideration of the visitor density and behaviors, and analyzing the changes in vegetation quantitatively in order to manage the vegetation in urban areas damaged by visitors more effectively.

Application of EPON to Wireless Network and Handover Algorithm (EPON의 무선네트워크 적용 및 핸드오버 알고리즘)

  • Cho, Won-Kuk;Chung, Jun-Hoi;Park, Jae-Uk;Choi, Byung-Chul;Park, Young-Il
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.32 no.7A
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    • pp.666-671
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    • 2007
  • EPON is proposed to be used in an infrastructure of the next generation wireless network. EPON can reduce fiber deployment cost and easily decrease the occurrence of layer-3 handover by introducing group cell concept. An EPON-based layer-2 handover algorithm is suggested for fast handover. The time-delay of the control signals are examined using simulation.