• Title/Summary/Keyword: lateral process

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Heat Treatment of Carbonized Photoresist Mask with Ammonia for Epitaxial Lateral Overgrowth of a-plane GaN on R-plane Sapphire

  • Kim, Dae-sik;Kwon, Jun-hyuck;Jhin, Junggeun;Byun, Dongjin
    • Korean Journal of Materials Research
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    • v.28 no.4
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    • pp.208-213
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    • 2018
  • Epitaxial ($11{\bar{2}}0$) a-plane GaN films were grown on a ($1{\bar{1}}02$) R-plane sapphire substrate with photoresist (PR) masks using metal organic chemical vapor deposition (MOCVD). The PR mask with striped patterns was prepared using an ex-situ lithography process, whereas carbonization and heat treatment of the PR mask were carried out using an in-situ MOCVD. The heat treatment of the PR mask was continuously conducted in ambient $H_2/NH_3$ mixture gas at $1140^{\circ}C$ after carbonization by the pyrolysis in ambient $H_2$ at $1100^{\circ}C$. As the time of the heat treatment progressed, the striped patterns of the carbonized PR mask shrank. The heat treatment of the carbonized PR mask facilitated epitaxial lateral overgrowth (ELO) of a-plane GaN films without carbon contamination on the R-plane sapphire substrate. Thhe surface morphology of a-plane GaN films was investigated by scanning electron microscopy and atomic force microscopy. The structural characteristics of a-plane GaN films on an R-plane sapphire substrate were evaluated by ${\omega}-2{\theta}$ high-resolution X-ray diffraction. The a-plane GaN films were characterized by X-ray photoelectron spectroscopy (XPS) to determine carbon contamination from carbonized PR masks in the GaN film bulk. After $Ar^+$ ion etching, XPS spectra indicated that carbon contamination exists only in the surface region. Finally, the heat treatment of carbonized PR masks was used to grow high-quality a-plane GaN films without carbon contamination. This approach showed the promising potential of the ELO process by using a PR mask.

Radiograph-based Diagnostic Methods for Thoracic and Lumbar Spine Malposition in Chuna Manual Therapy Using Biomarkers (단순 방사선 영상기반 바이오마커를 활용한 흉·요추의 추나의학적 변위 진단 방법)

  • Jin-Hyun Lee;Minho Choi;Joong Il Kim;Jun-Su Jang;Tae-Yong Park
    • The Journal of Churna Manual Medicine for Spine and Nerves
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    • v.18 no.2
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    • pp.1-8
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    • 2023
  • Objectives This study aimed to propose biomarkers for diagnosing Chuna manual therapy (CMT) based on X-ray images in the thoracic and lumbar spines. Methods Through a literature review and expert consensus process, diagnostic biomarkers for CMT were selected based on the listing system in thoracic and lumbar radiograph anterior-posterior (AP) and lateral views. Results 1. Diagnostic biomarkers were derived from four points on the outer contour of the vertebral body in the thoracic and lumbar spine radiograph lateral view, enabling the diagnosis of flexion and extension malposition. 2. Additional diagnostic biomarkers were identified in the thoracic and lumbar radiographAP view, utilizing points on the outer contour of the vertebral body. These biomarkers facilitate the diagnosis of lateral bending. Moreover, biomarkers derived from the innermost point of the pedicle contour allow for the diagnosis of rotation malposition. 3. Furthermore, through the biomarkers proposed in this study, all malpositions of the thoracolumbar spines and complex Type I and II malpositions can be diagnosed in CMT. Conclusions The biomarkers reported in this study consist of minimal points to determine the position of the vertebral body, providing the advantage of simplicity while minimizing potential errors during the CMT diagnostic process. Further clinical research and the development of related programs should be pursued to expand the evidence for CMT.

Topology Optimization of a HDD Actuator Arm

  • Chang, Su-Young;Cho, Ji-Hyon;Youn, Sung-Kie;Kim, Cheol-Soon;Oh, Dong-Ho
    • Computational Structural Engineering : An International Journal
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    • v.1 no.2
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    • pp.89-96
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    • 2001
  • A study on the topology optimization of a Hard-Disk-Driver(HDD) actuator arm is presented. The purpose of the present wert is to increase the natural frequency of tole first lateral mode of the HDD actuator arm under the constraint of total moment of inertia, so as to facilitate the position control of the high speed actuator arm. The first lateral mode is an important factor in the position control process. Thus the topology optimization for 2-D model of the HDD actuator arm is considered. A new objective function corresponding to multieigenvalue optimization is suggested to improve the solution of the eigenvalue optimization problem. The material density of the structure is treated as the design variable and the intermediate density is penalized. The effects of different element types and material property functions on the final topology are studied. When the problem is discretized using 8-node element of a uniform density, tole smoothly-varying density field is obtained without checker-board patterns incurred. AS a result of 7he study, an improved design of the HDD actuator arm is suggested. Dynamic characteristics of the suggested design are compared computationally with those of the old design. With the same amount of the moment of inertia, the natural frequency of the first lateral mode of the suggested design is subsequently increased over the existing one.

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Pelvic Twist Analysis, PTA (골반 뒤틀림 변위 분석법에 대한 소고)

  • Jo, Jong-Jin;Kim, Sang-Deok
    • The Journal of Korea CHUNA Manual Medicine
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    • v.5 no.1
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    • pp.135-139
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    • 2004
  • Objectives : The objectives of this report is to introduce PTA. Methods : The examination of the leg length inequality gives us a useful tool for diagnosis of body imbalance. especially pelvic distortion. There are four steps in the process of the leg analysis, according to "The Standard Manual of Chuna Society (2nd ed., Seoul:KCA Press. 2001)". In the last step of the analysis, knee-flexing over $90^{\circ}$, we have often experienced a specific sign that the lower legs are attracted toward one side spontaneously. The authors call it 'Lower Leg Lateral Attraction'. This is a very significant sign that gives us which is the major part between pelvis and the upper parts over sacrum. Thus it is definded as "Pelvic Twist Analysis, PTA" by the authors. With PTA, first, you must check the side of short leg and next, check the side of lateral attraction in lower leg over-flexing. If both sides coincide with each other, then the major part you can correct first is pelvic distortion. If not, you must find another part for primary correction, instead of pelvis. Conclusions : PTA becomes a useful complement to the examination of the leg length inequality.

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Preliminary Study for the Reliability Assurance on Results and Procedure of the Out-pile Mechanical Characterization Test for a Fuel Assembly; Lateral Vibration Test(I) (핵연료 집합체 노외성능시험의 절차와 결과에 대한 신뢰성확보를 위한 예비고찰; 횡방향 진동특성시험(I))

  • Lee, Kang-Hee;Yoon, Kyung-Ho;Kim, Hyung-Kyu
    • Proceedings of the KSME Conference
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    • 2007.05a
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    • pp.1854-1858
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    • 2007
  • The reliability assurance with respect to the test procedure and results of the out-pile mechanical performance test for the nuclear fuel assembly is an essential task to assure the test quality and to get a permission for fuel loading into the commercial reactor core. For the case of vibration test, which is carried out to obtain basic dynamic characteristics of the fuel assembly, proper management and appropriate calibration of instruments and devices used in the test, various efforts to minimize the possible error during the test and signal acquisition process are needed. Additionally, the deep understanding both of the theoretical assumption and simplification cation for the signal processing/modal analysis and of the functions of the devices used in the test were highly required. Finally, to verify the test result to represent the accurate natural characteristics of the structure, the proper correlation analysis between the theoretical and experimental method has to be carried out. In this study, the overall procedure and result of lateral vibration test for the fuel assembly's mechanical characterization were briefly introduced. A series of measures to assure and improve the reliability of the vibration test were discussed.

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Computer simulation of electric field distribution in FALC process (FALC 공정에서의 전계 분포 전산모사)

  • 정찬엽;최덕균;정용재
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.13 no.2
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    • pp.93-97
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    • 2003
  • The crystallization behavior of amorphous silicon is affected by direction and intensity of electric field in FALC(Field-Aided Lateral Crystallization). Electric field was calculated in a simplified model using conductivity data of Mo, a-Si, $SiO_2$and boundary conditions for electric potential at the electrodes. The magnitude of electric field intensity in each corner of cathode was much larger than that in the center of patterns, and the electric field direction was 50~60 degree outside to cathode. And electric field intensity at a relatively small pattern was larger than that of a large pattern.

Numerical study of double diffusive convection due to lateral heating in a rotating annulus (회전하는 환형용기내의 옆면 가열에 의한 이중확산대류에 관한 수치해석)

  • Gang, Sin-Hyeong;Lee, Gyo-Seung;Lee, Jin-Ho
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.21 no.11
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    • pp.1422-1436
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    • 1997
  • Numerical investigations were conducted to study the convective phenomena of an initially stably stratified salt water solution with lateral heating in a uniformly rotating annulus. The method of investigation is the finite difference analysis of the basic conservation equation for an axisymmetric, unsteady, double-diffusive convection and calculation is made for R $a_{\eta}$=2*10$^{5}$ and Ta=10$^{7}$ ~ 2.5*10$^{8}$ . Formation of layered flow structure, merging process of layers, the corresponding temperature and concentration distributions, Nu variation with time are examined. Numerical results show that in each layer, the temperature profile looks 'S'-shaped and the concentration profile is uniform due to the convective mixing. At the interface between adjacent layers, the temperature changes smoothly but the concentration changes rapidly. As the effect of the rotation increases, the generation of rolls at hot wall, the formation and merging of layers are delayed. The average Nu shows the trend of conduction heat transferees the effect of the rotation increases.n increases.

Topology Optimization of a HDD Actuator Arm (HDD 구동기 팔의 위상 최적화)

  • Chang, Su-Young;Youn, Sung-Kie;Kim, Cheol-Soon;Oh, Dong-Ho
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.24 no.7 s.178
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    • pp.1801-1809
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    • 2000
  • A study on the topology optimization of Hard-Disk-Driver(HDD) actuator arm in free vibration is presented. The purpose of this research is to increasse the natural frequency of the first lateral mode of the HDD actuator arm under the constraint of total moment of inertia, so as to facilitate the position control of high speed actuator am. The first lateral mode is an important factor in the position control process. Thus the topology optimization for 2-D model of the HDD actuator arm is considered. A new objective function corresponding to multieigenvalue optimization is suggested to improve the solution of the eigenvalue optimization problem. The material density of the structure is treated as the design variable and the intermediate density is penalized. The effects of different element types and material property functions on the final topology are studied. When the problem is discretized using 8-node element of a uniform density, the smoothly-varying density field is obtained without checker-board patterns incurred. As a result of the study an improved design of the HDD actuator arm is suggested. Dynamic characteristics of the suggested design are compared computationally with those of the old design. With the same amount of the moment of inertia, the natural frequency of the first lateral mode or the suggested design is subsequently increased over the existing one.

Electrophoretic Deposition Technique by Vertical Lateral Assisted Field (측면수직보조전계에 의한 전기영동전착 기술)

  • Soh, Dae-Wha;Jeon, Yong-Woo;Park, Jeung-Cheul;Fan, Zhanguo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.05b
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    • pp.82-85
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    • 2003
  • This dissertation describes an optimization method for fabricating thick films with superconducting YBCO powders by electrophoresis technique. The lateral alternating applied voltage caused to shake the superconducting powder vertically to the deposition field during the process of the oriented deposition so that it was deposited along the c-axis on the silver tape with shaky-aligned EPD. As the result, the optimized thin film fabrication method was obtained to get more dense and uniform surface morphology as well as the improved critical current density. For commercial utilization and efficiency, in this dissertation, alternating voltage of 25-120 V/cm in frequency of 60Hz was proposed to apply it as a subsidiary source for shaky-flow deposition so that the fabricated thin film showed uniform surface morphology with less voids and cracks and $T_{c.zero}$ of 90 K and the critical current density of $3419A/cm^2$.

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