• Bulletin of the Korean Chemical Society
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• v.24 no.2
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• pp.197-204
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• 2003

The intracluster ion-molecule reactions of $Ti^+(H_2O)_n,\;Ti^+(CH_3OCH_3)_n,\;and\;Ti^+(CH_3OD)_n$ complexes produced by the mixing of the laser-vaporized plasma and the pulsed supersonic beam were studied using a reflectron time-of-flight mass spectrometer. The reactions of $Ti^+$ with water clusters were dominated by the dehydrogenation reaction, which produces $TiO^+(H_2O)_n$ clusters. The mass spectra resulting from the reactions of $Ti^+\;with\;CH_3OCH_3$ clusters exhibit a major sequence of $Ti^+(OCH_3)_m(CH_3OCH_3)_n$ cluster ions, which is attributed to the insertion of $Ti^+$ ion into C-O bond of $CH_3OCH_3$ followed by $CH_3$ elimination. The prevalence of $Ti^+(OCH_3)_m(CH_3OD)_n$ ions in the reaction of $Ti^+\;with\;CH_3OD$ clusters suggests that D elimination via O-D bond insertion is the preferred decomposition pathway. In addition, the results indicate that consecutive insertion reactions by the $Ti^+$ ion occur for up to three precursor molecules. Thus, examination of $Ti^+$ insertion into three different molecules establishes the reactivity order: O-H > C-O > C-H. The experiments additionally show that the chemical reactivity of heterocluster ions is greatly influenced by cluster size and argon stagnation pressure. The reaction energetics and formation mechanisms of the observed heterocluster ions are also discussed.

• Korean Journal of Optics and Photonics
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• v.23 no.5
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• pp.217-221
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• 2012

In this paper, we have fabricated by means of the "Micro-Block Stacking (MBS)" method the 8 pin mini DIL integrated Triplexer, which can transmit CATV and voice/data at the same time in a single fiber. Our MBS technique is a novel scheme of compact optical module packaging which secures precision positioning of the components on the optical beam path by prefixed stacks of ceramic blocks. The subassembly in which a laser diode, two receiver photodiodes, two WDM filters, and four micro lenses are integrated is only $5.40mm{\times}2.15mm{\times}1.05mm$ in size. As the Triplexer is aligned to the single mode fiber, the transmitter power of -14.5 dBm and the receiver sensitivities of 0.83 A/W, 0.73 A/W for 1550 nm, 1490 nm, respectively are obtained.

• Applied Microscopy
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• v.25 no.3
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• pp.75-81
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• 1995

The microstructural characterization of ternary $ZnS_{x}Se_{1-x}$(x=0.085) on GaAs(001) substrate grown up to $2{\mu}m\;at\;300^{\circ}C$ by molecular beam epitaxy(MBE) which has a single growth chamber was investigated by high resolution transmission electron microscope (HRTEM) working at 300 kV with point resolution of 0.18nm. The interface in the ZnSSe/GaAs specimen maintains a pseudomorphism with the substrate, but the epilayer has high density of stacking faults and moire fringes. The pits which had formed along <111> direction were found at the interface of ZnSSe/GaAs. The pits were responsible for producing defects in both epilayer and substrate. The wavy interface which has the difference of 15nm in height was found to maintain the pseudomorphism with the substrate and no stacking faults were found around the interface. However there exists faint and fine moire fringes in the epilayer near interface.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.3
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• pp.66-72
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• 2002

Electronic Speckle Pattern Interferometry (ESPI) has been recently developed and widely used because it has advantage to be able to measure surface deformations of engineering components and materials in industrial areas with non-contact. The speckle patterns to be formed with interference and scattering phenomena can measure not only out-of-plane but also in-plane deformations, together with the use of digital image equipment to process the informations included in the speckle patterns and to display consequent interferogram on a computer monitor. In this study, the experimental results of a canti-levered plate using ESPI were compared with those obtained from the simple beam theory. The ESPI results of the canti-levered plate analyzed by 4-step phase shifting method are close to the theoretical expectation. Also, out-of-plane displacements of a spot welded cacti-levered plate were measured by ESPI with 4-step phase shifting technique. The phase map of the spot welded cacti-levered plate is quite different from that of the canti-levered plate without spot welding.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.249-249
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• 1999

GaN과 같은 III-nitride 반도체 관한 식각 기술의 연구는 blue-emitting laser diode(LD)를 위한 경면(mirror facet)의 형성뿐만아니라 새로운 display 용도의 light emitting diodes (LED), 고온에서 작동되는 광전소자 제조 등에도 그 중요성이 증대되고 있다. 최근에는 III-nitride 물질의 높은 식각속도와 미려하고 수직한 식각형상을 이루기 위하여 ECR(Electron Cyclotron Resonance)이나 ICP(Inductively Coupled Plasma)와 같은 고밀도 플라즈마 식각과 CAIBE(Chemically assisted ion beam etching)를 이용한 연구가 진행되고 있다. 현재 제조되어 지고 있는 LED 및 LD와 같은 광소자의 구조의 대부분은 p-GaN/AlGaN/InGaN(Q.W)/AlGaN/n-GaN 와 같은 여러 층의 형태로 이루어져 있다. 이중 InGaN는 광소자나 전자소자의 특성에 영향을 주는 가장 중요한 부분으로써 현재까지 보고된 식각연구는 undoped GaN에 대부분 집중되고 있고 이에 비해 소자 특성에 핵심을 이루는 InGaN의 식각특성에 관한 연구는 미흡한 상황이다. 본 연구에서는 고밀도 플라즈마원인 ICP 장비를 이용하여 InGaN를 식각하였고, 식각에는 Cl2/CH4, Cl2/Ar 플라즈마를 사용하였다. InGaN의 식각특성에 영향을 미치는 플라즈마의 특성을 관찰하기 위하여 quadrupole mass spectrometry(QMS)와 optical emission spectroscopy(PES)를 사용하였다. 기판 온도는 5$0^{\circ}C$, 공정 압력은 5,Torr에서 30mTorr로 변화시켰고 inductive power는 200~800watt, bias voltage는 0~-200voltage로 변화시켰으며 식각마스크로는 SiO2를 patterning 하여 사용하였다. n-GaN, p-GaN 층 이외에 광소자 제조시 필수적인 InGaN 층을 100% Cl2로 식각한 경우에 InGaN의 식각속도가 GaN에 비해 매우 낮은 식각속도를 보였다. Cl2 gas에 소량의 CH4나 Ar gas를 첨가하는 경우와 공정압력을 감소시키는 경우 식각속도는 증가하였고, Cl2/10%Ar 플라즈마에서 공정 압력을 감소시키는 경우 식각속도는 증가하였고, Cl2/10%CHF3 와 Cl2/10%Ar 플라즈마에서 공정압력을 15mTorr로 감소시키는 경우 InGaN과 GaNrks의 선택적인 식각이 가능하였다. InGaN의 식각속도는 Cl2/Ar 플라즈마의 이온에 의한 Cl2/CHF3(CH4) 플라즈마에서의 CHx radical 형성에 의하여 증가하는 것으로 사료되어 진다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.04a
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• pp.127-130
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• 2003

We have carried out two-beam interference experiment to form holographic grating on amorphous $As_{40}Ge_{10}Se_{15}S_{35}$ single-laver, $MgF_{2}/As_{40}Ge_{10}Se_{15}S_{35}$ muliti-layer. In this study holographic grating formed using He-Ne laser(632.8nm) under different polarization state(intensity, phase polarization holography). The diffraction efficiency was obtained by first order intensity. The maximum diffraction efficiency of $As_{40}Ge_{10}Se_{15}S_{35}$ single-laver was 0.8% and The maximum diffraction efficiency of $MgF_{2}/As_{40}Ge_{10}Se_{15}S_{35}$ multi-layer(multi-layer I, multi-layer II) were 1.4% and 3.1%.

• Progress in Medical Physics
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• v.27 no.4
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• pp.189-195
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• 2016

This paper aims to verify the clinical feasibility of a custom-made film created by a laser cutting tool for End-to-End (E2E) quality assurance in robotic intensity modulated radiation therapy system. The custom-made film was fabricated from the Gafchromic EBT3 film with the size of $8^{{\prime}{\prime}}{\times}10^{{\prime}{\prime}}$ using a drawing that is identical to the shape and scale of the original E2E film. The drawing was created by using a computer aided design program with the image file, which is obtained by scanning original E2E film. Beam delivery and evaluations were respectively performed with the original film and the custom-made film using fixed-cone collimator on three tracking modes: 6D skull (6DS), Xsight spine (XS), and Xsight lung (XL). The differences between total targeting errors of the original and custom-made films were recorded as 0.17 mm, 0.3 mm, and 0.17 mm at 6DS, XS, and XL tracking modes, respectively. This indicates that the custom-made film could yield nearly equivalent results to those of the original E2E film, given the uncertainties caused by distortions during film scanning and vibrations associated with film cutting. By confirming the clinical feasibility of a custom-made film for E2E testing, it can be expected that economic efficiency of the testing will increase accordingly.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.5 no.3
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• pp.197-203
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• 2004

New lithography techniques are employed for the patterning of arbitrary shapes in nanometer scale. When, in the photolithography, the electromagnetic waves such as UV and X-ray are incident on the mask patterned in nanometer scale, the diffraction effect is unavoidable and degrades images of the mask imprinted on wafer. Only a convex lens is well-known Fourier transformer. It is possible to make the mask Fourier-transformed with the convex lens, even though the size of pattern on the mask is very large compared to the wavelength of electromagnetic wave. If the mask, modified according to new technique described in this paper, was placed at the front of the lens and was illuminated with laser beam, the nanometer-size patterns are only formed on the plane called Fourier transform plane. The new method presented here is quite simple setup and comparable with present and next generation lithographies such as UV/EUV photolithograpy and electron projection lithography when compared in attainable minimum linewidth. In this paper, we showed our theoretical research work in the field of Fourier optics, . In the near future, we are going to verify this theoretical work by experiments.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.30 no.5
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• pp.109-117
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• 2002

An off-surface flow visualization experiments have been performed to investigate the flow field over a delta wing with the leading edge extension(LEX). The model is a flat wing with $65^{\circ}$ sweepback angle. The free stream velocity is 6.2 m/s, which corresponds to Reynolds number of $4.4\times10^5$ based on the wing root chord. The angle of attack and sideslip angle range from $16^{\circ}\sim28^{\circ}$ and $0^{\circ}\sim-15^{\circ}$, respectively. The visualization technique of using the micro water-droplet and the laser beam sheet enabled to observe the vortical flow structures, which can not be obtained by 5-hole probe measurements. With sideslip angle, the interaction and breakdown of the LEX and wing vortices was promoted in the windward side, whereas, it was suppressed in the leeward side.

• International Journal of Aeronautical and Space Sciences
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• v.4 no.1
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• pp.63-74
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• 2003

The vortical flow of a 65-deg flat plate delta wing with a leading edge extension(LEX) was examined through off-surface visualization, 5-hole probe and hot-film measurements. The off-surface flow visualization technique used micro water droplets generated by a home-style ultrasonic humidifier and a laser beam sheet. The angles of attack ranged from 10 to 30 degrees, and the sideslip angles ranged from 0 to -15 degrees. The Reynolds number was $1.82{\times}10^5$ for the flow visualization, and $1.76{\times}10^6$ for the 5-hole probe and hot-film measurements. The comparison of the visualization photos and the flow field measurement showed that the two results were in a good agreement for the relative position and the structure of the wing and LEX vortices, even though the flow Reynolds numbers of the two results were much different. The wing vortex and the LEX vortex coil each other while maintaining a comparable strength and identity at zero sideslip. Neither a looping of the wing vortex around the strake vortex, nor the lopsided coiling of the stronger strake and the weaker wing vortices was observed. At non-zero sideslip, the downward movement of the LEX vortex when going downstream was enhanced on the windward side, and the downward and inboard movement of the LEX vortex when going downstream was suppressed on the leeward side. The counterclockwise coiling of the wing and LEX vortices was decreased significantly on the leeward side.