• 제목/요약/키워드: large area plasma

검색결과 189건 처리시간 0.027초

고성능 TFT 소자 응용을 위한 폴리스티렌 나노입자를 이용한 나노 그물망 제작공정 개발 (Formation of nanonet structure using polystyrene nanoparticle for high-performances TFT applications)

  • 윤길상;이준영;박익수;;백록현;신현진;이정수
    • 반도체디스플레이기술학회지
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    • 제17권3호
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    • pp.36-40
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    • 2018
  • We have developed a nonlithographic patterning technique using polystyrene nanoparticles to form nanonet channel structures which is promising for high-performance TFT applications. Nanoparticles assisted patterning (NAP) is a technique to form uniform nano-patterns by applying lift-off and dry etch process. Oxygen plasma treatment was used to control the diameters of nanonet hole size to realize a branch width down to 100 nm. NAP technology can be very promising to fabricate nanonet structure with advantages of lower manufacturing cost and large-area patterning capability.

염화제이수은 및 중크롬산칼륨이 가슴샘의 미세구조에 미치는 영향 (Effects of Mercuric Chloride and Potassium Dichromate on the Thymic Ultrastructure)

  • 안의태;고정식;박경호;박인규;경홍기;한영복
    • Applied Microscopy
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    • 제27권1호
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    • pp.31-46
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    • 1997
  • Ultrastructure of mouse thymus was evaluated, following the administration of potassium dichromate and mercuric chloride, the heavy metals of evironmental pollutants. Potassium dichromate (20 mg/kg) or mercuric chloride solutions (10 mg/kg) were subcutanously injected to the mice. Six hours, three days and two weeks after the injections, animals were sacrificed. Thymic tissues were fixed in 2.5% glutaraldehyde-1.5% paraformaldehyde solutions. The procedure was followed by the fixation in 1% osmium tetroxide solutions. Washed and dehydrated tissue-blocks were embedded in the araldite mixture. Ultra-thin sections were stained with uranyl acetate-lead citrate solutions. Results observed were as follows: 1. In electron microscopy, cortical population of thymocytes in the thymus of experimental groups were reduced. especially in the outer cortex. Subcapsular cortices of potassium dichromate treated mice were filled with many epithelial reticular cells, whereas the similar area of mercuric chloride-treated mice exhibited large intercellular spaces. 2. In the thymus of mercuric chloride treated group, large intercellular spaces were formed by shrinkage of epithelial reticular cells, and the space was invaded by numerous cytoplasmic projections of macrophages. Thymocytes nuded out from the shrunken cytoplasm of epithelial reticular cells, presented numerous microvilli. 3. In the thymus of potassium dicromate treated group, many activated macrophages and plasma cells migrated into thymic cortices. 4. In the perivascular spaces of thymic cortices of potassium dichromate- and mercuric chloride-treated mice, activated macrophages. plasma cells, collagen fibrils, and flocculent substance of exudated materials were exhibited. From the above findifgs, it was concluded that potassium dichromate or mercuric chloride could disturb the normal differentiation or 'education' of T cells in the thymic cortex. In turn, these heavy metals may hurt the immunological defense mechanism.

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중·저위도 지구 전리권 현상 및 연구 현황 (Mid- and Low-Latitude Earth Ionospheric Phenomena and Current Status of Research )

  • 김어진;김기남
    • 우주기술과 응용
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    • 제3권3호
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    • pp.239-256
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    • 2023
  • 지구 전리권은 고층대기의 일부가 이온화되어 전파에 영향을 주는 플라즈마 상태로 존재하는 영역으로 통신과 관련하여 실생활에 직접적으로 영향을 주어 오랜 기간 연구되어온 분야이다. 고도에 따라 전자밀도를 이루는 주된 이온에 따라 D-층, E-층, F-층으로 구분되며, 전자 밀도에 비해 중성대기 밀도가 매우 커서 그 영향을 고려한 플라즈마로 기술되어야 한다. 또한 태양에서 시작되어 지표면에 이르는 영역까지 전리권 외부의 영향이 직접적으로 반영되는 영역으로 복잡하고 다양한 영역의 연구가 연관되는 분야이다. 본 논문에서는 지구 고층대기가 이온화되어 전리권을 형성하는 과정을 설명하고 중·저위도 전리권의 특성에 대해 소개하였다. 또한 현재까지 전리권과 관련하여 국내 연구자들이 참여한 연구를 소개하고 향후 전리권 연구 분야의 교류 활성화에 활용되기를 기대한다.

펨토초레이저 충격파에 의한 형광 나노입자 제거 (Removal of Nano-scaled Fluorescence Particles on Wafer by the Femtosecond Laser Shockwave)

  • 박정규;조성학;김재구;장원석;황경현;유병헌;김광열
    • 한국정밀공학회지
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    • 제26권5호
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    • pp.150-156
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    • 2009
  • The removal of tiny particles adhered to surfaces is one of the crucial prerequisite for a further increase in IC fabrication, large area displays and for the process in nanotechnology. Various cleaning techniques (wet chemical cleaning, scrubbing, pressurized jets and ultrasonic processes) currently used to clean critical surfaces are limited to removal of micrometer-sized particles. Therefore the removal of sub-micron sized particles from silicon wafers is of great interest. For this purpose various cleaning methods are currently under investigation. In this paper, we report on experiments on the cleaning effect of 100nm sized fluorescence particles on silicon wafer using the plasma shockwave occurred by femtosecond laser. The plasma shockwave is main effect of femtosecond laser cleaning to remove particles. The removal efficiency was dependent on the gap distance between laser focus and surface but in some case surface was damaged by excessive laser intensity. These experiments demonstrate the feasibility of femtosecond laser cleaning using 100nm size fluorescence particles on wafer.

Investigation of the observed solar coronal plasma in EUV and X-rays in non-equilibrium ionization state

  • Lee, Jin-Yi;Raymond, John C.;Reeves, Katharine K.;Shen, Chengcai;Moon, Yong-Jae
    • 천문학회보
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    • 제43권1호
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    • pp.53.1-53.1
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    • 2018
  • During a major solar eruption, the erupting plasma is possibly out of the equilibrium ionization state because of its rapid heating or cooling. The non-equilibrium ionization process is important in a rapidly evolving system where the thermodynamical time scale is shorter than the ionization or recombination time scales. We investigate the effects of non-equilibrium ionization on EUV and X-ray observations by the Atmospheric Imaging Assembly (AIA) on board Solar Dynamic Observatory and X-ray Telescope (XRT) on board Hinode. For the investigation, first, we find the emissivities for all the lines of ions of elements using CHIANTI 8.07, and then we find the temperature responses multiplying the emissivities by the effective area for each AIA and XRT passband. Second, we obtain the ion fractions using a time-dependent ionization model (Shen et al. 2015), which uses an eigenvalue method, for all the lines of ion, as a function of temperature, and a characteristic time scale, $n_et$, where $n_e$ and t are density and time, respectively. Lastly, the ion fractions are multiplied to the temperature response for each passband, which results in a 2D grid for each combination of temperature and the characteristic time scale. This is the set of passband responses for plasma that is rapidly ionized in a current sheet or a shock. We investigate an observed event which has a relatively large uncertainty in an analysis using a differential emission measure method assuming equilibrium ionization state. We verify whether the observed coronal plasmas are in non-equilibrium or equilibrium ionization state using the passband responses.

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익스트루전 압력과 사료원료의 입자크기를 조절한 배합사료가 치어기 넙치 (Paralichthys olivaceus)의 성장에 미치는 영향 (Effects of Extrusion Pressure and Feed Ingredient Particle Size on Growth Performance in Olive Flounder Paralichthys olivaceus)

  • 조정현;이봉주;허상우;이승형;김강웅;임상구;손맹현
    • 한국수산과학회지
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    • 제52권3호
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    • pp.247-255
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    • 2019
  • This study was conducted to investigate the effects of extrusion pressure and particle size of feed ingredients on the growth performance and plasma hormone activity in juvenile olive flounder Paralichthys olivaceus. Experimental diets were prepared with extrusion pressure manipulated by screw speed [low pressure (LP), 885 rpm/min; high pressure (HP), 708 rpm/min] and different dietary particle sizes [specific surface area: small (SS), $169.9m^2/kg$; large (LS), $67.4m^2/kg$] in a two-level factorial design. Four experimental diets (LP+SS, LP+LS, HP+SS, and HP+LS) were randomly assigned to 12 tanks (3 replicates) stocked with 20 fish (initial weight, 57 g) per tank. After a 4-week feeding trial, the observable trends of the main effects of extrusion pressure and particle size on growth performance showed that LP and SS enhanced fish weight gain. The plasma insulin-like growth factor-I level was significantly higher in fish fed the LP+SS diet than in fish fed the HP+SS diet. These results indicate that manipulation of the physical qualities of feed through adjustment of extrusion pressure and feed ingredient particle size may influence the growth performance of juvenile olive flounder, which should be considered in feed manufacture.

Rapid Screening of Phospholipid Biomarker Candidates from Prostate Cancer Urine Samples by Multiple Reaction Monitoring of UPLC-ESI-MS/MS and Statistical Approaches

  • Lim, Sangsoo;Bang, Dae Young;Rha, Koon Ho;Moon, Myeong Hee
    • Bulletin of the Korean Chemical Society
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    • 제35권4호
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    • pp.1133-1138
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    • 2014
  • Ultrahigh performance liquid chromatography-electrospray ionization-tandem mass spectrometry (UPLC-ESI- MS/MS) provides a high-speed method to screen a large number of samples for small molecules with specific properties. In this study, UPLC-ESI-MS/MS with multiple reaction monitoring (MRM) was employed to screen urinary phospholipid (PL) content for biomarkers of prostate cancer. From lists of urinary PLs structurally identified using nanoflow LC-ESI-MS/MS, 52 PL species were selected for quantitative analysis in urine samples between 22 cancer-free urologic patients as controls and 45 prostate cancer patients. Statistical treatment of data by receiver operating characteristic (ROC) analysis yielded 14 PL species that differed significantly in relative concentrations (area under curve (AUC) > 0.8) between the two groups. Among PLs present at higher levels in prostate cancer urine, phosphatidylcholines (PCs) and phosphatidylinositols (PIs) constituted the major head group PLs (3 PCs and 7 PIs). For technical reasons, PL species of low abundance may be underrepresented in data from UPLC-ESI-MS/MS performed in MRM mode. However, the proposed method enables the rapid screening of large numbers of plasma or urine samples in the search for biomarkers of human disease.

셀 구조 변화에 따른 FFL(Flat Fluorescent Lamp)의 방전특성 (Discharge characteristics of FFL as the variation of cell structure)

  • 윤성현;박철현;조민정;임민수;권순석;임기조
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 하계학술대회 논문집
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    • pp.600-603
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    • 2000
  • Recently, Display devices have become important in the information-oriented society and flat display devices are greatly demanded. Liquid crystal display(LCD) represents one of the most promising devices for large size desk-top monitors, notebook PC and car navigation system. However LCD cannot give forth light itself and must have backlight system. The most popular backlighting system is composed of a lighting-guide plate and CCFL as a lighting source. The number of CCFL must increase up if the area of display is increased. So a new backlighting source with high luminance is needed for large LCDs. In this paper, we proposed a surface discharge FFL with the new electrode structure like the needle shaped electrode as the variation of cell structure to high luminance and low power consumption. In comparison with different electrode structure it has low discharge voltage and current and good optical characteristics. So it has better discharge characteristics than different surface discharge FFL and can be fungible for a backlight as a lighting source in LCDs.

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Cu oxide의 형성과 H(hfac) 반응을 이용한 Cu 박막의 건식식각 (Cu dry etching by the reaction of Cu oxide with H(hfac))

  • 양희정;홍성진;조범석;이원희;이재갑
    • 한국재료학회지
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    • 제11권6호
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    • pp.527-532
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    • 2001
  • O$_2$plasma와 H(hfac)을 이용한 Cu 박막의 건식 식각을 조사하였다. 휘발성이 큰 Cu(hfac)$_2$$H_2O$를 탈착시키기 위하여 $O_2$ Plasma를 이용한 Cu 박막의 산화와 생성된 Cu 산화막을 H(hfac)과의 반응으로 제거하는 공정으로 식각을 수행하였다. Cu 박막의 식각율은 50-700 /min의 범위를 보였으며, 기판온도, H(hfac)/O$_2$ 유량비, plasma power에 따라 변하였다. Cu 박막의 식각율은 기판온도 215$^{\circ}C$보다 높은 온도구간에서 RF power가 증가함에 따라 증가하였고, 산화 공정과 H (hfac)과의 반응이 균형을 이루는 최적의 H (hfac)/O$_2$ 유량비는 1:1임을 확인하였다. Ti mask를 사용한 Cu Patterning은 유량비 1 : 1, 기판온도 25$0^{\circ}C$에서 실시하였고, 30$^{\circ}$외 taper slope를 갖는 등방성 etching profile을 얻을 수 있었다. Taper angle을 갖는 Cu 건식 patterning은 고해상도의 대면적 thin film transistor liquid-crystal(TFT-LCDs)를 위래 필요한 것으로써 기판온도, RF power, 유량비를 조절한 one-step 공정으로부터 성공적으로 얻을 수 있었다.

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A Robust Process for the Fabrication of Field Emission Backlights

  • Marquardt, B.;Cojucaru, C.S.;Xavier, S.;Legagneux, P.;Pribat, D.
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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    • pp.1606-1609
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    • 2008
  • In this paper, we present a novel process for the realization of large area, low cost field emission cathodes. The process makes use of alumina substrates, which are anodically oxidized in order to yield porous structures capable of hosting metal catalyst nanoparticles. By carefully controlling the final stage of the anodisation as well as the electrodeposition conditions, it is possible to fine tune the density of such catalysts in the range of $10^8-10^9/cm^2$. The catalytic growth of CNTs is subsequently performed at low temperature (${\sim}\;600^{\circ}C$ or below, thanks to the use of $H_2O$), using plasma enhanced chemical vapour deposition. There is no lithography need to make the cathode and current densities of ${\sim}\;1mA/cm^2$ are easily obtained.

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