• 제목/요약/키워드: ion plating

검색결과 321건 처리시간 0.021초

DC Magetron Suttering법으로 제작한 Ti$_{x}$N 박막의 밀착력에 미치는 첨가원소(C,H,O) (The Effects of Additional Gases(C,H,O) on Adhesive strength Ti$_{x}$N Films Prepared by the DC Magetron Suttering Method)

  • 김학동;조성식
    • 한국표면공학회지
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    • 제31권3호
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    • pp.142-150
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    • 1998
  • Stainless steel is being used widely for various purposes due to its good corrosion resistance. There has been much research to produce colored stainless steel by several methods such as anodizing and ion plating. In this experiment, we coated TiN(C,O,H)films SUS304 substraate with the DC magnetron spttering system made by Leybold Heraeus and studied the interlater structure and abhesive strength of the films as a function of additional gases, acetylene, hydrogen and oxygen. When the acetylene gas was added into the chamber, the specimen with the interlayer phase had good adhesion due to the toughness of the $\gamma'-Fe_4N$ plase induced from a solid solution of carbon atoms, while low adhesion appeared on the specimen of the non interlayer phase. The formation of the interlayer phase($\gamma'-Fe_4N$) was due to hydrogen embrittlement and internal stress induced by $\gamma'-Fe_4N$ formation in the interlayer. We could fine the interlayer phase ($\gamma'-Fe_4N$) at the interface between the film and the substrate of the TEM image when $\gamma'-Fe_4N$ was detected by the X-ray duffraction metheod.

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TiCrN 박막의 고온 산화시 생성되는 산화막 분석 (Analyses of Oxide Scales Formed on TiCrN Coatings)

  • 이동복;이영찬;김성훈;권식철
    • 한국표면공학회지
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    • 제34권4호
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    • pp.321-326
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    • 2001
  • The TiCrN Coatings haying three kinds of Compositions of $Ti_{36}$ $Cr_{26}$ $N_{38}$ , $Ti_{31}$ $Cr_{35}$ $N_{34}$ / and $Ti_{14}$ $Cr_{52}$ $N_{34}$ were deposited on STD 61 steel substrate by arc ion plating and were oxidized between 700 and 100$0^{\circ}C$ to identify the oxide scales formed on the coatings. The oxide scales were then analyzed using EPMA, XRD and GAXRD. During oxidation, the coatings consisting of TiN and CrN phases were reduced to TiO2 and $Cr_2$$O_3$, respectively. Titania tended to form at the outer oxide layer, whereas chromia tended to form at the inner oxide layer, owing to the different oxygen affinity. The substrate elements as well as coating elements diffused outwardly toward the oxide layer due to the concentration gradient. The growth of oxide from the TiCrN coatings was schematically expressed on the basis of thickness measurement of the reacted and unreacted coatings. The Cr element showed its stronger role to keep the TiCrN coatings from oxidation, when compared with Ni.

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Tribology특성 향상을 위한 Ag 박막의 형성과 평가에 관한 연구 (A Study on Formation and Evaluation of he Thin Films for Improvement of Tribology Properties)

  • 이경황;이상기;송복한;정병진;박창남;문경만;이명훈
    • 한국표면공학회지
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    • 제33권5호
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    • pp.319-328
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    • 2000
  • Silver is known to have such characteristics as low shear strength, good transfer-film forming tendency, and good corrosion resistance. Silver thin films have been prepared by ion plating of physical vapour deposition (PVD) using both argon gas pressure and bias voltage of processing condition. After the silver films were prepared, the properties in them were examined by gas pressure and bias voltage of substrate. Their morphology and crystal orientation were investigated by scanning electron microscopy (SEM) and X-ray diffractor. The properties of film were, also, studied to relate with morphology, X-ray diffraction pattern, and friction coefficient at vacuum ambient. The friction coefficient was stabilized remarkably on deposited films with increasing argon pressure for deposition. Also, the effect of increasing of the bias voltage for deposition resulted in lower friction coefficient and stability in $1.7$\times$10^{-4}$ torr. On the contrary, behavior of friction coefficient was stabilized on deposited films with decreasing the bias voltage in $1.7$\times$10^{-5}$ torr for deposition.

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DC Magnetron Sputtering법으로 제작한 Ti$_{x}$N박박의 부식특성에 미치는 코팅조건과 첨가원소의 영향 (Effects of Coating and Additivw Gases on the corrosion Properties of Ti$_{x}$N Films Preapered with DC Magneton Sputtering Method)

  • 김학동;이봉상;조성석
    • 한국표면공학회지
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    • 제31권5호
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    • pp.251-260
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    • 1998
  • Stainless Steel is being used widely for various purposes due to its good corrosion resistance. There have been many researches to produce colored stainless steel by several methods such as anodizing and ion-plating. In this experiment, we $Ti_XN$(C,O) on the films SUS304, aluminium, and glass substrates with DC magentron sputterinng system made by Leybold Hereus, and strdied the structur, corrsion and pit characture of the TiXN observed by TeM image was black and whink and white columnar hed a very fine(200$\AA$) dense sturcture,and the diffraction resistance at the $3{\times}10_6A/\textrm{cm}^2$ and $10_{10}\times{cm}^2$current density were obtained in the under-stoichiometry $Ti_xN$ compound of Ar/$N_2$(Ar:$N_2$=100:6, titanium-rich compound) and the over-stoichiometry compound of Ar/$N_2$((Ar:$N_2$=60:15) respectively. When the thiness was over 1.64$\mu\textrm{m}$, good pit resistance could be obtained and its improvement was especially affected by perfect surfaceface. Typical TiN anodic polarzation curves of very unstable corrosion were observed by $Ti_xN$ film on the glass and perfect film of 3.28$\mu\textrm{m}$ thickness.

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음극 아크 이온플레이팅법으로 코팅된 TiN 박막의 수명결정요인에 관한 연구 (A study on life decision factors of TiN films coated by Cathode Arc ion Plating Method)

  • 최석우;백영남
    • 한국표면공학회지
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    • 제33권4호
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    • pp.222-228
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    • 2000
  • The life time of cutting tool was studied in the relation with the properties of TiN coating tools. The purpose of this study is to compare the cutting conditions of the TiN coated tools with those of the non-coated tools and to find out the optimal cutting condition of the TiN coated tool. The coated tools were prepared by the sputtering process at $4$\times$10^{-3}$Torr. When the cutting speed is increased 22.2% from 90m/min, the limited life of coating bite was decreased by 60.61%, but non-coating bite was decreased by 64.05%. In the tool lifetime equation of the coated tools "a"(exponent of feed rate) was not much changed in comparison with that of the non-coated tools but "n" (exponent of tool′s life) was increased by 9.3% and "b" (exponent of cutting depth) was increased by 2.4%. It was thought to be that TiN coated tools was used for higher cutting speed than non-coated tools to improve the lifetime of the coated tools.

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XPS 분석을 통한 CrMoN 코팅의 마찰마모 거동 연구 (Tribological Behavior Analysis of CrMoN Coating by XPS)

  • 양영환;여인웅;박상진;임대순;오윤석
    • 대한금속재료학회지
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    • 제50권8호
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    • pp.549-556
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    • 2012
  • The tribological behavior of CrMoN films with respect to surface chemistry was investigated by using X-ray photoelectron spectroscopy (XPS). All of the films were prepared from a hybrid PVD system consisting of DC unbalanced magnetron (UBM) sputtering and arc ion plating (AIP) sources. The tribological property of the films was evaluated by a friction coefficient using a Ball-on-disk type tribometer. The chemistry of wear track was analyzed by energy dispersive spectroscopy (EDS) and XPS. The friction coefficient was measured to be 0.4 for the CrMoN film, which is lower than that of a monolithic CrN film. EDS and XPS results imply the formation of an oxide layer on the coating surface, which was identified as molybdenum oxide phases, known to be a solid lubricant during the wear test.

고온 액상 성형용 금형 수명 향상을 위한 TiAlCrSiN 코팅의 특성 (Characteristics of TiAlCrSiN coating to improve mold life for high temperature liquid molding)

  • 여기호;박은수;이한찬
    • 한국표면공학회지
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    • 제54권5호
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    • pp.285-293
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    • 2021
  • High-entropy TiAlCrSiN nano-composite coating was designed to improve mold life for high temperature liquid molding. Alloy design, powder fabrication and single alloying target fabrication for the high-entropy nano-composite coating were carried out. Using the single alloying target, an arc ion plating method was applied to prepare a TiAlCrSiN nano-composite coating had a 30 nm TiAlCrSiN layers are deposited layer by layer, and form about 4 ㎛-thickness of multi-layered coating. TiAlCrSiN nano-composite coating had a high hardness of about 39.9 GPa and a low coefficient of friction of less than about 0.47 in a dry environment. In addition, there was no change in the structure of the coating after the dissolution loss test in the molten metal at a temperature of about 1100 degrees.

폐수(廢水) 중(中) 유가금속(有價金屬) 회수기술(回收技術) 동향(動向) (Technology Trends of Metal Recovery from Wastewater)

  • 황용길;길상철;김종헌
    • 자원리싸이클링
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    • 제22권3호
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    • pp.91-99
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    • 2013
  • 우리나라 경제의 근간을 이루고 있는 철강산업, 자동차산업이나 전자산업에서 전기도금은 중요한 역할을 담당하고 있다. 전기도금 폐액은 전처리, 도금 및 후처리과정에서 발생하는 폐액이고 다양한 금속염을 포함한 유해한 폐수이다. 현재 일반적인 폐수는 환경법상 배수 규제치 이하로 중화처리한 후 각종 금속이 혼합된 슬러지는 매립하거나 위탁처리하고 있는데, 처리에 따른 막대한 비용이 들뿐만 아니라 매립지 부족과 유가금속 자원 낭비를 초래하고 있다. 따라서 이러한 폐수에서 유가금속을 회수하는 연구가 활발하게 진행되고 있다. 전기도금 폐액에서 금속을 선택적으로 회수하는 새로운 방법은 철산화세균을 이용하는 방법, 황화제를 이용한 황화물(MS) 회수법 및 유기용매를 이용한 용매추출법 등에 관한 연구가 진행되고 있다. 이들의 폐수처리방법을 이용하여 Fe, Cu, Zn, Ni 등의 금속이온이 혼합된 폐수에서 유가금속을 95%이상 회수하는 성과를 거두었다. 이는 전기도금공정에서 배출되는 폐수를 폐기할 것이 아니라 도시광산의 중요한 금속자원으로 활용될 것으로 기대된다.

Citrate Baths로부터 전기도금된 나노결정립 CoW 합금 박막/후막의 응력변화에 대한 연구 (Study of Stress Changes in Nanocrystalline CoW Thin/Thick Film Alloys Eletrodeposited from Citrate Baths)

  • 조익종;박덕용;인현만
    • 전기화학회지
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    • 제9권4호
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    • pp.141-150
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    • 2006
  • 도금용액 내 텅스텐 이온 농도, 전류밀도, 도금용액 pH의 변화가 CoW 박막/후막의 화학조성, 전류효율, 잔류응력, 표면형상, 미세결정 구조, 결정립 크기에 미치는 영향을 조사하기 위하여, citrate 도금용액으로부터 전기도금공정에 의해 나노결정립 CoW 박막/후막 합금을 제조하였다. CoW 박막/후막에서 전기도금된 텅스텐 함량은 도금용액내의 텅스텐 이온 농도, 전류밀도, pH를 증가시킴에 따라 증가하였다. CoW 박막/후막에서 잔류응력은 도금용액내의 텅스텐 이온 농도와 pH를 증가시킴에 따라 감소함을 관찰하였다. CoW 박막/후막은 0.02M로부터 0.08M 범위의 텅스텐 이온 농도에서 hcp Co [(100), (002)]와 hop $Co_3W$ [(002), (201)] 혼합된 상들을 나타내었다. 그러나 0.1 M로부터 0.2M 범위의 텅스텐 이온 농도에서는 비정질에 가까운 상들을 나타내었다. 5, 10, 25, $100mA{\cdot}cm^{-2}$의 전류밀도에서 CoW 박막/후막은 hop Co (002)와 hcp $Co_3W$ [(200), (002), (201)] 상들로 구성되어 있다 그러나 50과 $75mA{\cdot}cm^{-2}$의 전류밀도에서는 비정질에 가까운 상들을 나타내었다. 8.7의 도금용액 pH에서 CoW 박막/후막은 hcp Co (002)와 hcp $Co_3W$ [(200), (002), (201)]상들을 나타내었다. 그러나 8.7 이하위 도금용액 pH 에서는 비정질에 가까운 상을 나타내었다. CoW 박막/후막의 최적 전기도금조건은 0.08M의 텅스텐 이온농도, $10mA{\cdot}cm^{-2}$ 전류밀도, 8.7의 도금용액 pH로 관찰되었다.

Chromizing과 이온 질화에 의한 CrNvyaus층 형성에 관한연구 (Studies on the formation of CrN surface layer by chromizing and plasma nitriding)

  • 박홍진;이상률;양성철;이상용;김상식;한전건
    • 한국표면공학회지
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    • 제31권6호
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    • pp.334-344
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    • 1998
  • Yew coating pmccss t.o form a surface layer ol CrN phasc on mild steel (A81 1020!, AlSI Hi3, 1Cr-0.5Mo steel (ASTM A213 and Nickrl-base superalloy (Inconel 718) was developed. Surlaces of various alloys t,n.ateii by chromizing for the formation ol Cr diffusion layer was subsequently trcaled by plasma nitriding in order t.o form the hard CrS coating layer on the surfaces. This duplex plasma surface tri-atments of chromizing and plasma nitriding have induced a lormation of a duplex-lrcated surfacr hyer of approximat~ls 70-80 $\mu\textrm{m}$thickncss with a iargcly improved microiiardnrss up to approxiniateW 1500Hv(50gf). The main cause for the lage improvment in the surface hardncss is altribilted to [.he fact that CrN and $Fe_xN$ phases are created successfully by ccliromizins and plasma nilriding treatment. High tenipera1,urc wear resislance of the duplex-treated mild steel and HI3 steels at $600^{\circ}C$ was examined. Comparing the duplex-treated specimens with the specimens treated only by chromizing, the rcsults shovmi that, thc wear volume of the duplex-treated mild skcl and 1113 stcel aSt.er a wear test, at $600^{\circ}C$ were reduced hy a Iactor of 8 and 3, respectively. Characteristics of the CrS phase by duplrx treatment were compared with $CrN_x$,/TEX> film by ion plating and the wear behaviors of CrN film lormed by two different nroccsses arc nea.riy identical.

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