• Title/Summary/Keyword: ion detection

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Run-to-Run Fault Detection of Reactive Ion Etching Using Support Vector Machine (Support Vector Machine을 이용한 Reactive ion Etching의 Run-to-Run 오류검출 및 분석)

  • Park Young-Kook;Hong Sang-Jeen;Han Seung-Soo
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.10 no.5
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    • pp.962-969
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    • 2006
  • To address the importance of the process fault detection for productivity, support vector machines (SVMs) is employed to assist the decision to determine process faults in real-time. The reactive ion etching (RIE) tool data acquired from a production line consist of 59 variables, and each of them consists of 10 data points per second. Principal component analysis (PCA) is first performed to accommodate for real-time data processing by reducing the dimensionality or the data. SVMs for eleven steps or etching m are established with data acquired from baseline runs, and they are further verified with the data from controlled (acceptable) and perturbed (unacceptable) runs. Then, each SVM is further utilized for the fault detection purpose utilizing control limits which is well understood in statistical process control chart. Utilizing SVMs, fault detection of reactive ion etching process is demonstrated with zero false alarm rate of the controlled runs on a run to run basis.

Simultaneous determination of low molecular weight amines and quaternary ammonium ions by IC/ESI-MS

  • Jung, Joo-Young;Park, Han-Seok;Kim, Kang-Jin
    • Analytical Science and Technology
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    • v.20 no.3
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    • pp.255-260
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    • 2007
  • A new method for the simultaneous determination of low molecular weight amines and quaternary ammonium ions based on the separation by IC with a suppressor and the detection by MS with ESI has been developed. The method has been applied to the analysis of a mixture containing tetramethylammonium ion, tetraethylammonium ion, tetrapropylammonium ion, triethanolamine, trimethylamine and triethylamine. The constituents were separated by isocratic elution using an IonPac CS17 column, a cation-exchange column, and detected by conductivity and mass spectrometry. The newly developed method for the six components demonstrated that the repeatability in terms of relative standard deviation for three measurements was in the range of 0.1-0.5 %. The detection limits were between 0.2 and $0.9{\mu}g/mL$ by the IC/ESI-MS.

Lower the Detection Limits of Accelerator Mass Spectrometry

  • John A., Eliades;Song, Jong-Han;Kim, Jun-Gon;Kim, Jae-Yeol;O, Jong-Ju;Kim, Jong-Chan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.243-244
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    • 2013
  • Over the past 15 years, several groups have incorporated radio-frequency quadrupole (RFQ) based instruments before the accelerator in accelerator mass spectrometry (AMS) systems for ion-gas interactions at low kinetic energy (<40 eV). Most AMS systems arebased on a tandem accelerator, which requires negative ions at injection. Typically, AMS sensitivity abundance ratios for radioactive-to-stable isotope are limited to Xr/Xs >10^-15, and the range of isotopes that can be analyzed is limited because of theneed to produce rather large negative ion beams and the presence of atomic isobaric interferences after stripping. The potential of using low-kinetic energy ion-gas interactions for isobar suppression before the accelerator has been demonstrated for several negative ion isobar systems with a prototype RFQ system incorporated into the AMS system at IsoTrace Laboratory, Canada (Ontario, Toronto). Requisite for any such RFQ system applied to very rare isotope analysis is large transmission of the analyte ion. This requires proper phase-space matching between the RFQ acceptance and the ion beam phase space (e.g. 35 keV, ${\varphi}3mm$, +-35 mrad), and the ability to control the average ion energy during interactions with the gas. A segmented RFQ instrument is currently being designed at Korea Institute for Science and Technology (한국과학기술연구원, KIST). It will consist of: a) an initial static voltage electrode deceleration region, to lower the ion energy from 35 keV down to <40 eV at injection into the first RFQ segment; b) the segmented quadrupole ion-gas interaction region; c) a static voltage electrode re-acceleration region for ion injection into a tandem accelerator. Design considerations and modeling will be discussed. This system should greatly lower the detection limits of the 6 MV AMS system currently being commissioned at KIST. As an example, current detection sensitivity of 41Ca/Ca is limited to the order of 10^-15 while the 41Ca/Ca abundance in modern samples is typically 41Ca/Ca~10^-14 - 10^-15. The major atomic isobaric interference in AMS is 41K. Proof-of-principal work at IsoTrace Lab. has demonstrated that a properly designed system can achieve a relative suppression of KF3-/41CaF3- >4 orders of magnitude while maintaining very high transmission of the 41CaF3- ion. This would lower the 41Ca detection limits of the KIST AMS system to at least 41Ca/Ca~10^-19. As Ca is found in bones and shells, this would potentially allow direct dating of valuable anthropological archives and archives relevant to our understanding of the most pronounced climate change events over the past million years that cannot be directly dated with the presently accessible isotopes.

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A Educational Study on Detection of Fluoride by Borane Compounds (보레인 화합물을 이용한 불소 이온 검출에 관한 교육 연구)

  • Lee, Kang Mun
    • Korean Educational Research Journal
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    • v.37 no.1
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    • pp.33-45
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    • 2016
  • We propose a research for detection of the fluoride ion using borane compounds. Based on the Lewis acid-base reaction, we discussed the fundamental of sensing for fluoride ion. One of the important aspects in the chemistry of organoboranes is their behaviors as Lewis acids, which is a result of the vacant $2p_{\pi}$ orbital on the tricoordinate boron center. The electronic interaction between boron atoms and ${\pi}$-orbitals of donor molecules, constructed from the carbon 2p orbitals, is generally strong. Boron atoms can reach the desired octet configuration either through ${\pi}$-overlap with a suitable X or through formation of Lewis acid-Lewis base complexes.

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Ion-Based Micro Vibration Sensor for Ultra-High Frequency Vibration Detection (초고주파수 진동 감지를 위한 이온 질량기반 진동센서)

  • Kim, Kwang-Ho;Seo, Young-Ho
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.32 no.9
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    • pp.728-732
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    • 2008
  • This paper presents ion-based micro vibration sensor for the ultra-high frequency vibration detection. Presented sensor uses the motion of anion and cation in an electrolyte. Electrolyte vibration sensors have the high shock survival characteristics and a simple read-out circuit because of the small mass and own charges of ions. Presented sensor measures the induced electric potential by the mechanical-electrical coupling. It consist of electrolyte chamber and detection electrode. Electrolyte chamber was fabricated by PDMS molding. Detection electrode was made of gold evaporation on pyrex glass. Size of electrolyte chamber was designed as $600{\times}600{\times}100um$. Detection electrode had 200nm-thick and 42um-gap. In the experimental study, 5.8M sodium Chloride (NaCl) solution was used as electrolyte in 36nl-chamber. Mechanical vibration was measured from 2kHz to 4MHz.

Adaptive Window-based Detection of Narcotics and Explosives using IMS Signals in Cargo Containers (화물 컨테이너 내 IMS 신호를 이용한 적응 윈도우 기반 마약 및 폭발물 검출)

  • Ju, Heesong;Kim, Donghyun;Cho, Sungyoon;Park, Kyungwon;Kim, Yangsub;Jeon, Wongi;Kwon, Kiwon
    • Journal of Internet Computing and Services
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    • v.23 no.3
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    • pp.57-65
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    • 2022
  • International attempts to smuggle narcotics and explosives using ship or aircraft cargoes are on the rise. With the recent increase in the number of detection cases of narcotics and explosives in Korea, it is important to detect dangerous material (narcotics and explosives) through container searches at ports and airports, which are the main routes. This paper proposes a technique to detect dangerous material in cargo containers using the sampled output signal of ion mobility spectroscopy (IMS). The proposed technique estimates parameters such as a threshold, a window length, and a noise level for ion detection of the target dangerous material by using known materials in the initialization stage. The estimated parameters are used to detect the ions of the dangerous target material inside the containers. The proposed technique can be applied when the peak value of the IMS signal and the ion mobility are varying due to container environments.

Determination of Trace Anions in Concentrated Hydrogen Peroxide by Direct Injection Ion Chromatography with Conductivity Detection after Pt-Catalyzed On-Line Decomposition

  • 김도희;이보경;이동수
    • Bulletin of the Korean Chemical Society
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    • v.20 no.6
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    • pp.696-700
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    • 1999
  • A method has been developed for the determination of trace anion impurities in concentrated hydrogen peroxide. The method involves on-line decomposition of hydrogen peroxide, ion chromatographic separation and subsequent suppressed-type conductivity detection. H2O2 is decomposed in Pt-catalyst filled Gore-Tex membrane tubing and the resulting aqueous solution containing analytes is introduced to the injection valve of an ion chromatograph for periodic determinations. The oxygen gas evolving within the membrane tubing escapes freely through the membrane wall causing no problem in ion chromatographic analysis. Decomposition efficiency is above 99.99% at a flow rate of 0.4mL/min for a 30% hydrogen peroxide concentration. Analytes are quantitatively retained. The analysis results for several brands of commercial hydrogen peroxides are reported.

Accuracy and Precision of Ion Chromatography/Visible Absorbance Detection for Analyzing Hexavalent Chromium Collected on PVC Filter (Ion Chromatography/Visible Absorbance Detection을 이용한 Cr(VI) 분석의 정확도 및 정밀도 평가)

  • Shin, Yong Chul;Oh, Se Min;Paik, Nam Won
    • Journal of Korean Society of Occupational and Environmental Hygiene
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    • v.7 no.2
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    • pp.223-232
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    • 1997
  • The accuracy and precision of a modified method of NIOSH Method 7600 and EPA method 218.6 was determined for analyzing hexavalent chromium, Cr(VI), collected on PVC filter from workplace air. The method was designed to extract from Cr(VI) on PVC filter with a alkali solution, 2% NaOH/3% $Na_2CO_3$, and to analyze it using ion chromatography/visible absorbance detection(IC/VAD). The results and conclusion are as the following. 1. The peak of Cr(VI) was separated sharply on chromatogram and was linearly related with Cr(VI) concentration in sloution. The correlation coefficient was 0.9999 in a calibration curve. The limit of detection was 0.25 $0.25{\mu}g/sample$. 2. The accuracy(% recovery) was 93.3% in a set of sample($9-50{\mu}g$) stored for a day, and 100.1%($10-60{\mu}g$) in another set of samples stored for 2 hours. It is assumed that the difference in recovery by storage time was due to reduction of Cr(VI) to Cr(III). 3. The precision(coefficient of variation, CV) of the method was 0.015 in spiked samples with Cr(VI) standard solution, and 0.010 in spiked samples with plating solution from a chrome electroplating factory. The overall CV in all types of samples was 0.0013. 4. The Cr(VI) was stable in 2% NaOH/3% $Na_2CO_3$ at least for 10 hours. In conclusion, the IC/VAD method is appropriate for determining low-level Cr(VI) in workplace air containing various interferences.

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Comparison of the Ion-exchange Method and Evaporation Method for the Detection of Radioactivity in Water (수중 방사능 측정시 이온교환농축법과 증발건조법의 비교)

  • Ji, Pyung-Gook;Park, Chong-Mook;Ro, Seung-Gy
    • Journal of Radiation Protection and Research
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    • v.13 no.2
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    • pp.52-56
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    • 1988
  • An ion-exchange method for the detection of radioactivity in water using ion-exchange resin in concentrating radioactive nuclides was compared with an evaporation method. The loss of the radioactive materials in the sample treated by the ion-exchange method was less by about 20% than that by the evaporation method. In addition, the evaporation method needed about 20 hours for evaporating one liter of the sample at $70^{\circ}C$, while the ion-exchange method spent 6 hours to adsorb and adsorb the same amount of the sample on the resin. Consequently, the ion-exchange method is more effective than the evaporation method for the treatment of the radioactively contaminated water and is especially suitable for detecting the low-level radioactivity in water.

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Noise Reduction Algorithm For The Detection of Fine Ion Signals in Residual Gas Analyzer (잔류가스분석기의 질량 스펙트럼 검출 성능 향상을 위한 잡음제거 알고리즘)

  • Heo, Gyeongyong;Choi, Hun
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.68 no.1
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    • pp.102-107
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    • 2019
  • This paper proposes a method to improve the mass spectral detection performance of the residual gas analyzer. By improving the mode estimation method for setting the threshold value and improving the additive noise elimination method, it is possible to detect mass spectrums having low peak values of the threshold level difficult to distinguish from noise. Ion signal blocks for each mass index with noise removed by the improved method are effective for eliminating invalid ion signals based on the linear and quadratic fittings. The mass spectrum can be obtained from the quadratic fitted curves for the reconstructed ion signal block using only the valid ion signals. In addition, the resolution of the mass spectrum can be improved by correcting the error caused by the shift of the spectral peak position. To verify the performance of the proposed method, computer simulations were performed using real ion signals obtained from the residual gas analysis system under development. The simulation results show that the proposed method is valid.