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Copper Interconnection and Flip Chip Packaging Laboratory Activity for Microelectronics Manufacturing Engineers

  • Moon, Dae-Ho;Ha, Tae-Min;Kim, Boom-Soo;Han, Seung-Soo;Hong, Sang-Jeen
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.431-432
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    • 2012
  • In the era of 20 nm scaled semiconductor volume manufacturing, Microelectronics Manufacturing Engineering Education is presented in this paper. The purpose of microelectronic engineering education is to educate engineers to work in the semiconductor industry; it is therefore should be considered even before than technology development. Three Microelectronics Manufacturing Engineering related courses are introduced, and how undergraduate students acquired hands-on experience on Microelectronics fabrication and manufacturing. Conventionally employed wire bonding was recognized as not only an additional parasitic source in high-frequency mobile applications due to the increased inductance caused from the wiring loop, but also a huddle for minimizing IC packaging footprint. To alleviate the concerns, chip bumping technologies such as flip chip bumping and pillar bumping have been suggested as promising chip assembly methods to provide high-density interconnects and lower signal propagation delay [1,2]. Aluminum as metal interconnecting material over the decades in integrated circuits (ICs) manufacturing has been rapidly replaced with copper in majority IC products. A single copper metal layer with various test patterns of lines and vias and $400{\mu}m$ by $400{\mu}m$ interconnected pads are formed. Mask M1 allows metal interconnection patterns on 4" wafers with AZ1512 positive tone photoresist, and Cu/TiN/Ti layers are wet etched in two steps. We employed WPR, a thick patternable negative photoresist, manufactured by JSR Corp., which is specifically developed as dielectric material for multi- chip packaging (MCP) and package-on-package (PoP). Spin-coating at 1,000 rpm, i-line UV exposure, and 1 hour curing at $110^{\circ}C$ allows about $25{\mu}m$ thick passivation layer before performing wafer level soldering. Conventional Si3N4 passivation between Cu and WPR layer using plasma CVD can be an optional. To practice the board level flip chip assembly, individual students draw their own fan-outs of 40 rectangle pads using Eagle CAD, a free PCB artwork EDA. Individuals then transfer the test circuitry on a blank CCFL board followed by Cu etching and solder mask processes. Negative dry film resist (DFR), Accimage$^{(R)}$, manufactured by Kolon Industries, Inc., was used for solder resist for ball grid array (BGA). We demonstrated how Microelectronics Manufacturing Engineering education has been performed by presenting brief intermediate by-product from undergraduate and graduate students. Microelectronics Manufacturing Engineering, once again, is to educating engineers to actively work in the area of semiconductor manufacturing. Through one semester senior level hands-on laboratory course, participating students will have clearer understanding on microelectronics manufacturing and realized the importance of manufacturing yield in practice.

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CO2 Emission Structure Analysis with Environmental Input-Output Table 2000 (환경산업연관표 2000을 이용한 산업부문의 이산화탄소(CO2) 발생 분석)

  • Kim, Yoon Kyung
    • Environmental and Resource Economics Review
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    • v.15 no.3
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    • pp.425-450
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    • 2006
  • The index of energy intensity(energy/GDP) has been a primary policy concern since it can clarify industry sectors which use energy intensively and generate $CO_2$ emission heavily. Although energy intensity index may be suitable for estimating $CO_2$ emission from an isolated industry sector, we need an index for induced $CO_2$ emission since industrial activities are interconnected in terms of input and output. By employing Environmental Input-Output Table 2000, this paper analyses the flow of energy demand and pollutants after first estimating an induced $CO_2$ emissions from various industrial sectors and economic activities. The paper reports higher induced $CO_2$ emissions from industry sectors with larger energy intensity since they produces goods or services retaining relatively considerable environmental load. Furthermore, it is shown that environmental load and $CO_2$ emissions in overall economy are likely increasing when the products of energy intensive industrial sector is used as inputs for less intensive sectors' production process. The result suggests we need consistent policy efforts to reduce energy intensity to lower $CO_2$ emissions.

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The Influence of Market in Agricultural Spatial Organization (농업공간조직에서 시장의 영향)

  • Lee, Sang-Yool
    • Journal of the Korean association of regional geographers
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    • v.3 no.2
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    • pp.151-162
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    • 1997
  • Although modern versions of the traditional Von $Th{\ddot{u}}nen$ theory have contributed to a description of spatial organization in agriculture, they did not incorporate the market mechanism as an integral part of location theory. This deficiency has been indicated and new mathematical structure has been proposed elsewhere by the author. The closed model, which simultaneously considered a basic principle of supply and demand, exposed a computational complexity. Based on the problem, this study attempts to extend market mechanism in order to consider the influence of city (market) size in agricultural location theory. To theoretically explore the economic relationship in a location theory, this study simplifies agricultural activity as just two activities in one-dimensional spatial economy. The problem has been solved by equating total supply and demand of agricultural products, and then by determining each agricultural price from the relationship. All of the mathematical problems have been arranged in matrix form. First, the traditional model and closed model have been compared by quantitative comparative statics which provides the sensitivity test for each model. The results have shown that the traditional model shows a relatively excessive change in land use, besides the deficiency of a constant agricultural price. Second, the effects of the size of market town and its population increase were examined, using the closed model. In this case, the price of agricultural product is increased, and the land use is extended outward. This proves that locational rent is related to the expansion of land use. Third, environmental uncertainty was associated with the closed model, in order to further consider the difference of farmers attitude in strategic perspective. In this study, two extreme attitudes, which reflects the maximum average expected returns and the maximum guaranteed returns, were examined in their land use and their effects on the prices of agricultural products. It was shown that the two farmers attitudes can be interconnected with location theory. Due to the exogenous data, the differences in the area of land use and total quantities of agricultural products were not clearly shown in this study. However, it was shown that the land use pattern is very different. That is, maximum guaranteed return model reveals a mixed land use pattern around the market town. Basically, this study shows some spatial and economic implications related to Von $Th{\ddot{u}}nen$ model.

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Chungbuk Province's Migration Characters Based on the Centrality Indicators : Comparative Observations of 2001 and 2008 Examples (중앙성 지표에 따른 충청북도 인구이동 특성 : 2001년과 2008년 사례 비교분석)

  • Park, Ju-Hye;Hong, Sung-Ho;Ahn, Yoo-Jeong;Lee, Man-Hyung
    • Journal of the Korean association of regional geographers
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    • v.16 no.4
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    • pp.369-386
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    • 2010
  • Migration usually derived from the gap of spatial efficiency and the attractiveness difference between the origin and the destination puts forth significant impact on the regional dynamics of population. Both migration and regional planning or policy are structurally interconnected, exerting impact each other within the circular loops. In order to observe migration characters in the regional dimension, this research depends on social network analysis(SNA) methods which easily portray interrelationship and its weight between the origin and the destination. In specific, it focuses on the application of centrality indicators in order to understand the in- and out-migration patterns and visualize them with spring graphs, pinpointing the in- and out-migration administrative units. This research deals with three migration patterns in 2001 and 2008, respectively: i) in- and out-migration between the nation and Chungbuk Province; ii) in- and out-migration within Chungcheong Areas; and iii) in- and out-migration within Chungbuk Province. Judging from Chungbuk examples, the highest in-migration was recorded at Heungduck District in terms of in- and out-migration between the nation and Chungbuk Province. Seoul and Gyeonggi were two major origins towards Chungbuk Province. Within Chungcheong Areas, Daejeon produced the highest in-migration in 2001. However, Chungnam took that position in 2008.

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Observations of the Cyanobacteria Synechocystis sp. PCC 6803 using Cryo-Methods and Cryo-SEM (Cryo-Methods와 Cryo-SEM을 이용한 Cyanobacteria, Synechocystis sp. PCC 6803 미세구조 관찰)

  • Lee, Eun-Ju;Moon, Yoon-Jung;Oh, Hyun-Woo;Kim, Su-Jin;Chung, Young-Ho;Kweon, Hee-Seok;Kim, Youn-Joong
    • Applied Microscopy
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    • v.39 no.1
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    • pp.65-72
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    • 2009
  • Cryo-SEM which enables specimens to be observed in frozen form has been used to study liquid specimens in their native states. Cryo-methods, sample preparation for cryo-SEM, are quite complex and involve several discrete but vitally interconnected steps which are rapid cooling, fracturing, sectioning, etching and coating. It is important to select practical techniques and to optimize conditions of each steps considering analytic purpose and specimen characters, viz., sample dimension, water contents. In this study, etching methods and sample preparation before freezing had been studied for observation of cyanobacteria, Synechocystis sp. PCC 6803 using cryo-SEM and their cryo-SEM images were compared to Conventional SEM (CSEM) images treated by chemical fixation. We could observe the improved morphological images of the pili of the surface and membranes of Synechocystis sp. PCC 6803 and the three-dimensional architectures of their biofilm, which were difficult to observe using chemical fixation and CSEM. These results suggest that cryo-methods/cryo-SEM are useful techniques for morphological study of biological specimen.

Design and Evaluation of an Edge-Fog Cloud-based Hierarchical Data Delivery Scheme for IoT Applications (사물인터넷 응용을 위한 에지-포그 클라우드 기반 계층적 데이터 전달 방법의 설계 및 평가)

  • Bae, Ihn-Han
    • Journal of Internet Computing and Services
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    • v.19 no.1
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    • pp.37-47
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    • 2018
  • The number of capabilities of Internet of Things (IoT) devices will exponentially grow over the next years. These devices may generate a vast amount of time-constrained data. In the context of IoT, data management should act as a layer between the objects and devices generating the data and the applications accessing the data for analysis purposes and services. In addition, most of IoT services will be content-centric rather than host centric to increase the data availability and the efficiency of data delivery. IoT will enable all the communication devices to be interconnected and make the data generated by or associated with devices or objects globally accessible. Also, fog computing keeps data and computation close to end users at the edge of network, and thus provides a new breed of applications and services to end users with low latency, high bandwidth, and geographically distributed. In this paper, we propose Edge-Fog cloud-based Hierarchical Data Delivery ($EFcHD^2$) method that effectively and reliably delivers IoT data to associated with IoT applications with ensuring time sensitivity. The proposed $EFcHD^2$ method stands on basis of fully decentralized hybrid of Edge and Fog compute cloud model, Edge-Fog cloud, and uses information-centric networking and bloom filters. In addition, it stores the replica of IoT data or the pre-processed feature data by edge node in the appropriate locations of Edge-Fog cloud considering the characteristic of IoT data: locality, size, time sensitivity and popularity. Then, the performance of $EFcHD^2$ method is evaluated through an analytical model, and is compared to fog server-based and Content-Centric Networking (CCN)-based data delivery methods.

A Study on the Countermeasure Algorithm for Power System Disturbance in Large Scale Fuel Cell Generation System (대용량 연료전지발전시스템의 계통외란방지알고리즘에 관한 연구)

  • Kim, Gi-Young;Oh, Yong-Taek;Kim, Byung-Ki;Kang, Min-Kwan;Rho, Dae-Seok
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.16 no.8
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    • pp.5550-5558
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    • 2015
  • Recently, fuel cell with high energy efficiency and low CO2 emission is energetically interconnected with power system. Especially, FCGS(Fuel Cell Generation System) which usually operates at high temperature, is being developed and installed in the form of large scale system. However, it is reported that power system disturbances related to surge, harmonic and EMI have caused several problems such as malfunction of protection device and damage of control device in the large scale FCGS. In order to solve these problems, this paper presents a modeling of operation characteristics of FCGS by PSCAD/EMTDC, ETAP, P-SIM software. And also, this paper proposes countermeasure algorithms to prevent power system disturbances. From the simulation results, it is confirmed that the proposed algorithm is useful method for the stable operation of large scale FCGS.

Preparation of Flexible 3D Porous Polyaniline Film for High-Performance Electrochemical pH Sensor (고성능 전기 화학 pH 센서를 위한 유연한 3차원 다공성 폴리아닐린 필름 제조)

  • Park, Hong Jun;Park, Seung Hwa;Kim, Ho Jun;Lee, Kyoung G.;Choi, Bong Gill
    • Applied Chemistry for Engineering
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    • v.31 no.5
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    • pp.539-544
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    • 2020
  • A three-dimensional (3D) porous polyaniline (PANI) film was fabricated by a combined photo-and soft-lithography technique based on a large-area nanopillar array, followed by a controlled chemical dilute polymerization. The as-obtained 3D PANI film consisted of hierarchically interconnected PANI nanofibers, resulting in a 3D hierarchical nanoweb film with a large surface and open porous structure. Using electrochemical measurements, the resulting 3D PANI film was demonstrated as a flexible pH sensor electrode, exhibiting a high sensitivity of 60.3 mV/pH, which is close to the ideal Nernstian behavior. In addition, the 3D PANI electrode showed a fast response time of 10 s, good repeatability, and good selectivity. When the 3D PANI electrode was measured under a mechanically bent state, the electrode exhibited a high sensitivity of 60.4 mV/pH, demonstrating flexible pH sensor performance.

Investigation on Formation of Nanotube Titanium Oxide Film by Anodizing on Titanium in NaF Electrolytes (NaF 전해용액을 이용한 양극산화에 의한 타이타늄 표면의 나노튜브구조의 형성에 관한 연구)

  • Lim, Hyun-Pil;Park, Nam-Soon;Park, Sang-Won
    • Journal of Dental Rehabilitation and Applied Science
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    • v.25 no.2
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    • pp.183-190
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    • 2009
  • The aim of this study is to find the condition of forming the favorable nanotubes by anodizing with NaF and $H_3PO_4$. Machined Ti discs were used for anode, and Platinum net was used for cathode. For electrolyte, $H_3PO_4$ and NaF solution were mixed. We controlled voltage, electrolyte concentration, anodizing time and formed nanotubes on Ti discs. After that, these were washed with distilled water for 24 hours and dried in the $40^{\circ}C$ oven for 24 hours. The surface structure of specimens were analyzed. The results were as follows : At 0.5 wt % NaF, according as increasing voltage and anodizing time, early state of nucleating pores were generated. At 1.0 wt % NaF, 20 V, 20 & 25 min, well-formed nanotubes were observed. At 1.0 wt % NaF, 30 V, structure of nanotube became bigger and interconnected. At 2.0 wt % NaF, no nanotubes were formed and it was unrelated with voltage and time. At 1.0 wt % NaF, 20 V, 20 - 25 min, well-ordered nanotubes were generated on Ti discs. For the formation of favorable nanotubes, it is considered that proper parameters such as electrolyte concentration, voltage, anodizing time are necessary according to the kind of electrolytes.

Preparation and Characterization of Small Intestine Submucosa Powder Impregnated Poly(L-lactide) Scaffolds: The Application for Tissue Engineered Bone and Cartilage

  • Khang, Gilson;Rhee, John M.;Shin, Philkyung;Kim, In Young;Lee, Bong;Lee, Sang Jin;Lee, Young Moo;Lee, Hai Bang;Lee, Ilwoo
    • Macromolecular Research
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    • v.10 no.3
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    • pp.158-167
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    • 2002
  • In order to endow with new bioactive functionality from small intestine submucosa (SIS) powder as natural source to poly (L-lactide) (PLA) and poly (lactide-co-glycolide) (PLGA) synthetic biodegradable polymer, porous SIS/PLA and SIS/PLGA as natural/synthetic composite scaffolds were prepared by means of the solvent casting/salt leaching methods for the possibility of the application of tissue engineered bone and cartilage. A uniform distribution of good interconnected pores from the surface to core region was observed the pore size of 40~500 ${\mu}{\textrm}{m}$ independent with SIS amount using the solvent casting/salt leaching method. Porosities, specific pore areas as well as pore size distribution also were almost same. After the fabrication of SIS/PLA hybrid scaffolds, the wetting properties was greatly enhanced resulting in more uniform cell seeding and distribution. Five groups as PGA non-woven mesh without glutaraldehyde (GA) treatment, PLA scaffold without or with GA treatment, and SIS/PLA (Code No.3 ; 1 : 12 of salt content, (0.4 : 1 of SIS content, and 144 ${\mu}{\textrm}{m}$ of median pore size) without or with GA treatment were implanted into the back of nude mouse to observe the effect of SIS on the induction of cells proliferation by hematoxylin and eosin, and von Kossa staining for 8 weeks. It was observed that the effect of SIS/PLA scaffolds with GA treatment on bone induction are stronger than PLA scaffolds, that is to say, in the order of PLA/SIS scaffolds with GA treatment > PLA/SIS scaffolds without GA treatment > PGA nonwoven > PLA scaffolds only with GA treatment = PLA scaffolds only without GA treatment for the osteoinduction activity. The possible explanations are (1) many kinds of secreted, circulating, and extracellular matrix-bound growth factors from SIS to significantly affect critical processes of tissue development and differentiation, (2) the exposure of SIS to GA resulted in significantly calcification, and (3) peri-implant fibrosis due to covalent bonding between collagen molecule by crosslinking reaction. In conclusion, it seems that SIS plays an important role for bone induction in SIS/PLA scaffolds for the application of tissue engineering area.