• Title/Summary/Keyword: inlet surface

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Numerical Analysis on Silicon Nitride Deposition onto a Semiconductor Wafer in Atomic Layer Deposition (반도체 ALD 공정에서의 질화규소 증착 수치해석)

  • Song, Gun-Soo;Yoo, Kyung-Hoon
    • Proceedings of the KSME Conference
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    • 2007.05b
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    • pp.2032-2037
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    • 2007
  • Numerical analysis was conducted to investigate the atomic layer deposition(ALD) of silicon nitride using silane and ammonia as precursors. The present study simulated the surface reactions for as-deposited $Si_3N_4$ as well as the kinetics for the reactions of $SiH_4$ and $NH_3$on the semiconductor wafer. The present numerical results showed that the ALD process is dependent on the activation constant. It was also shown that the low activation constant leads to the self-limiting reaction required for the ALD process. The inlet and wafer temperatures were 473 K and 823 K, respectively. The system pressure is 2 Torr.

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An Experimental Study on Heat Transfer Characteristics and Pressure Drop in Micro Plated Heat Exchangers with S-shape of Microchannel (S 형상의 마이크로 채널을 가진 마이크로 판형 열교환기의 열전달 특성 및 압력강하에 관한 실험적 연구)

  • Seo, Jang-Won;Kim, Yoon-Ho;Moon, Chung-Eun;Lee, Kyu-Jung
    • Proceedings of the KSME Conference
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    • 2007.05b
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    • pp.1876-1881
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    • 2007
  • The micro plated heat exchangers were designed to transfer more heat/volume or mass than previous heat exchangers within the context of the design constraints specified. The increase of the surface-to-volume ratio results in an increase of the interfacial area. This enhances considerably the performance of a heat exchanger. This can be an important component in a wide range of applications fuel cell, aerospace, automotive, electronic system and home heating, etc). In this study, the performance evaluation of micro plated heat exchangers under the counter flows with straight and S-shaped channel are carried out. The pressure drop as well as inlet and outlet fluid temperature were measured at steady state under various operating conditions and the total heat transfer rate were also calculated.

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A Numerical Study of Thermal Performance in Ventilated Disk Brake (통기식 디스크 브레이크의 방열 성능에 관한 수치적 연구)

  • 김진택;백병준
    • Tribology and Lubricants
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    • v.17 no.5
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    • pp.358-364
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    • 2001
  • Disk brake system transforms a large amount of kinetic energy to thermal energy in a short time. As the size and speed of automotive increases in recent years, the disk brakes absorbs more thermal energy. And this thermal energy can cause an unacceptable braking performance due to the high transient temperature, that is attained at the friction surface of brake disk and pad. Although these high temperatures are one of the biggest problems. In this study, the overall thermal behavior of ventilated disk brake system was investigated by numerical method. The 3-Dimensional unsteady model was simulated by using a general purpose software package “FLUENT” to obtain the temperature distributions of disk and pad. The model includes the more realistic braking method, which repeats braking and release. The effects of several parameters such as the repeated braking, inlet air velocity and thermal conductivity on the temperature distribution were investigated.

A NUMERICAL STUDY FOR IMPROVING PERFORMANCE ON PAINT DRYING SYSTEM OF A VEHICLE (차량 도장 건조 성능 향상을 위한 수치해석 연구)

  • Lee, Seung-Jae;Choi, Jong-Rak;Hur, Nahm-Keon;Kim, Hee-Soo
    • Journal of computational fluids engineering
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    • v.16 no.2
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    • pp.75-80
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    • 2011
  • In this study, three-dimensional transient numerical simulations were carried out for a paint drying system of vehicle. The vehicle on assembly line passes through the drying system consisting of hot and cool air blow region. For the moving motion of the vehicle, moving of inlet boundary condition and MRF technique are used. The transient distribution of temperature and velocity in the drying system were predicted numerically. In order to validate the numerical results, transient distribution of the vehicle surface temperature was compared with experimental data, showing a good agreement. As a result of present study, optimal operating condition of the drying system are to be suggested.

Gas phase temperature profile measurement of an upflow OMVPE reactor by laser Raman spectroscopy (레이저 라만 분광법을 이용한 도립형 OMVPE 반응기의 기상 온도 분포 측정)

  • ;Timothy J. Anderson
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.8 no.3
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    • pp.448-453
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    • 1998
  • An inverted, stagnation point flow OMVPE reactor was studied by laser Raman spectroscopy. Pure rotational Raman scattering by the carrier gas $(N_2; or; H_2)$ was used to determine the axial centerline temperature profile in the reactor as a function of the inlet flow velocity and the rector aspect ratio. A larger temperature gradient normal to the susceptor surface was obtained with higher gas glow velocity, larger aspect ratio, and the use of a $N_2$ carrier gas.

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Air-side flow and heat transfer for a two-row lanced finned tube heat exchanger (2열 절개형 핀-관 열교환기의 공기측 유동 및 열전달 특성)

  • Bae, Jin-Hyo;Lee, Jae-Heon
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.22 no.1
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    • pp.79-92
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    • 1998
  • A numerical study has been performed to obtain the air-side flow and heat transfer characteristics for a two-row lanced finned tube heat exchanger with 7 mm tube outer diameter. The increases of dimensionless local heat flux at the leading edge of slit and bottom surface of the fin were noticed. The temperature of air at downstream of the 2nd row of the lanced fin becomes more uniform than that of the plain fin because the mixing of energy increases by the slit and the side-slit. As the inlet velocity increases, the contribution of the 1st row to heat transfer decreases and that of 2nd row increases.

Hydrodynamic Characteristics of Stratified Flow at a Y-Junction (Y자형 혼합지점에서의 성층류유동 특성)

  • ;;Lee, Sang Yong
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.19 no.12
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    • pp.3360-3371
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    • 1995
  • Hydrodynamic characteristics of a stratified flow at a Y-junction were examined analytically. Gas is supplied through the main horizontal channel and liquid is introduced into the gas stream from the Y-shaped bottom branch. Analysis was performed with irrational flow and inviscid fluid assumptions. The Stokes' inverse transformation technique was adopted to convert the real x-y plane into the x-.psi. plane. The potential flow equation was solved numerically in the transformed (x-.psi.) plane and the interface profile, pressure distribution and the streamlines were obtained. The effects of the inlet conditions, injection angle and the gravity on the flow characteristics were also examined. To check the validity of the present method, the previous resultant the two-dimensional obtuse wedge flow was compared. The inverse transformation technique turned out to be also very useful to predict the hydrodynamic characteristics of a stratified flow with the pressure variation at a Y-shaped mixing junction.

Transient EHL Analysis on Spur Gear Teeth with Consideration of Gear Kinematics

  • Koo, Young-Pil
    • Journal of Mechanical Science and Technology
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    • v.18 no.8
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    • pp.1319-1326
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    • 2004
  • Transient 3-dimensional elasto-hydrodynamic lubrication (EHL) analysis is performed on the contacting teeth surfaces of involute spur gears. Kinematics of the gear and the pinion are taken into account to get accurate geometric clearance around the EHL region of the contacting teeth. The surface pressure and film thickness distribution for the whole contact faces in a lubricated condition at several time steps are obtained through the analysis. Besides the pressure spike at the outlet region, a representative phenomenon in EHL regime, the pressure at the inlet region is slightly higher than that of the center region. The film thickness of transient condition is thicker than that of steady condition.

Unsteady Flow Fields in a Rotor Blade Passage by Wake Passing (회전익 채널내 후류장에 의한 비정상 유동특성에 관한 연구)

  • Kim, Youn J.;Jeon, Y.-R
    • The KSFM Journal of Fluid Machinery
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    • v.2 no.4 s.5
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    • pp.16-23
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    • 1999
  • The characteristic of unsteady flowfields on gas turbine, particularly on a rotor blade surface has been numerically investigated. The unsteady flow in a rotor blade passage as a result of wake/blade interaction is modeled by the inviscid flow approach, and solved by Euler equations using a time accurate marching scheme. Unsteady flow in the blade passage is induced by periodically moving a wake model across the passage inlet. The wake model used in this study is the Gaussian wate model in which the wake flow is assumed to be parallel with uniform static pressure and uniform relative total enthalpy. Numerical results show that for the case of Ps/Pr=1.5, the velocity and pressure distribution on the blade surfaces have much more complex profiles than for the case of Ps/Pr=1.0.

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Design Consideration for Tunnel Spillway related to Hydraulic Characteristics (수리특성을 고려한 수로터널 설계)

  • Yoon, Dong-Duk;Kim, Tae-Hyok;Lee, Jung-Woo;Oh, Myung-Ryul
    • Proceedings of the Korean Geotechical Society Conference
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    • 2006.10a
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    • pp.161-168
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    • 2006
  • The recent unpredictable weather condition, especially abnormal heavy precipitation which is on the verge of PMF, made implement more rigorous design standard. Following these trends, the idea of additional auxiliary spillway, most of them are tunnel around existing one, is adopted to many sites. Tunnel spillway, having free water table is generally consisted of several compartments such as inlet, transition, inclined, curved and stilling parts. It may has some technical problems to be considered. Among them, the surface deterioration due to cavitation is reported many times in the part of irregularities on lining. Including this kind of problem, several technical considerations for tunnel spillway will be handled in this paper during design procedure.

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