Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2007.05b
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- Pages.2032-2037
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- 2007
Numerical Analysis on Silicon Nitride Deposition onto a Semiconductor Wafer in Atomic Layer Deposition
반도체 ALD 공정에서의 질화규소 증착 수치해석
- Published : 2007.05.30
Abstract
Numerical analysis was conducted to investigate the atomic layer deposition(ALD) of silicon nitride using silane and ammonia as precursors. The present study simulated the surface reactions for as-deposited