Dielectric Characteristics through 2D-correlation Analysis of SiOCH Thin Film deposited by BTMSM/O2 High Flow Rates (BTMSM/O2 고유량으로 증착된 SiOCH 박막의 2차원 상관관계 분석을 통한 유전특성 연구)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.21 no.6
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- pp.544-551
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- 2008