• 제목/요약/키워드: in situ detection

검색결과 314건 처리시간 0.026초

HSS을 적용한 STI CMP 공정에서 EPD 특성 (A study of EPD for Shallow Trench Isolation CMP by HSS Application)

  • 김상용;김용식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 춘계학술대회 논문집 전자세라믹스 센서 및 박막재료 반도체재료 일렉트렛트 및 응용기술
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    • pp.35-38
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    • 2000
  • In this study, the rise throughput and the stability in fabrication of device can be obtained by applying of CMP process to STI structure in 0.l8um semiconductor device. Through reverse moat pattern process, reduced moat density at high moat density, STI CMP process with low selectivity could be to fit polish uniformity between low moat density and high moat density. Because this reason, in-situ motor current end point detection method is not fit to the current EPD technology with the reverse moat pattern. But we use HSS without reverse moat pattern on STI CMP and take end point current sensing signal.[1] To analyze sensing signal and test extracted signal, we can to adjust wafer difference within $110{\AA}$.

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비강 및 부비동의 반전성 유두종에서 인형유두종 및 Ebstein-Barr 바이러스의 검출 (Detection of Human papillomavirus & Ebstein-Barr virus in Sinonasal Inverted papilloma)

  • 조재식;임상철;백준;정형수;신명석
    • 대한기관식도과학회지
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    • 제5권1호
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    • pp.49-54
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    • 1999
  • The etiology of inverted papilloma(IP) remains unknown, but several studies have reported that Human Papillomavirus(HPV) may play a role in the pathogensis of sinonasal inverted papilloma(IP). And recent reports demonstrate the possible etiologic role of Epstein-Barr virus (EBV) in sinonasal IP. The aim of this study is to detect HPV and EBV in sinonasal IP, to examine the relationship between HPV subtype and sinonasal IP, to investigate the relation between HPV and EBV. We reviewed 30 cases of sinonasal IP(simple IP 19 cases, IP with dysplasia 8 cases, IP with squamous cell carcinoma 3 cases). Paraffin embedded archival tissue was used in this study. Detection of HPV, EBV were examined by in situ hybridization(ISH) using HPV type 6/11, 16/18, 31/33/35 DNA probe and EBER probe. The HPV was detected in 6(20%) out of 30 cases. The HPV 6/11 was dectected in 4 out of 19 cases of simple IP, HPV 16/18 in 1, HPV 31/33/35 in 1 out of 8 cases of IP with dysplasia respectively. The EBV was not detected in 30 cases. HPV may play a role in the pathogensis of sinonasal inverted papilloma. But EBV is not a etiopathologic factor to be considered in the development of sinonasal IP.

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Determination of End Point for Direct Chemical Mechanical Polishing of Shallow Trench Isolation Structure

  • Seo, Yong-Jin;Lee, Kyoung-Jin;Kim, Sang-Yong;Lee, Woo-Sun
    • KIEE International Transactions on Electrophysics and Applications
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    • 제3C권1호
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    • pp.28-32
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    • 2003
  • In this paper, we have studied the in-situ end point detection (EPD) for direct chemical mechanical polishing (CMP) of shallow trench isolation (STI) structures without the reverse moat etch process. In this case, we applied a high selectivity $1n (HSS) that improves the silicon oxide removal rate and maximizes oxide to nitride selectivity Quite reproducible EPD results were obtained, and the wafer-to-wafer thickness variation was significantly reduced compared with the conventional predetermined polishing time method without EPD. Therefore, it is possible to achieve a global planarization without the complicated reverse moat etch process. As a result, the STI-CMP process can be simplified and improved using the new EPD method.

이미지 기반 인공지능을 활용한 현장 적용성 연구 (Application of artificial intelligence-based technologies to the construction sites)

  • 나승욱;허석재;노영숙
    • 한국건축시공학회:학술대회논문집
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    • 한국건축시공학회 2022년도 봄 학술논문 발표대회
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    • pp.225-226
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    • 2022
  • The construction industry, which has a labour-intensive and conservative nature, is exclusive to adopt new technologies. However, the construction industry is viably introducing the 4th Industrial Revolution technologies represented by artificial intelligence, Internet of Things, robotics and unmanned transportation to promote change into a smart industry. An image-based artificial intelligence technology is a field of computer vision technology that refers to machines mimicking human visual recognition of objects from pictures or videos. The purpose of this article is to explore image-based artificial intelligence technologies which would be able to apply to the construction sites. In this study, we show two examples which is one for a construction waste classification model and another for cast in-situ anchor bolts defection detection model. Image-based intelligence technologies would be used for various measurement, classification, and detection works that occur in the construction projects.

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The Value of I-Scan Image-Enhanced Endoscopy in the Diagnosis of Vocal Cord Leukoplakia

  • Lee, Young Chan;Eun, Young-Gyu;Park, Il-Seok
    • 대한후두음성언어의학회지
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    • 제29권2호
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    • pp.98-102
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    • 2018
  • Background and Objectives : Detection of vascular abnormalities in vocal cord (VC) leukoplakia is important for the diagnosis of neoplastic change of the mucosa. The aim of this study was to investigate the value of i-scan in the differential diagnosis of VC leukoplakia based on visualization of abnormal vascular features. Material and Methods : Fifty-two patients with leukoplakia were enrolled in the study. Images of their larynx obtained using conventional white light endoscopy and an i-scan-enhanced endoscopy (Pentax DEFINA EPK-3000 Video Processors, with Pentax VNLJ10) were reviewed. The microvascular features of the lesions and vascular changes were analyzed and the results were compared with the histopathologic diagnosis. Results : Among the 52 leukoplakia patients, 7 (13.5%) patients had squamous hyperplasia, 10 (19.3%) mild dysplasia, 2 (3.8%) moderate dysplasia, 14 (26.9%) severe dysplasia, 4 (7.7%) carcinoma in situ, and 15 (28.8%) invasive squamous cell carcinoma on histopathologic examination. Using i-scan-enhanced endoscopy, abnormal vascular change with neoplastic neoangiogenesis was detected in most cases of malignant VC lesion [severe dysplasia : 9/14 (64.3%), carcinoma in situ: 2/4 (50.0%), and invasive squamous cell carcinoma : 11/15 (73.4%)]. Conclusion : i-scan-enhanced endoscopy is a useful optical technique for the diagnosis of VC leukoplakia. Our results suggest that i-scan may be a promising diagnostic tool in the early detection of laryngeal cancer.

In Situ Identification of Cyanobacteria

  • Ahn Tae-Seok;Hong Sun-Hee;Chung Hyun-Mi;Belkova Natalia L.
    • 한국미생물학회:학술대회논문집
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    • 한국미생물학회 2001년도 추계학술대회
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    • pp.121-127
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    • 2001
  • Seven cyanobacteria strains (Anabaena macrospora NIERl0016, Oscillatoria sp. NIER10042, Microcystis aeruginosa NIER10015, M. ichtyoblabe BIER10025, BIER10040, M. novacekii NIER10029, M. wesenbergii NIER10068) were tested with four rRNA - targeted oligonucleotide probes labelled with horseradish peroxidase (HRP) and specific for cyanobacteria. Non- fluorescent detection of hybridization signal was used. The hybridization with artificial mixture of cyanobacteria have shown the possibility to use 2 species-specific probes in duplicate hybridization and detection with different colored substrates.

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Highly Sensitive Biological Analysis Using Optical Microfluidic Sensor

  • Lee, Sang-Yeop;Chen, Ling-Xin;Choo, Jae-Bum;Lee, Eun-Kyu;Lee, Sang-Hoon
    • Journal of the Optical Society of Korea
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    • 제10권3호
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    • pp.130-142
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    • 2006
  • Lab-on-a-chip technology is attracting great interest because the miniaturization of reaction systems offers practical advantages over classical bench-top chemical systems. Rapid mixing of the fluids flowing through a microchannel is very important for various applications of microfluidic systems. In addition, highly sensitive on-chip detection techniques are essential for the in situ monitoring of chemical reactions because the detection volume in a channel is extremely small. Recently, a confocal surface enhanced Raman spectroscopic (SERS) technique, for the highly sensitive biological analysis in a microfluidic sensor, has been developed in our research group. Here, a highly precise quantitative measurement can be obtained if continuous flow and homogeneous mixing condition between analytes and silver nano-colloids are maintained. Recently, we also reported a new analytical method of DNA hybridization involving a PDMS microfluidic sensor using fluorescence energy transfer (FRET). This method overcomes many of the drawbacks of microarray chips, such as long hybridization times and inconvenient immobilization procedures. In this paper, our recent applications of the confocal Raman/fluorescence microscopic technology to a highly sensitive lab-on-a-chip detection will be reviewed.

High-Performance Liquid Chromatographic Determination of Cyclosulfamuron Residues in Soil, Water, Rice Grain and Straw

  • Lee, Young-Deuk;Kwon, Chan-Hyeok
    • 한국환경농학회지
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    • 제23권4호
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    • pp.251-257
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    • 2004
  • Analytical methods were developed to determine cyclosulfamuron residues in soil, water, rice grain and straw using high-performance liquid chromatography (HPLC) with ultraviolet absorption detection. In these methods, cyclosulfamuron was extracted with aqueous $Na_2HPO_4$/acetone and acetone/methanol mixture from soil and rice samples respectively. Liquid-liquid partition coupled with ion-associated technique, Florisil column chromatography, and solid-phase extraction (SPE) were used to separate cyclosulfamuron from interfering co-extractives prior to HPLC analysis. For water sample, the residue was enriched in $C_{18}$-SPE cartridge, cleaned up in situ, and directly subjected to HPLC. Reverse-phase HPLC under ion-suppression was successfully applied to determine cyclo-sulfamuron in sample extracts with the detection at its ${\lambda}_{max}$ (254 nm). Recoveries from fortified samples averaged $87.8{\pm}7.1%$ (n=12), $97.3{\pm}7.2%$ (n=12), $90.8{\pm}6.6%$ (n=6), and $78.5{\pm}6.7%$ (n=6) for soil, water, rice grain and straw, respectively. Detection limits of the methods were 0.004 mg/kg, 0.001 mg/L, 0.01 mg/kg and 0.02 mg/kg for soil, water, rice grain and straw samples, respectively.

Armeniacae Semen Extract Induces Apoptosis in Mouse N2a Neuroblastoma Cells

  • Kim, Beum-Seuk;Song, Yun-Kyung;Lim, Hyung-Ho
    • 대한한의학회지
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    • 제26권4호
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    • pp.12-21
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    • 2005
  • Objectives: In the present study, we investigated whether an aqueous extract of Armeniacae semen induces apoptotic neuronal cell death upon mouse N2a neuroblastoma cells. Methods: 1. Cell viability was determined by using 3-(4,5-dimethylthiazol-2-yl)-2,5-diphenyltetrazolium bromide (MTI) assay. 2. For in situ detection of apoptotic cells, terminal deoxynucleotidyl transferase (TdT)-mediated dUTP nick end labeling (TUNEL) assay, 4,6-diamidino-2-phenylindole (DAPI) staining. 3. The fraction of cells was revealed by flow cytometric analysis used that. 4. For detection of apoptotic DNA cleavage, DNA fragmentation assay was performed. 5. For detection of bax and bcl-2, Western blot analysis was performed. 6. Caspase enzyme activity was measured using caspase-3 assay. Results: From the present results, N2a neuroblastoma cells treated with Armeniacae semen extract exhibited several characteristics of apoptosis. A treatment of Armeniacae semen extract was shown to increase the expression of Bax, a proapoptotic protein, and the treatment decreased the expression of Blc2, an anti-apoptotic protein. In addition, Armeniacae semen extract increased the caspase-3 enzyme activity. Conclusions: The present results show that Armeniacae semen extract induces apoptotic cell death in mouse N2a neuroblastoma cells.

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Holder exponent analysis for discontinuity detection

  • Sohn, Hoon;Robertson, Amy N.;Farrar, Charles R.
    • Structural Engineering and Mechanics
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    • 제17권3_4호
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    • pp.409-428
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    • 2004
  • In this paper, a Holder exponent, a measure of the degree to which a signal is differentiable, is presented to detect the presence of a discontinuity and when the discontinuity occurs in a dynamic signal. This discontinuity detection has potential applications to structural health monitoring because discontinuities are often introduced into dynamic response data as a result of certain types of damage. Wavelet transforms are incorporated with the Holder exponent to capture the time varying nature of discontinuities, and a classification procedure is developed to quantify when changes in the Holder exponent are significant. The proposed Holder exponent analysis is applied to various experimental signals to reveal underlying damage causing events from the signals. Signals being analyzed include acceleration response of a mechanical system with a rattling internal part, acceleration signals of a three-story building model with a loosing bolt, and strain records of an in-situ bridge during construction. The experimental results presented in this paper demonstrate that the Holder exponent can be an effective tool for identifying certain types of events that introduce discontinuities into the measured dynamic response data.