• 제목/요약/키워드: high aspect ratio structure

검색결과 192건 처리시간 0.029초

나노 X-선 쉐도우 마스크를 이용한 고폭비의 나노 구조물 제작 (A Novel Fabrication Method of the High-Aspect-Ratio Nano Structure (HAR-Nano Structure) Using a Nano X-Ray Shadow Mask)

  • 김종현;이승섭;김용철
    • 대한기계학회논문집A
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    • 제30권10호
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    • pp.1314-1319
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    • 2006
  • This paper describes the novel fabrication method of the high-aspect-ratio nano structure which is impossible by conventional method using a shadow mask and a Deep X-ray Lithography (DXRL). The shadow mask with $1{\mu}m-sized$ apertures is fabricated on the silicon membrane using a conventional UV-lithography. The size of aperture is reduced to 200nm by accumulated low stress silicon nitride using a LPCVD (low pressure chemical vapor deposition) process. The X-ray mask is fabricated by depositing absorber layer (Au, $3{\mu}m$) on the back side of nano shadow mask. The thickness of an absorber layer must deposit dozens micrometers to obtain contrast more than 100 for a conventional DXRL process. The thickness of $3{\mu}m-absorber$ layer can get sufficient contrast using a central beam stop method, blocking high energy X-rays. The nano circle and nano line, 200nm in diameter in width, respectively, were demonstrated 700nm in height with a negative photoresist of SU-8.

2 차원 평판가공법을 이용한 고세장비 미세 격벽어레이구조물 가공 (Study on Machining High-Aspect Ratio Micro Barrier Rib Array Structures using Orthogonal Cutting Method)

  • 박언석;최환진;김한희;전은채;제태진
    • 한국정밀공학회지
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    • 제29권12호
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    • pp.1272-1278
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    • 2012
  • The micro barrier rip array structures have been applied in a variety of areas including as privacy films, micro heat sinks, touch panel and optical waveguide. The increased aspect ratio (AR) of barrier rip array structures is required in order to increase the efficiency and performance of these products. There are several problems such as burr, defect of surface roughness and deformation and breakage of barrier rip structure with machining high-aspect ratio micro barrier rip array structure using orthogonal cutting method. It is essential to develop technological methods to solve these problems. The optimum machining conditions for machining micro barrier rip array structures having high-aspect ratio were determined according to lengths ($200{\mu}m$ and $600{\mu}m$) and shape angles ($2.89^{\circ}$ and $0^{\circ}$) of diamond tool, overlapped cutting depths ($5{\mu}m$ and $10{\mu}m$), feed rates (100 mm/s) and three machining processes. Based on the optimum machining conditions, micro barrier rib array structures having aspect ratio 30 was machined in this study.

Mechanical Properties of Steam Cured High-Strength Steel Fiber-Reinforced Concrete with High-Volume Blast Furnace Slag

  • Yang, Jun-Mo;Yoo, Doo-Yeol;Kim, You-Chan;Yoon, Young-Soo
    • International Journal of Concrete Structures and Materials
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    • 제11권2호
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    • pp.391-401
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    • 2017
  • In this study, the effects of water-to-binder (W/B) ratio and replacement ratio of blast furnace slag (BFS) on the compressive strength of concrete were first investigated to determine an optimized mixture. Then, using the optimized high-strength concrete (HSC) mixture, hooked steel fibers with various aspect ratios and volume fractions were used as additives and the resulting mechanical properties under compression and flexure were evaluated. Test results indicated that replacement ratios of BFS from 50 to 60% were optimal in maximizing the compressive strength of steam-cured HSCs with various W/B ratios. The use of hooked steel fibers with the aspect ratio of 80 led to better mechanical performance under both compression and flexure than those with the aspect ratio of 65. By increasing the fiber aspect ratio from 65 to 80, the hooked steel fiber volume content could be reduced by 0.25% without any significant deterioration of energy absorption capacity. Lastly, complete material models of steel-fiber-reinforced HSCs were proposed for structural design from Lee's model and the RILEM TC 162-TDF recommendations.

장방형 해양구조물의 변장비에 따른 와방출 특성에 관한 연구 (A Study on Vortex Shedding Characteristics of Rectangular Marine Structure With Aspect Ratio)

  • 김진구;조대환
    • 해양환경안전학회지
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    • 제5권2호
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    • pp.35-44
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    • 1999
  • High negative pressure coefficient is formed in the corner of the bluff body structures. For many curtain wall designers this phenomena is of interest because this high negative pressure coefficient is adopted in structural calculation. The present study is aimed to investigate shedding vortex characteristics of two-dimensional rectangular prism flow. Unsteady calculation by finite difference method based upon SOLA is carried out for three aspect ratios(1:1, 1:2, 1:3) of Re=10$^4$ in viscous incompressible flow within infinite domain. Fluctuation of velocity components at various pick-up points and time variation of drag and lift coefficients are analysed by FFT method to reveal shedding vortex frequency patterns. At aspect ratio 1:1, one primary Strouhal number appears for about all pick-up points. At aspect ratio 1:2, two representative Strouhal numbers are classified by pick-up positions and their flows show two different reattachment patterns. For aspect ratio 1:3, frequency spectrum maintains multiple peaks.

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유체-구조 연계 해석기법을 이용한 세장비가 큰 비행체 날개의 공탄성 해석 (Fluid-Structure Interaction Analysis of High Aspect Ratio Wing for the Prediction of Aero-elasticity)

  • 이기두;이영신;이대열;이인원
    • 한국항공우주학회지
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    • 제38권6호
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    • pp.547-556
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    • 2010
  • 항공기의 안전성 확보 및 투하되는 탄의 정확도 증대를 위한 새로운 개념의 활공비행체 개발이 많은 기업에서 진행 중에 있다. 항공기의 장착 공간 및 활공거리 증대를 고려하여 세장비가 큰 전개되는 날개를 채택하는 것이 일반적이다. 큰 세장비의 날개 구조물은 상대적으로 낮은 강성에 의하여 과도한 탄성변형 뿐 아니라 플러터 발생의 가능성이 높아지게 된다. 본 연구는 큰 세장비 날개에 대하여 유체-공력 연계기법을 이용, 구조변형에 의한 공력특성의 변화 및 플러터 발생가능성에 대하여 검토하였다. 공기력 계산을 위하여 FLUENT 코드가 구조 동특성 해석을 위하여 ABAQUS 상용코드가 사용되었으며, 국부지지 방사기저함수로 구성된 Code-bridge를 이용한 입력 자료의 보간 및 사상을 수행하였다. 해석 결과 고려된 활공 조건에서 구조 변형에 의한 공력 특성의 변화가 발생하는 것이 관측되었으며, 이에 의한 진동도 계속적으로 발생되는 것으로 표현되었다.

압전 에너지 하베스트를 위한 마이크로 필라 공정 연구 (Processing Study for the Micro Pillar for Piezoelectric Energy Harvest)

  • 윤석우;이규탁;이경수;정순종;김민수;조경호;고중혁
    • 한국전기전자재료학회논문지
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    • 제23권8호
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    • pp.601-604
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    • 2010
  • In this study, the piezoelectric energy harvester was investigated employing the pillar structure with the diameter size of 50~500 um. Usually, the aspect ratio between the height and diameter was related with the piezoelectric performance. High aspect ratio was showed the low electric noise and high piezoelectric properties than low aspect ratio. Therefore, we have selected the Su-8 photo-resist and modified lithography process to manufacture the pillar structure with height above the 250 ${\mu}m$. In this presentation, we will report the process and properties of micro pillar structure based on the PMN-PZT (Pb$(Mg_{1/3}Nb_{2/3})O_3$-PbZrTiO$_3$) materials.

마이크로 분말사출성형에서 바인더 물성이 피드스탁 및 성형공정에 미치는 영향에 관한 연구 (A study on the effect of binder properties on feedstock and micro powder injection molding process)

  • 이원식;김용대
    • Design & Manufacturing
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    • 제11권3호
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    • pp.1-7
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    • 2017
  • The fabrication process of micro pattern structure with high precision and high aspect ratio using powder injection molding (PIM) is developed. In the PIM process, the metal powder is mixed with the binder systems and the mixture is injected into the metal mold. The injection molded green parts are debinded and sintered to reach final shape and properties. In this method, the optimization of physical properties such as fluidity and strength of the binder system is essential for perfect filling the high aspect ratio micro-pattern. For this purpose, the correlation between the properties of the binder system and feedstock and ${\mu}-PIM$ process was investigated, and a binder system with low viscosity at low temperature(about $110^{\circ}C$) and high strength after cooling was investigated and applied. Employing this process, high precision parts with line type micro pattern structure which has pattern size $160{\mu}m$ and aspect ratio more than 2 can be manufactured.

Nonlinear Aeroelastic Analysis of a High-Aspect-Ratio Wing with Large Deflection Effects

  • Kim, Kyung-Seok;Lim, In-Gyu;Lee , In;Yoo, Jae-Han
    • International Journal of Aeronautical and Space Sciences
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    • 제7권1호
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    • pp.99-105
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    • 2006
  • In this study, nonlinear static and dynamic aeroelastic analyses for a high-aspect-ratio wing have been performed. To achieve these aims, the transonic small disturbance (TSD) theory for the aerodynamic analysis and the large deflection beam theory considering a geometrical nonlinearity for the structural analysis are applied, respectively. For the coupling between fluid and structure, the transformation of a displacement from the structural mesh to the aerodynamic grid is performed by a shape function which is used for the finite element and the inverse transformation of force by work equivalent load method. To validate the current method, the present analysis results of a high-aspect-ratio wing are compared with the experimental results. Static deformations in the vertical and torsional directions caused by an angle of attack and gravity loading are compared with experimental results. Also, static and dynamic aeroelastic characteristics are investigated. The comparisons of the flutter speed and frequency between a linear and nonlinear analysis are presented.