Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Study on Machining High-Aspect Ratio Micro Barrier Rib Array Structures using Orthogonal Cutting Method

2 차원 평판가공법을 이용한 고세장비 미세 격벽어레이구조물 가공

  • Park, Eun-Suk (Dept. of NanoMechatronics, University of Science and Technology) ;
  • Choi, Hwan-Jin (Dept. of NanoMechatronics, University of Science and Technology) ;
  • Kim, Han-Hee (Dept. of NanoManufacturing Technology, Korea Institute of Machinery and Materials) ;
  • Jeon, Eun-Chae (Dept. of NanoManufacturing Technology, Korea Institute of Machinery and Materials) ;
  • Je, Tae-Jin (Dept. of NanoMechatronics, University of Science and Technology)
  • 박언석 (과학기술연합대학원대학교 나노메카트로닉스 전공) ;
  • 최환진 (과학기술연합대학원대학교 나노메카트로닉스 전공) ;
  • 김한희 (한국기계연구원 나노공정연구실) ;
  • 전은채 (한국기계연구원 나노공정연구실) ;
  • 제태진 (과학기술연합대학원대학교 나노메카트로닉스 전공)
  • Received : 2012.10.16
  • Accepted : 2012.10.23
  • Published : 2012.12.01
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Abstract

The micro barrier rip array structures have been applied in a variety of areas including as privacy films, micro heat sinks, touch panel and optical waveguide. The increased aspect ratio (AR) of barrier rip array structures is required in order to increase the efficiency and performance of these products. There are several problems such as burr, defect of surface roughness and deformation and breakage of barrier rip structure with machining high-aspect ratio micro barrier rip array structure using orthogonal cutting method. It is essential to develop technological methods to solve these problems. The optimum machining conditions for machining micro barrier rip array structures having high-aspect ratio were determined according to lengths ($200{\mu}m$ and $600{\mu}m$) and shape angles ($2.89^{\circ}$ and $0^{\circ}$) of diamond tool, overlapped cutting depths ($5{\mu}m$ and $10{\mu}m$), feed rates (100 mm/s) and three machining processes. Based on the optimum machining conditions, micro barrier rib array structures having aspect ratio 30 was machined in this study.

Keywords

References

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