• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.262.2-262.2
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• 2014

Plasma processing is an essential process for pattern etching and thin film deposition in nanoscale semiconductor device fabrication. It is necessary to maintain plasma chamber in steady-state in production. In this study, we determined plasma chamber state with residual gas analysis with self-plasma optical emission spectroscopy. Residual gas monitoring of fluorocarbon plasma etching chamber was performed with self-plasma optical emission spectroscopy (SPOES) and various chemical elements was identified with a SPOES system which is composed of small inductive coupled plasma chamber for glow discharge and optical emission spectroscopy monitoring system for measuring optical emission. This work demonstrates that chamber state can be monitored with SPOES and this technique can potentially help maintenance in production lines.

• 반도체디스플레이기술학회지
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• 제20권3호
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• pp.27-31
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• 2021

VI probe, which is one of various in-situ plasma monitoring sensor, is frequently used for in-situ process monitoring in mass production environment. In this paper, we correlated the plasma etch results with VI probe data with the small amount of gas flow rate changes to propose usefulness of the VI probe in real-time process monitoring. Several different sized contact holes were employed for the etch experiment, and the etched profiles were measured by scanning electron microscope (SEM). Although the shape of etched hole did not show satisfactory relationship with VI probe data, the chamber status changed along the incremental/decremental modification of the amount of gas flow was successfully observed in terms of impedance monitoring.

• 한국농공학회논문집
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• 제64권5호
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• pp.1-8
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• 2022

Hydrogen can be produced by gasification of biomass and other combustible fuels. Depending on oxydant agents, syngas or producer gas compositions become quite different. Since biomass has limited amount of hydrogen including moisture in it, the hydrogen concentration in the syngas is about 15% when air is supplied for oxidant agent. Experiments were conducted to investigate the channges in hydrogen concentrations in syngas with different oxidant agent conditions, fuel conditions, and external heat supply. Allothermal reaction resulted in higher concentrations of hydrogen with the supply of steam over air, reaching over 60%. Hydrogen is produced by water-gas and water-gas shift reactions. These reactions are endothermic and require enough heat. Autothermal reaction occurred in the downdraft gasifier used in the experiment did not provide enough heat in the reactions for hydrogen production. Steam seems a more desirable oxidant agent in producing the syngas with higher concentrations of hydrogen from biomass gasifications since nitrogen is included in syngas when air is used.

• 한국가스학회지
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• 제9권4호
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• pp.44-49
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• 2005

본 연구에서는 Steam Reforming수소 제조설비에 대한 안전성 평가를 수행하여 설비의 위험성을 체계적으로 검토하였다 안전성 평가 방법으로는 정성적 안전성 기법인 Hazard & Operability Analysis와 Failure Mode & Effect Analysis를 사용하였다. HAZOP을 통하여 수소 제조설비의 flow, pressure, temperature 등의 주요 parameter들에 대하여 의미 있는 guide word를 적용하여 비정상 상태(deviation)를 만들어 단계별로 공정상의 인간 실수나 잘못된 운전 등의 잠재 위험을 분석하였다. FMEA를 이용하여 설비 내 장치의 파손 및 기능 실패 등 주로 부품의 불량이나 고장 등에 대한 분석을 하여 그에 따른 영향 및 대처방안을 제시하였고, RPN값 계산을 통하여 상대적 위험순위를 결정하여 보았다.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2007년도 춘계학술대회
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• pp.81-85
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• 2007

A fluidized bed reactor is made with quartz. The size of FBR is 0.055 m I.D. and 1.0 m in height. The FBR was employed for the thermocatalytic decomposition of propane to produce hydrogen without $CO_{2}$. The fluidized bed was proposed for the continuous withdraw of product carbons from the reactor. Carbon black DCC-N330 is used to decompose the propane gas. The propane decomposition reaction over carbon black catalyst in a fluidized bed reactor was carried out the temperature range of 600 ${\sim}$ 800 $^{\circ}C$, propane gas velocity of 1.0 ${\sim}$ 4.0$U_{mf}$($1U_{mf}$ = 0.61cm/s) and the catalyst loading of 100 ${\sim}$ 200g. Production of $H_{2}$ such as other reaction temperature, gas velocity, catalytic loading on the reaction rates was investigated. The carbon depositied on the catalyst surface was observed by FE-SEM. The particle size of the carbon black was observed by Particle size analyzer. Resulting production in the experiment was not only hydrogen but also several by-products such as methane, ethylene, ethane, and propylene.

• Advances in environmental research
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• 제7권2호
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• pp.73-85
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• 2018

The anaerobically digestion and agricultural application of organic wastes was conducted using food wastes and cow dung. Twenty kilograms each of the feed stocks was added into two 30 liters-capacity batch digesters. The anaerobic digestion was carried out within a temperature range of $25-31^{\circ}C$ for a retention time of 51 days. The results showed a cumulative gas yield of 5.0 bars for food waste and no gas production for cow dung within the retention time. Bacteria such as Escherichia coli, Staphylococcus aureus, Pseudomonas aeruginosa, Proteus vulgaris and Clostridium sp were isolated. Fungi isolated included Aspergillus niger, Aspergillus nidulan, Trichophyton rubrum and Epidermophyton flocossum. The non-dispersive infrared (NDIR) analysis of the biogas produced confirmed that the gas consisted of $CH_4$, $CO_2$ and $H_2$. Statistical analysis revealed there was no significant correlation between temperature and biogas produced from the organic wastes (r= 0.177, p = 0.483).The organic wastes from the biogas production process stimulated maize growth when compared to control (soil without organic waste) and indicated maximum height. The study therefore reveals that food waste as potential substrates for biogas production has a moderate bio-fertilizer potential for improving plant growth and yield when added to soil.

• 환경위생공학
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• 제13권2호
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• pp.95-105
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• 1998

This research was investigated which denitrification of wastewater containing nitrate, using upflow anaerobic sludge blanket process. The upflow anaerobic sludge blanket process is also used for both artifical and industrial wastewater. Main ingredients investigated in the artifical and industrial wastewater experiment were the determination of optimum organism/nitrate ratios, nitrate removal efficiency by various hydrogen donor addition and characteristics of granular sludge and gas production in case of various hydrogen donor addition. From the experimental results the following conclusions were made: In case of adding methanol, ethanol and sodium acetate as hydrogen donor granular sludge was formed 50 days after seeding. Average diameter of granular sludge was 4.0 mm and settling velocity was 37 cm/min. Production rate of gas 3.3 L/d in case of adding methanol as hydrogen donor in wastewater containing 150mg/L nitrate. However adding ethanol and sodium acetate as hydrogen donor, gas production rate were 2.2-2.7L/d respectively. In case of adding methanol as hydrogen donor treatability of artifical wastewater contained 150mg/L as nitrate was about 93%. But in addition of sodium acetate in wastewater contained 40mg.L as nitrate, nitrate removal efficiency was 80%.

• Environmental Sciences Bulletin of The Korean Environmental Sciences Society
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• 제10권S_1호
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• pp.35-40
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• 2001

Effect of the addition of an enzyme/microbial additive(EMA) to enhance anaerobic digestion of the primary sludge was investigated. Two laboratory scale anaerobic digester were operated with primary sludge taken from a municipal wastewater treatment plant. The digester receiving EMA with the sludge feed performed better than the control digester, when both were operated at 10-days and 15-days Solid Retention Time(SRT). Addition of EMA to the experimental digester provided 7%(10-days SRT) and 16%(15-days SRT) higher gas production compared to the control digester when both were fed with the same amount of volatile solids. The reduction in volatile solids was 24% better in the experimental digester compared to the control ar 10-days SRT, and the improvement 10% at 15-day SRT. Improvement in COD reduction, and fecal coliform density reduction were also seen in the experimental digester due to EMA addition compared to the control both ar 10-days SRT and 15-day SRT operation. Preliminary cost benefit analysis for a wastewater treatment plant showed that approximately $115/day in gas production improvements can be realized upon addition of EMA to primary sludge anaerobic digesters operating at 10-day SRT. The value of increased gas production was $172/day if the same digesters are operated with EMA addition at 15-day SRT.

• Asian-Australasian Journal of Animal Sciences
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• 제18권6호
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• pp.873-878
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• 2005

Emissions of nitrous oxide (N$_2$O) and methane (CH$_4$) from poultry enteric fermentation were investigated using a respiration chamber. Birds were placed in a respiration chamber for certain intervals during their growing period or for the whole life cycle. The accumulated gas inside the chamber was sampled and analyzed for N$_2$O and CH$_4$ production. A curve for gas production during a life cycle was fitted. The calculated area under the curve estimated the emission factor of poultry enteric fermentation on a life cycle basis (mg bird$^{-1}$ life cycle$^{-1}$). This method can be used to estimate CH$_4$ or N$_2$O emissions from different types of avian species taking into account factors such as diet, season or thermal effects. The CH$_4$/N$_2$O emission factors estimated for commercial broiler chickens, Taiwan country chickens and White Roman Geese were 15.87/0.03, 84.8/16.4 and 1,500/49 (mg bird$^{-1}$ life cycle$^{-1}$), respectively, while the calculated CH$_4$/N$_2$O emission from enteric fermentations were 3.03/0.006, 14.73/2.84 and 9.5/0.31 (Mg year$^{-1}$), respectively in Taiwan in the year of 2000. The described method is applicable to most poultry species and the reported emission factors were applicable to meat type poultry only.

• 상하수도학회지
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• 제26권5호
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• pp.629-636
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• 2012

This study focuses on the feasibility of bio-gas production using anaerobic digestion by measuring methane generation and biodegradability through the BMP test of industrial organic wastes. Organic wastes consist of entrails of pigs and organic residues of rumen generated from slaughter houses, wastewater sludge from slaughter waste water, fish offal and residues of vegetables from public wholesale markets, and wastewater sludge from the process of wastewater treatment in paper mill. The cumulative methane production by BMP test ranges from 149.3 ml/g-VS to 406.6 ml/g-VS and this is similar to methane generation of the normal wastewater sludge and food waste. As a result of measurement of biodegradability, wastewater sludge (S1 ~ S4) is low, ranging from 27.1% to 58.9 % and organic residues of rumen (G1) is low at 49.6 %. In conclusion, it turned out that raising the hydrolysis by various pre-treatments is necessary in order to produce bio-gas by using industrial organic wastes.