Study on Electron Temperature Diagnostic and the ITO Thin Film Characteristics of the Plasma Emission Intensity by the Oxygen Gas Flow (산소 유량별 플라즈마 방출광원 세기에 따른 전자온도 진단과 산화주석박막 특성연구)
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- Journal of Surface Science and Engineering
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- v.49 no.1
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- pp.92-97
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- 2016