• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2000.11a
• /
• pp.476-479
• /
• 2000

In this study, mesh-type PECVD system was suggested to minimize the hydrogen concentration. The main structural difference between the triode system and a conventional system is that a mesh was attached to the substrate holding electrode. We investigated several conditions to compare with conventional PECVD. The main effect of mesh was to minimize the substrate damage by ion bombardment and to enhance the surface reaction to induce hydrogen desorption. It was also found that hydrogen concentration decreased but deposition rate increased as increasing applied dias. Applied DC bias enhanced sputtering process. Intense ion bombardment causes the weakly bonded hydrogen or hydrogen-containing species to leave the growing film and increased adatom mobility. Furthermore, addition of hydrogen gas enhance the surface diffusion of adatom. The structural properties of poly-Si films were analyzed by scanning electron microscopy(SEM).

• Journal of Sensor Science and Technology
• /
• v.14 no.5
• /
• pp.313-321
• /
• 2005

Spray combustion has been used in many industrial fields, for instance, such as diesel engines, gas turbines and industrial furnaces, and furthermore various measurement techniques have been applied to elucidate the phenomenon of spray combustion. In order to measure simultaneously the droplet velocity and the droplet size of spray, phase doppler anemometry (PDA) was frequently used in spray combustion. However, the measurement error is occurred due to existence of flame, which is considered as influencing the precision of measurement. Therefore, the purpose of this study is experimentally to conduct the systematic evaluation on the measurement error when PDA measurement is applied to combustion field.

• Journal of Sensor Science and Technology
• /
• v.14 no.5
• /
• pp.357-361
• /
• 2005

Low-stress silicon nitride (LSN) thin films with embedded metal line have been developed as free standing structures to keep microspheres in proper locations and localized heat source for application to a chip-based sensor array for the simultaneous and near-real-time detection of multiple analytes in solution. The LSN film has been utilized as a structural material as well as a hard mask layer for wet anisotropic etching of silicon. The LSN was deposited by LPCVD (Low Pressure Chemical Vapor Deposition) process by varing the ratio of source gas flows. The residual stress of the LSN film was measured by laser curvature method. The residual stress of the LSN film is 6 times lower than that of the stoichiometric silicon nitride film. The test results showed that not only the LSN film but also the stack of LSN layers with embedded metal line could stand without notable deflection.

• Bulletin of the Korean Chemical Society
• /
• v.6 no.1
• /
• pp.29-32
• /
• 1985

Normal modes of crystalline orthorhombic sulfur belonging to the space group $D_{2h}$-Fddd, have been evaluated by taking the lowest temperature phase in the solid. Normal modes are obtained by the valence force field with modified force constants and a quantitative description of the mode is adjusted by the potential energy distribution. Since the full crystal system of orthorhombic sulfur is so large, we intended to calculate the normal modes simply by constructing the imaginary box made by the infinite mass boundary. And the Raman experiment is done by using the more powerful Ar-Kr gas laser with lowering the temperature to ${\sim}10^{\circ}K$.

• Journal of the Korean Electrochemical Society
• /
• v.18 no.1
• /
• pp.31-37
• /
• 2015

Composition-controlled ternary components chalcogenides germanium tin sulfide ($Sn_xGe_{1-x}S$) nanoparticles were synthesized by a novel gas-phase laser photolysis reaction of tetramethyl germanium, tetramethyl tin, and hydrogen sulfide mixture. Subsequent thermal annealing of as-grown amorphous nanoparticles produced the crystalline orthorhombic phase nanoparticles. All these composition-tuned nanoparticles showed excellent cycling performance of the lithium ion battery. The germanium sulfide nanoparticles exhibit a maximum capacity of 1200 mAh/g after 70 cycles. As the tin composition (x) increases, the capacity maintains better at the higher discharge/charge rate. This novel synthesis method of tin germanium sulfide nanoparticles is expected to contribute to expand their applications in high-performance energy conversion systems.

• Progress in Superconductivity and Cryogenics
• /
• v.5 no.1
• /
• pp.111-117
• /
• 2003

In the design of the split type free displacer Stilting cryocooler the motion of the displacer is very important to decide the cooling capacity, which depends upon the working gas pressure, the swept volume in the compression space and the expansion space, operating frequency, the phase shift between piston and displacer, etc. In this study, Stirling cryocooler actuated by the electric farce of the dual linear motor is designed and manufactured. Cool down characteristics of the cold end with laser displacement sensor in the expander of the Stilting cryocooler is evaluated. The charging pressure was 15kg$_{f}$/$\textrm{cm}^2$ and operating frequency was 50Hz. Input power and the lowest temperature were about 32W and 67K, respectively. And, displacement of the piston is measured by LVDTs (Linear Variable Differential Transformers), displacement of thedisplacer is measured by laser optic method, and phase shift between piston and displacer is discussed. As the peak-to-peak pressure of the compressor was increased, peak-to-peak displacement of the displacer was increased. The peak-to-peak displacement of the displacer increases in the range of 0 - 64.5Hz(resonant frequency of the displacer), but decreases steeply when the operating frequency is bigger than the resonant frequency. Finally when the phase shift between displacements of the Piston and displacer is 45。, operating frequency is optimum and is decided by resonant frequency of the expander, mass and cross section area of the displacer and constant by friction and flow resistance.e.

• International Journal of Automotive Technology
• /
• v.7 no.1
• /
• pp.83-90
• /
• 2006

The purpose of this paper is to describe the design and implementation of an unmanned ground vehicle, called the TailGator at CIMAR (Center for Intelligent Machines and Robotics) of the University of Florida. The TailGator is a gas powered, four-wheeled vehicle that was designed for the AUVSI Intelligent Ground Vehicle Competition and has been tested in the contest for 2 years. The vehicle control model and design of the sensory systems are described. The competition is comprised of two events called the Autonomous Challenge and the Navigation Challenge: For the autonomous challenge, line following, obstacle avoidance, and detection are required. Line following is accomplished with a camera system. Obstacle avoidance and detection are accomplished with a laser scanner. For the navigation challenge, waypoint following and obstacle detection are required. The waypoint navigation is implemented with a global positioning system. The TailGator has provided an educational test bed for not only the contest requirements but also other studies in developing artificial intelligence algorithms such as adaptive control, creative control, automatic calibration, and internet-base control. The significance of this effort is in helping engineering and technology students understand the transition from theory to practice.

• Journal of the Korean Institute of Telematics and Electronics D
• /
• v.36D no.7
• /
• pp.50-55
• /
• 1999

We have fabricated optical waveguide which utilizes intermixing of InGaAs/InGaAsP multi quantum well separate confinement heterostructure. The waveguide was fabricated by reactive ion etching technique using $CH_4/H_2$ gas mixture, and the width and depth of the waveguide ware $5{\mu}m$ and $1.2{\mu}m$, respectively. The propagation loss of the waveguide was measured by Fabry-Perot interference phenomena using tunable laser. For the waveguide after $800^{\circ}C$, 30s heat treatment, the measured loss was 3.76dB/cm and 3.95dB/cm for TE and TM mode, respectively. This value is very small compared to other waveguide made by IFVD technique. Hence, this technique can applied to integration of waveguide and electronic devices.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2010.08a
• /
• pp.208-208
• /
• 2010

Zinc oxide (ZnO) is a functional material with interesting optical and electrical properties, a wide band gap (more than 3.3 eV), a high transmittance in the visible light region, piezoelectric properties, and a high n-type conductivity. This material has been investigated for use in many applications, such as transparent electrodes, blue light-emitting diodes, and ultra-violet detector. ZnO films grown under low oxygen pressure by thin film deposition methods show low resistivity and large free electron concentration. Therefore, reducing the background carrier concentration in ZnO films is one of the major challenges ahead of realizing high-performance ZnO-based optoelectronic devices. In this study, we deposited ZnO thin films on sapphire substrates by pulsed laser deposition (PLD) with employing an oxygen plasma source to decrease the background free-electron concentration and enhance the crystalline quality. Then, the substrate temperature was varied between 200 'C to 900 'C The vacuum chamber was initially evacuated to a pressure of $10^{-6}$ Torr, and then a pure $O_2$ gas was introduced into the chamber and the pressure during deposition was maintained at $10^{-2}$ Torr. Crystallinity and orientation of ZnO films were investigated by X-ray diffraction (XRD). The film surface was analyzed with atomic force microscope (AFM). And electrical properties were measured at room temperature by Hall measurement.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.26 no.2
• /
• pp.108-114
• /
• 2006

Transient and asymmetric density distributions of butane flow have been investigated from laser image signals by developed three-dimensional digital speckle tomography. Moved signals of speckles have been captured by multiple CCD images in three angles of view simultaneously because the flows were asymmetric and transient. The signals of speckle movements between no flow and downward butane flow from a circular half opening have been calculated by a cross-correlation tracking method so that those distances can be transferred to deflection angles of laser rays fur density gradients. The three-dimensional density fields have been reconstructed from the fringe shift signal which is integrated from the deflection angle by a real-time multiplicative algebraic reconstruction technique (MART).