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The surface kinetic properties of $ZrO_2$ Thin Films in dry etching by Inductively Coupled Plasma

  • Yang-Xue, Yang-Xue;Kim, Hwan-Jun;Kim, Dong-Pyo;Um, Doo-Seung;Woo, Jong-Chang;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.105-105
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    • 2009
  • $ZrO_2$ is one of the most attractive high dielectric constant (high-k) materials. As integrated circuit device dimensions continue to be scaled down, high-k materials have been studied more to resolve the problems for replacing the EY31conventional $SiO_2$. $ZrO_2$ has many favorable properties as a high dielectric constant (k= 20~25), wide band gap (5~7 eV) as well as a close thermal expansion coefficient with Si that results in good thermal stability of the $ZrO_2/Si$ structure. In order to get fine-line patterns, plasma etching has been studied more in the fabrication of ultra large-scale integrated circuits. The relation between the etch characteristics of high-k dielectric materials and plasma properties is required to be studied more to match standard processing procedure with low damaged removal process. Due to the easy control of ion energy and flux, low ownership and simple structure of the inductively coupled plasma (ICP), we chose it for high-density plasma in our study. And the $BCl_3$ included in the gas due to the effective extraction of oxygen in the form of $BCl_xO_y$ compound In this study, the surface kinetic properties of $ZrO_2$ thin film was investigated in function of Ch addition to $BCl_3/Ar$ gas mixture ratio, RF power and DC-bias power based on substrate temperature. The figure 1 showed the etch rate of $ZrO_2$ thin film as function of gas mixing ratio of $Cl_2/BCl_3/Ar$ dependent on temperature. The chemical state of film was investigated using x-ray photoelectron spectroscopy (XPS). The characteristics of the plasma were estimated using optical emission spectroscopy (OES). Auger electron spectroscopy (AES) was used for elemental analysis of etched surface.

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Ho3+-Doped Amorphous Dielectrics:Emission and Excitation Spectra of the 1.6 μm Fluorescence (Ho3+ 첨가 비정질 유전체 : 1.6μm 헝광의 방출 및 여기 스펙트럼)

  • 최용규
    • Journal of the Korean Ceramic Society
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    • v.41 no.8
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    • pp.618-622
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    • 2004
  • Excitation spectra of the 1.6 rm emission originating from $Ho^{3+}$$^{5}$ I$_{5}$ \longrightarrow$^{5}$ I$_{7}$ transition in fluoride, sulfide, and selenide glasses were measured at wavelengths around 900nm where the fluorescing $^{5}$ I$_{5}$ level is located. In specific energy range where the frequency upconversion populating $^{5}$ F$_{1}$ state happens, the excitation efficiency of the 1.6 fm emission was deteriorated in fluoride and sulfide hosts. In selenide however spectral line shapes of the excitation spectrum and the '$^{5}$ I$_{8}$ \longrightarrow$^{5}$ I$_{5}$ absorption spectrum looked seemingly identical to each other. Differences in optical nonlinearity as well as electronic band gap energy of the host glasses used are responsible for the experimental observations. On the other hand, codoping of rare earths such as Tb$^{3+}$, Dy$^{3+}$, Eu$^{3+}$, and Nd$^{3+}$ was effective in decreasint the terminating $^{5}$ I$_{7}$ level lifetime. However, at the same time, some of the codopants increased unnecessary absorption at the 1.6 $\mu$m wavelengths via their ground state absorption. Though the lifetime quenching effect of Eu$^{3+}$ was moderate, it exhibited no additional extrinsic absorption at the 1.6 $\mu$m band.EX>m band.

INFLUENCE OF INTERIMPLANT DISTANCE ON BONE RESORPTION : A RADIOLOGICAL AND HISTOLOGICAL STUDY IN BEAGLE DOGS (Beagle dog를 이용한 임프란트 사이의 간격에 따른 골흡수에 대한 방사선 및 조직학적 평가)

  • Lee, Su-Youn;Lee, Jae-Wook;Kim, Jin-Wook;Lee, Sang-Han
    • Journal of the Korean Association of Oral and Maxillofacial Surgeons
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    • v.34 no.5
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    • pp.571-577
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    • 2008
  • Introduction: Possible etiologic factors associated with bone loss around implants after implantation are surgical trauma, occlusal overload, periimplantitis, presence of micro gap and the formation of biologic distances. Tarnow et al. observed that the crestal bone loss was greater when the distance between the implants was <3mm than when the implants were ${\geq}\;3mm$ apart. The aim of this study was to evaluate the influence of different interimplant distance on marginal bone and crestal bone resorption in the beagle dogs. Materials and methods: The mandibular premolars of 5 dogs were extracted bilaterally. After 12 weeks of healing, each dog received 7 implants. On each side, implants were separated by 2mm (Group 1) and by 5mm (Group 2). After 16 weeks of healing, the dogs were sacrificed. Marginal bone loss was determined through linear measurements made between the implant-abutment junctions and the most coronal portions of the bone in contact with the implant surface. A line was drawn uniting the implant-abutment junctions of the adjacent implants, and a linear measurement was made at the midpoint in the direction of the most coronal peak of the interimplant bone crest to determine the crestal bone loss. Both of them was measured radiologically and histologically. Result and conclusion: In radiological analysis, the mean of marginal bone loss was $1.26{\pm}0.14mm$ for group 1 and $1.23{\pm}0.34mm$ for group 2, the mean of crestal bone loss was $1.10{\pm}0.14mm$ for group 1 and $1.02{\pm}0.30mm$ for group 2. The results were not statistically significant between 2 groups. In histological analysis, the mean of marginal bone loss was $1.63{\pm}0.48mm$ for group 1 and $1.62{\pm}0.50mm$ for group 2, the mean of crestal bone loss was $1.23{\pm}0.35mm$ for group 1 and $1.15{\pm}0.39mm$ for group 2. The differences were also not statistically significant. The clinical significance of this result is that the increase in the crestal bone loss results in the increase in the distance between the base of the interproximal contact of the crowns and the bone crest, and this determines if papilla will be present or absent between implants. Considering this fact, keeping up sufficient interimplant distance is important to minimize crestal bone loss.

A Study of the Bystander Effect and Its Enhancement in HSV-TK Gene Therapy Using a Murine Neuroblastoma Model (마우스 신경모세포종 모델을 이용한 HSV-TK 유전자 치료에서 Bystander 효과 및 증폭에 관한 연구)

  • Cho, Hyun Sang;Kim, Moon Kyu;Park, Chong Young
    • Clinical and Experimental Pediatrics
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    • v.45 no.3
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    • pp.354-361
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    • 2002
  • Purpose : Selective introduction of genes conferring chemosensitivity into proliferating tumor cells may be used to treat cancer. We first investigated the bystander effect of retrovirus-mediated gene transfer of herpes simplex virus thymidine kinase(HSV-TK) gene to murine neuroblstoma cell line(neuro-2a) in vitro and in vivo. Second, we examined the mechanism and its enhancement of the bystander effect in murine neuroblastoma. Methods : To investigate the bystander effect, we studied tumor growth and survival time after HSV-TK/ganciclovir(GCV) treatment in a syngenic A/J mouse neuroblastoma model by mixing various ratios of HSV-TK-expressing neuro-2a cells with wild type neuro-2a cells followed by GCV treatment. To investigate the mechanism of the bystander effect in murine neuroblastoma, immunohistochemistry using connexin 43, CD4 and CD8-specific monoclonal antibodies was analyzed. We studied whether IL-2-secreting neuro-2a cells(neuro-2a/IL-2) would potentiate the bystander effect. Results : A strong bystander effect was observed in vitro and in vivo. The bystander effect in murine neuroblastoma was dependent on the immune response rather than connexin-mediated gap junction. Neuro-2a/IL-2 treatment enhanced the bystander effect in the HSV-TK/GCV system in murine neuroblastoma model. Conclusion : We conclude that the bystander effect in murine neuroblastoma depends on immune response and is enhanced by neuro-2a/IL-2.

Development of Ergonomic Backrest for Office Chairs

  • Kim, Chang Yong;Song, Gyung Yong;Jang, Yeon Sik;Ko, Hyo Eun;Kim, Hee Dong;Park, Gemus;Hwang, Jung Bo;Jung, Hwa Shik
    • Journal of the Ergonomics Society of Korea
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    • v.34 no.2
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    • pp.151-165
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    • 2015
  • Objective: This study aims to develop and scientifically investigate the efficacy of the Spine S-curve Reactive Backrest that responds to the spine curvature of the user when seated, and maintains and enhances the natural S-curve of the lower back, thereby helping to relieve fatigue, correct posture and prevent spine deformities. Background: The focus of current development, design guidelines and/or standards for office chairs is mainly placed on the chair's dimensions, incline angle, adjusting features and lumbar support. Research and development was called for developing a chair backrest that maintains and improves the S-curve of the full spine. Method: The Spine S-curve Reactive Backrest was ergonomically designed to maintain correct posture and enhance user comfort. When leaned on, the backrest responds to the user's spine line and the whole lower back sits closely against the backrest, thereby aligning the user's lower back and backrest as one to maintain and improve the natural S-curve formation of the spine. In order to evaluate the efficacy of the newly designed chair (new design) and the comparison target (chair), five male college students of standard body type with normal spine curvature were selected as test subjects, and a motion analyzer and electromyography were utilized to measure S-curve and erector spinae muscle activity when seated. Results: The spine S-curve was better maintained and improved when sitting in the new design than in the comparison chair. Particularly notable was the greater displacement gap of the thoracic spine than the cervical spine, and also that of the lumbar more than the thoracic spine, with the increase of the backrest tilting angle. Furthermore, the electromyogram results showed the new design caused a lower fatigue level of the erector spinae muscles compared to the comparison chair, and also earned a higher preference in the subjective opinion results. Conclusion: The newly designed chair in this study responds to the user's spine curvature and maintains and enhances the lower back's natural S-curve, and thereby relieves fatigue, promotes better posture, and helps to prevent spine deformities better than existing office chairs. There is a need to widely introduce and supply this new design. Application: The new design is applicable to office and student chairs, and is expected to improve concentration and work efficiency.

Temperature Dependence on Dry Etching of $ZrO_2$ Thin Films in $Cl_2/BCl_3$/Ar Inductively Coupled Plasma ($Cl_2/BCl_3$/Ar 유도 결합 플라즈마에서 온도에 따른 $ZrO_2$ 박막의 식각)

  • Yang, Xue;Kim, Dong-Pyo;Lee, Cheol-In;Um, Doo-Seung;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.145-145
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    • 2008
  • High-k materials have been paid much more attention for their characteristics with high permittivity to reduce the leakage current through the scaled gate oxide. Among the high-k materials, $ZrO_2$ is one of the most attractive ones combing such favorable properties as a high dielectric constant (k= 20 ~ 25), wide band gap (5 ~ 7 eV) as well as a close thermal expansion coefficient with Si that results in good thermal stability of the $ZrO_2$/Si structure. During the etching process, plasma etching has been widely used to define fine-line patterns, selectively remove materials over topography, planarize surfaces, and trip photoresist. About the high-k materials etching, the relation between the etch characteristics of high-k dielectric materials and plasma properties is required to be studied more to match standard processing procedure with low damaged removal process. Among several etching techniques, we chose the inductively coupled plasma (ICP) for high-density plasma, easy control of ion energy and flux, low ownership and simple structure. And the $BCl_3$ was included in the gas due to the effective extraction of oxygen in the form of $BCl_xO_y$ compounds. During the etching process, the wafer surface temperature is an important parameter, until now, there is less study on temperature parameter. In this study, the etch mechanism of $ZrO_2$ thin film was investigated in function of $Cl_2$ addition to $BCl_3$/Ar gas mixture ratio, RF power and DC-bias power based on substrate temperature increased from $10^{\circ}C$ to $80^{\circ}C$. The variations of relative volume densities for the particles were measured with optical emission spectroscopy (OES). The surface imagination was measured by scanning emission spectroscope (SEM). The chemical state of film was investigated using energy dispersive X-ray (EDX).

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Customer-Centric CRM Implementation Case Study (고객중심의 CRM 구축비교 사례연구)

  • Lee, Ho-Seoub
    • Management & Information Systems Review
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    • v.23
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    • pp.25-40
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    • 2007
  • In the highly competitive and divers world of financial market, customer is the single most important factor to company's survival. Especially, creating a relationship with valued customers is a key to success. CRM provides the mean to retain high value customers. It takes a prospect of what customers expect. Utilizing those knowledge can help the products and service meet the customers' needs, thereby maximizing customer satisfaction and company's profit. In this report, I am going to suggest a few ways to develop successful CRM in the life insurance industry. First, CRM should innovate the way of communication to keep pace with Web 2.0 era. In other words, the customer's needs should be caught by real-time communication than traditional off-line market research. Thus, the functionality and specification of products can be decided by customer's direct choice so that the customers are able to purchase the understanding and experience of the products. Second, CRM project should consider whether the initial strategy plan can promise the stable growth of customer at the first step. When planning strategy, the project needs to identify what customer wants and how to fulfill the needs with stable growth of the customer. In addition, the CRM should be developed by realizing that customer centric benefits ultimately guarantee the growth of the organization. Third, CRM systems should enhance the organization's ability to take the customer's insight in a 360 degree view and to capture the voice of the customer directly. In order to develop the best matched product package, more precise customer segmentation should be ahead of market segmentation strategy. Forth, the biggest reward from CRM will be a customer royalty program. Many successful banks are already planning and practicing customer royalty strategy. A comprehensive analysis of customers and their behavior allow organization to identify high value potential customers' needs and determine a strategy required to meet those needs. Even life insurance companies such as Prudential Korea are developing products designed for royal customers. Fifth, understanding and managing the experience of customer called Customer Experience Management also can increase customer satisfaction. Measuring only customers' experience and adapting it to marketing strategy make products position in the gap between the customers' expectation and experience not required by market. A key component of CEM is its application across all organizational functions. At last, the direction of change and development of CRM can be defined from the conceptualization of information technology represented by Ubiquitous and Web 2.0. Instead of just managing customer information, companies should take the initiative in personalized system with customer oriented strategy. Furthermore, with the regular communication between CRM stakeholders (Sales-Marketing-IT), customer's demand should be directly reflected to enterprise strategy in real time.

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Study on the Standardization of Korean Distribution Terminology through its Usage Survey (유통분야 전문용어 사용실태 조사를 통한 용어 표준화 연구)

  • Han, Kyu-Chul;Lee, Sang-Youn
    • Journal of Distribution Science
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    • v.13 no.4
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    • pp.77-87
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    • 2015
  • Purpose - This study aims to investigate the current state of distribution terminology usage by retailers and consumers nationwide, and to suggest a practical improvement plan for its standardization. The Korean distribution industry is closely related to consumers' daily lives. However, in reality, there exists a gap among producers, distributors, and consumers in terms of the definition, understanding, and perception of the terminology. Therefore, standardizing this terminology is essential for more smooth communication. This paper suggests the necessity of committing overall research and survey activities to the actual conditions of using Korean distribution terminology by organizations and their respective management situations, and further, the necessity of probing the problem and its measures in line with the objective and mission of the "Fundamental Law of the Korean Language." Research design, data, and methodology - This study's scope is limited to wholesale and retail including some information systems. First, the study covers most written material including lexicons and glossary of distribution terminology, university textbooks and teaching material for national certificate of qualification, and related laws and ordinances. Second, the survey covers retailers' management situations by store format. The retailers used as the sample for the survey include department stores, discount stores, SSM, and convenience stores. Altogether, 20 specialists were interviewed in their respective sectors or retail formats. Finally, the project team surveyed a sample of 1,300 consumers nationwide on 50 distribution terms mainly used by consumers, including those about awareness, understanding, usage, and attitude. Results - In total, 1,249 terms are drawn through literature research including distribution terminology used in the related literature, glossary and lexicons, distribution terminology in textbooks, and legal terminology. A classified table comprises four large categories including general distribution, distribution marketing, distribution information, and merchandise. The results of the three-step research including literature survey, field survey of retailers, and consumer survey were advised to be screened by academia (retail associations, faculty etc.), retailers (major retail management by store format), retail specialists and consultants, consumers, and Korean linguists. In total, 1,300 questionnaires for 50 terms of the distribution terminology closely associated with consumers were distributed to subjects nationwide. Conclusions - The desired and expected results from this study are summarized from three perspectives as follows: First, from retailers' perspective, a new concept, or coinage of new terms of the distribution industry stems from advanced countries such as America and Europe. However, the original meaning and definition are diluted and distorted with changes in the language users' situations and context. This study provides basic guidelines for standardization of distribution terms used among various retail formats in most daily life situations that consumers encounter. Second, from the nation's perspective, this study suggests optimal choices of distribution terminology in the context of laws and ordinances regarding concerned Ministries. Last, from the consumers' perspective, this paper enables consumers to understand and use distribution terms properly in their daily life.

Usage and Analysis on Readability of Korean Typography in WBI for Children (효과적인 아동용 WBI를 위한 한글 타이포그래피의 가해성 분석과 활용)

  • Han, Jeong-Hye;Kim, Yong-Dae
    • Journal of The Korean Association of Information Education
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    • v.6 no.3
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    • pp.328-337
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    • 2002
  • Looking at multimedia education contents from a design point of view, the instructor's design model may differ from the child's understanding model due to gap of the instructor's and child's knowledge. This fact implies it impacts the effectiveness of the education contents. The learning efficiency of Korean typography in WBI for children depends on the font-family, line space, font-size, the age of user, the output device such as the monitor, and other various factors. In this paper, we measured and analyzed on readability of Korean typography in WBI for children by reading speed method. The results of experiments show that readability depends on the font-family of typography, age(grade), and sex of children. In detail, "Goolymche" has the shortest time to be read, and girl and the highest grade students of elementary school have shorter time than boy and the lower grade students. Moreover, we consider the elegance of typography in WBI for holding children's interests because they prefer "Yopseoche". We provide some CSSs in WBI for children based on the experimental results, to used in school fields.

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Characteristics and Automatic Detection of Block Reference Patterns (블록 참조 패턴의 특성 분석과 자동 발견)

  • Choe, Jong-Mu;Lee, Dong-Hui;No, Sam-Hyeok;Min, Sang-Ryeol;Jo, Yu-Geun
    • Journal of KIISE:Computer Systems and Theory
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    • v.26 no.9
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    • pp.1083-1095
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    • 1999
  • 최근 처리기와 입출력 시스템의 속도 차이가 점점 커짐에 따라 버퍼 캐쉬의 효율적인 관리가 더욱 중요해지고 있다. 버퍼 캐쉬는 블록 교체 정책과 선반입 정책에 의해 관리되며, 각 정책은 버퍼 캐쉬에서 블록의 가치 즉 어떤 블록이 더 가까운 미래에 참조될 것인가를 결정해야 한다. 블록의 가치는 응용들의 블록 참조 패턴의 특성에 기반하며, 블록 참조 패턴의 특성에 대한 정확한 분석은 올바른 결정을 가능하게 하여 버퍼 캐쉬의 효율을 높일 수 있다. 본 논문은 각 응용들의 블록 참조 패턴에 대한 특성을 분석하고 이를 자동으로 발견하는 기법을 제안한다. 제안된 기법은 블록의 속성과 미래 참조 거리간의 관계를 이용해 블록 참조 패턴을 발견한다. 이 기법은 2 단계 파이프라인 방법을 이용하여 온라인으로 참조 패턴을 발견할 수 있으며, 참조 패턴의 변화가 발생하면 이를 인식할 수 있다. 본 논문에서는 8개의 실제 응용 트레이스를 이용해 블록 참조 패턴의 발견을 실험하였으며, 제안된 기법이 각 응용의 블록 참조 패턴을 정확히 발견함을 확인하였다. 그리고 발견된 참조 패턴 정보를 블록 교체 정책에 적용해 보았으며, 실험 결과 기존의 대표적인 블록 교체 정책인 LRU에 비해 최대 57%까지 디스크 입출력 횟수를 줄일 수 있었다.Abstract As the speed gap between processors and disks continues to increase, the role of the buffer cache located in main memory is becoming increasingly important. The buffer cache is managed by block replacement policies and prefetching policies and each policy should decide the value of block, that is which block will be accessed in the near future. The value of block is based on the characteristics of block reference patterns of applications, hence accurate characterization of block reference patterns may improve the performance of the buffer cache. In this paper, we study the characteristics of block reference behavior of applications and propose a scheme that automatically detects the block reference patterns. The detection is made by associating block attributes of a block with the forward distance of the block. With the periodic detection using a two-stage pipeline technique, the scheme can make on-line detection of block reference patterns and monitor the changes of block reference patterns. We measured the detection capability of the proposed scheme using 8 real workload traces and found that the scheme accurately detects the block reference patterns of applications. Also, we apply the detected block reference patterns into the block replacement policy and show that replacement policies appropriate for the detected block reference patterns decreases the number of DISK I/Os by up to 57%, compared with the traditional LRU policy.