A study on the crystallographic properties of AlN/Al/SiO$_2$ /Si thin film for FBAR
(FBAR용 AlN/Al/SiO$_2$ /Si 박막의 결정학적 특성에 관한 연구)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2003.07a
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- pp.151-154
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- 2003