• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.447-447
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• 2010

일찍이 $SiO_2$ (Silicon dioxide) 박막은 다양한 분야에서 유전층, 부식 방지층, passivation층 등의 역할을 해왔다. 그리고 이러한 박막 공정은 대부분 진공의 환경에서 그 공정이 이루어지고 있다. 하지만 이러한 진공 system은 chamber, loadlock 그리고 펌프 등의 다양한 진공장비로 인한 생산 비용 증가, 공정의 복잡성뿐만 아니라 공정의 대면적화에 어려움을 지니고 있다. 그리고 최근 flexible display의 제조 공정에서 polymer 혹은 plastic 기판을 제조 공정에 적용시키기 위해 저온 공정이 필수적으로 요구 되고 있다. 이러한 기술적 한계를 뛰어 넘기 위해 최근 많은 연구가들은 atmospheric pressure plasma enhanced chemical vapor deposition (AP-PECVD)에 대해 지속적으로 다양한 연구를 하고 있다. 본 연구에서는 remote-type의 modified pin-to-plate dielectric barrier discharge (DBD) 시스템을 이용한 $SiO_2$ 무기 박막 증착에 관해 연구하였다. $O_2$/He/Ar의 gas와 5 kV AC power (30 kHz)의 전원장치를 통해 고밀도 대기압 플라즈마를 발생시켰고, silicon precursor로는 hexamethyldisilazane (HMSD)를 사용하였다. 먼저 HMDS와 $O_2$ gas의 flow rate 변화에 따른 증착률을 조사하였고 그 다음으로 박막의 조성 및 표면 특성을 조사하였다. HMDS의 유량이 100 ~ 300 sccm으로 증가함에 따라 증착속도는 증가했다. 하지만 FT-IR을 통해 HMDS의 유량이 증가하면 반응에 참여할 산소 분자의 부족으로 인해 $-(CH_3)_X$의 peak intensity가 증가하고, -OH의 peak intensity가 점차 감소함을 관찰 할 수 있었다. 또한 증착된 박막의 표면에 particle과 불균일한 surface morphology 등을 SEM image를 통해 관찰 하였다. 산소 유량이 탄소와 관련된 많은 불순물들의 제거에 도움이 됨에도 불구하고 14 slm 이상의 산소가 반응기 내로 주입되게 되면 대기압 플라즈마의 discharge가 불안정하게 되어 공정효율을 저하시키는 요소가 되었다. 결과적으로 HMDS (150 sccm)/$O_2$ (14 slm)/He (5 slm)/Ar (3 slm)의 조건에서 약 42.7 nm/min 증착률을 가지며, 불순물이 적고 surface morphology가 깨끗한 $SiO_2$ 박막을 증착할 수 있었다.

• 대한의용생체공학회:의공학회지
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• 제27권5호
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• pp.218-223
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• 2006

We examined the effects of ${\beta}$-glucan-reinforced PLGA film and scaffold on HDFs (human dermal fibroblast) attachment and proliferation. The PLGA films were prepared by simple solvent-casting method. The prepared films were grafted with $(1{\to}3)(1{\to}6)-{\beta}-glucan$ in various ratios after plasma treatment on surface. The surface of the film was characterized by contact angle measurement, scanning electron microscope (SEM), and Fourier-transform infrared spectrophotometer (FT-IR). The amount of $(1{\to}3)(1{\to}6)-{\beta}-glucan$ in the prepared film was indirectly determined by phenol-sulfuric acid method. The HDFs (Human dermal fibroblasts) were used to evaluate the cell attachment and proliferation on PLGA specimens before and after plasma/${\beta}-glucan$ treatment. The result showed that the plasma treated groups exhibited more mont of ${\beta}-glucan$ might be grafted than the non plasma treated groups. Cell attachment was significantly enhanced in the plasma/${\beta}-glucan$ grafted group after 4 hours incubation (p<0.05) due to the improved hydrophilicity and cytoactivity effect of the ${\beta}-glucan$. The cell proliferation of plasma/${\beta}-glucan$ (2mg/ml) grafted group was the highest rate among the groups (p<0.05).

• 한국정보과학회논문지:소프트웨어및응용
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• 제32권7호
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• pp.636-649
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• 2005

분야연상어는 어휘자체가 분야정보를 가지므로 인간이 분야를 인지할 때와 유사하게 문서의 분야를 판단한다. 한국어의 경우 180분야로 분류된 약 IS,000개의 문서뱅크를 수집하여 구축 $\cdot$실험한 결과 88,782개의 단일 분야연상어가 8,405개로 전체의 약 9$\%$로 압축되며, 재현율 0.77 이상(평균 0.85), 정확률 0.90 이상(평균 0.94)의 높은 추출 정밀도를 얻었다. 구축한 분야연상어를 문서분류의 초기결정에 적용하여 인간에 의한 분야결정과 비교한 결과 약 90$\%$이상의 정답률을 얻었다. 연구결과를 문서분류의 초기단계에 관한 기초연구로 이용하고, 다언어(multilingual) 간의 문서검색에 적용하여 다국어 정보검색에 대한 기초 연구로 이용할 수 있다.

• Membrane and Water Treatment
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• 제8권2호
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• pp.113-123
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• 2017

This study investigated effects of physical and chemical cleaning methods on the initial flux recovery of fouled membrane in membrane distillation process. A laboratory scale direct contact membrane distillation (DCMD) experiment was performed to treat digested livestock wastewater with 3.89 mg/L suspended solids, 874.7 mg/L COD, 543.7 mg/L nitrogen, 15.6 mg/L total phosphorus, and pH of 8.6. A hydrophobic PVDF membrane with an average pore size of $0.22{\mu}m$ and a porosity of 75 % was installed inside a direct contact type membrane distillation module. The temperature difference between feed and permeate side was maintained at $40^{\circ}C$ with the feed and permeate stream velocity of 0.18 m/s. The results showed that the permeate flux decreased from $22.1L{\cdot}m^{-2}{\cdot}hr^{-1}$ to $19.0L{\cdot}m^{-2}{\cdot}hr^{-1}$ after 75 hours of distillation. The fouled membrane was cleaned first by physical flushing and consecutively by chemicals with NaOCl and citric acid. After the physical cleaning the flux was recovered to 92 % as compared with the initial clean water flux of the virgin membrane. Then 94 % of the flux was recovered after cleaning by 2,000 ppm NaOCl for 90 minutes and finally 97 % of flux recovered after 3 % citric acid for 90 minutes. SEM-EDS and FT-IR analysis results presented that the foulants on the membrane surface were removed effectively after each cleaning step. The contact angle measurement showed that the hydrophobicity of the membrane surface was also restored gradually after each cleaning step to reach nearly the same hydrophobicity level as the virgin membrane.

• 한국건설순환자원학회논문집
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• 제9권3호
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• pp.367-374
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• 2021

본 연구는 기계·화학적 에너지를 활용하는 메카노케미칼 공정기술을 자기치유 혼화재에 적용하기 위한 목적으로 진행되었다. 기계·화학적 공정기술을 자기치유 혼화재 제조 공정에 적용하여 치유 소재의 활성화 에너지를 증가시켜 치유성능에 미치는 영향을 확인하고자 하였다. 자기치유 모르타르에 사용한 자기치유 소재는 팽창/팽윤제를 주요 구성물로 선정하고 탄산염 촉진제와 무기염 첨가제를 기타 첨가제로 혼입하였으며, 기계·화학 처리공정 적용에 의한 치유 소재의 활성화도 및 개질화 반응이 가능한 재료로 선택하였다. 기계·화학 처리공정에 대한 자기치유 혼화재의 기초평가는 XRD, FT-IR 분석으로 확인하였으며, 자기치유 모르타르의 치유 성능평가는 정수위 투수시험을 이용하여 치유율을 확인하였다. 치유성능 확인결과 기계·화학 처리 공정을 적용한 WM3 시료(MC360min)가 공정처리 하지 않은 WM1 시료에 대비 치유성능이 4.1% 증가하였으며, 자기치유율은 평균 94.3%로 확인되었다.

• 한국자기공명학회논문지
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• 제22권4호
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• pp.107-114
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• 2018

In this exploration, the nuclear magnetic resonance of the $^{207}Pb$ nucleus in $PbWO_4:Mn^{2+}$ and $PbWO_4:Dy^{3+}$ Single Crystals using FT-NMR spectrometer is investigated. The line width of the resonance line for the $^{207}Pb$ nucleus decreases as temperature increases due to motional narrowing. The chemical shift of $^{207}Pb$ NMR spectra also increases as temperature decreases for both crystals. The spinlattice relaxation times $T_1$ of $^{39}K$ nucleus were calculated as a function of temperature (180 K~400 K). The $T_1$ of $^{207}Pb$ nucleus decreases as temperature increases. The dominant relaxation mechanism at the studied temperature range can be deduced as the Raman process, which is the coupling between lattice vibrations and the nuclear spins. This deduction is substantiated by the fact that the nuclear spin-lattice relaxation rate $1/T_1$ of the $^{207}Pb$ nucleus in $PbWO_4:Mn^{2+}$ and $PbWO_4:Dy^{3+}$ single crystal is proportional to $T^2$, or temperature squared. The activation energies for the $^{207}Pb$ nucleus in $PbWO_4:Mn^{2+}$ and $PbWO_4:Dy^{3+}$ single crystals are $E_a=49{\pm}1meV$ and $E_a=47{\pm}2meV$, respectively.

• 대한의용생체공학회:의공학회지
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• 제42권6호
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• pp.251-258
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• 2021

Hyaluronic acid (HA) microspheres (MSs) crosslinked with polyethylene glycol diglycidyl ether (PEGDE) are prepared using a simple fluidic device (SFD) to investigate the optimized parameters. A solution mixture of PEGDE in 2-methyl-1-propanol was prepared as a continuous phase in SFD. HA solutions of 1 wt% concentration were introduced into SFD as a discontinuous phase. The HA solution prepared by stirring for more than 48 h exhibited spherical MSs at the needle tip inside the ring cap. As the flow rate of the continuous phase increased from 0.7 to 1.9 mL/min, the diameter of the MS decreased from 173±36 ㎛ to 129±13 ㎛. Although the PEGDE concentration in the range of 0.2 to 1.8 vol% did not affect the diameter of the MS, the microstructure of MS, consisting of inner hollow void and wall, was changed. The inner void and wall size decreased and increased from 79.5 ㎛ to 57.2 ㎛ and from 10.3 ㎛ to 21.4 ㎛, respectively, with increasing PEGDE concentration from 0.2 vol% to 1.8 vol%. FT-IR peaks located around 2867 cm^-1 and 1088 cm^-1 indicated that the HA MS prepared at different PEGDE concentrations were chemically crosslinked. The HA MSs containing different PEGDE concentrations exhibited quantitative cell viability of more than 98%. L-929 cells adhered well to the HA MSs and proliferated continuously with increasing culture time to 48 h regardless of PEGDE concentration, implying that the HA MSs are clinically safe and effective.

• 한국표면공학회지
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• 제34권5호
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• pp.403-408
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• 2001

In this work, the cyclic perfluorinated ether (c-C$_4$F$_{8}$O) with very high destructive removal efficiency (DRE) than other alternative gases, such as $C_3$F$_{8}$, c-C$_4$F$_{8}$ and NF$_3$ was used as an alternative process chemical. The plasma cleaning of silicon nitride using gas mixtures of c-C$_4$F$_{8}$O/O$_2$ and c-C$_4$F$_{8}$O/O$_2$+ $N_2$ was investigated in order to evaluate the effects of adding $N_2$ to c-C$_4$F$_{8}$O/O$_2$ on the global warming effects. Under optimum condition, the emitted net perfluorocompounds (PFCs) during cleaning of silicon nitride were quantified and then the effects of additive $N_2$ by obtaining the destructive removal efficiency (DRE) and the million metric tons of carbon equivalent (MMT-CE) were calculated. DRE and MMTCE were obtained by evaluating the volumetric emission using. Fourier transform-infrared spectroscopy (FT-IR). During the cleaning using c-C$_4$F$_{8}$O/O$_2$+$N_2$, DRE values as high as (equation omitted) 98% were obtained and MMTCE values were reduced by as high as 70% compared to the case of $C_2$F$_{6}$O$_2$. Recombination characteristics were indirectly investigated by combining the measurements of species in the chamber using optical emission spectroscopy (OES), before and after the cleaning, in order to understand any correlation between plasma and emission characteristics as well as cleaning rate of silicon nitride.silicon nitride.

• 한국재료학회지
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• 제33권12호
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• pp.530-536
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• 2023

The theoretical capacity of silicon-based anode materials is more than 10 times higher than the capacity of graphite, so silicon can be used as an alternative to graphite anode materials. However, silicon has a much higher contraction and expansion rate due to lithiation of the anode material during the charge and discharge processes, compared to graphite anode materials, resulting in the pulverization of silicon particles during repeated charge and discharge. To compensate for the above issues, there is a growing interest in SiO_x materials with a silica or carbon coating to minimize the expansion of the silicon. In this study, spherical silica (SiO₂) was synthesized using TEOS as a starting material for the fabrication of such SiO_x through heating in a reduction atmosphere. SiO_x powder was produced by adding PVA as a carbon source and inducing the reduction of silica by the carbothermal reduction method. The ratio of TEOS to distilled water, the stirring time, and the amount of PVA added were adjusted to induce size and morphology, resulting in uniform nanosized spherical silica particles. For the reduction of the spherical monodisperse silica particles, a nitrogen gas atmosphere mixed with 5 % hydrogen was applied, and oxygen atoms in the silica were selectively removed by the carbothermal reduction method. The produced SiO_x powder was characterized by FE-SEM to examine the morphology and size changes of the particles, and XPS and FT-IR were used to examine the x value (O/Si ratio) of the synthesized SiO_x.

• Korean Chemical Engineering Research
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• 제49권2호
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• pp.256-262
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• 2011

아민 흡수 공정에서 아민은 $O_{2}$ 및 고온에 의해 비가역반응을 일으키며, 이러한 현상을 열화반응이라 한다. 열화반응은 아민의 가치를 떨어뜨릴 뿐만 아니라 부식, fouling과 같은 문제를 일으킨다. 따라서, 본 연구에서는 여러가지 화학흡수제(MEA; monoethanolamine, AMP; 2-amino-2-methyl-propanol, DAM; 1,8-diamino-p-menthane)를 이용하여 i) 50, $120^{\circ}C$에서의 흡수평형, ii) $CO_{2}$ 및 $CO_{2}/O_{2}$ 계에서 흡수제의 열화에 따른 농도변화 및 초기열화속도상수, iii) 산소 $(O_{2})$에 의한 열화 영향을 살펴보았다. DAM은 흡수영역에서 MEA와 AMP에 비해 400~270% 높은 흡수평형부하를 보이며, MEA나 AMP에 비해 흡수/재생영역에서 흡수평형부하가 커 흡수능이 우수하였다. $CO_{2}$계에서 DAM의 초기열화속도상수는 $2.254{\times}10^{-4}$ $cycle^{-1}$로 MEA와 AMP의 $2.761{\times}10^{-4}$ $cycle^{-1}$, $2.416{\times}10^{-4}cycle^{-1}$에 비해 작아 열화가 늦게 진행되며, $O_{2}$ 주입시 초기열화속도상수는 1.3배 증가하여 2배 증가한 MEA보다 열화 영향이 적었다. 이러한, 일련의 열화반응은 GC chromatogram에서 새로운 peak의 생성과 FT-IR spectrum 분석을 통하여 확인할 수 있었다.