• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.4
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• pp.313-320
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• 2005

Stick-slip friction is one of the material removal mechanisms in tribology. It occurs when the static friction force is larger than the dynamic friction force, and make the friction curve fluctuated. In the friction monitoring of chemical mechanical polishing(CMP), the friction force also vibrates just as stick-slip friction. In this paper, an attempt to show the similarity between stick-slip friction and the friction of CMP was conducted. The prepared hard pa(IC1000/Suba400 stacked/sup TM/) and soft pad(Suba400/sup TM/) were tested with SiO₂ slurry. The friction force was measured by piezoelectric sensor. According to this experiment, it was shown that as the head and table velocity became faster, the stick-slip time shortened because of the change of real contact area. And, the gradient of stick-slip period as a function of head and table speed in soft pad was more precipitous than that of hard one. From these results, it seems that the fluctuating friction force in CMP is stick-slip friction caused by viscoelastic behavior of the pad and the change of real contact area.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.972-975
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• 2002

An understanding of tribological behavior in CMP(Chemical Mechanical Polishing) is one of the most important things to reveal the mechanism of material removal. In CMP, the contact type is thought to be semi-direct, elastohydrodynamic contact type from the Stribeck diagram, which is a combination of solid-solid direct contact and hydrodynamic lubrication with thin liquid film. This study is focused on the decay of friction force during CMP from two points of view, one of which is change of the real contact area and the other is the decrease of the elastic modulus of the pad caused by the increase of the temperature during CMP Experiments are implemented with elastic modulus measuring system and tool dynamometer. Results show that the decay of friction force during CMP results from the decrease of the real contact pressure working on an abrasive, which is induced by the decrease of elastic modulus of pad caused by the increase of temperature. And, the phenomenon is thought to be happen specially in the case that the weight concentration of abrasive in slurry is small enough.

• KSTLE International Journal
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• v.5 no.1
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• pp.1-6
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• 2004

Nano-scale studies on adhesion and friction were conducted in Si-wafer (100) using Atomic Force Microscopy (AFM). Glass (Borosilicate) balls of radii 0.32$\mu\textrm{m}$, 1.25$\mu\textrm{m}$, and 2.5$\mu\textrm{m}$, mounted on cantilever (Contact Mode type NPS) were used as tips. Adhesion and friction between Si-wafer and glass tips were measured at ambient temperature (24${\pm}$1$^{\circ}C$) and humidity (45${\pm}$5%). Friction was measured as a function of applied normal load in the range of 0-160 nN. Results showed that, both adhesion and friction increased with the tip radii. Also, friction increased linearly as a function of applied normal load. The effect of tip size on adhesion and friction was explained as the influence of the capillary force exerted by meniscus and that of the contact area on these parameters respectively. The coefficient of friction was estimated in two different ways, as the slope from the plot of friction force against the applied normal load and as the ratio between the friction force and the applied normal load. Both these estimates showed that the coefficient of friction increased with the tip size. Further, the influence of the adhesion force on the coefficient of friction was also discussed.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.1 s.190
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• pp.79-84
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• 2007

Some surface pattern of tribological application is an attractive technology of engineered surface. Therefore, friction reduction is considered to be necessary for improved efficiency of machine. This study investigated the effect of friction property for angles of micro-crosshatch groove surface pattern on bearing steel using pin-on-disk test. We obtain sample which can be fabricated by photolithography process. We discuss the friction property depend on an angle of crosshatch groove surface pattern. We can verify the lubrication mechanism as Stribeck curve, which has a relationship between the friction coefficient and a dimensionless parameter under the lubrication condition. It was found that the friction coefficient was related to angle of crosshatch groove pattern on contact surface.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.24 no.4
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• pp.332-338
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• 2014

Experimental study is conducted for investigating the characteristics of friction-induced noise with respect to the variation of system geometry. In this study, a vertically fixed rod is in contact with the reciprocating plate which is controlled by the step motor. Friction noise is generated during the reciprocating motion due to the frictional contact between the plastic pin and the aluminum plate. The frequencies of the friction noise are changed when the height of the rod varies. However, it is found that the vibration modes involved in the friction noise are not changed. It implies that the unstable modes remain unstable regardless of the change of the system geometry, and thus, there are the certain mode shapes which are likely to produce friction noise.

• Composites Research
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• v.36 no.3
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• pp.141-153
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• 2023

This review paper presents an introduction of contact mechanics and rubber friction theory for sliding friction of elastomer composites in contact with rough surfaces. Particularly, Klüppel & Heinrich theory considers the self-affine (or fractal) characteristic for rough surfaces to predict adhesion and hysteresis frictions of elastomers based on the contact mechanics of Greenwood & Williamson. Due to dynamic excitation process of elastomer composites while sliding in contact with multiscale surface roughness (or asperity), viscoelastic properties in a wide frequency range becomes major contributor to friction behaviors. A brief description and examples are provided to construct a viscoelastic master curve considering nonlinear viscoelasticity of elastomer composites. Finally, application of rubber friction theory to tire tread compounds in traction with road surfaces is discussed with several experimental and theoretical results.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2002.10b
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• pp.91-92
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• 2002

Most studies of elsatohydrodynamic lubrication are oriented only to the measurement of film thickness itself with optical interferometer. In order to exactly investigate the characteristics of a certain lubricant under the condition of additives. especially for traction performance. it is also important to get the information of traction force as well. In this work. we developed the device for measuring friction force of EHL contact condition, which can trace the film thickness over the contact area with optical interferometer. To verify the validity of the measuring system, the friction force and film thickness under EHL condition are measured with the variation of additive ratios of viscosity Index improvers.

• Journal of Mechanical Science and Technology
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• v.15 no.7
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• pp.859-865
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• 2001

This paper reports on the theoretical analysis of mixed lubrication for the piston ring. The analytical model is presented by using the average flow and asperity contact model. The cyclic variations of the nominal minimum oil film thickness are obtained by numerical iterative method. The total friction is calculated by using the hydrodynamic and asperity contact theory. The effect of the roughness height, pattern, and engine speed on the nominal minimum film thickness, friction force, ad frictional power losses are investigated. As the roughness height increases, the nominal oil film thickness and total friction force increase. Also, the effect of the surface roughness on the boundary friction is dominant at low engine speed and high asperity height. The longitudinal roughness pattern shows lower mean oil film pressure and thinner oil film thickness compared to the case of the isotropic and transverse roughness patterns.

• Transactions of The Korea Fluid Power Systems Society
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• v.8 no.3
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• pp.21-26
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• 2011

Nonlinear seal friction in pneumatic cylinders can impede the performance of pneumatic systems designed for high precision positioning with favorable high speed actuation. The behaviour of an elastomeric piston seals in high speed pneumatic cylinders is analyzed by nonlinear finite element analysis using ABAQUS. The contact pressures, stress and strain distributions and frictional forces of the squeeze type piston seal are simulated with variation of the seal radial installed interference, the operating pressures, friction coefficients and piston rod velocities. The nonlinear finite element model of the squeeze type piston seal is used to predict deformation of a seal, friction force and contact pressure distributions.

• Steel and Composite Structures
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• v.11 no.4
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• pp.325-340
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• 2011

Based on the experimental data presented in part I of these companion papers, a semi-empirical model is proposed for axial stress-strain curves of reinforced high-strength concrete square columns confined by aramid fiber reinforced polymer (FRP) jackets. Additionally, a three-dimensional finite element model is developed to simulate the mechanical behaviors of the columns. In the finite element model, both material nonlinear and contact nonlinear are taken into account. Moreover, the influence of contact nonlinear (i.e., the end friction on the contact surface between test machines and specimens) is investigated deeply. Predictions from both the semi-empirical model and the finite element model agree with the experimental results, and it is also demonstrated that the friction coefficient of end friction notably affect the properties of columns when it ranges from 0.00 to 0.25.