• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2002.11a
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• pp.20-26
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• 2002

The fluid flow, mass transfer, heat transfer and film thickness variation during the spin coating process are numerically studied. The model is said to be 1-dimensional because radial variations in film thickness, concentration and temperature are ignored. The finite difference method is employed to solve the equations that are simplified using the similarity transformation. In early time film thinning is due to the radial convective outflow. However that slows during the first seconds of spinning so the film thinning due to evaporation of solvent becomes sole. The time various film thickness is analyzed according to the var ious solvent fraction in the coating liquid and in the bulk of the overlying gas and the temperature variation in the liquid film during the spin coating is estimated.

• Journal of the Semiconductor & Display Technology
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• v.3 no.3
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• pp.41-44
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• 2004

The aim of this study is the confirmation of the coating uniformity affected by the surface tension and wall attachment angle in a slit-coater model. In this work, we use the commercial code (Fluent) to solve the two-phase flow formed with air and photo resist numerically. The results show that the surface tension is the most important factor to determine the coating efficiency in the view of coating uniformity, and the coating uniformity is 2% for our slit-coater model and conditions. To improve the coating uniformity, it is in need of minimization of the sidewall effect of slit-coater.

• Journal of Magnetics
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• v.20 no.2
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• pp.193-200
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• 2015

Direct-acting solenoid valves are used in the automotive industry due to their simple structure and quick response in controlling the flow of fluid. We performed an optimization study of response time in order to improve the dynamic performance of a direct-acting solenoid valve. For the optimal design process, we used the commercial optimization software PIAnO, which provides various tools for efficient optimization including design of experiments (DOE), approximation techniques, and a design optimization algorithm. 35 sampling points of computational experiments are performed to find the optimum values of the design variables. In all cases, ANSYS Maxwell electromagnetic analysis software was used to model the electromagnetic dynamics. An approximate model generated from the electromagnetic analysis was estimated and used for the optimization. The best optimization model was selected using the verified approximation model called the Kriging model, and an optimization algorithm called the progressive quadratic response surface method (PQRSM).

• 한국연소학회:학술대회논문집
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• 2013.06a
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• pp.65-68
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• 2013

In a syngas cooling system of coal gasification process, fly slag carried by syngas deposit on the surface of heat exchanger. The deposited materials form a fouling layer with several millimeters thickness, disturbing heat transfer between steam and syngas. This study investigates flow and heat transfer characteristics of syngas in helical coil heat exchanger using computational fluid dynamics under clean and fouled surface condition. Process model were also designed and its results are in good agreement with CFD results.

• Journal of Power System Engineering
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• v.10 no.1
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• pp.90-95
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• 2006

Pneumatic control systems have been mainly used as a high speed operating system. Therefore, state change of air in a control volume was assumed to be adiabatic change and, pneumatic control systems have been analyzed by using this assumption. Especially, when absolute value of pressure change in the control volume is small, there is a tendency to neglect effect of temperature change on pneumatic control system because temperature change owing to pressure change is small. In this study, an effect of temperature change of air on the decompression control process was analyzed by considering change of mass flow rate, and heat transfer characteristics between air in the chamber and the chamber wall. As a result, this study could confirm that a slight temperature change of the air in the pneumatic pressure control system can influence on the dynamic characteristics of pressure response, and pressure control performance.

• Journal of Power System Engineering
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• v.6 no.1
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• pp.36-42
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• 2002

Two-dimensional natural convection in an inclined open cavity with bottom heated, two side insulated and the top open was investigated using PIV(Particle-Image-Velocimetry) measurement. Experimental results are presented for Prandtl number, Pr=6.62, cavity aspect ratio, A=1.0, Rayleigh number from $1.294{\times}10^6\;to\;3.8841{\times}10 ^6$, and inclination angles, ${\alpha}=0$, 30 and 60 deg to the horizontal. It was found that the fluid rises along both side walls in the boundary layer region at ${\alpha}=0\;deg$, and the inclination of the cavity induced flow entrainment. The experimental results are in good agreement with the numerical results.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.30 no.5 s.248
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• pp.422-429
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• 2006

Resolved simulations are presented fur gravity current flows aiming at studying their spreading rate. The simulations are performed for two extreme configurations such as planar and cylindrical and for 3 different Grashof numbers: $10^5,\;1{\times}10^6\;and\;10^7$. Varying the size of the heavy fluid release, the study is performed for several phases of spreading, namely acceleration, slumping and inertial phases. For the simulations, efficient spectral multi-domain code is used. From the simulations results it is concluded that 2-D results predicts well the mean front velocity during the slumping phase, but fails to predict it during the inertial phase of spreading. It is also observed that the vortex dynamics of the flow is not reproduced well by the 2-D simulation.

• Journal of Surface Science and Engineering
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• v.45 no.4
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• pp.174-180
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• 2012

Low pressure inductively coupled plasma characteristics of argon and oxygen are numerically simulated for a 400 mm rectangular type system with a plasma fluid model. The results showed lower power absorption profile at the corner than a circular one in a 13.56 MHz driven 1.5 turn antenna system with a drift-diffusion and quasi-neutrality assumption. Ions controlled by electric field are more non-uniform than metastables and the power absorption profile of oxygen plasma is affected by horizontal gas flow pattern to show 25% lower power absorption at the pumping flange side. Oxygen negative ions which are generated in electron collisional dissociation of oxygen molecules was calculated as 0.1% of oxygen atoms with similar spatial profile.

• Journal of Magnetics
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• v.12 no.2
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• pp.84-88
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• 2007

A micropump with spiral-type magnetic micromachine was fabricated. When a rotating magnetic field was applied, the machine rotated and pumped a surrounding liquid. We experimentally examined the basic properties of this pump. We found that the pressure and the flow rate could be controlled by the rotating frequency, and this pump could work under wide range kinematic viscosity. In addition, we proposed a disposable pump system using the machine. When a plate installed a fluid channel and the machine was set on a stage for generating a rotating magnetic field, the machine worked as the pump.

• Nuclear Engineering and Technology
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• v.34 no.2
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• pp.105-116
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• 2002

In special industrial fields such 3s nuclear power plants and chemical plants, it is often necessary to repair system components without plant shutdown or drainage of system having many piping structures which may have hazardous or expensive fluid. A temporary ice plugging method for blocking internal flow is considered as a useful method in that case. According to the pipe freezing guideline of the nuclear power plant, the length of a freezing jacket must be longer than twice of the pipe diameter. However, for applying the ice plugging to short pipes which do not have enough freezing length because of geometrical configuration, it is inevitable to use shorter jacket less than twice of the pipe diameter. In this study, the integrity evaluation for short pipes in the nuclear power plant Is conducted by an experiment and the finite element analysis. From the results, the ice plugging process in short pipes can be safely carried out without any plastic deformation and fracture.