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Numerical Modeling of a Rectangular Type Inductively Coupled Plasma System

사각형 유도 결합 플라즈마 시스템의 수치 모델링

  • Joo, Jung-Hoon (Department of Materials Science and Engineering & Plasma Materials Research Center, Kunsan National University)
  • 주정훈 (군산대학교 신소재공학과, 플라즈마 소재응용센터)
  • Received : 2012.08.26
  • Accepted : 2012.08.30
  • Published : 2012.08.31

Abstract

Low pressure inductively coupled plasma characteristics of argon and oxygen are numerically simulated for a 400 mm rectangular type system with a plasma fluid model. The results showed lower power absorption profile at the corner than a circular one in a 13.56 MHz driven 1.5 turn antenna system with a drift-diffusion and quasi-neutrality assumption. Ions controlled by electric field are more non-uniform than metastables and the power absorption profile of oxygen plasma is affected by horizontal gas flow pattern to show 25% lower power absorption at the pumping flange side. Oxygen negative ions which are generated in electron collisional dissociation of oxygen molecules was calculated as 0.1% of oxygen atoms with similar spatial profile.

Keywords

References

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