• 제목/요약/키워드: final annealing

검색결과 111건 처리시간 0.023초

솔 - 젤법을 이용한 Bismuth Layered Structure를 가진 강유진성 박막의 제조 및 특성평가에 관한 연구 (II. MOD법으로 제조한 강유전성 $Sr_{0.7}/B_{2.3}(Ta_{1-x}Nb_x)_2O_9$ 박막의 유전특성) (The Preparation and Characterization of Bismuth Layered Ferroelectric Thin Films by Sol-Gel Process (II. Dielectric Properties of Ferroelectric $Sr_{0.7}/B_{2.3}(Ta_{1-x}Nb_x)_2O_9$ Thin Films Prepared by MOD Process))

  • 최무용;송석표;정병직;김병호
    • 한국전기전자재료학회논문지
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    • 제12권1호
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    • pp.62-68
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    • 1999
  • Ferroelectric $Sr_{0.7}/B_{2.3}(Ta_{1-x}Nb_x)_2O_9$(x=0, 0.1, 0.2, 0.3) thin films were deposited on $Pt/SiO_2/Si$ substrate by MOD(Metalorganic Decomposition) process. Metal carboxylate and metal alkoxide were used as precursors, and 2-methoxyethanol, xylene as solvents. After spin coating, thin films were pre-annealed at $400^{\circ}C$, followed by RTA(Rapid Thermal Annealing) and final annealing at $800^{\circ}C$ in oxygen atmosphere. These procedures were repeated three times to obtain thin films with the thickness of $2000{\AA}$. To enhance the nucleation and growth of layered-perovskite phase, thin films were rapid-thermally annealed above $720^{\circ}C$ in oxygen atmosphere. As RTA temperature increased, fluorite phase was transformed to layered-perovskite phase. And the change of Nb contents affected dielectric / electrical properties and microstructure. The ferroelectric characteristics of $Sr_{0.7}/B_{2.3}(Ta_{1-x}Nb_x)_2O_9$ thin film were Pr=8.67 $\mu{C}/cm^2$, Ec=62.4kV/cm and $I_{L}=1.4\times10^{-7}A/cm^2$ at the applied voltage of 5V, respectively.

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Sol-Gel 법을 이용한 PLT(28) 박막의 제작과 특성 (Preparation and Characteristics of PLT(28) Thin Film Using Sol-Gel Method)

  • 강성준;정양희;류재홍
    • 한국정보통신학회:학술대회논문집
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    • 한국해양정보통신학회 2005년도 추계종합학술대회
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    • pp.865-868
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    • 2005
  • $Pb_{0.72}La_{0.28}TiO_3$ (PLT(28)) 박막을 sol-gel 법을 이용하여 제작한 후, 그 특성을 조사하여 ULSI DRAM 의 캐패시터 절연막으로서의 적용 가능성을 연구하였다. Sol-gel 법의 출발 물질로는 acetate계를 사용하였다. TGA-DTA 분석을 통하여 PLT(28) 박막의 sol-gel 법에 의한 공정 조건을 확립하였다. 매 coating 후 350$^{\circ}C$에서 drying 하고, 마지막으로 650$^{\circ}C$에서 annealing 하여 100% perovskite 구조를 가지는 치밀하고 crack 이 없는 PLT(28) 박막을 얻었다. Pt/Ti/SiO$_2$/Si 기판 위에 PLT(28) 박막을 형성하여 전기적 특성을 측정하였다. 그 결과 유전 상수와 누설전류밀도가 각각 936 과 1.1${\mu}$A/cm$^2$ 으로 측정되었다.

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냉간가공에 의한 CuZnAl계 현상기억합급의 결정립미세화와 특성평가 (The Effect of Cold-rolling on Microstructure and Transformation Behavior of Cu-Zn-Al shape Memory Alloy)

  • 이상봉;박노진
    • 한국재료학회지
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    • 제9권3호
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    • pp.322-326
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    • 1999
  • 본 연구는 냉간가공과 열처리를 통해 Cu-26.65Zn-4.05Al-0.31Ti(wt%) 형상기억합금의 결정립을 미세화하기 위한 목적으로 수행하였다. 냉간가공을 위하여는 α-상이 가능한 많이 존재하는 (α+β)-조직을 가져야 하는데, 이는 550℃에서 열처리함으로써 얻었고, 최종두께 1mm로 냉간압연하였다. 총 압연율은 70%와 90%이었다. 냉간압연한 판재를 800℃에서 가열 후 급랭함으로써 형상기억특성을 갖는 상으로 변태시켰으며, 이 대 결정립크기를 측정한 결과, 열간압연한 경우보다 냉간압연과 열처리를 한 경우의 결정립이 월등히 작아졌음을 보여주었다. 냉간압연과 열처리를 한 경우에는 냉간압연 변형율이 큰 경우가 결정립이 더 작아지는 경향을 보였다. 또한 결정립크기가 작아짐에 따라 변태온도가 저하되었으며 오스테나이트상이 더 안정하게 되었음을 확인할 수 있었다. In this study, cold-rolling and appropriate annealing was adopted for the grain refining of Cu-26.65Zn-4. 05Al-0.31Ti(wt%) shape memory alloy. For the cold deformation of this alloy the ducti1e α-phase must be contained. After heat treatment at 550℃ the (α+β)-dual phase with 40vol.% α-phase was obtained which could be rolled at room temperature. This alloy was cold rolled into a final thickness of 1.0mm with total reduction degrees of 70% and 90%. The rolled sheets were betanized at 800℃ for various times, then quenched into ice water. The grain size of co]d rolled samples were 60∼80 ㎛ which is much smaller comparing with the hot-rolled samples. And the 90% rolled sample showed smaller grain size than the case of the 70% rolled one. The small grain size had influence on the phase transformation temperatures and stabilization of the austenitic phases.

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Development of a Design System for Multi-Stage Gear Drives (2nd Report : Development of a Generalized New Design Algortitm

  • Chong, Tae-Hyong;Inho Bae
    • International Journal of Precision Engineering and Manufacturing
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    • 제2권2호
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    • pp.65-72
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    • 2001
  • The design of multi-stage gear drives is a time-consuming process, since on includes more complicated problems, which are not considered in the design of single-stage gear drives. The designer has th determine the number of reduction stages and the gear ratios of each reduction state. In addition, the design problems include not only the dimensional design but also the configuration design of gear drive elements. There is no definite rule and principle for these types of design problems. Thus the design practices largely depend on the sense and the experiences of the designer , and consequently result in undesirable design solution. We propose a new generalized design algorithm to support the designer at the preliminary design phase of multi-stage gear drives. The proposed design algorithm automates the design process by integrating the dimensional design and the configuration design process. The algorithm consists of four steps. In the first step, a designer determines the number of reduction stage. In the second step. gear ratios se chosen by using the random search method. In the third step, the values of basic design parameter are chosen by using the generate and test method. Then, the values of other dimension, such ad pitch diameter, outer diameter, and face width, are calculated for the configuration design in the final step. The strength and durability of a gear is guaranteed by the bending strength and the pitting resistance rating practices by using the AGMA rating formulas. In the final step, the configuration design is carried out b using the simulated annealing algorithm. The positions of gears and shafts are determined to minimize the geometrical volume(size) of a gearbox, while satisfying spatial constraints between them. These steps are carried out iteratively until a desirable solution is acquired. The propose design algorithm has been applied to the preliminary design of four-stage gear drives in order to validate the availability. The design solution have shown considerably good results in both aspects of the dimensional and the configuration design.

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Solution Structure of a GSK 3$\beta$ Binding Motif, A $AXIN^{pep}$

  • Kim, Yong-Chul;Jung, JIn-Won;Park, Hee-Yong;Kim, Hyun-Yi;Lee, Weon-tae
    • 한국자기공명학회논문지
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    • 제9권1호
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    • pp.38-47
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    • 2005
  • Axin is a scaffold protein of the APC/axin/GSK complex, binding to all of the other signalling components. Axin interacts with Glycogen synthase kinase 3$\beta$ (GSK 3$\beta$) and functions as a negative regulator of Wnt signalling pathways. To determine the solution structure of the GSK3$\beta$ binding regions of the axin, we initiated NMR study of axin fragment comprising residues 3$Val^{388} - Arg^{401}$using circular dichroism (CD) and two-dimensional NMR spectroscopy. The CD spectra of 3$axin^{pep}$ in the presence of 30% TFE displayed a standard 3$\alpha$-helical conformation, exhibiting the bound structure of 3$axin^{pep}$ to GSK3$\bata$. On the basis of experimental restraints including $NOE_s$, and $^3J_{HN\alpha} $ coupling constants, the solution conformation of $axin^{pep}$ was determined with program CNS. The 20 lowest energy structures were selected out of 50 final simulated-annealing structures in both water and TFE environment, respectively. The $RMSD_s$ for the 20 structures in TFE solution were 0.086 nm for backbone atoms and 0.195 nm for all heavy atoms, respectively. The Ramachandran plot indicates that the $\varphi$, $\psi$ angles of the 20 final structures is properly distributed in energetically acceptable regions. $Axin^pep$ in aqueous solutions consists of a stable $\alpha$-helix spanning residues form $Glu^{391}$ to $Val^{391} $, which is an interacting motif with GSK3$\beta$.

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알루미늄 합금(Al 7075) 절삭성 향상을 위한 열간단조 후처리 방법에 관한 연구 (A Study on the Improvement of Machinability in Hot-Forged Aluminum Alloy Product(Al 7075))

  • 김진복;임학진;강범수
    • 한국추진공학회지
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    • 제4권2호
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    • pp.46-53
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    • 2000
  • 알루미늄 제품은 열간단조하면 재료가 연화되어 있어 절삭가공시 연속적인 칩이 발생하여 공구와 피삭재를 감고 회전함으로서 가공면 손상, 공구파손 및 작업자의 안전을 초래함에 따라 가공이 어려워 단지 절삭성 개선목적만을 위해 중간공정으로 T-4열처리하여 절삭가공하고 다시 어닐링처리하여 냉간성형을 하고 최종열처 리를 한다. 따라서 본 연구는 열간단조후 제품을 급냉시키면 용체화처리의 효과를 얻어 재료가 경화됨으로서 절삭성이 개선될 수 있다는 이론에 근거하여 T4열처리를 대체할 수 있는 후처리방법에 대해 연구하였다. 최적의 후처리방법을 구하기 위해 열간단조후 수냉과 공냉처리를 비교분석하였고, 열간단조후 냉각처리까지 지연된 시간과 수냉과정에서의 유지시간에 따른 분식을 통해 최적의 작업조건을 설정하였다.

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ULSI DRAM의 캐패시터 절연막을 위한 Paraelectric PLT 박막의 제작과 특성 (Preparatio and properties of the paraelectric PLT thin film for the cpapcitor dielectrics of ULSI DRAM)

  • 강성준;윤영섭
    • 전자공학회논문지A
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    • 제32A권8호
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    • pp.78-85
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    • 1995
  • We fabricated the Pb$_{1-0.28{\alpha}}La_{0.28}TiO_{3}$ (PLT(28)) thin film successfully by using the sol-gel method and characterized it to evaluate its potential for being utilized as the capacitor dielectrics of ULSI DRAMs. In our sol-gel process, the acetates were used as the starting materials. Through the TGA-DTA analysis, we established the excellent fabrication conditions of the sol-gel method for the PLT(28) thin film. We obtained the dense and crack-free PLT(28) thin film of 100% perovskite phase by drying at 350$^{\circ}C$ after each coating and final annealing at 650$^{\circ}C$. Its electrical properties were measured from the planar capacitors fabricated on the Pt/Ti/SiO$_{2}$/Si substrate. By the P-E hysteresis measurement, its paraelectric phase was identified and its dielectric constant and leakage current density were measured as 936 and 1.1${\mu}A/cm^{2}$, respectively. Those electrical values indicate that the PLT(28) thin film is the most successful candidate for the capacitor dielectrics of ULSI DRAMs at the present.

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High-rate, Low-temperature Deposition of Multifunctional Nano-crystalline Silicon Nitride Films

  • Hwang, Jae-Dam;Lee, Kyoung-Min;Keum, Ki-Su;Lee, Youn-Jin;Hong, Wan-Shick
    • Journal of Information Display
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    • 제11권3호
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    • pp.109-112
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    • 2010
  • The solid phase compositions and dielectric properties of silicon nitride ($SiN_x$) films prepared using the plasma enhanced chemical vapor deposition (PECVD) technique at a low temperature ($200^{\circ}C$) were studied. Controlling the source gas mixing ratio, R = $[N_2]/[SiH_4]$, and the plasma power successfully produced both silicon-rich and nitrogen-rich compositions in the final films. The composition parameter, X, varied from 0.83 to 1.62. Depending on the film composition, the dielectric properties of the $SiN_x$ films also varied substantially. Silicon-rich silicon nitride (SRSN) films were obtained at a low plasma power and a low R. The photoluminescence (PL) spectra of these films revealed the existence of nano-sized silicon particles even in the absence of a post-annealing process. Nitrogen-rich silicon nitride (NRSN) films were obtained at a high plasma power and a high R. These films showed a fairly high dielectric constant ($\kappa$ = 7.1) and a suppressed hysteresis window in their capacitance-voltage (C-V) characteristics.

Effects of Drying Temperature on the $LiCoO_2$ Thin Films Fabricated by Sol-gel Method

  • Kim, Mun-Kyu;Park, Kyu-Sung;Kim, Duk-Su;Son, Jong-Tae;Kim, Ho-Gi
    • 한국세라믹학회지
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    • 제38권9호
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    • pp.777-781
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    • 2001
  • $LiCoO_{2}$ thin films have received attention as cathodes of thin film microbatteries in these days. In this study, $LiCoO_{2}$ thin films are fabricated by a sol-gel spin coating method followed by a post-annealing process. The thermal decomposition behaviour of precursor is investigated by TG/DTA analysis. The change of crystallinity, microstructure and electrochemical properties of final films as the drying temperature changes are also studied by XRD, SEM and galvanostatic charge/discharge cycling test. The relationship between the discharge capacity and the drying temperature are intensively investigated in this work.

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열연판을 사용한 방향성 박규소강대의 제작 (The Trial Manufacture of the Grain-Oriented Ultra-Thin Silicon Steel Ribbon using Hot-Rolled Plate)

  • 강희우
    • 한국자기학회지
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    • 제11권1호
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    • pp.1-7
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    • 2001
  • 열연판을 모재로 하여 압연 및 열처리 공정을 조합한 공정을 3회 냉간압연법을 사용하여 최종두께 100$\mu\textrm{m}$로 제작한 방향성 규소강대에 대하여, 직류자기 특성 및 결정입자의 열처리 의존성, 결정방위 등을 조사하였다. 그 결과, (110)면이 거의 시료 전체표면에 성장하는 것이 관측되었으며, B$_{8}$은 1.9 T정도, 평균$\alpha$각은 약 4.6$^{\circ}$이었다. 향후 약간의 (001)조직의 집적도 개선이 추가된다면, 염가의 열연판을 모재로 사용하여 기존의 방향성 규소강판의 경우보다 훨씬 제조공정수를 단순화함으로써, 경제성이 우수한 방향성 극박 규소강대를 제작할 수 있는 가능성을 확인하였다.

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